CN102956423B - Negative pressure detection interlocking method - Google Patents
Negative pressure detection interlocking method Download PDFInfo
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- CN102956423B CN102956423B CN201110241143.8A CN201110241143A CN102956423B CN 102956423 B CN102956423 B CN 102956423B CN 201110241143 A CN201110241143 A CN 201110241143A CN 102956423 B CN102956423 B CN 102956423B
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- negative pressure
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- Filling Or Discharging Of Gas Storage Vessels (AREA)
Abstract
A negative pressure detection interlock method comprising: negative pressure detector, interlock control circuit. The device is characterized in that when the detector detects negative pressure, the negative pressure detector sends a signal, the interlocking control circuit can automatically prompt a LOW (LOW) negative pressure state and a HIGH (HIGH) negative pressure state, exhaust and toxic gas of the device can be pumped into a special device, once the exhaust negative pressure is lost, HIGH-voltage power supply of the device and the process toxic gas are cut off immediately, the surrounding environment is prevented from being polluted, and injury to personnel is avoided. The invention improves the safety protection function of the equipment, can ensure the safety of the ion implanter and the environment around the equipment, and is used for improving the safe operation of the ion implanter.
Description
Technical field
The present invention relates to a kind of negative pressure and survey interlocking method, relate to especially the device security for ion implantation apparatusAutomatic operation method with ensureing personal security, belongs to field of semiconductor devices.
Background technology
Ion implantation apparatus belongs to the one of particle accelerator, in ion implantation apparatus operation process, should ensure ion implantation apparatusThere are enough negative exhaust pressure force environments. Because when ion implantation apparatus work, can use toxicity process gas, if equipment exhaustNegative pressure is inadequate, and toxic gas can leak in equipment and atmosphere around, can cause mortal injury to personnel. At ionImplanter is installed negative pressure sniffer and is detected negative pressure value, and when pressure is during lower than high (HIGH) negative pressure value, equipment sends early warningSignal, when pressure is during lower than low (LOW) negative pressure value, cuts off immediately equipment high pressure and gas tank power supply by interlock circuit, and stopsPoisonous process gas, makes equipment in a safe condition, and Accident prevention occurs.
Summary of the invention
The negative exhaust pressure power a kind of simple and that can automatically perform that the present invention is directed to the feature of ion implantation apparatus and design is visitedObserve and predict alarm method.
Patent of the present invention adopts following technical scheme to realize: utilize negative pressure exhaust detector to detect and interlocked control electricityRoad, realizes automatic early-warning and alarm, and cutoff high electricity, gas tank are powered and toxicity process gas immediately. Negative pressure detector,Can judge the negative pressure value of exhaust, according to the difference of negative pressure send normally, early warning and alarm signal. The first, work as negative pressureDetector, when detecting exhaust pressure value and being greater than height (HIGH) negative pressure value, equipment exhaust is normal; The second, when negative pressure detector,When detecting exhaust pressure value and being less than height (HIGH) negative pressure value, send early warning signal and control in advance by interlocked control circuitAlert, now only can remind operating personnel to take suitable method to tackle, can not cut off equipment high pressure and poison gas process gas.The 3rd, when negative pressure detector, when detecting exhaust pressure value and being less than low (LOW) negative pressure value, signal by connection gives the alarmLock control circuit cuts off equipment high pressure and gas tank power supply immediately, stops sending poisonous process gas. Equipment is in safe shape like thisState, can not cause damage to surrounding environment to personnel by intoxicating gas leakage. The present invention has following remarkable advantage:
1. utilize negative exhaust pressure force detector, ion implantation apparatus is carried out to automatic safe control, be not subject to human intervention automaticCarry out, reliability is high.
2. the method has warning function, when early warning alarm occurs, can cutoff high and gas tank power supply, but can send pre-Alert signal, reminds operating personnel to take immediate steps, and has very high safety assurance.
3. improved implanter reliability and security at work.
Brief description of the drawings
Fig. 1 is negative pressure detector and interlocked control circuit working flow chart.
Fig. 2 is negative pressure detector and interlocked control circuit working schematic diagram.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the invention will be described further, but not as the limit to patent of the present inventionFixed.
Patent of the present invention discloses a kind of negative exhaust pressure power interlocking method, and concrete implementer's case is come as follows: utilize negativePressure detector (1) detects negative pressure value size (being deflation rate), according to the difference of negative pressure value send normally, early warning and policeReport three signals, by interlocked control circuit (2), realize automatic early-warning and alarm, can cut off immediately equipment high-tension electricity and toxicityProcess gas.
The first, when negative pressure detector (1), when detecting exhaust pressure value and being greater than HIGH negative pressure value, normally opened contact P1-3 and P1-4 disconnect all the time, so interlocked control circuit (2) does not receive signal, exhaust condition is normal, equipment is in safe operationState;
The second, when negative pressure detector (1), when detecting exhaust pressure value and being less than height (HIGH) negative pressure value, send early warningWhen signal, normally opened contact P1-3 and P1-4 closure, the Q1 control relay K1 line bag by interlocked control circuit (2) is from adhesiveBecome off-state, now normally opened contact K1-4, the K1-8 of K1 become disconnection from closure, then deliver to master by J2-3 and J2-4Distribution control, carries out early warning. Now can not cut off equipment high pressure and poison gas process gas, only can remind operating personnel to take to fitWhen method tackle.
The 3rd, when negative pressure detector (1), when detecting exhaust pressure value and being less than low (LOW) negative pressure value, letter gives the alarmNumber, normally opened contact P1-1 and P1-2 closure, by interlocked control circuit (2) Q2 control relay K2 line bag become from adhesiveOff-state, now normally opened contact K2-4, the K2-8 of K2 become disconnection from closure, then deliver to main distribution by J1-1 and J1-2Control, carry out the alarm of exhaust low value. After alarm occurs, can cut off immediately equipment high pressure and gas tank power supply, stop sending poisonousProcess gas, prevents that poisonous gas from leaking, and makes equipment in a safe condition.
Specific embodiment of the present invention elaborates content of the present invention. To persons skilled in the art andSpeech, any apparent change of without departing from the premise in the spirit of the present invention it being done, all forms patent of the present inventionInfringement, will bear corresponding legal liabilities.
Claims (1)
1. negative pressure is surveyed an interlocking method, comprising: negative pressure detector; Interlocked control circuit, control circuit has normally,Early warning and alarm modules control section, is characterized in that, when negative pressure detector checkout equipment negative exhaust pressure, sends signal and pass throughInterlocked control circuit comes automatic early-warning and warning, and can cut off immediately equipment high-tension electricity and toxicity process gas, by ionThe improvement of the security of implanter, can guarantee that the toxicity process gas of ion implantation apparatus can not cause damage to human and environment, reallyProtect the safe operation of ion implantation apparatus itself; When negative pressure detector, when detecting exhaust pressure value and being greater than high negative pressure value, normalOpen contact P1-3 and P1-4 and disconnect all the time, so interlocked control circuit does not receive signal, exhaust condition is normal, equipment inSafe operation state; In the time that negative pressure detector detects exhaust pressure value and is less than high negative pressure value, while sending early warning signal, normalOpen contact P1-3 and P1-4 closure, become disconnection shape by the Q1 control relay K1 line bag of interlocked control circuit from adhesiveState, now normally opened contact K1-4, the K1-8 of K1 become disconnection from closure, then deliver to by contact J2-3 and contact J2-4Main distribution control, carries out early warning; Now can not cut off equipment high pressure and poison gas process gas, only can remind operating personnel to takeSuitable method is tackled; When negative pressure detector, when detecting exhaust pressure value and being less than lower negative pressure value, letter gives the alarmNumber, normally opened contact P1-1 and P1-2 closure, becomes from adhesive by the Q2 control relay K2 line bag of interlocked control circuitOff-state, now normally opened contact K2-4, the K2-8 of K2 become disconnection from closure, then by contact J1-1 and contact J1-2 deliver to main distribution control, carry out the alarm of exhaust low value; After alarm occurs, can cut off immediately equipment high pressure and gas tank power supply,Stop sending poisonous process gas, prevent that poisonous gas from leaking, and makes equipment in a safe condition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110241143.8A CN102956423B (en) | 2011-08-22 | 2011-08-22 | Negative pressure detection interlocking method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110241143.8A CN102956423B (en) | 2011-08-22 | 2011-08-22 | Negative pressure detection interlocking method |
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| Publication Number | Publication Date |
|---|---|
| CN102956423A CN102956423A (en) | 2013-03-06 |
| CN102956423B true CN102956423B (en) | 2016-06-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201110241143.8A Active CN102956423B (en) | 2011-08-22 | 2011-08-22 | Negative pressure detection interlocking method |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2847133Y (en) * | 2005-12-05 | 2006-12-13 | 北京中科信电子装备有限公司 | Toxic gas protection and collecting discharge system for ionic filler |
| CN1942365A (en) * | 2003-09-09 | 2007-04-04 | 高级技术材料公司 | Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array |
| KR20070084829A (en) * | 2006-02-22 | 2007-08-27 | 삼성전자주식회사 | Leak detection appratus and method in dry etcher of semiconductor manufacture type thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100426815B1 (en) * | 2002-06-26 | 2004-04-14 | 삼성전자주식회사 | Lens power supplier interlock apparatus and method for ion implanter equipment |
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2011
- 2011-08-22 CN CN201110241143.8A patent/CN102956423B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1942365A (en) * | 2003-09-09 | 2007-04-04 | 高级技术材料公司 | Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array |
| CN2847133Y (en) * | 2005-12-05 | 2006-12-13 | 北京中科信电子装备有限公司 | Toxic gas protection and collecting discharge system for ionic filler |
| KR20070084829A (en) * | 2006-02-22 | 2007-08-27 | 삼성전자주식회사 | Leak detection appratus and method in dry etcher of semiconductor manufacture type thereof |
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| Publication number | Publication date |
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| CN102956423A (en) | 2013-03-06 |
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Effective date of registration: 20220513 Address after: 101111 1st floor, building 1, 6 Xingguang 2nd Street, Tongzhou District, Beijing Patentee after: Beijing Scintillation Section Zhongkexin Electronic Equipment Co.,Ltd. Address before: 101111 No. 6, Xingguang Second Street, Tongzhou Park optical electromechanical integration industrial base, Zhongguancun Science Park, Beijing Patentee before: BEIJING ZHONGKEXIN ELECTRONICS EQUIPMENT Co.,Ltd. |
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