CN2847133Y - Toxic gas protection and collecting discharge system for ionic filler - Google Patents
Toxic gas protection and collecting discharge system for ionic filler Download PDFInfo
- Publication number
- CN2847133Y CN2847133Y CN 200520142511 CN200520142511U CN2847133Y CN 2847133 Y CN2847133 Y CN 2847133Y CN 200520142511 CN200520142511 CN 200520142511 CN 200520142511 U CN200520142511 U CN 200520142511U CN 2847133 Y CN2847133 Y CN 2847133Y
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- ion gun
- ion source
- exhaust duct
- toxic gas
- pipe
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Abstract
The utility model discloses a toxic gas protecting and collecting discharge system for ion implanters, which comprises a main system air exhaust pipe, an air exhaust pipeline pressure sensor, an air box, an ion source air feeding pipe protecting ventilating pipe, an ion source air exhaust pipe and an ion source toxic gas protecting isolating casing, wherein the main system air exhaust pipe is provided with the air exhaust pipeline pressure sensor and is respectively connected with the ion source air exhaust pipe and the air box which is respectively connected with the ion source air feeding pipe protecting ventilating pipe and the main system air exhaust pipe; one end of the ion source air feeding pipe protecting ventilating pipe is connected with the air box, the other end of the ion source air feeding pipe protecting ventilating pipe is connected with the ion source toxic gas protecting isolating casing; the ion source air exhaust pipe is connected with the main system air exhaust pipe and the ion source toxic gas protecting isolating casing which is installed on the periphery of an ion source and is respectively connected with the ion source air feeding pipe protecting ventilating pipe and the ion source air exhaust pipe. The utility model can effectively prevent the concentration of toxic gas and can enhance the security at the time of carrying out maintenance or replacement of toxic gas bottles in air feeding systems.
Description
Technical field
The utility model relates to a kind of gas and collects exhaust system, relates in particular to a kind of ion implantation apparatus toxic gas protection and collects exhaust system.
Background technology
It is one doping process of semiconductor technology that ion injects, and the doped chemical gas major part of use has hypertoxic characteristic.And the plenum system complexity of implanter, parts are many, are in high-pressure state usually, in case leaking appears in wherein a certain part, all may cause personal injury and environmental pollution.
For preventing the appearance of this danger, except plenum system being carried out strict leak detection test, must collect completely and concentrated harmless treatment the air of air-channel system periphery, keep simultaneously ventilating, prevent that toxic gas from gathering, can improve the security when carrying out the plenum system maintenance or changing poisonous gas cylinder simultaneously greatly.
Summary of the invention
In order to realize that the ion implantation apparatus toxic gas collects completely and concentrate, the utility model provides a kind of ion implantation apparatus toxic gas protection to collect exhaust system, and this system can prevent effectively that toxic gas from gathering, and improves the security performance of ion implantation device.
The utility model is achieved through the following technical solutions:
The protection of ion implantation apparatus toxic gas is collected exhaust system and is comprised main system exhaust duct, air draft line-pressure sensor, gas tank, ion gun snorkel protective ventilation pipe, ion gun exhaust duct, ion gun gas protection cage.
Wherein the main system exhaust duct is used for toxic gas is discharged into factory's centralized collection pipeline, and the air draft line-pressure sensor is installed on it, and is connected with ion gun exhaust duct, gas tank respectively.
The air draft line-pressure sensor is installed on the main system exhaust duct, detect ion implantation apparatus and be connected to the loine pressure that factory focuses on exhaust system, and provide corresponding interlocking signal to implanter control and distribution system, when pipeline air draft negative pressure when setting safety value, interlocking bans use of air-channel system, and sends warning.
Gas tank links to each other with ion gun snorkel protective ventilation pipe, main system exhaust duct respectively, gas tank inside is placed with the poisonous gas pipeline parts, this element can discharge toxic gas, gas tank is responsible for and will be responsible for the protection of toxic gas pipeline parts in a space with one-way flow ventilation characteristic, be connected to factory's centralized collection pipeline by the main system exhaust duct, guarantee that plenum system space air can flow into the air draft pipeline smoothly, prevents that toxic gas from gathering.
Ion gun snorkel protective ventilation Guan Yiduan connects gas tank, and the other end connects ion gun gas protection cage, and ion gun gas protection cage surrounding air is entered gas tank along pipeline, enters primary exhaust conduit then.Ion gun snorkel protective ventilation pipe can also prevent that the possible gas leakage of gas tank from entering peripheral space with the peripheral space sealing of gas tank and ion gun gas protection cage.
The ion gun exhaust duct connects main system exhaust duct and ion gun gas protection cage, for ion gun gas protection cage provides an air pipeline.
Ion gun gas protection cage is installed in ionogenic periphery, form a toxic gas collecting region of isolating in the ion gun space, connect ion gun snorkel protective ventilation pipe and ion gun exhaust duct respectively, new wind inlet is arranged on it simultaneously, when ion source region air flow into the main system exhaust duct by the ion gun exhaust duct, there is new wind constantly to enter the ion gun space, prevent that toxic gas from gathering, protective cover designs with insulating materials, can improve the High-Voltage Insulation performance in ion source region simultaneously.
The utlity model has following remarkable advantage:
1. prevent effectively that toxic gas from gathering, can improve the security when carrying out the plenum system maintenance or changing poisonous gas cylinder greatly.
2. simple and practical, be convenient to produce and safeguard.
Description of drawings
Fig. 1 is a theory structure schematic diagram of the present utility model.
Wherein:
1-main system exhaust duct
2-air draft line-pressure sensor
The 3-gas tank
4-ion gun snorkel protective ventilation pipe
5-ion gun exhaust duct
6-ion gun gas protection cage
7-toxic gas pipeline parts
The specific embodiment
Below in conjunction with the drawings and specific embodiments the utility model is described further, but not as the qualification novel to the present invention.
As shown in Figure 1, the utility model comprises main system exhaust duct 1, air draft line-pressure sensor 2, gas tank 3, ion gun snorkel protective ventilation pipe 4, ion gun exhaust duct 5, ion gun gas protection cage 6.
Wherein main system exhaust duct 1 is used for toxic gas is discharged into factory's centralized collection pipeline (not shown), air draft line-pressure sensor 2 is installed on it, and is connected with ion gun exhaust duct 5, gas tank 3 respectively.Main system exhaust duct 1 is an insulating materials, as organic glass or polypropylene (PP) pipe etc., when realizing vented exhaust, reaches the insulation of gas tank 3 and factory's centralized collection pipeline (not shown).
Air draft line-pressure sensor 2 is installed on the main system exhaust duct 1, detect the ion implantation apparatus (not shown) and be connected to the loine pressure that factory focuses on the exhaust system (not shown), and provide corresponding interlocking signal to implanter control (not shown) and distribution system (not shown), when pipeline air draft negative pressure when setting safety value, interlocking bans use of the air-channel system (not shown), and sends warning.Air draft line-pressure sensor 2 adopts the vacuum table or the negative pressure switch of band bound signals output, and the operating point can arrive and bear hundreds of to a kPa.
Gas tank 3 is a hardware, link to each other 5 with ion gun snorkel protective ventilation pipe 4, main system exhaust duct respectively, gas tank inside is placed with poisonous gas pipeline parts 7, this element can discharge toxic gas, gas tank 3 is responsible for being responsible for 7 protection of toxic gas pipeline parts in a space with one-way flow ventilation characteristic, be connected to factory's centralized collection pipeline (not shown) by main system exhaust duct 1, guarantee that plenum system space air can flow into factory smoothly and focus on the exhaust system (not shown), prevent that toxic gas from gathering.
Ion gun snorkel protective ventilation pipe 4 one ends connect gas tank 3, and the other end connects ion gun gas protection cage 6, and ion gun gas protection cage 6 surrounding airs are entered gas tank 3 along pipeline, enters primary exhaust conduit 1 then.Ion gun snorkel protective ventilation pipe 4 can also prevent that gas tank 3 possible gas leakages from entering peripheral space with the peripheral space sealing of gas tank 3 and ion gun gas protection cage 6.Ion gun snorkel protective ventilation pipe 4 adopts in the plastics airduct and adds insulation sleeve, and is flexible good, improves insulating properties simultaneously.
Ion gun exhaust duct 5 connects main system exhaust duct 1 and ion gun gas protection cage 6, for ion gun gas protection cage 6 provides an air pipeline.Ion gun exhaust duct 5 adopts insulation around the property airduct, and draft power is strong, is convenient to safeguard change.
Ion gun gas protection cage 6 is installed in ionogenic peripheral (not shown), form a toxic gas collecting region of isolating in ion gun (not shown) space, connect ion gun snorkel protective ventilation pipe 4 and ion gun exhaust duct 5 respectively, new wind inlet is arranged on it simultaneously, when ion source region air flow into main system exhaust duct 1 by ion gun exhaust duct 5, there is new wind constantly to enter ion gun (not shown) space, prevents that toxic gas from gathering.Ion gun gas protection cage 6 adopts lucite or other transparent insulation materials, can improve the external insulating capacity of ion gun (not shown).For making things convenient for ion gun (not shown) attended operation, a removable cover (not shown) is arranged in the front, can take off when carrying out ion gun (not shown) attended operation.6 li air of ion gun gas protection cage this moment are to flow toward exhaust duct 5, and can be not excessive, and in the time of also effectively preventing attended operation, the residual gas of ion gun (not shown) and snorkel (not shown) produces harm to operating personnel.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the utility model patent, with corresponding legal responsibilities.
Claims (1)
1, exhaust system is collected in a kind of ion implantation apparatus toxic gas protection, comprise main system exhaust duct, air draft line-pressure sensor, gas tank, ion gun snorkel protective ventilation pipe, ion gun exhaust duct, ion gun gas protection cage, it is characterized in that: wherein on the main system exhaust duct air draft line-pressure sensor is installed, and is connected with ion gun exhaust duct, gas tank respectively; Gas tank links to each other with ion gun snorkel protective ventilation pipe, main system exhaust duct respectively; Ion gun snorkel protective ventilation Guan Yiduan connects gas tank, and the other end connects ion gun gas protection cage; Ion gun exhaust duct one end connects the main system exhaust duct, and the other end connects ion gun gas protection cage; Ion gun gas protection cage connects ion gun snorkel protective ventilation pipe and ion gun exhaust duct respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520142511 CN2847133Y (en) | 2005-12-05 | 2005-12-05 | Toxic gas protection and collecting discharge system for ionic filler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520142511 CN2847133Y (en) | 2005-12-05 | 2005-12-05 | Toxic gas protection and collecting discharge system for ionic filler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2847133Y true CN2847133Y (en) | 2006-12-13 |
Family
ID=37512556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520142511 Expired - Fee Related CN2847133Y (en) | 2005-12-05 | 2005-12-05 | Toxic gas protection and collecting discharge system for ionic filler |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2847133Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102867387A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Smoke detection and interlock method |
| CN102956423A (en) * | 2011-08-22 | 2013-03-06 | 北京中科信电子装备有限公司 | Negative pressure detection interlocking method |
-
2005
- 2005-12-05 CN CN 200520142511 patent/CN2847133Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102867387A (en) * | 2011-07-05 | 2013-01-09 | 北京中科信电子装备有限公司 | Smoke detection and interlock method |
| CN102956423A (en) * | 2011-08-22 | 2013-03-06 | 北京中科信电子装备有限公司 | Negative pressure detection interlocking method |
| CN102956423B (en) * | 2011-08-22 | 2016-06-08 | 北京中科信电子装备有限公司 | Negative pressure detection interlocking method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |