CN2838052Y - Strip line resonator and microwave thin-film material electromagnetic parameter testing device - Google Patents

Abstract

The utility model relates to a belt-shaped resonator and a microwave thin film material electromagnetic parameter testing device, which belongs to the technical field of the testing of microwaves. The belt-shaped resonator comprises metal grounding plates 4, an inner conductor 5, a metal short circuit plate 6 and coupling rings 7, wherein both ends of the metal grounding plates 4 which are mutually parallel are respectively connected with the metal short circuit plate 6. The inner conductor 5 is positioned between the two metal grounding plates 4, and the two coupling rings 7 are arranged in the proper positions on the upper part and the lower part of one metal ground plate 4 which is connected with the inner conductor 5 to realize the input and the output of microwave signals. The electromagnetic parameter testing device for microwave thin film materials comprises a microwave signal source 1, the belt-shaped resonator 2 and the scalar network analyzer 3, wherein the belt-shaped resonator has the advantages of wide working frequency, small size, convenient operation, little testing error, etc. The microwave thin film material electromagnetic parameter testing device of the utility model can test microwave thin film material electromagnetic parameters in the range of each microwave frequency band.

Description

A kind of stripline resonator and microwave thin film material electromagnetic parameter testing device

Technical field

A kind of stripline resonator and microwave thin film material electromagnetic parameter testing device belong to the microwave testing field, particularly a kind of electromagnetic parameter testing device of microwave thin film material.

Background technology

Microwave thin film material is as a kind of multifunctional material, and the quality of its performance must be through the actual test of performance parameter.Two basic parameters describing the microwave thin film material electromagnetic characteristic are complex dielectric permittivity and complex permeability, and they are main foundations of estimating microwave thin film material electromagnetic performance quality, also are the important parameters that carries out design of Electromagnetic Shielding and Microwave Communication Design.

Abroad the microwave thin film material electromagnetic parameter has been carried out more than ten years in the test job under the microwave frequency band, method of testing commonly used is the network parameter method.The network parameter method is placed with the scattering parameter of the microwave transmission line of tested microwave thin film material by test, calculates the electromagnetic parameter of measured material.The type of transmission line that is adopted has: strip line, microstrip line, rectangular waveguide, co-planar waveguide and coaxial line etc.Test frequency wider range of network parameter method, but the influence of the making complexity of testing sensor, higher modes is big, test error is bigger.

For the test of microwave thin film material electromagnetic parameter, also can adopt based on resonant cavity perturbation method.Document " Zhang Xiucheng, Nie Yan, He Huahui etc.; microwave thin film material complex dielectric permittivity and complex permeability testing research, Central China University of Science and Technology's journal, 2004; Vol.32, No.4, p 90～92. " utilize the rectangular cavity perturbation method to carry out near the microwave thin film material electromagnetic Testing Technology Study of 2GHz.The test frequency narrow range, if carry out the more electromagnetic parameter testing of low frequency (for example 1GHz), the rectangle resonator of required usefulness is actively big, and the specimen of required making is also very big, and the manufacture difficulty of test fixture and sample increases.

When above-mentioned network parameter method resonant cavity perturbation method was carried out electromagnetic parameter testing to microwave thin film material, its test frequency was limited in scope, and can not realize the wideband test to the microwave thin film material electromagnetic parameter; In addition, because of the film sample thinner thickness, be subjected to the restriction of base material and method of testing, all also exist some defectives at aspects such as measuring stability and accuracys, be difficult to obtain electromagnetic parameter accurately, test error is big.Most of document can only be tested the equivalent permeability of microwave thin film material, and the complex manufacturing technology of the required sample of partial test method, is difficult to adapt to the present situation requirement of microwave thin film material electromagnetic parameter testing.

The utility model content

Task of the present utility model provides the stripline resonator and the corresponding testing device of in a kind of suitable broadband the microwave thin film material electromagnetic parameter being tested.

The utility model detailed technology scheme is:

A kind of stripline resonator, shown in Fig. 2,3, comprise four parts such as metal ground plate 4, inner wire 5, short circuit metal plate 6 and coupling loop 7, it is characterized in that, the two ends of described two metal ground plates that are parallel to each other 4 are connected with metal breaker board 6 respectively, inner wire 5 is in the centre of two metal ground plates 4, and wherein the appropriate location of the upper and lower that links to each other with inner wire 5 of metal ground plate 4 has two coupling loops 7, to realize the input and output of microwave signal.

In the technique scheme, can on the metal breaker board 6 of no coupling loop, open three holes that are complementary with metal ground plate 4 and inner wire 5 shape of cross sections respectively, make that the metal breaker board 6 of this no coupling loop can be along the moving axially of inner wire 5, thereby the length of resonant cavity that realizes stripline resonator 2 is adjustable continuously.

Microwave thin film material electromagnetic parameter testing device, as shown in Figure 1, comprise microwave signal source 1, stripline resonator 2 and scalar network analyzer 3, the microwave signal input stripline resonator 2 that microwave signal source 1 is produced, the resonance frequency input scalar network analyzer 3 that stripline resonator 2 is produced, it is characterized in that, described stripline resonator 2 comprises metal ground plate 4, inner wire 5, four parts such as short circuit metal plate 6 and coupling loop 7, as Fig. 2, shown in 3, the two ends of two metal ground plates that are parallel to each other 4 are connected with metal breaker board 6 respectively, inner wire 5 is in the centre of two metal ground plates 4, wherein the appropriate location of the upper and lower that links to each other with inner wire 5 of metal ground plate 4 has two coupling loops 7, to realize the input and output of microwave signal.

In the technique scheme, can on the metal breaker board 6 of no coupling loop, open three holes that are complementary with metal ground plate 4 and inner wire 5 shape of cross sections respectively, make that the metal breaker board 6 of this no coupling loop can be along the moving axially of inner wire 5, thereby the length of resonant cavity that realizes stripline resonator 2 is adjustable continuously.

The formation of the utility model device and test job principle thereof are:

The structural principle of stripline resonator:

In order to carry out the wideband test of microwave thin film material electromagnetic parameter, for used stripline resonator, the frequency range that should work as required and the frequency of required test are counted, the length of appropriate design resonator.The structural representation of stripline resonator as shown in Figure 3.L is the length of cavity among the figure.

The mode of operation of the stripline resonator TEM ripple that is as the criterion, the relation of resonance frequency and cavity size is seen formula (1).

$f_0=\frac{\mathrm{cn}}{2L\sqrt{{\mathrm{\ϵ}}_r{\mathrm{\μ}}_r}}---\left(1\right)$

F wherein ₀Be the cavity resonance frequency of resonator, c is the light velocity, and n is that mode of resonance is at the axial half-wave long number of cavity, ε _rBe the relative dielectric constant of institute's filled media in the stripline resonator, μ _rRelative permeability for institute's filled media.

Can draw from formula (1), the relative dielectric constant and the relative permeability of cavity resonant frequency and cavity length and institute's filled media are closely related.When medium one timing of being filled, designed cavity length needs the operating frequency range design according to resonator.Also resonator can be made length and make continuously adjustable cavity, when cavity length changed continuously, the resonator resonance frequency changed continuously, can finish the sweep check of tested film sample electromagnetic parameter.The variation of resonator length can realize by the change of short board position.

At first, design the cavity length of stripline resonator by formula (1) according to the frequency range of required test.

The principle of stripline resonator perturbation method test microwave thin film material electromagnetic parameter

The calculating of sample electromagnetic parameter can be adopted following two kinds of methods.

Method 1:

Tested film sample is put in the bottom of resonator, as shown in Figure 4.Wherein (8) are tested film samples, and a, b are respectively the distances of two end face distance resonators of sample short board.Before putting into sample, should measure the resonance frequency f of cavity earlier ₀With Q-unloaded Q ₀

After cavity loads tested film sample, record the resonance frequency f of load sample rear chamber _0mAnd quality factor q _0mAccording to the microwave cavity perturbation theory, can obtain

$\frac{f_0-f_{0m}}{f_0}={\mathrm{\Δ\ϵ}}_r\·C_1+{\mathrm{\Δ\μ}}_r\·C_2---\left(2\right)$

Wherein:

$C_1=\frac{b-a-\frac{\mathrm{<figure-callout\; id="2"\; label="L"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">L</figure-callout>}}{2\mathrm{n\&pi;}}[\sin \left(\frac{2\mathrm{n\&pi;b}}{L}\right)-\sin \left(\frac{2\mathrm{n\&pi;a}}{L}\right)]}{2L}---\left(3\right)$

${\mathrm{<figure-callout\; id="2"\; label="C"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">C</figure-callout>}}_2=\frac{b-a+\frac{\mathrm{<figure-callout\; id="2"\; label="L"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">L</figure-callout>}}{2\mathrm{n\&pi;}}[\sin \left(\frac{2\mathrm{n\&pi;b}}{L}\right)-\sin \left(\frac{2\mathrm{n\&pi;a}}{L}\right)]}{2L}---\left(4\right)$

Δε _r＝ε _rm-ε _r (5)

Δμ _r＝μ _rm-μ _r (6)

f _0mBe the resonance frequency after the resonator load sample, ε _RmBe the real part of the relative complex dielectric permittivity of tested film sample, μ _RmIt is the real part of the relative complex permeability of tested film sample.

If sample is put in the strongest and the position that magnetic field is the most weak of electric field, then the change amount of resonance frequency and quality factor is only relevant with the material electrical quantity.Can obtain

${\mathrm{\&epsiv;}}_{\mathrm{rm}}={\mathrm{\&epsiv;}}_r+\frac{f_0-f_{0m}}{f_0{C}_1}---\left(7\right)$

${\tan \mathrm{\&delta;}}_{\mathrm{\&epsiv;}}=\frac{1}{{2\mathrm{\&epsiv;}}_{\mathrm{rm}}{C}_1}\&CenterDot;(\frac{1}{Q_0}-\frac{1}{Q_{0m}})---\left(8\right)$

Wherein, tan δ _εLoss angle tangent for tested film sample electrical quantity.

If sample is put in the strongest and position that electric field is the most weak, magnetic field, then the change amount of resonance frequency and quality factor is only relevant with the material magnetic parameter.Can obtain

${\mathrm{\&mu;}}_{\mathrm{rm}}={\mathrm{\&mu;}}_r+\frac{f_0-f_{0m}}{f_0{C}_2}---\left(9\right)$

${\tan \mathrm{\&delta;}}_{\mathrm{\&mu;}}=\frac{1}{{2\mathrm{\&mu;}}_{\mathrm{rm}}{C}_1}\&CenterDot;(\frac{1}{Q_0}-\frac{1}{Q_{0m}})---\left(10\right)$

Wherein, tan δ _εLoss angle tangent for tested film sample magnetic parameter.

It is the most weak and magnetic field is the strongest and position that electric field is the most weak respectively sample to be positioned over the strongest and magnetic field of electric field, by the resonance frequency of resonator before and after the load sample and the measurement of Q-unloaded, can calculate the electromagnetic parameter of microwave thin film material according to formula (2)～(10).

Method 2:

Also can be by changing the position of tested film sample in resonator, after for example sample being moved, the distance of two end face distance short boards of sample is respectively c, d.

After cavity loads tested film sample, record the resonance frequency f of load sample rear chamber _0m1And quality factor q _0mlAccording to the microwave cavity perturbation theory, can obtain

$\frac{f_0-f_{0m1}}{f_0}={\mathrm{\&Delta;\&epsiv;}}_r\&CenterDot;{\mathrm{<figure-callout\; id="3"\; label="C"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">C</figure-callout>}}_3+{\mathrm{\&Delta;\&mu;}}_r\&CenterDot;C_4---\left(11\right)$

Wherein:

${\mathrm{<figure-callout\; id="3"\; label="C"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">C</figure-callout>}}_3=\frac{d-c-\frac{\mathrm{<figure-callout\; id="2"\; label="L"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">L</figure-callout>}}{2\mathrm{n\&pi;}}[\sin \left(\frac{2\mathrm{n\&pi;d}}{L}\right)-\sin \left(\frac{2\mathrm{n\&pi;c}}{L}\right)]}{2L}---\left(12\right)$

$C_4=\frac{d-c+\frac{\mathrm{<figure-callout\; id="2"\; label="L"\; filenames="Y20052003639300081.png"\; state="\{\{state\}\}">L</figure-callout>}}{2\mathrm{n\&pi;}}[\sin \left(\frac{2\mathrm{n\&pi;d}}{L}\right)-\sin \left(\frac{2\mathrm{n\&pi;c}}{L}\right)]}{2L}---\left(13\right)$

Simultaneous solution (2) formula and (11) formula can be obtained Δ ε simultaneously _rWith Δ μ _rValue, thereby obtain ε _RmAnd μ _RmValue.

Need to prove that the utility model is fit to the wideband test of each frequency range microwave thin film material electromagnetic parameter, promptly the utility model can carry out the wideband test of electromagnetic parameter at different frequency range to various microwave thin film materials.

The beneficial effects of the utility model are:

Propose a kind of stripline resonator of suitable wideband work, utilize the resonance frequency of load sample front and back resonator and the variation of Q-unloaded, can finish the wideband test of microwave thin film material electromagnetic parameter.This stripline resonator has that operating frequency is wide, volume is little, easy to use, advantage such as test error is little.On the basis of the stripline resonator that the utility model proposed, propose a kind of microwave thin film material electromagnetic parameter testing device, can in each microwave frequency band scope, test the microwave thin film material electromagnetic parameter.

Description of drawings

Fig. 1 is a microwave thin film material electromagnetic parameter testing device structural representation described in the utility model, and wherein 1 is microwave signal source, the 2nd, and stripline resonator, the 3rd, scalar network analyzer.

Fig. 2 is a kind of stripline resonator described in the utility model longitudinal cross-section schematic diagram, and wherein 4 is metal ground plates, the 5th, and inner wire, the 6th, short circuit metal plate, the 7th, coupling loop.

Fig. 3 is a kind of stripline resonator transverse sectional view described in the utility model, and wherein 4 is metal ground plates, the 5th, and inner wire.

Fig. 4 is that cavity length described in the utility model is the stripline resonator structural representation of L.

Fig. 5 is the stripline resonator schematic diagram behind the loading film sample, wherein, the 8th, sample.

Fig. 6 is the stripline resonator schematic diagram behind the film sample shift position.

Embodiment

The mode of operation of the stripline resonator TEM that is as the criterion _00nMould, resonator length are 250mm, and filled media is an air.As the mode of operation TEM that is as the criterion ₀₀₁The time, resonance frequency is 0.6GHz, the pattern TEM that is as the criterion ₀₀₁₀The time, resonance frequency is 6.0GHz.Frequency range is 0.6～6.0GHz.

Identical in the other parts of the utility model execution mode stripline resonator and the utility model content, do not repeat them here.

Identical in the other parts of the utility model execution mode testing apparatus and the utility model content, do not repeat them here.

Claims (6)

1, a kind of stripline resonator, comprise metal ground plate (4), inner wire (5), short circuit metal plate (6) and coupling loop four parts such as (7), it is characterized in that, the two ends of described two metal ground plates that are parallel to each other (4) are connected with metal breaker board (6) respectively, inner wire (5) is in the centre of two metal ground plates (4), wherein the appropriate location of the upper and lower that links to each other with inner wire (5) of a metal ground plate (4) has two coupling loops (7), to realize the input and output of microwave signal.

2, a kind of stripline resonator according to claim 1, it is characterized in that, can open three holes that are complementary with metal ground plate (4) and inner wire (5) shape of cross section respectively on the metal breaker board (6) of described no coupling loop, make that the metal breaker board (6) of this no coupling loop can be along the moving axially of inner wire (5), thereby the length of resonant cavity that realizes stripline resonator (2) is adjustable continuously.

3, a kind of stripline resonator according to claim 1 is characterized in that, the mode of operation of the described stripline resonator TEM that is as the criterion _00nMould, resonator length are 250mm, and filled media is an air; As the mode of operation TEM that is as the criterion ₀₀₁The time, resonance frequency is 0.6GHz, the pattern TEM that is as the criterion ₀₀₁₀The time, resonance frequency is 6.0GHz.Frequency range is 0.6～6.0GHz.

4, microwave thin film material electromagnetic parameter testing device, comprise microwave signal source (1), stripline resonator (2) and scalar network analyzer (3), the microwave signal input stripline resonator (2) that microwave signal source (1) is produced, the resonance frequency input scalar network analyzer (3) that stripline resonator (2) is produced, it is characterized in that described stripline resonator (2) is a stripline resonator according to claim 1.

5, microwave thin film material electromagnetic parameter testing device according to claim 4 is characterized in that, described stripline resonator (2) is a stripline resonator according to claim 2.

6, microwave thin film material electromagnetic parameter testing device according to claim 4 is characterized in that, described stripline resonator (2) is a stripline resonator according to claim 3.

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