CN2862331Y - Substrate support means for the preparation of flexible solar battery - Google Patents
Substrate support means for the preparation of flexible solar battery Download PDFInfo
- Publication number
- CN2862331Y CN2862331Y CNU2005201306951U CN200520130695U CN2862331Y CN 2862331 Y CN2862331 Y CN 2862331Y CN U2005201306951 U CNU2005201306951 U CN U2005201306951U CN 200520130695 U CN200520130695 U CN 200520130695U CN 2862331 Y CN2862331 Y CN 2862331Y
- Authority
- CN
- China
- Prior art keywords
- shaped
- frame
- substrate
- film
- stainless steel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates a substrate support device for preparing thin film solar cell with flexible substrate. The device is composed of frame-shaped base, grooves, frame-shaped press plate, screws, and stainless steel posts. The grooves are formed on opposite two sides of the frame-shaped base, the stainless steel posts are placed in and matched with the grooves, the frame-shaped press plate is placed on the frame-shaped base, the frame-shaped press plate and the frame-shaped base are corresponding to each other and respectively provided with threaded holes, the screws are inserted into the threaded holes to fix the frame-shaped base and the frame-shaped press plate, and the hollow part of the frame is working surface of the film substrate. The organic flexible film substrate is fixed by tensioning, extruding its edge into the grooves in the base via the stainless steel posts, pressing the stainless steel posts with the press plate, and fastening the screws. Film deposition and device fabrication can be performed on the spread and fixed organic flexible film.
Description
Technical field
The utility model relates to a kind of substrate supports device that is used for the flexible solar cell preparation.
Background technology
Use the plasma enhanced chemical vapor deposition technology, make silane SiH
4, phosphine PH
3, diborane B
2H
6, methane CH
4Decomposing gas, to prepare thin film solar cell be relatively more current at present silicon-film solar-cell manufacturing technology to the hydrogenated amorphous/microcrystalline silicon film of deposition intrinsic and doping on the substrate of heating.Compare with the traditional glass substrate film solar battery, have light weight based on the thin film solar cell of organic flexible substrate, collapsible, be difficult for broken, be convenient to advantages such as transportation, especially high power-weight ratio that it had is that glass substrate is incomparable, has a good application prospect.
Because organic fexible film substrate matter is soft, can curl, and has characteristics such as elasticity, for being implemented in thin film deposition and the device manufacturing on the flexible substrate, must keep film surface smooth and have certain tension force,, must grip it for this reason with the substrate supports device.
The utility model content
The purpose of this utility model provides a kind of substrate supports device that is used for the flexible solar cell preparation.Can realize the effective clamping to organic flexible substrate, it is fixing that it is flattened, so that carry out thin film deposition and device manufacturing thereon.
The utility model is by the shaped as frame base, groove, and the shaped as frame pressing plate, screw and stainless steel column are formed.The both sides of shaped as frame base correspondence are fluted, stainless steel column is placed on coupling in the groove, the shaped as frame pressing plate is placed on above the shaped as frame base, the shaped as frame base is corresponding with the shaped as frame pressing plate, and screw is set respectively, screw inserts screw fixedly shaped as frame base and shaped as frame pressing plate, and shaped as frame inner area place is the film-substrate working face.
The design of use shaped as frame, base and pressing plate hollow between shaped as frame base and the film-substrate, can be inserted the moderate plate glass of a thickness, so that in the device manufacturing processes film-substrate is evenly heated.
To stretch tight organic fexible film edge with stainless steel column gets in the groove of shaped as frame base, with the shaped as frame pressing plate stainless steel column is pushed down and tighten the screws, promptly realize clamping to organic fexible film, gap between shaped as frame base and film, insert the moderate plate glass of a thickness, further the film tensioning is stretched flatly, and help in the device manufacturing processes film-substrate evenly being heated.
On the polyimide film substrate that uses bracing or strutting arrangement clamping described in the utility model, use plasma enhanced chemical vapor deposition (PECVD) deposition techniques amorphous silicon hydride/microcrystalline silicon film, deposited by electron beam evaporation deposition indium tin oxide alloy (ITO) film, with to target sputtering sedimentation zinc-oxide film, rete is smooth evenly, wrinkle resistant, do not come off.
Description of drawings
Fig. 1 flexible substrate bracing or strutting arrangement overall structure schematic diagram.
Fig. 2 flexible substrate bracing or strutting arrangement decomposing schematic representation.
Fig. 3 is based on the flexible substrate solar cell I-V test curve of polyimide film.
Embodiment
The utility model specific embodiments is described in detail as follows with reference to accompanying drawing:
As shown in the figure, 1 shaped as frame base, 2. shaped as frame pressing plate, 3. screw, 4. stainless steel column, 5. film-substrate, 6. plate glass, 7. groove.
By shaped as frame base 1, groove 7, shaped as frame pressing plate 2, screw 3 and stainless steel column 4 are formed.The both sides of shaped as frame base correspondence are fluted, stainless steel column 4 is placed on coupling in the groove 7, shaped as frame pressing plate 2 is placed on above the shaped as frame base 1, shaped as frame base 1 is corresponding with shaped as frame pressing plate 2, and screw is set respectively, screw 3 inserts screw fixedly shaped as frame base 1 and shaped as frame pressing plate 2, and shaped as frame inner area place is the film-substrate working face.Shaped as frame base 1 and shaped as frame pressing plate 2 can be made of stainless steel material.
The design of use shaped as frame, base and pressing plate hollow between shaped as frame base and the film-substrate, can be inserted the moderate plate glass of a thickness, so that in the device manufacturing processes film-substrate is evenly heated.
To stretch tight organic fexible film edges of substrate with stainless steel column 4 gets in the groove 7 of shaped as frame base 1, with shaped as frame pressing plate 2 stainless steel column 4 is pushed down and tighten the screws 3, promptly realize clamping to organic fexible film, gap between shaped as frame base 1 and film-substrate 5, insert the moderate plate glass of a thickness 6, further the film tensioning is stretched flatly, and help in the device manufacturing processes film-substrate 5 evenly being heated.
On the polyimide film substrate that uses the clamping of this bracing or strutting arrangement, use plasma enhanced chemical vapor deposition (PECVD) deposition techniques amorphous silicon hydride/microcrystalline silicon film, deposited by electron beam evaporation deposition indium tin oxide alloy (ITO) film, with to target sputtering sedimentation zinc-oxide film, rete is smooth evenly, wrinkle resistant, do not come off.
Use the flexible substrate solar cell based on polyimide film of this substrate supports device preparation, can reach 4.21% conversion efficiency, its I-V test curve as shown in Figure 3.
Claims (2)
1, a kind of substrate supports device that is used for the flexible substrate film solar battery preparation, it is characterized in that it is by the shaped as frame base, groove, shaped as frame pressing plate, screw and stainless steel column are formed, the both sides of shaped as frame base correspondence are fluted, and stainless steel column is placed on coupling in the groove, and the shaped as frame pressing plate is placed on above the shaped as frame base, the shaped as frame base is corresponding with the shaped as frame pressing plate, and screw is set respectively, and screw inserts screw fixedly shaped as frame base and shaped as frame pressing plate, and hollowing out the area place in the shaped as frame is the film-substrate working face.
2, by the described substrate supports device of claim 1, it is characterized in that inserting plate glass between described shaped as frame base and the film-substrate, so that in the device manufacturing processes film-substrate is evenly heated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201306951U CN2862331Y (en) | 2005-12-22 | 2005-12-22 | Substrate support means for the preparation of flexible solar battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005201306951U CN2862331Y (en) | 2005-12-22 | 2005-12-22 | Substrate support means for the preparation of flexible solar battery |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2862331Y true CN2862331Y (en) | 2007-01-24 |
Family
ID=37659960
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005201306951U Expired - Fee Related CN2862331Y (en) | 2005-12-22 | 2005-12-22 | Substrate support means for the preparation of flexible solar battery |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2862331Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100433375C (en) * | 2005-12-22 | 2008-11-12 | 南开大学 | Cleaning method of solar battery substrate with flexible thin film |
| CN103022243A (en) * | 2011-09-27 | 2013-04-03 | 绿阳光电股份有限公司 | Thin Film Solar Cell Manufacturing System |
| CN104726838A (en) * | 2013-12-20 | 2015-06-24 | 昆山国显光电有限公司 | Supporting device for making flexible display, and making method of flexible display |
| CN106683998A (en) * | 2016-11-28 | 2017-05-17 | 中国电子科技集团公司第四十八研究所 | Flexible substrate pretreatment process |
-
2005
- 2005-12-22 CN CNU2005201306951U patent/CN2862331Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100433375C (en) * | 2005-12-22 | 2008-11-12 | 南开大学 | Cleaning method of solar battery substrate with flexible thin film |
| CN103022243A (en) * | 2011-09-27 | 2013-04-03 | 绿阳光电股份有限公司 | Thin Film Solar Cell Manufacturing System |
| CN104726838A (en) * | 2013-12-20 | 2015-06-24 | 昆山国显光电有限公司 | Supporting device for making flexible display, and making method of flexible display |
| CN106683998A (en) * | 2016-11-28 | 2017-05-17 | 中国电子科技集团公司第四十八研究所 | Flexible substrate pretreatment process |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070124 Termination date: 20111222 |