CN2890078Y - Multistage planetary work rest for vacuum coating machine - Google Patents
Multistage planetary work rest for vacuum coating machine Download PDFInfo
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- CN2890078Y CN2890078Y CN 200620068928 CN200620068928U CN2890078Y CN 2890078 Y CN2890078 Y CN 2890078Y CN 200620068928 CN200620068928 CN 200620068928 CN 200620068928 U CN200620068928 U CN 200620068928U CN 2890078 Y CN2890078 Y CN 2890078Y
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Abstract
The utility model relates to a multistage planetary work rest for vacuum coating machine. The work rest of the prior coating machine, a single stage planetary work, is provided with a relative low technical efficiency for coating a solar energy gathering pipe. The multistage planetary work of the utility model is designed on the basis of single stage planetary work, i.e. at the planetary work of the previous stage are arranged the planetary work, a fixed wheel, the planetary axis, so that the space in the vacuum of the coating machine is utilized fully and the number of the planetary axis-glass pipe ready to coat, which can revolve around the centre of the vacuum cavity of the coating machine and around its own axis, is increased. Therefore, the output rate of per machine and per time of the vacuum coating machines and the application rate of the target materials are elevated, thereby reducing energy consumption and decreasing cost.
Description
Technical field:
The utility model relates to field of mechanical technique, relates to a kind of work rest of vacuum plating unit particularly.
Background technology:
Solar water heater is because of having energy-saving and environmental protection and premium properties such as safe in utilization, so demonstrate more and more broader prospect among the people and industrial applications.The heat collector of solar water heater is mainly constituted by many vacuum heat collection pipes.The coatings of this vacuum heat collection pipe has high absorptivity and low emissivity to the photo-thermal of the sun, and the temperature of liquid in pipe medium is risen rapidly, finishes the heat collection function of solar water heater.At present, the plated film of vacuum heat collection pipe all adopts " magnetron sputtering plating " technology to finish.Mainly include planetary work rest and cylindrical target in the chamber of coating equipment, this work rest is installed in the vacuum chamber, can make uniform circular motion with respect to the target at vacuum chamber center, many Glass tubings to be coated then erectly place on the work rest separately and are enclosed within on the planet axis that is circle-shaped arrangement.When coating equipment is in work status, be high vacuum in the chamber, when work rest rotated, each Glass tubing both can be done " revolution " with work rest, can do " rotation " with planet axis again.Thin columniform target is placed at the center in the coating equipment chamber, by certain working gas, with target as sputter and uniform deposition on the surface of workpiece to be plated, thereby finish the coating process of Glass tubing.The work rest of existing coating equipment is the planetary work rest of one-level, thereby output is lower comparatively speaking, far can not satisfy the requirement of solar water heater industry development.
Goal of the invention:
The utility model has proposed a kind of vacuum plating unit multistage planet formula work rest at the problems referred to above, and purpose is to make full use of the space of coating equipment vacuum chamber, under the prerequisite that guarantees coating quality, make great efforts to improve the output of vacuum plating unit, reduce energy consumption simultaneously, reduce production costs.
Technical solution of the present utility model: it is that multistage planet formula work rest is set on the basis of the planetary work rest of one-level, the fixed wheel of back one-level planet circular system promptly is set on the planet carrier of previous stage, the upper end of previous stage planet axis made to become with this planet axis be the planet carrier of the disc face at center as back one-level planet circular system, and the planet axis of one-level afterwards is set on back primary planet carrier, engagement constitutes gear pair in the corresponding position for the gear of this planet axis lower end and the fixed wheel of planet circular system at the corresponding levels.
Beneficial effect: the utility model improves the planetary work rest of one-level becomes multistage planet formula work rest, can make full use of the space in the coating equipment vacuum chamber, both increased greatly and can do " revolution " around the vacuum chamber center, can make the quantity of the planet axis of " rotation " again, also promptly increase the quantity of Glass tubing to be coated, improved the output capacity of coating equipment unit, single, also improved the utilization ratio of target, the corresponding energy consumption that reduced has reduced production cost.The SCS700-A type coating equipment of producing with certain factory is an example, and former work rest only can be installed 30 Glass tubings to be coated, and the workpiece cycle, daily output was 1440 vacuum plating thermal-collecting tubes in 30 minutes.And adopt secondary planet axle of the present utility model is the symmetric secondary planet formula of cross work rest, just can adorn 52 workpiece (Glass tubing to be coated), and the workpiece cycle is defined as 35 minutes, and then daily output can reach 2130.Through check, can be up to state standards the fully requirement of (GB/T17049-1997) of quality product.
Tabulation now is compared as follows:
| Actual measurement relatively | Day output | Electric energy | Target consumes | |||||
| Motor | Electric furnace | Target power supply | The total electric weight of daily consumption | Single consumes power | Target working hour every day | Save per-cent | ||
| Before the improvement | 1440 | 132kW. h | 180kW .h | 144kW .h | 456 kW.h | 0.317 | 12 hours | |
| After the improvement | 2130 | 132kW. h | 180kW .h | 138kW .h | 450 kW.h | 0.211 kW.h | 11.57 hour | 3.58％ |
Description of drawings:
Accompanying drawing 1 is the transmission system sketch of the planetary work rest of vacuum plating unit one-level.
Accompanying drawing 2 is equipped with the diagrammatic top view of workpiece (Glass tubing) for the planetary work rest of one-level of accompanying drawing 1.
Accompanying drawing 3 is the secondary planet formula transmission system of the utility model embodiment (gear pair is the outer rotor engagement) sketch.
Accompanying drawing 4 is the secondary planet formula transmission system of the utility model embodiment (gear pair is the internal wheel engagement) sketch.
Accompanying drawing 5 is equipped with the diagrammatic top view of workpiece (Glass tubing) for accompanying drawing 3,4 secondary planet formula work rests.
Embodiment:
The utility model is that the planetary work rest of the existing one-level of coating equipment is improved to multistage planet formula work rest.From Fig. 1 and 2 as seen, the work rest of prior art vacuum plating unit includes primary planet carrier 11, one-level planet circular system fixed wheel 12, one-level planet axis 13, reaches the pinch roller 6 spacing to support body, and the lower end of one-level planet axis 13 is provided with the gear 14 that is meshed with one-level planet circular system fixed wheel 12.During work, motor and deceleration device input to primary planet carrier 11 with driving force by gear 3, and the workpiece 5 (Glass tubing) on the work rest then can be described as the circumferential motion of " revolution " with respect to the center of fixed wheel 12.Gear 14 makes one-level planet axis 13 do " rotation " again.Fig. 3,4, the 5th, the utility model is as secondary planet formula work rest embodiment diagrammatic sketch, it is that the axle center that the last plane of one-level planet axis 13 is set to one-level planet axis 13 is the disc face in the center of circle---be secondary planet frame 21, but disc face is provided with the symmetric secondary planet axle in cross symmetry, left-right symmetry or front and back, provide cross symmetrical expression secondary planet axle 231,232,233,234 among the figure, the lower end of this secondary planet axle be provided with gear 24 and be installed in primary planet carrier on secondary planet train fixed wheel 22 on gear be meshed.Above structure makes the secondary planet axle not only still keep " revolution " around center, machine chamber, and each group planet axis (as the A among Fig. 5 group) also can be done " revolution " around this group planet carrier center, and wherein each planet axis is (as 231,232,233,234 axle center works " rotation " separately again among the figure.Thereby the target as sputter deposition that all workpiece 5 (Glass tubing) can both fully and uniformly be accepted coating equipment vacuum chamber center on the work rest of present embodiment reaches original coating process requirement.In like manner, enforcement as multistage planet formula work rest of the present utility model, as long as allowing just the gear of primary planet carrier lower end, back can be done engagement with the fixed gear that is arranged on the previous stage planet circular system, the space in the coating equipment vacuum chamber constitutes gear pair, this gear pair can be the outer rotor engagement, also can be the internal wheel engagement.Described gear pair can both drive back primary planet carrier " rotation " and can realize again doing " revolution " with respect to the center target, thereby reaches the goal of the invention of expection.
Claims (4)
1, vacuum plating unit multistage planet formula work rest, include primary planet carrier (11), one-level planet circular system fixed wheel (12), one-level planet axis (13), reach the pinch roller (6) that support body is limited to, the lower end of one-level planet axis (13) is provided with the gear (14) that is meshed with one-level planet circular system fixed wheel (12), it is characterized in that: it is provided with multistage planet formula work rest on the basis of the planetary work rest of one-level, it promptly is the fixed wheel (22) that back one-level planet circular system is set on the planet carrier (11) in previous stage, the upper end of previous stage planet axis (13) made to become with this planet axis be the planet carrier (21) of the disc face at center as back one-level planet circular system, and afterwards on the primary planet carrier planet axis (231 of one-level afterwards is being set, 232,233,234), the gear of this planet axis lower end (24) meshes the formation gear pair with the fixed wheel (22) of planet circular system at the corresponding levels in the corresponding position.
2, according to the described vacuum plating unit multistage planet of claim 1 formula work rest, it is characterized in that: each grade planet carrier upper planet axle group (A) can be made up of a plurality of planet axis.
3, vacuum plating unit multistage planet formula work rest according to claim 2 is characterized in that: a plurality of planet axis that constitute planet axis group (A) can be symmetric four planet axis of cross, about also can be, symmetric two planet axis in front and back.
4, according to the described vacuum plating unit multistage planet of claim 1 formula work rest, it is characterized in that: the gear pair that the lower end of planet axis and fixed wheel at the corresponding levels are provided with in the corresponding position, this gear pair can be the outer rotor engagement, also can be the internal wheel engagement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620068928 CN2890078Y (en) | 2006-01-25 | 2006-01-25 | Multistage planetary work rest for vacuum coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620068928 CN2890078Y (en) | 2006-01-25 | 2006-01-25 | Multistage planetary work rest for vacuum coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2890078Y true CN2890078Y (en) | 2007-04-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620068928 Expired - Fee Related CN2890078Y (en) | 2006-01-25 | 2006-01-25 | Multistage planetary work rest for vacuum coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2890078Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102080213A (en) * | 2011-01-21 | 2011-06-01 | 东北大学 | Multi-motion mode planetary workpiece rest of vacuum coating machine |
| CN102285764A (en) * | 2010-06-17 | 2011-12-21 | 北京清华阳光能源开发有限责任公司 | Heat collector tube cover glass tube film coating equipment and process |
| CN102522193A (en) * | 2012-01-11 | 2012-06-27 | 中国科学院宁波材料技术与工程研究所 | Device and method for improving coercivity of magnet |
| CN103423896A (en) * | 2012-05-18 | 2013-12-04 | 徐秀萍 | Method, product and equipment for manufacturing high-emissivity anti-idle-sunning all-glass vacuum heat collecting and utilizing element |
| CN104003624A (en) * | 2014-06-10 | 2014-08-27 | 芜湖万辰电光源科技有限公司 | Film-coating stage for glass tubes |
| CN107513688A (en) * | 2017-09-25 | 2017-12-26 | 江门市新合盛涂料实业有限公司 | A kind of vacuum coating equipment |
-
2006
- 2006-01-25 CN CN 200620068928 patent/CN2890078Y/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102285764A (en) * | 2010-06-17 | 2011-12-21 | 北京清华阳光能源开发有限责任公司 | Heat collector tube cover glass tube film coating equipment and process |
| CN102080213A (en) * | 2011-01-21 | 2011-06-01 | 东北大学 | Multi-motion mode planetary workpiece rest of vacuum coating machine |
| CN102080213B (en) * | 2011-01-21 | 2012-04-25 | 东北大学 | Multi-motion mode planetary workpiece rest of vacuum coating machine |
| CN102522193A (en) * | 2012-01-11 | 2012-06-27 | 中国科学院宁波材料技术与工程研究所 | Device and method for improving coercivity of magnet |
| CN102522193B (en) * | 2012-01-11 | 2014-02-12 | 中国科学院宁波材料技术与工程研究所 | Device and method for improving coercivity of magnet |
| CN103423896A (en) * | 2012-05-18 | 2013-12-04 | 徐秀萍 | Method, product and equipment for manufacturing high-emissivity anti-idle-sunning all-glass vacuum heat collecting and utilizing element |
| CN103423896B (en) * | 2012-05-18 | 2016-06-01 | 徐秀萍 | The anti-air drying all glass vacuum heat collecting of high emissivity utilizes element approach product facility |
| CN104003624A (en) * | 2014-06-10 | 2014-08-27 | 芜湖万辰电光源科技有限公司 | Film-coating stage for glass tubes |
| CN104003624B (en) * | 2014-06-10 | 2017-03-29 | 芜湖万辰电光源科技有限公司 | A kind of glass tubing plated film microscope carrier |
| CN107513688A (en) * | 2017-09-25 | 2017-12-26 | 江门市新合盛涂料实业有限公司 | A kind of vacuum coating equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070418 Termination date: 20100225 |