CN2844881Y - High sensitive vibration detector - Google Patents
High sensitive vibration detector Download PDFInfo
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- CN2844881Y CN2844881Y CN 200520069804 CN200520069804U CN2844881Y CN 2844881 Y CN2844881 Y CN 2844881Y CN 200520069804 CN200520069804 CN 200520069804 CN 200520069804 U CN200520069804 U CN 200520069804U CN 2844881 Y CN2844881 Y CN 2844881Y
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- photodiode array
- array detector
- vibration
- detector
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Abstract
The utility model relates to a high sensitive vibration detector of the vibration detection field. The high sensitive vibration detector comprises a laser and an A-B photodiode array detector, and also comprises a box body, a vibration damping device and an interface, wherein the interface is arranged on the box body, the vibration damping device is installed on the inner wall of the box body, the A-B photodiode array detector is fixed to the vibration damping device, and the laser is fixed to the inner wall of the box body. The power supply of the laser is provided by an internal battery or an external power supply through the interface. The laser beams delivered by the laser are projected in the middle of an A and B joint of the A-B photodiode array detector, an output signal wire of which is connected with the interface. The utility model has the advantages of simple structure, high sensitivity, small distortion of original signals, etc. The utility model is particularly suitable for the high precision measurement of the micro vibration field.
Description
Technical field
The utility model relates to a kind of vibrating detector, and the highly sensitive vibration detector that use in particularly a kind of little vibration field belongs to the vibration detection technology field.
Background technology
The A-B photodiode array detector is made up of photodiode array detector (photodiodearray) A (being designated hereinafter simply as A) and photodiode array detector B (being designated hereinafter simply as B) and difference engine, the voltage signal that the signal of its output is directly proportional for the difference with the received laser intensity of A and B.The utility model is because the motion scan process of laser beam on A and B that has adopted laser instrument to launch reacted box body moving with respect to mass, and finally obtain the vibration signal of highly sensitive vibration detector self, and existing vibrating detector mostly adopts is piezoelectric effect, therefore, compare with existing vibrating detector, the sensitivity of this highly sensitive vibration detector is high, and the original signal degree of distortion is minimum.
Summary of the invention
The purpose of this utility model is to provide a kind of high vibrating detector of sensitivity that is applicable to little vibration detecting.
The utility model is by measuring vibrations moving of laser beam generation to be obtained vibration signal.For moving of Laser Measurement bundle, we project laser beam the junction of two the photodiode array detector A and the B of A-B photodiode array detector.Laser beam will be in the photodiode array detector A signal output different with generation on the B moving of junction.The difference A-B of these two unlike signals has promptly provided laser beam moving with respect to photodiode array detector A and B joint.In addition, can cause laser beam relatively moving on the A-B photodiode array detector in order to make little vibration source, we separate them by shock attenuation device (spring or single pendulum or magnetic levitation etc.).
The purpose of this utility model is achieved through the following technical solutions, this highly sensitive vibration detector comprises laser instrument, the A-B photodiode array detector, also include box body, vibration absorber and interface, interface is installed on the box body, vibration absorber is contained on the inboard wall of cartridge, the A-B photodiode array detector is fixed on the vibration absorber, laser instrument is fixed on the inboard wall of cartridge, the power supply of laser instrument connects battery or external power supply provides by interface by interior, its laser beam of sending is incident upon the A of A-B photodiode array detector and the centre of B junction, and the output signal line of A-B photodiode array detector is connected with interface.
Described vibration absorber is made up of spring and mass, and an end of spring is fixed on the inboard wall of cartridge, and mass is fixed on the other end of spring, and described A-B photodiode array detector is fixed on the mass.
Described vibration absorber also can be made up of fine rule and mass, and an end of fine rule is fixed on the inboard wall of cartridge, and mass is suspended on the other end of fine rule, and described A-B photodiode array detector is fixed on the mass.
Described vibration absorber also can be made up of magnetic field generating and diamagnetism gauge block, magnetic field generating is fixed on the inboard wall of cartridge, the A-B photodiode array detector is fixed on the diamagnetism gauge block, and this diamagnetism gauge block is in magnetic suspension state under the action of a magnetic field that magnetic field generating produces.Magnetic field generating can be permanent magnet or electromagnet or superconductor, and described diamagnetism gauge block is permanent magnet or electromagnet or superconductor.
The purpose of this utility model also can be achieved through the following technical solutions, this highly sensitive vibration detector, comprise laser instrument, the A-B photodiode array detector, also include box body, vibration absorber and interface, interface is installed on the box body, vibration absorber is contained on the inboard wall of cartridge, laser instrument is fixed on the vibration absorber, the A-B photodiode array detector is fixed on the inboard wall of cartridge, the power supply of laser instrument connects battery or external power supply provides by interface by interior, and its laser beam of sending is incident upon the A of A-B photodiode array detector and the centre of B junction, and the output signal line of A-B photodiode array detector is connected with interface.
Described vibration absorber is made up of spring and mass, and an end of spring is fixed on the inboard wall of cartridge, and mass is fixed on the other end of spring, and described laser instrument is fixed on the mass.
Described vibration absorber also can be made up of fine rule and mass, and an end of fine rule is fixed on the inboard wall of cartridge, and mass is suspended on the other end of fine rule, and described laser instrument is fixed on the mass.
Described vibration absorber also can be made up of magnetic field generating and diamagnetism gauge block, and magnetic field generating is fixed on the inboard wall of cartridge, and laser instrument is fixed on the diamagnetism gauge block, and this diamagnetism gauge block is in magnetic suspension state under the action of a magnetic field that magnetic field generating produces.Magnetic field generating can be permanent magnet or electromagnet or superconductor, and described diamagnetism gauge block is permanent magnet or electromagnet or superconductor.
The present invention is owing to adopted the scanning process of laser instrument on the A-B photodiode array detector to react box body moving with respect to mass, and finally obtain the vibration signal of highly sensitive vibration detector self, therefore the sensitivity of this highly sensitive vibration detector is high, the original signal degree of distortion is minimum, its sensitivity even can be up to energy measurement to the microvibration of atomic level or move.When carrying out high resolution microscope imaging or high-accuracy measurement, the present invention can be used for analyzing desktop or experiment background vibration interference intensity and source, and the present invention is also having very big application aspect the variation of the quality of Measuring Object and quality.This is because an important method of Measuring Object quality is to put it in the vibrational system, and measures the quality of this object by the resonant frequency of measuring this system.Therefore, utilize the present invention just can accurately measure quality or its variation of object to the accurate measurement of this resonant frequency or its variation.The present invention also can be applicable to the wearing and tearing (whether the bearing as the high speed rotating wheel has unusual or the crack) of earthquake or tsunami monitoring and periodic motion object etc.
Description of drawings
Accompanying drawing 1 is a kind of structural representation that adopts spring damping in the embodiment of the invention;
In the accompanying drawing 11 is laser instrument, the 2nd, A-B photodiode array detector, the 3rd, mass, the 4th, spring, the 5th, laser beam, the 6th, interface, the 7th, photodiode array detector A, the 8th, photodiode array detector B, the 9th, the output signal line of A-B photodiode array detector, the 10th, the circumscripted power line of laser instrument, the 11st, box body.
Accompanying drawing 2 is the another kind of structural representations that adopt spring damping in the embodiment of the invention;
In the accompanying drawing 2 12 is laser instruments, the 13rd, A-B photodiode array detector, the 14th, mass, the 15th, spring, the 16th, laser beam, the 17th, interface, the 18th, photodiode array detector A, the 19th, photodiode array detector B, the 20th, the output signal line of A-B photodiode array detector, the 21st, the circumscripted power line of laser instrument, the 22nd, box body.
Accompanying drawing 3 is a kind of structural representations that adopt the single pendulum vibration damping in the embodiment of the invention;
In the accompanying drawing 3 23 is laser instruments, the 24th, A-B photodiode array detector, the 25th, mass, the 26th, fine rule, the 27th, laser beam, the 28th, interface, the 29th, photodiode array detector A, the 30th, photodiode array detector B, the 31st, the output signal line of A-B photodiode array detector, the 32nd, the circumscripted power line of laser instrument, the 33rd, box body.
Accompanying drawing 4 is the another kind of structural representations that adopt the single pendulum vibration damping in the embodiment of the invention;
In the accompanying drawing 4 34 is laser instruments, the 35th, A-B photodiode array detector, the 36th, mass, the 37th, fine rule, the 38th, laser beam, the 39th, interface, the 40th, photodiode array detector A, the 41st, photodiode array detector B, the 42nd, the output signal line of A-B photodiode array detector, the 43rd, the circumscripted power line of laser instrument, the 44th, box body.
Accompanying drawing 5 is a kind of structural representations that adopt the magnetic levitation vibration damping in the embodiment of the invention;
In the accompanying drawing 5 45 is laser instruments, the 46th, A-B photodiode array detector, the 47th, diamagnetism gauge block, the 48th, magnetic field generating, the 49th, laser beam, the 50th, interface, the 51st, photodiode array detector A, the 52nd, photodiode array detector B, the 53rd, the output signal line of A-B photodiode array detector, the 54th, the circumscripted power line of laser instrument, the 55th, box body.
Accompanying drawing 6 is the another kind of structural representations that adopt the magnetic levitation vibration damping in the embodiment of the invention;
In the accompanying drawing 6 56 is laser instruments, the 57th, A-B photodiode array detector, the 58th, diamagnetism gauge block, the 59th, magnetic field generating, the 60th, laser beam, the 61st, interface, the 62nd, photodiode array detector A, the 63rd, photodiode array detector B, the 64th, the output signal line of A-B photodiode array detector, the 65th, the circumscripted power line of laser instrument, the 66th, box body.
Embodiment
One embodiment of the present invention: referring to accompanying drawing 1, one end of spring is fixed on the inboard wall of cartridge, mass is fixed on the other end of spring, the A-B photodiode array detector is fixed on the mass, laser instrument is fixed on the inboard wall of cartridge, and make its laser beam of sending be incident upon the A of A-B photodiode array detector and the centre of B junction, the power supply of laser instrument connects battery or external power supply provides by interface by interior, and the output signal line of A-B photodiode array detector is connected with interface.At this moment, because the laser beam that laser instrument is sent is incident upon the A of A-B photodiode array detector and the centre of B junction, the intensity of the light signal that the A of A-B photodiode array detector and B receive equates, so A-B photodiode array detector signal is output as zero.When vibration when AB place rectilinear direction takes place, since the inertia of mass and spring to the damping effect of mass, make that the vibration of mass and box body is asynchronous, thereby the vibration of A-B photodiode array detector and laser instrument is asynchronous, and relative displacement taken place, be fixed on the laser beam that the laser instrument on the inboard wall of cartridge sends and departed from the A of the A-B photodiode array detector that is fixed on the mass and the centre position of B junction, so the intensity of the light signal that the A of A-B photodiode array detector and B receive does not wait, therefore, the A-B photodiode array detector will have a non-vanishing voltage signal output, at this moment in fact signal output write down the vibration situation of laser instrument with respect to the A-B photodiode array detector, this signal is admitted to the outer signal processing system of box body by interface, because the vibration of mass is the forced vibration that can separate, signal is easy to separated processing.Thereby can obtain the vibration signal of highly sensitive vibration detector simply.And the coefficient of stiffiness of quality that can be by the quality of regulation piece and/or the spring detection sensitivity of regulating highly sensitive vibration detector.
The installation site of laser instrument in the above-mentioned highly sensitive vibration detector and A-B photodiode array detector also can be exchanged, and promptly laser instrument is installed on the mass, and the A-B photodiode array detector is installed in (referring to accompanying drawing 2) on the inboard wall of cartridge.
Another embodiment of the invention: referring to accompanying drawing 3, an end of fine rule is fixed on the inboard wall of cartridge, and mass is suspended on the other end of fine rule.The A-B photodiode array detector is fixed on the mass, laser instrument is fixed on the inboard wall of cartridge, and make its laser beam of sending be incident upon the A of A-B photodiode array detector and the centre of B junction, the power supply of laser instrument connects battery or external power supply provides by interface by interior, and the output signal line of A-B photodiode array detector is connected with interface.At this moment, because the laser beam that laser instrument is sent is incident upon the A of A-B photodiode array detector and the centre of B junction, the intensity of the light signal that the A of A-B photodiode array detector and B receive equates, so A-B photodiode array detector signal is output as zero.When vibration at surface level when AB place rectilinear direction takes place, because the inertia of mass and the damping effect of single pendulum, make that the vibration of mass and box body is asynchronous, be fixed on the laser beam that the laser instrument on the inboard wall of cartridge sends and departed from the A of the A-B photodiode array detector that is fixed on the mass and the centre position of B junction, so the intensity of the light signal that the A of A-B photodiode array detector and B receive does not wait, therefore, the A-B photodiode array detector will have a non-vanishing voltage signal output, at this moment in fact signal output write down the vibration situation of laser instrument with respect to the A-B photodiode array detector, this signal is admitted to the outer signal processing system of box body by signaling interface, because the vibration of mass is the forced vibration that can separate, signal is easy to separated processing.Thereby can obtain the vibration signal of highly sensitive vibration detector simply.And the length of quality that can be by the quality of regulation piece and/or the fine rule detection sensitivity of regulating highly sensitive vibration detector.This mode is applicable to the vibration that detects along continuous straight runs.
The installation site of laser instrument in the above-mentioned highly sensitive vibration detector and A-B photodiode array detector also can be exchanged, and promptly laser instrument is installed on the mass, and the A-B photodiode array detector is installed in (referring to accompanying drawing 4) on the inboard wall of cartridge.
Another embodiment of the present invention: referring to accompanying drawing 5, magnetic field generating is fixed on the inboard wall of cartridge, the A-B photodiode array detector is contained on the diamagnetism gauge block, and this diamagnetism gauge block is in magnetic suspension state under the effect in the magnetic field that magnetic field generating produced.Laser instrument is fixed on the inboard wall of cartridge, and make its laser beam of sending be incident upon the centre of A-B photodiode array detector A and B junction, the power supply of laser instrument connects battery or external power supply provides by interface by interior, and the output signal line of A-B photodiode array detector is connected with interface.At this moment, because the laser beam that laser instrument is sent is incident upon the A of A-B photodiode array detector and the centre of B junction, the intensity of the light signal that the A of A-B photodiode array detector and B receive equates, so A-B photodiode array detector signal is output as zero.When vibration when AB place straight line takes place, because the inertia of diamagnetism gauge block and the damping effect of suspension magnetic, make that the vibration of diamagnetism gauge block is asynchronous vibration in box body, be fixed on the laser beam that the laser instrument on the inboard wall of cartridge sends and departed from the A of A-B photodiode array detector and the centre position of B junction, so the intensity of the light signal that the A of A-B photodiode array detector and B receive does not wait, therefore, the A-B photodiode array detector will have a non-vanishing voltage signal output, at this moment in fact signal output write down the vibration situation of laser instrument with respect to the A-B photodiode array detector, this signal is admitted to the outer signal processing system of box body by signaling interface, because the vibration of diamagnetism gauge block is the forced vibration that can separate, signal is easy to separated processing.Thereby can obtain the vibration signal of highly sensitive vibration detector simply.And the intensity in quality that can be by regulating the diamagnetism gauge block and/or the magnetic field detection sensitivity of regulating highly sensitive vibration detector.
The installation site of laser instrument in the above-mentioned highly sensitive vibration detector and A-B photodiode array detector also can be exchanged, and promptly laser instrument is installed on the diamagnetism gauge block, and the A-B photodiode array detector is installed in (referring to accompanying drawing 6) on the inboard wall of cartridge.
For above each embodiment, when vibration source is carried out vibration detection, only need this highly sensitive vibration detector is fixed on the vibration source to be measured, and vibrate with vibration source and both can.
Claims (5)
1, a kind of highly sensitive vibration detector, comprise laser instrument, the A-B photodiode array detector, it is characterized in that also including box body, vibration absorber and interface, interface is installed on the box body, vibration absorber is contained on the inboard wall of cartridge, A-B photodiode array detector and laser instrument are divided on the box body interior vibration absorber and non-vibration absorber, the power supply of laser instrument connects battery or external power supply provides by interface by interior, its laser beam of sending is incident upon two the photodiode array detector A of A-B photodiode array detector and the centre of B junction, and the output signal line of A-B photodiode array detector is connected with interface.
2, a kind of highly sensitive vibration detector as claimed in claim 1, it is characterized in that described vibration absorber is made up of spring and mass, one end of spring is fixed on the inboard wall of cartridge, mass is fixed on the other end of spring, the A-B photodiode array detector is fixed on the mass, and laser instrument is installed on the inboard wall of cartridge.
3, a kind of highly sensitive vibration detector as claimed in claim 1, it is characterized in that described vibration absorber is made up of fine rule and mass, one end of fine rule is fixed on the inboard wall of cartridge, mass is suspended on the other end of fine rule, the A-B photodiode array detector is fixed on the mass, and laser instrument is installed on the inboard wall of cartridge.
4, a kind of highly sensitive vibration detector as claimed in claim 1, it is characterized in that described vibration absorber is made up of magnetic field generating and diamagnetism gauge block, magnetic field generating is fixed on the inboard wall of cartridge, described A-B photodiode array detector is fixed on the diamagnetism gauge block, this diamagnetism gauge block is in magnetic suspension state under the action of a magnetic field that magnetic field generating produces, laser instrument is installed on the inboard wall of cartridge.
5, as claim 1 or 2 or 3 or 4 described a kind of highly sensitive vibration detectors, it is characterized in that described A-B photodiode array detector and laser instrument also can exchange installation, be that the A-B photodiode array detector is fixed on the inboard wall of cartridge, laser instrument is installed on the mass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520069804 CN2844881Y (en) | 2005-03-15 | 2005-03-15 | High sensitive vibration detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520069804 CN2844881Y (en) | 2005-03-15 | 2005-03-15 | High sensitive vibration detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2844881Y true CN2844881Y (en) | 2006-12-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520069804 Expired - Fee Related CN2844881Y (en) | 2005-03-15 | 2005-03-15 | High sensitive vibration detector |
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|---|---|
| CN (1) | CN2844881Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528783A (en) * | 2013-10-24 | 2014-01-22 | 广东技术师范学院 | Intelligent fault diagnosis system based on immunity detector |
| CN108698813A (en) * | 2016-06-02 | 2018-10-23 | 歌尔股份有限公司 | Mems device and electronic equipment |
-
2005
- 2005-03-15 CN CN 200520069804 patent/CN2844881Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103528783A (en) * | 2013-10-24 | 2014-01-22 | 广东技术师范学院 | Intelligent fault diagnosis system based on immunity detector |
| CN108698813A (en) * | 2016-06-02 | 2018-10-23 | 歌尔股份有限公司 | Mems device and electronic equipment |
| CN108698813B (en) * | 2016-06-02 | 2023-01-20 | 歌尔股份有限公司 | MEMS device and electronic equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |