CN2763965Y - Long service life ion source cathode - Google Patents
Long service life ion source cathode Download PDFInfo
- Publication number
- CN2763965Y CN2763965Y CN 200420120110 CN200420120110U CN2763965Y CN 2763965 Y CN2763965 Y CN 2763965Y CN 200420120110 CN200420120110 CN 200420120110 CN 200420120110 U CN200420120110 U CN 200420120110U CN 2763965 Y CN2763965 Y CN 2763965Y
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- CN
- China
- Prior art keywords
- ion source
- negative electrode
- cathode
- source cathode
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model discloses a long service life ion source cathode, which comprises a cathode, a cathode card, a cathode holder, a support cylinder base, a fixing cylinder and a fixing graphite shielding plate, wherein the cathode is embedded on the cathode card, and the cathode card is tightly locked and fixed on the graphite heat shielding plate via the cathode holder, the support cylinder base and the fixing cylinder. The utility model has the advantages of simple structure, stable and reliable connection, little heat deformation and long service life.
Description
Technical field
The utility model relates to ion source, and this ion source is applicable to ion implantor, and particularly a kind of ion source with long life cathode belongs to field of manufacturing semiconductor devices.
Background technology
In the existing semiconductor integrated circuit manufacturing technology, require ion implantor to have function and features such as whole aircraft reliability is good, the high and low grit pollution of production efficiency, and these performances of ion implantor are closely related useful life with ion source.
Ion source at present commonly used is generally graceful ion source and Bei Nasi ion source in the fluorine of hot filament type, this hot filament type ion source is by directly being in the filament emitting electrons of discharge in the arc chamber, because heat filament directly is in the discharge arc chamber adverse circumstances, be subjected to effects such as high temperature sputter, etchant gas erosion and ionizing radiation, make ion source low useful life, MaLS also has only tens hours, so direct production efficiency and unfailing performance that influences ion implantor.Thereby to develop a kind of long-life ion source emitting electrons device be necessary.
Summary of the invention
The utility model promptly is at prior art intermediate ion source filament short shortcoming in useful life, uses the cathodes heated indirectly by an el material to replace, to improve emitting electrons negative electrode and ionogenic useful life.
The utility model is achieved through the following technical solutions:
A kind of long-life ion source cathode assembly comprises: a negative electrode, a negative electrode card, a negative electrode deck, a support cylinder seat, a stationary cylinder and be the graphite barricade fixedly.Described negative electrode is embedded on the negative electrode card, and described negative electrode cartoon is crossed negative electrode deck, support cylinder seat and stationary cylinder and is locked on the graphite heat shield plate.
Described negative electrode is the high purity tungsten material, the round sheet block structure; Described support cylinder seat is high-purity Mo, cylindrical structure; Described stationary cylinder is high-purity Mo, cylindrical structure; Described fixedly graphite barricade is the high purity graphite material.
The utlity model has following significant advantage:
1. simple in structure, connect reliable and stablely, thermal deformation is little;
2. the negative electrode long service life is equivalent to general ion source 3-4 useful life doubly.
Description of drawings
Fig. 1 is an ion source cathode assembly structure chart of the present utility model.
Fig. 2 is a cathode construction front view of the present utility model.
Fig. 3 is a cathode construction vertical view of the present utility model.
Specific embodiment
Below in conjunction with the drawings and specific embodiments the utility model is done to introduce further, but not as to qualification of the present utility model.
With reference to figure 1, Fig. 2, Fig. 3, a kind of long-life ion source cathode assembly, it comprises: a negative electrode 1, a negative electrode card 2, a negative electrode deck 3, a support cylinder seat 4, a stationary cylinder 5 and be graphite barricade 6 fixedly.Wherein: negative electrode 1 is a pure tungsten material, and its effect is an emitting electrons, and the filament before replacing is a round sheet piece, is embedded on the negative electrode card 2, is locked on graphite heat shield plate 6 by negative electrode deck 3, support cylinder seat 4 and stationary cylinder 5; Fixedly graphite barricade 6 is the high purity graphite material, and on the one hand the fixed support cylinder seat 4, shields the thermal loss of filament and negative electrode on the other hand.
When ion source was worked, cathode block 1 was heated to thermionic emission temperature emitting electrons, and its heating is to heat by the electron bombard of certain energy to realize.
In the present embodiment, ion source is compared with direct heated cathode formula ion source and prolonged useful life, is because emitting electrons negative electrode 1 is block structure, and is more much longer useful life than traditional filament.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes to the utility model infringement of patent right, with corresponding legal responsibilities.
Claims (5)
1. long-life ion source cathode assembly is characterized in that:
This device comprises: a negative electrode, a negative electrode card, a negative electrode deck, a support cylinder seat, a stationary cylinder and be the graphite barricade fixedly; Described negative electrode is embedded on the negative electrode card; Described negative electrode cartoon is crossed negative electrode deck, support cylinder seat and stationary cylinder and is locked on the graphite heat shield plate.
2. a kind of long-life ion source cathode assembly as claimed in claim 1 is characterized in that:
Described negative electrode is the high purity tungsten material, the round sheet block structure.
3. a kind of long-life ion source cathode assembly as claimed in claim 1 is characterized in that:
Described support cylinder seat is high-purity Mo, cylindrical structure.
4. a kind of long-life ion source cathode assembly as claimed in claim 1 is characterized in that:
Described stationary cylinder is high-purity Mo, cylindrical structure.
5. a kind of long-life ion source cathode assembly as claimed in claim 1 is characterized in that:
Described fixedly graphite barricade is the high purity graphite material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420120110 CN2763965Y (en) | 2004-12-23 | 2004-12-23 | Long service life ion source cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420120110 CN2763965Y (en) | 2004-12-23 | 2004-12-23 | Long service life ion source cathode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2763965Y true CN2763965Y (en) | 2006-03-08 |
Family
ID=36141505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420120110 Expired - Fee Related CN2763965Y (en) | 2004-12-23 | 2004-12-23 | Long service life ion source cathode |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2763965Y (en) |
-
2004
- 2004-12-23 CN CN 200420120110 patent/CN2763965Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |