CN2795900Y

CN2795900Y - Self control liquid crystal light valve group photo etching shutter mechanism

Info

Publication number: CN2795900Y
Application number: CN 200520028103
Authority: CN
Inventors: 陈赟
Original assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Current assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date: 2005-01-05
Filing date: 2005-01-05
Publication date: 2006-07-12
Anticipated expiration: 2015-01-05

Abstract

The utility model relates to a light etching shutter mechanism of a self-control liquid crystal light valve group. The utility model relates to a light etching shutter mechanism which belongs to the optical precision etching technical field. The utility model can solve the technical problem that the utility model can provide the light etching shutter mechanism of the self-control liquid crystal light valve group. The utility model has the solving technical scheme that the utility model comprises a lamp box, a supporting plate, a liquid crystal light valve group, an exposure lens, a microcomputer and a code disc waiting for etching, wherein the lamp box, the supporting plate, the exposure lens and the code disc waiting for etching are installed from top to bottom in sequence on the direction of the light transmission of the lamp box; the liquid crystal light valve group is arranged on the supporting plate in a fixed-connection way, so that the liquid crystal light valve group is arranged at the center of the light path; a working surface is vertical to a light shaft of the exposure lens, and the code disc waiting for etching is arranged on a focusing surface of the exposure lens; the microcomputer is connected with the liquid crystal light valve group according to a control circuit; the pattern of the code disc waiting for etching is compiled into the controlled pulse voltage signal; then, the utility model can make use of the microcomputer to control the pulse voltage of each unit on the liquid crystal light valve group by the control program, so that the utility model is in the light transmission state or the non-light transmission state; the image is formed on the code disc waiting for etching by the exposing lens so as to complete the light etching operation. The shutter has the advantages of simple structure and convenient operation.

Description

A kind of shutter of self-control liquid crystal light valve group for photo etching mechanism

Technical field

The utility model belongs to a kind of shutter of self-control liquid crystal light valve group for photo etching mechanism that relates in the optical precision delineation technical field.

Technical background

Code-disc is the core parts of photoelectric angular displacement fine measuring instrument and grating measurement testing apparatus, and the candy strip on the code-disc is to realize that by the mode that optical precision is delineated the quality of photoetching often depends on the version of the shutter that exposes.The version of photoetching shutter is a lot of both at home and abroad, and external shutter structure is all very complicated.

The prior art the most approaching with the utility model, be " the coding perforation belt photoetching shutter " of Changchun Institute of Optics, Fine Mechanics and Physics, CAS's development, as shown in Figure 1: comprise lamp box 1, roller 2, guide card wheel 3, coding perforated tape 4, quilling wheel 5, exposure camera lens 6, quilling wheel support 7, drive link 8, cam 9, quilling wheel handle 10, connecting rod 11, ratchet 12, ratchet 13, wait to carve code-disc 14.

The arrangement of the coding perforation on the coding perforated tape 4 is to punch on the coding perforated tape according to the code-disc pattern that designs in advance, and the arrangement in hole reflects the code-disc pattern of waiting to carve on the code-disc 14.Coding perforated tape 4 is placed between roller 2 and the guide card wheel 3, two ends stick on respectively on the quilling wheel 5, driving cam 9 by drive link 8 during photoetching rotates, connecting rod 11 is moved up and down, thereby the ratchet on the drivening rod 12 is stirred ratchet 13, make guide card wheel 3 turn over a tooth, quilling wheel 5 is under the effect of quilling wheel handle 10, drive coding perforated tape 4 and turn over a tooth, pulse flashing light in this moment lamp box 1 sends high light by triggering, by the coding perforation on the coding perforated tape 4, is imaged on the surface of waiting to carve code-disc 14 through exposure camera lens 6 and exposes, just obtain required code-disc pattern, finish the optics of code-disc and scribe.The subject matter that this shutter exists is: easily block the coding perforated tape in rotation process, cause the damage of coding perforated tape, scribe failure thereby cause, simultaneously, time-consuming easy again malfunction code is debug cumbersome when making the coding perforated tape, if debug incorrect, will produce light leak or optical crosstalk, cause the code-disc pattern to distort, influence the code-disc quality.

Summary of the invention

In order to overcome the defective that above-mentioned prior art exists, the purpose of this utility model is to improve the quality of scribing to code-disc, guarantees homogeneity, improve parameters such as resolution, adapt to the requirement of high precision, miniaturization, strict the smooth and easy errorless of shutter that expose, a kind of novel tripper of ad hoc meter.

The technical problems to be solved in the utility model is: a kind of shutter of self-control liquid crystal light valve group for photo etching mechanism is provided.The technical scheme of technical solution problem is as shown in Figure 2: comprise lamp box 15, liquid crystal light valve group 16, supporting plate 17, exposure camera lens 18, microcomputer 19, wait to carve code-disc 20.On the direction of propagation of the light of lamp box 15, settle lamp box 15, supporting plate 17, exposure camera lens 18 from top to bottom successively, wait to carve code-disc 20, on supporting plate 17, place liquid crystal light valve group 16, make liquid crystal light valve group 16 place the center of light path, workplace is perpendicular to the optical axis of exposure camera lens 18, wait to carve on the focal plane that code-disc 20 places exposure camera lens 18, be connected by control circuit block diagram shown in Figure 3 between liquid crystal light valve group 16 and the microcomputer 19.Control circuit block diagram shown in Figure 3 comprises microcomputer 19, latch 21, liquid crystal light valve group driver module 22, liquid crystal light valve group 16; The output terminal of microcomputer 19 is connected with the input end of latch 21, and the output terminal of latch 21 is connected with the input end of liquid crystal light valve pack module 22, and the output terminal of liquid crystal light valve group driver module 22 is connected with the input end of liquid crystal light valve group 16.The control program instruction that microcomputer 19 sends is input to latch 21, be latched in the latch 21, latch 21 flows to liquid crystal light valve group 16 to the drive signal of each the liquid crystal light valve correspondence in the liquid crystal light valve group 16 through liquid crystal light valve group driver module 22 under enable signal, thereby shows by pre-provisioning request; Wait that with what design in advance carving the code-disc pattern is compiled into the controlled pulse voltage signal, utilize the pulse voltage of microcomputer 19 by each unit on the control program flow process control liquid crystal light valve group 16 shown in Figure 4, make its printing opacity or light tight, be imaged on and wait to carve on the code-disc 20 through exposure camera lens 18, finish scribing of code-disc.By control circuit shown in Figure 5, microcomputer 19 by program circuit shown in Figure 4 is: electrification reset is just at first carried out in start, whether the K1 that pushes button afterwards control display image, if pressed and just carried out the output pattern data, if K1 does not press and just is in waiting status, after button K1 presses, the control information of bright dark duration of liquid crystal light valve group, being locked into three latchs among N1, N2, the N3, produce control bright field and details in a play not acted out on stage, but told through dialogues cycle clock signal CTL afterwards, clock signal CTL just gets back to the state whether button K1 presses after producing once more.

The principle of work explanation: liquid crystal light valve group 16 has optical activity, Liquid Crystal Molecules Alignment has twisted phenomena, normal printing opacity or light tight, but when extra electric field surpasses threshold voltage, the ordered state of liquid crystal molecule changes, orientation is consistent with direction of an electric field to make that the light that passes through liquid crystal layer is modulated, thereby under the control of pulse voltage, incident light is seen through or do not see through the liquid crystal light valve group, thereby liquid crystal light valve group 16 can play fast exposure gate effect, so waiting of will designing in advance carved the code-disc pattern, is compiled into the pulse voltage signal of awarding control, utilize the pulse voltage of microcomputer by each unit on the certain procedure control liquid crystal light valve group 16, make its printing opacity or light tight, waiting to carve on the code-disc through the exposure lens imaging, finishing scribing of code-disc, the code-disc pattern that is designed in advance.

Good effect of the present utility model: simple in structure, be convenient to adjust, operate, under control of microcomputer, expose accurately, be difficult for malfunction code, guarantee photoetching quality.

Description of drawings

Fig. 1 is the structural representation of prior art, Fig. 2 is a structural representation of the present utility model, and Fig. 3 is a control circuit block diagram in the utility model, and Fig. 4 is the control program process flow diagram that adopts in the utility model, Fig. 5 is the control circuit schematic diagram in the utility model, and Figure of abstract also adopts Fig. 2.

Embodiment

The utility model is implemented by structural representation shown in Figure 2, light source among Fig. 2 in the lamp box 15 adopts elongated PS230x type high pressure xenon lamp, trigger voltage 1200V, frequency 30 times/second, liquid crystal light valve group 16 adopts Guangdong Dongguan City wound to show the 1X20 type liquid crystal light valve group that Science and Technology Ltd. produces, and exposure camera lens 18 adopts enlargement ratio 0.5, focal distance f=38.2mm, microcomputer 19 adopts the 89C51 single-chip microcomputer, and supporting plate 17 adopts the thick aluminium sheet of 5mm, and the centre has the slot of placing the liquid crystal light valve group.Microcomputer control circuit is implemented with reference to Fig. 3 and control circuit shown in Figure 5, and control program adopts program circuit shown in Figure 4, and the latch 21 among Fig. 3 adopts the 74LS537 latch, and liquid crystal light valve group driver module 22 adopts 75451 modules.

Claims

1. a shutter of self-control liquid crystal light valve group for photo etching mechanism comprises lamp box, exposure camera lens, code-disc to be carved, and it is characterized in that also comprising liquid crystal light valve group (16), supporting plate (17), microcomputer (19); On the direction of propagation of the light of lamp box (15), settle lamp box (15), supporting plate (17), exposure camera lens (18), code-disc to be carved (20) from top to bottom successively, go up placement liquid crystal light valve group (16) at supporting plate (17), make liquid crystal light valve group (16) place the center of light path, workplace is perpendicular to the optical axis of exposure camera lens (18), code-disc to be carved (20) places on the focal plane of exposure camera lens (18), is connected by the control circuit block diagram between liquid crystal light valve group (16) and the microcomputer (19); Wait that with what design in advance carving the code-disc pattern is compiled into the controlled pulse voltage signal, utilize the pulse voltage of microcomputer (19) by each unit on the control program flow process control liquid crystal light valve group (16), make its printing opacity or light tight, be imaged on the code-disc to be carved (20) through exposure camera lens (18), finish the photolithographic fabrication of code-disc.

2. by the described a kind of shutter of self-control liquid crystal light valve group for photo etching of claim 1 mechanism, it is characterized in that the control circuit block diagram comprises microcomputer (19), latch (21), liquid crystal light valve group driver module (22), liquid crystal light valve group (16); The output terminal of microcomputer (19) is connected with the input end of latch (21), the output terminal of latch (21) is connected with the input end of liquid crystal light valve pack module (22), and the output terminal of liquid crystal light valve group driver module (22) is connected with the input end of liquid crystal light valve group (16); The control program instruction that microcomputer (19) sends is input to latch (21), be latched in the latch (21), latch (21) flows to liquid crystal light valve group (16) to the drive signal of each the liquid crystal light valve correspondence in the liquid crystal light valve group (16) through liquid crystal light valve group driver module (22) under enable signal, thereby shows by pre-provisioning request.