CN2740401Y - Coating element of lyophobic film, liquid injector and parts thereof - Google Patents

Coating element of lyophobic film, liquid injector and parts thereof Download PDF

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Publication number
CN2740401Y
CN2740401Y CN 200420050743 CN200420050743U CN2740401Y CN 2740401 Y CN2740401 Y CN 2740401Y CN 200420050743 CN200420050743 CN 200420050743 CN 200420050743 U CN200420050743 U CN 200420050743U CN 2740401 Y CN2740401 Y CN 2740401Y
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China
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film
parts
nozzle plate
ink
metal alkoxide
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Chinese (zh)
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宫岛弘夫
足助慎太郎
松尾泰秀
市川祐永
小池保则
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Seiko Epson Corp
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Seiko Epson Corp
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Abstract

The utility model relates to a lyophobic film coating component, a liquid jet device and a member which comprises the lyophobic film coating component. In order to beneficially realize lyophobic effects, the lyophobic film coating component comprises comprising a substrate, a bottom coating film formed on the surface of the substrate, and a metal alkoxide lyophobic film formed on the surface of the bottom coating film. The lyophobic film coating component can be used for a nozzle plate, a liquid jet head and a liquid jet device.

Description

Lyophobic film coating part, liquid injection apparatus and member thereof
Technical field
The utility model relates to the member of lyophobic film coating part, liquid injection apparatus, nozzle plate, jet head liquid and the liquid injection apparatus of jet head liquid.More specifically, the utility model relates to a kind of liquid injection apparatus, this liquid injection apparatus has the primary coat tunic and by the film formed lyophoby film of metal alkoxide molecule, this lyophoby film not only is formed on the surface of jet head liquid nozzle plate substrate of liquid injection apparatus, and be formed on the surface of other members (comprising the miscellaneous part except that metal parts, for example resin component and composite material component) of liquid injection apparatus.
Background technology
Have nozzle plate by its jet hole to the ink jetting head (embodiment of jet head liquid) that medium injection goes out drop, and a plurality of meticulous inkjet mouth is formed in the nozzle plate with tiny spacing, by described inkjet mouth ejection ink.If ink adheres to the surface of nozzle plate, then other inks that outwards spray in the back may be subjected to the viscosity and the capillary influence of the previous ink that adheres to, and have crooked injection track.This causes that ink can not be applied to the problem in precalculated position.Therefore, nozzle plate surface must be carried out the lyophoby processing, adheres to described surface to prevent ink.
The certain methods of mentioning below is known lyophoby treatment technology.One of method is as follows: nozzle plate is at room temperature immersed in the lyophoby silane coupler solution such as alkoxy silane, continue tens of seconds.During this period, the temperature of alkoxy silane is about room temperature.Then, with the speed pull-up from solution of the nozzle plate that immerses, so form the monomolecular film of alkoxysilane polymer in its surface with the approximate number mm/second.Then with nozzle plate dry a whole day at room temperature, so that the solvent evaporation, obtain hydrophobic monomolecular film on the nozzle plate metal surface by the dehydration polycondensation thus.
As another example of method, can quote the method for in patent documentation JP-A 5-116309, describing.This method comprises following operation, be about in the mixture of absorbent immersion fluoropolymer compounds and compound with fluorohydrocarbon group and silazane, alkoxy silane or halosilanes group, then with its pull-up from solution, and when being pressed against it on nozzle plate, move described absorbent, to be implemented in the coating on the nozzle plate.After having carried out such coating, under 150 ℃, nozzle plate carried out 1 hour heat drying and curing, to form the lyophoby film thus thereon.
As another example of method, can quote the method for in patent documentation JP-A 5-116324, describing.The method comprises following operation, promptly do not require that at nozzle plate the part of lyophoby performance utilizes the aluminium mask to shelter nozzle plate, and its immersion is mixed with in the solution of the material with a plurality of silicochloroform bases, continue about 30 minutes, to form the chlorosilane monomolecular film thus thereon.Then, with chloroform washing chlorosilane monomolecular film, wash with water then, so that its reaction forms the siloxanes monomolecular film.Described siloxanes monomolecular film was immersed in the solution of material about 1 hour, and on the surface of nozzle plate and the aluminium film on it, formed fluorine-containing monomolecular film thus with carbon fluorin radical and chlorosilane group.Then, the aluminium film is etched away, so on the surface of nozzle plate, formed the lyophoby monomolecular film.
The OH radical reaction of alkoxy silane molecular film and end-blocking nozzle plate surface, and be bonded on the nozzle plate.Therefore, if on nozzle plate surface, there is a large amount of OH bases, then with the corresponding alkoxy silane molecular linkage of existing OH base to nozzle plate.In other words, if there is a large amount of OH bases on it, then the molecular film that is obtained has higher density, and therefore the lyophoby performance of resulting nozzle plate is higher.Yet because the quantity of the OH base that exists on the metallic surface such as stainless steel is less than the surface of glass etc., the gained molecular film that the polymerization by silane coupled material on the metal surface forms only has very low density and relatively poor adhesiveness.Therefore, have a such problem, promptly the hydrophobic performance of molecular film is very low, and described film can not guarantee the hydrophobic performance that it is long-term.
Employed ink type of dye ink normally in background technology before this, and its solvent is a water.Therefore, the hydrophobic molecule film can repel such type of dye ink, and is just passable as long as it has a hydrophobic performance.Yet recently pigment ink has been used to deal with from the high-quality of digital still camera etc. and has printed.The resin type dispersant is used to the solvent of such pigment ink.Therefore, the printer unit molecular film that requires to be used for such pigment ink not only has hydrophobic performance but also have oleophobic performance (after this, being called " lyophoby performance " in the lump).But disclosed molecular film is not to have hydrophobic performance and oleophobic performance simultaneously in JP-A 5-116309 and JP-A 5-116324, therefore can run into the wetted problem of molecular film.
Before this, the miscellaneous part of the liquid injection apparatus except that nozzle plate does not carry out the processing of ink-resistant water-based energy.Not carrying out the ink-resistant water-based can handle and cause following point.Ink will adhere to a great extent such as lid and Ink scraper directly with parts that ink contacts on, and if these parts form by wettable material, the ink that has then adhered on it can retain thereon after this manner.When the ink that adheres to as it is now by residual following time, it may thicken, and causes the pollution and the operating trouble of parts.Especially for the Ink scraper parts, ink is conducted through or arrives various parts, for example from Ink scraper main body (rubber, elastomer, polyurethane) to the Ink scraper support bar (polyformaldehyde (POM)), arrive system body (acrylonitrile-butadiene-styrene copolymer (ABS)) and waste liquid absorber then, and ink is adsorbed by these parts.Therefore, exist ink may be difficult to be conducted through or arrive the possibility of these parts.In addition, the ink that thickens can adhere to the bottom that the balladeur train of head is installed on it, and ink may be transferred on the described head when the operation Ink scraper.
The utility model content
The utility model has been proposed in order to address the above problem.
Therefore, a purpose of the present utility model provides the parts with metal alkoxide lyophoby film, and wherein metal alkoxide lyophoby film is stronger with adhesiveness such as the surface of the substrate of nozzle plate, and the density of described lyophoby film is higher.
Another purpose of the present utility model provides the member that comprises above-mentioned parts.
Another purpose of the present utility model provides the nozzle plate that comprises described parts, and jet head liquid and the liquid injection apparatus that comprises described nozzle plate is provided.
By following description, other purposes of the present utility model and effect will become clear.
To achieve these goals, the utility model will be not only uses lyophobic film coating part (liquid-repellent film-coated member) to the nozzle plate (being formed by metal) of the jet head liquid in the liquid injection apparatus, and to any other component of a system (forming by resin material, composite) use lyophobic film coating part of liquid injection apparatus.In the utility model, lyophobic film coating part goes out by following operative configuration, promptly the surface that is formed on the primary coat tunic on the substrate surface is handled and form OH, form the lyophoby film of metal alkoxide molecular film then thereon, wherein preferred the use has the metal alkoxide of fluorine-containing long-chain polymer group as described metal alkoxide.Thus, the utility model can prevent the pollution of system unit and prevent the operating trouble of system unit, and the utility model has successfully solved the problems referred to above.
Concrete, by following parts, nozzle plate, jet head liquid and liquid injection apparatus is provided, realized above-mentioned purpose of the present utility model.
(1) a kind of parts, the lyophoby film that comprises substrate, is formed on the primary coat tunic on the substrate surface and is formed on the lip-deep metal alkoxide of described primary coat tunic.
(2) as the described parts of top project (1), wherein said lyophoby film is the molecular film of metal alkoxide polymer.
(3) as the described parts of top project (1), wherein said metal alkoxide has fluorine-containing long-chain polymer group.
(4) as the described parts of top project (1), wherein said metal alkoxide is the metal acid-salt with lyophoby group.
(5) as the described parts of top project (1), wherein said metal alkoxide is a silane coupler.
(6) as the described parts of top project (1), wherein said primary coat tunic comprises the plasma polymerization film of silicone compositions, or contains SiO 2, ZnO, NiO, SnO 2, Al 2O 3, ZrO 2, cupric oxide, silver oxide, chromium oxide or iron oxide.
(7) as top project (1) or (2) described parts, wherein, described lyophoby film is formed by following technology, and wherein said technology comprises:
By oxidation and hydrogenation, utilize the OH base that end-blocking is carried out on the described surface of described primary coat tunic; With
On the described surface of described primary coat tunic, make metal alkoxide and described OH radical reaction.
(8) as top project (1) or (2) described parts, wherein, described lyophoby film is formed by following technology, and wherein said technology comprises:
By by plasma or ultraviolet ray irradiation, utilize the OH base that end-blocking is carried out on the described surface of described primary coat tunic; With
On the described surface of described primary coat tunic, make metal alkoxide and described OH radical reaction.
(9) as the described parts of top project (1), wherein said substrate comprises metal material or composite.
(10) as the described parts of top project (1), wherein said substrate comprises resin material.
(11) as the described parts of top project (9), wherein said metal material is a stainless steel.
(12) as the described parts of top project (9), wherein said composite comprises silicon, sapphire or carbon.
(13) as the described parts of top project (10), wherein said resin material comprises at least a compound that is selected from the group of being made up of polytetrafluoroethylene (PTFE), polyethylene, polyimides, polyamidoimide, polyphenylene sulfide, polyether-ether-ketone, polyformaldehyde, polystyrene, acrylonitrile-butadiene-styrene copolymer, polybutylene terephthalate, polyphenylene oxide, potassium titanate fibre compound resin, polypropylene, ethylene-propylene-diene terpolymer, olefin elastomer, polyurethane elastomer, neoprene, polysiloxane rubber and butyl rubber.
(14) as the described parts of top project (1), wherein said substrate withstands at least 400 ℃ heating, and described lyophoby film is formed on the described primary coat tunic by following technology, and described technology comprises:
Heat described primary coat tunic; And
In heating, described primary coat tunic is immersed in the metal alkoxide solution.
(15) as the described parts of top project (14), the heating-up temperature of wherein said primary coat tunic falls between 200 ℃ to 400 ℃.
(16) a kind of nozzle plate that is used for jet head liquid, described nozzle plate comprise as any one the described parts in the top project (1) to (14).
(17) a kind of jet head liquid comprises as the described nozzle plate of top project (16).
(18) a kind of liquid injection apparatus, described liquid injection apparatus are equipped with as the described jet head liquid of top project (17).
(19) as any one described parts in top project (1) to (8), (10) and (13), wherein said parts are bonnet body, head cleaning Ink scraper, head cleaning Ink scraper support bar, gear, platen or balladeur train.
(20) a kind of liquid injection apparatus, described liquid injection apparatus are equipped with as the described parts of top project (19).
As described above, the utility model will be not only uses lyophobic film coating part to the nozzle plate (mainly being formed by metal) of the jet head liquid in the liquid injection apparatus, and any other component of a system (comprising by resin material or the formed member of composite) of liquid injection apparatus used lyophobic film coating part, described member for example be that bonnet body, head cleaning Ink scraper, head clean Ink scraper support bar, gear, platen or balladeur train.Carry out ink-resistant by the several portions to system unit and handle, the following problem (i) that has solved liquid injection apparatus is to (iii).
(i) if to the frequent part that contacts with ink, for example bonnet body, head cleaning Ink scraper, head cleaning Ink scraper support bar etc. carry out the ink-resistant processing, and then these parts self can prevent that ink from adhering on it.Concrete, situation is as follows:
Bonnet body is subjected to hardly from the lid vestige of nozzle plate (NP) face (adhesion of the ink that thickens).
The scraping performance last very long of head cleaning Ink scraper has reduced because the ink on it adheres to.
The head cleaning Ink scraper support bar ink that will give up easily guides to useless black absorber from Ink scraper.
Twine the operated gear fault minimizing that covering causes by ink.
Prevented by the caused transfer that thickens ink to head of the adhesion that thickens ink and balladeur train.
(ii) these parts self (in particular for driving the part of operation, for example gear) have prevented that ink from adhering on it, and have therefore prevented to adhere to the operating trouble that causes by the ink that thickens on it.
(iii) can carry out the ink-resistant processing to the component of a system, and no matter its material (mainly is an engineering plastic resin, such as polyphenylene sulfide (PPS), polyformaldehyde (POM), acrylonitrile-butadiene-styrene copolymer (ABS), elastomer, rubber) contact angle how, and the recovery of therefore useless ink is easy to.In other words, the ink that has adhered on bonnet body and the Ink scraper can easily be directed to useless black absorber.
In lyophobic film coating part of the present utility model, as mentioned above, on substrate surface, form the primary coat tunic.The material that is used for substrate does not have concrete restriction, can be any in metal material, composite and the resin material.More effectively, the surface roughness of substrate (Ra) is 65nm or littler, preferred 35nm or littler.
Depend on substrate, can suitably select and use the primary coat tunic.For example, it can comprise the plasma polymerization film of silicone compositions, perhaps contains SiO 2, ZnO, NiO, SnO 2, Al 2O 3, ZrO 2, cupric oxide, silver oxide, chromium oxide or iron oxide.The surperficial oxidized and hydrogenation of primary coat tunic specifically, utilizes plasma or ultraviolet ray that it is shone, and then it is exposed to air, and described thus surface can be by OH base end-blocking (that is, the surface is by hydroxylating).Then, when the lyophoby film of metal alkoxide was formed on the primary coat tunic of processing like this, the OH base key on the primary coat tunic was incorporated on the lyophoby film of metal alkoxide.As a result, can form lyophoby film with high density and high-adhesiveness.
Withstand at substrate under at least 400 ℃ the situation of heating, can in heating, the primary coat tunic be immersed metal alkoxide solution, on the primary coat tunic, to form metal alkoxide lyophoby film.In this embodiment, can on primary coat tunic surface, form the molecular film of metal alkoxide polymer with homogeneous thickness.
In the molecular film that so forms, be bonded on the primary coat tunic by oxygen atom from the metallic atom of metal alkoxide.If the metal alkoxide that uses in the utility model has fluorine-containing long-chain polymer group, then be bonded to from the fluorine-containing long-chain polymer group on the metallic atom of metal alkoxide and be present on surface one side of film.With reference to the state of molecular film this moment, three-dimensional bonding takes place metallic atom and complicated entanglement takes place fluorine-containing long-chain polymer group each other.Therefore, molecular film is in fine and close state, and ink is difficult to be penetrated into wherein.
Therefore, lyophobic film coating part of the present utility model has guaranteed excellent lyophobicity, and can be with its long-term maintenance.In addition, because its higher density, thereby the lyophoby film has excellent abrasive.
Use description to produce the technology content of lyophobic film coating part of the present utility model below.
According to such explained hereafter lyophobic film coating part of the present utility model, wherein, described technology comprises at least: (1) substrate cleans, (2) formation of primary coat tunic, (3) activation on primary coat tunic surface, (4) formation of lyophoby metal alkoxide film, (5) wetting and dry processing, and (6) annealing.
Step (1) " substrate cleaning " is used for the unnecessary material that is unfavorable for the formation of primary coat tunic is removed from substrate.The details of cleaning condition should reasonably be determined according to material, shape system (form) and the size of substrate.
The details of the film formation condition in the step (2) " formation of primary coat tunic " should reasonably be determined according to material, shape system and the size of substrate and according to the type and the thickness of primary coat tunic to be formed.
Step (3) " activation on primary coat tunic surface " is used for the surface with OH base introducing primary coat tunic, so that metal alkoxide lyophoby film thereon to be formed is bonded on it more reliably.Specifically, the example of this step comprises the surface that utilizes plasma or ultraviolet ray irradiation primary coat tunic.The details of treatment conditions should reasonably be determined according to the type of primary coat tunic and thickness and according to the type that is used for the metal alkoxide of lyophoby film to be formed.
The details of the film formation condition in the step (4) " formation of lyophoby metal alkoxide film " should reasonably be determined according to the type of metal alkoxide and according to the predetermined lyophobicity of film.
In step (5) " wetting and dry processing ", the substrate that has applied is placed in the atmosphere of high-temperature high humility, be used for the polymerization of metal alkoxide, so that its molecular film is provided.The details of treatment conditions should reasonably be determined according to the type of metal alkoxide and according to the predetermined lyophobicity of film.
In step (6) " annealing ", the substrate that has applied is handled under than the higher temperature of the temperature in the previous steps (5) " wetting and dry the processing ", and this is the polymerisation that is used to finish metal alkoxide.The details of treatment conditions should reasonably be determined according to the type of metal alkoxide and according to the predetermined lyophobicity of film.
Jet head liquid of the present utility model is characterised in that it comprises above-mentioned nozzle plate.
Liquid injection apparatus of the present utility model is characterised in that, it comprises above-mentioned jet head liquid, perhaps comprise bonnet body, head cleaning Ink scraper, head cleaning Ink scraper support bar, gear, platen and/or balladeur train, wherein each in them has lyophobic film coating part of the present utility model.
Description of drawings
Fig. 1 is the key-drawing according to the cross section of the ink-jet printer of an embodiment of the utility model.
Fig. 2 is the key-drawing according to the membrane formation device that is used for the plasma polymerization mould of an embodiment of the utility model.
Fig. 3 shows the schematic diagram according to the bonding in the molecular film of an embodiment of the utility model.
Fig. 4 shows the schematic diagram according to the state in the molecular film of an embodiment of the utility model.
Fig. 5 is the perspective view according to the ink-jet printer of an embodiment of the utility model.
The parts that are expressed as follows respectively of the label of Shi Yonging in the accompanying drawings.
10: ink jetting head
12: the ink guiding groove
14: the storage ink reservoir
16: the balancing gate pit
18: nozzle plate
20: inkjet mouth
22: plasma polymerization film
24: molecular film
24a: silicon atom
24b: fluorine-containing long-chain polymer group
26: ink
30: membrane formation device
32: the chamber
34: pump
36: electrode
38: high frequency electric source
40: platform
42: aspirating pipeline
44: feed-stock pipeline
46: argon gas source
50: material container
52: heater
54: fluent material
The specific embodiment
With reference to preferred embodiment of the present utility model, the member of lyophobic film coating part of the present utility model, liquid injection apparatus, nozzle plate, jet head liquid and the liquid injection apparatus of jet head liquid will be described in more detail below.
Below the formation method of described primary coat tunic and metal alkoxide film be an embodiment of the present utility model, wherein, the nozzle plate of the jet head liquid that forms as substrate and by stainless steel will be coated on the lyophoby film.But the utility model is not limited thereto.
Fig. 1 shows the cross-sectional view of ink jetting head 10, wherein uses ink droplet as will be by the drop by jet hole ejection, and this ink jetting head 10 is examples of jet head liquid (parts of liquid injection apparatus).Ink jetting head 10 has ink guiding groove 12, and ink is imported into head inside by this ink guiding groove 12.Ink guiding groove 12 be connected to the storage ink reservoir 14, and be designed to ink can be stored in the storage ink reservoir 14 in.Storage ink reservoir 14 is communicated with balancing gate pit 16, and in its ink-jet side, balancing gate pit 16 is connected to the inkjet mouth 20 that is formed in the nozzle plate 18.
Balancing gate pit 16 is designed to pressure and can be applied on the part of its wall.For example, be formed with oscillating plate, and exciting electrode 17 (piezoelectric element) is set on its outer surface, arrange such structure by a part that makes balancing gate pit's 16 walls.If voltage is applied on the exciting electrode 17, then oscillating plate is because the electrostatic force that synthesizes vibrates, and the internal pressure in the balancing gate pit changes thus.By internal pressure, ink is sprayed by inkjet mouth 20.
As nozzle plate 18, use by the stainless steel (nozzle plate that SUS316) forms in this embodiment.The inner surface of the surface of nozzle plate 18 and inkjet mouth 20 is coated with plasma polymerization film 22, and described plasma polymerization film 22 is that the plasma polymerization by silicone compositions forms.The surface-coated of plasma polymerization film 22 has the lyophoby molecular film 24 of metal alkoxide.
Metal alkoxide molecular film 24 can be any metal alkoxide molecular film, as long as its hydrophobic and oleophobic, but metal alkoxide molecular film 24 be preferably have fluorine-containing long-chain polymer group (after this being called " long-chain RF group ") metal alkoxide monomolecular film or have the monomolecular film of the metal acid-salt of lyophoby group.
Metal alkoxide comprises any metal alkoxide that contains among for example Ti, Li, Si, Na, K, Mg, Ca, St, Ba, Al, In, Ge, Bi, Fe, Cu, Y, Zr or the Ta, but uses the metal alkoxide that contains silicon, titanium, aluminium or zirconium usually.In this embodiment, use siliceous metal alkoxide.Preferably, it is the alkoxy silane with fluorine-containing long-chain RF group, or has the metal acid-salt of lyophoby group.
Long-chain RF group has and is at least 1000 molecular weight, and its example comprises for example perfluoroalkyl chain and PFPE chain.
An example with alkoxy silane of long-chain RF group is the silane coupler with long-chain RF group.
In the utility model, the suitable examples that is used for the silane coupler with long-chain RF group of lyophoby film comprises, for example, and 37 fluorine icosane base trimethoxy silanes (heptatriacontafluoroeicosyltrimethoxysilane).Its commercially produced product comprises for example Optool DSX (trade name is produced by Daikin Ind Ltd) and KY-130 (trade name is produced by Shin-Etsu Chemial Co., Ltd).
The surface free energy of fluorocarbon group (RF group) is less than the surface free energy of alkyl.Therefore, if metal alkoxide has the RF group, then the lyophoby performance of gained lyophoby film is improved, and in addition, also is improved such as other performances of chemical resistance, weatherability and wearability.
Because the backbone of RF group is longer, so the lyophoby performance of film can keep for a long time.
Metal acid-salt with lyophoby group comprises for example aluminate and titanate.
As shown in Figure 5, structure uses the ink-jet printer of the ink jetting head 10 of design like this.
The device that is used for forming the plasma polymerization film 22 of silicone compositions on the surface of the nozzle plate 18 that is used as substrate is described below.Fig. 2 shows the key-drawing of the device that is used to form plasma polymerization film 22.Membrane formation device 30 has chamber 32 and is connected to the pump 34 of chamber 32.Electrode 36 is placed on the roof of chamber 32, and high frequency electric source 38 is connected to electrode 36.High frequency electric source 38 produces for example electrical power of about 300W.Controllable Temperature platform 40 is placed on the diapire of chamber 32, with relative with electrode 36, wherein nozzle plate 18 is installed on the described Controllable Temperature platform 40.
Aspirating pipeline 42 and feed-stock pipeline 44 are connected to chamber 32.Argon gas source 46 is connected on the pipeline 42 of supplying gas via the flow control valve (not shown).Flow control valve control will be admitted to the flow velocity of the gas in the chamber 32.The containers 50 that holds the material that is used for plasma polymerization film 22 is connected to feed-stock pipeline 44.Heater 52 is placed in the below of containers 50, makes fluent material 54 to be vaporized.
The material that is used for plasma polymerization film 22 comprises silicone oil and alkoxy silane, more particularly, comprises dimethyl polysiloxane.Its commercially produced product comprises for example TSF451 (being produced by organosilicon company of GE Toshiba) and SH200 (being produced by Toray Dow-Corning Silicone).
The suction of the negative pressure by chamber 32, evaporation of materials is admitted in the chamber 32 via feed-stock pipeline 44.
The method that forms the plasma polymerization film 22 of silicone compositions on nozzle plate 18 is described below, and the method that is used on plasma polymerization film 22 surfaces, forming metal alkoxide molecular film 24.In this embodiment, siloxanes (dimethyl polysiloxane) is used as the material that is used for plasma polymerization film 22; And the alkoxy silane (37 fluorine icosane base trimethoxy silane) with fluorine-containing long-chain polymer group is used as metal alkoxide.
At first, siloxanes is aggregated to form plasma polymerization film 22 on nozzle plate 18 surfaces.By using membrane formation device 30 to form plasma polymerization film 22.At first, nozzle plate 18 is placed on the platform 40 of chamber 32.Then, by pump 34 chamber 32 is outgased to predeterminated level.In this step, the temperature of console 40 makes in the polymerization that promotes the material on the nozzle plate 18 under the controlled temperature.For example, platform 40 is remained on 25 ℃ or higher (40 ℃ in this embodiment).32 have been outgased to predeterminated level in the chamber, and argon gas is admitted to wherein, and the pressure in the chamber 32 is maintained at predetermined level, for example are maintained at about 7Pa.For example, the electrical power of about 100W is applied on it from the high frequency electric source 38 that is connected on the electrode 36, and in chamber 32, produces argon plasma thus.By heater 52 heating, the siloxanes in the containers 50 is vaporized, and as mentioned above, evaporation of materials is aspirated by the negative pressure in the chamber 32, and is admitted in the chamber 32 via feed-stock pipeline 44.Then, the weak bond in the vaporization siloxanes closes part and is cut off by argon plasma, and siloxanes generation polymerization is to form plasma polymerization film 22 on nozzle plate 18 surfaces.Nozzle plate 18 has inkjet mouth 20.Plasma polymerization film 22 also is formed on the inner surface of inkjet mouth 20.The surface of plasma polymerization film 22 is by the methyl blocking that constitutes siloxanes, and described methyl is bonded on the silicon atom of siloxanes.
Then the plasma polymerization film 22 that forms like this on nozzle plate 18 surfaces is annealed.For example, in blanket of nitrogen, between 150 ℃ and 450 ℃, (under) the temperature it is annealed in this embodiment, 200 ℃, promote the crosslinked of nozzle plate 18 lip-deep plasma polymerization films 22 thus.Therefore, the hardness of plasma polymerization film 22 raises, and its adhesiveness to nozzle plate also improves.
Then, etching is carried out with plasma in the surface of plasma polymerization film 22.Carry out etching, with the described surface of oxidation.In other words, the methyl on end-blocking plasma polymerization film 22 surfaces and the bonding between the silicon atom are cut off, and oxygen atom is bonded on the silicon atom.Be exposed to the plasma of argon, nitrogen or oxygen by surface, realize plasma treatment plasma polymerization film 22.Can replace being exposed to such plasma with the ultraviolet ray irradiation plasma polymerization film 22 of excimer laser or deuterium lamp.For example, when argon plasma was used to oxidation processes, the surface of plasma polymerization film 22 was exposed to argon plasma about 1 minute.After oxidation processes, carry out hydrogen atom is bonded to the subsequent treatment of oxygen atom.Specifically, plasma polymerization film 22 is exposed to air, hydrogen atom is bonded on the oxygen atom on end-blocking plasma polymerization film 22 surfaces (that is, oxygen atom is by hydroxylating) thus.After the reason, the quantity of plasma polymerization film 22 lip-deep OH groups will be far longer than the quantity of the lip-deep OH group of the nozzle plate 18 that does not have coating herein.
On the surface of the plasma polymerization film 22 that forms like this on the nozzle plate 18, form hydrophobic and oleophobic metal alkoxide molecular film 24.
The metal alkoxide of Shi Yonging is the alkoxy silane with long-chain RF group in this embodiment.For this alkoxy silane, employed at this is 37 above-mentioned fluorine icosane base trimethoxy silanes.
At first, alkoxy silane and solvent such as diluent (in this embodiment, HFE-7200, trade name is produced by Sumitomo 3M company) are mixed, with the solution of preparation alkoxy silane, described solution has for example 0.1% weight concentration.
Then, heat the nozzle plate 18 that is coated with plasma polymerization film 22 down, then described nozzle plate 18 is immersed in the above-mentioned solution at 200 ℃ to 400 ℃.In short time after metal is immersed in metal alkoxide solution, can easily on the metal surface, form the molecular film of metal alkoxide polymer.Therefore, can shorten the time that is used on metal, forming molecular film.In addition, can form thick and highdensity molecular film.Therefore, can obtain to have the molecular film of excellent wear-resisting property.
For example, when under nozzle plate 18 being lower than 200 ℃ temperature, immersing, it was immersed in solution 0.5 second, and after having carried out such immersion, with the speed of for example 2mm/sec, with nozzle plate 18 pull-up from solution.Fig. 3 and Fig. 4 are the schematic diagrames by the formed molecular film 24 of polymerization of plasma polymerization film 22 lip-deep alkoxy silanes, and wherein, described plasma polymerization film 22 is formed on the nozzle plate 18.Fig. 3 shows the schematic diagram of the bonding of molecular film 24 and plasma polymerization film 22.Fig. 4 shows the schematic diagram of the state of molecular film 24.When immersing nozzle plate 18 in the alkoxy silane solution, the molecular film 24 of alkoxysilane polymer is formed on the surface of the plasma polymerization film 22 on the nozzle plate 18.The silicon atom 24a of molecular film 24 is bonded on the plasma polymerization film 22 by oxygen atom, and is bonded to surface one side that fluorine-containing long-chain polymer group 24b (after this being called long-chain RF group) on the silicon atom 24a is in film.In the molecular film 24 that is in this state, three-dimensional bonding takes place in silicon atom 24a, and long-chain RF group 24b carries out complicated entanglement each other.Therefore, molecular film 24 is in fine and close state, and ink 26 is difficult to be penetrated in the molecular film 24.
To carrying out the test of surface abrasion resistance according to the formed molecular film 24 of said method.In the test of wearability,, carry out friction operation 1000 times with the surface of molecular film 24 and the absorbent friction of immersing ink.As a result, does not peel off on the surface of molecular film 24, even after carrying out repeated friction, the lip-deep ink of film was ostracised in 5 seconds, did not show the deterioration of the ink-resistant of membrane.
According to aforesaid embodiment, by the plasma polymerization of material, can be on nozzle plate 18 surfaces and form the plasma polymerization film 22 of silicone compositions on the inner surface of inkjet mouth 20.The quantity of the methyl on end-blocking plasma polymerization film 22 surfaces is far longer than the quantity of nozzle plate 18 lip-deep OH bases.Utilize the surface of ultraviolet ray irradiation plasma polymerization film 22, with cut off wherein silicon atom and the bonding between the methyl, and oxygen atom is bonded on the silicon atom.Then, plasma polymerization film 22 is exposed to air, so that its surface hydroxylation.Therefore, the quantity of plasma polymerization film 22 lip-deep OH bases is far longer than the quantity of nozzle plate 18 lip-deep OH bases.
Under the nozzle plate 18 that is coated with plasma polymerization film 22 was dipped in the alkoxy silane solution simultaneously its heated situation, lyophoby molecular film 24 was formed on the surface of plasma polymerization film 22.Therefore, when nozzle plate 18 during by pull-up from solution, formed lyophoby molecular film 24 repels described alkoxy silane solution.This means that this technology does not need the step of the nozzle plate 18 after drying is handled.By nozzle plate 18 being immersed in the alkoxy silane solution and on plasma polymerization film 22 surfaces institute so the molecular film 24 of formation have the thickness of homogeneous.
Because use the silane coupler such as alkoxy silane, so the formation of film does not need to carry out a lot of chemical reactions with long-chain RF group.Be dipped under the situation of alkoxy silane solution under the condition of heating at nozzle plate 18, can shorten alkoxy silane carries out polymerization on plasma polymerization film 22 surfaces time.This means that technology of the present utility model does not need as desired long polymerization time in background technology.
The concentration of alkoxy silane solution is by weight 0.1%.Utilize such concentration, described solution can form highdensity molecular film 24.On the contrary, the solution concentration of using in the background technology is compared with formed molecular film in this embodiment of the utility model by the molecular film that this solution forms for about 0.3% by weight, has less thickness and lower density.The method that is used to form the metal alkoxide film that this means present embodiment is calculated.
Because the OH radical reaction and the bonding on molecular film 24 and end-blocking plasma polymerization film 22 surfaces are so its density is very high.In contrast, in background technology, molecular film is formed on the nozzle plate, and the OH radix amount of end-blocking nozzle plate surface is little, so the density of film is lower.In addition, in by the formed molecular film 24 of polymerization among this embodiment, three-dimensional bonding takes place in silicon atom 24a, and long-chain RF group 24b carries out complicated entanglement each other.Therefore, film is thicker and have higher density.In contrast, in background technology, the silicon atom two dimension in the film is bonded on the nozzle plate.Therefore, film is thinner.In addition, because the density of film is low, so when film was dipped in the liquid, the tangled structure of the long-chain RF group in the film was untied.As a result, the lyophobicity of film can not keep for a long time.Yet in embodiment of the present utility model, because the intricately entanglement each other of the density height of film and long-chain RF group, therefore, even when film is dipped in the liquid, long-chain RF group can not untied yet.As a result, the component of ink 26 can not be penetrated in the molecular film 24, and film can be kept its lyophobicity for a long time.Fall thereon even work as pigment ink, film also can repel it immediately.Embodiment of the present utility model makes that being used to remove the special technology that adheres to ink in the scraping operation of being carried out when utilizing ink-jet printer to begin to print becomes non-essential.Therefore, the operation of can easily swiping.
Fig. 5 shows an example of the ink-jet printer that is equipped with ink jetting head 10.Carried out the endurance quality excellence of the nozzle plate 18 that lyophobicity handles according to the utility model, the nozzle plate 18 that is coated with the ink-resistant film with excellent organic solvent resistance is applicable to commercial Application.
Among the illustrated herein embodiment, the nozzle plate 18 that is formed by stainless steel is dipped in the solution of silane coupler.As additional embodiments, any other metal except that stainless steel, for example nickel or iron also can be used as the material of nozzle plate 18, and all metals can be applied to nozzle plate 18.In addition, the material of any other except that metal also can be as the material of nozzle plate 18.For example, can use glass or other silicon materials.
For those its substrates of ink-jet printer by aforesaid composite or resin material rather than by the formed parts of stainless steel, for example for its bonnet body, head cleaning Ink scraper, head cleaning Ink scraper support bar, gear, platen or balladeur train, not only can use the plasma polymerization film of above-mentioned silicone compositions, can also use and contain SiO 2, ZnO, NiO, SnO 2, Al 2O 3, ZrO 2, cupric oxide, silver oxide, chromium oxide or iron oxide the primary coat tunic.
Contain SiO 2, ZnO, NiO, SnO 2, Al 2O 3, ZrO 2, cupric oxide, silver oxide, chromium oxide or iron oxide the primary coat tunic can form any pattern in (for example, apply, spraying, dipping), vapour deposition or the sputter by liquid film, and plasma polymerization forms.
Among the illustrated in the above embodiment, piezoelectric element is used as the ink droplet jet element, is used for ejecting the ink that is stored in the balancing gate pit by inkjet mouth.But the utility model comprises that heating element heater is arranged in the balancing gate pit is inner and eject another embodiment of ink droplet thus.The jet head liquid of the above embodiments is ink jet print heads, and it is used for ink-jet recording apparatus.But the utility model is not limited thereto, and the utility model covers all types of jet head liquids and all types of liquid injection apparatus widely.The jet head liquid that the utility model covers comprises: such as the record head in the image recording structure of printer; Be used to produce the injecting coloring agent head of the colour filtering that LCD etc. uses; Be used to form the electrode material injector head of the electrode among display of organic electroluminescence, the FED (surface launching display) etc.; And the biomaterial injector head that is used to produce biochip.
Though described the utility model in detail with reference to its specific embodiment, can carry out variations and modifications therein and do not depart from its spirit and scope, be tangible to those skilled in the art.
The utility model is based on Japanese patent application No.2003-129263 (on May 7th, 2003 submitted), 2003-129261 (on May 7th, 2003 submitted) and No.2004-102925 (on March 31st, 2004 submitted), and its content is included in this by application.

Claims (16)

1. lyophobic film coating part, the lyophoby film that it is characterized in that comprising substrate, is formed on the primary coat tunic on the substrate surface and is formed on the lip-deep metal alkoxide of described primary coat tunic.
2. parts as claimed in claim 1, wherein said lyophoby film are the molecular films of metal alkoxide polymer.
3. parts as claimed in claim 1, wherein said metal alkoxide have fluorine-containing long-chain polymer group.
4. parts as claimed in claim 1, wherein said metal alkoxide are the metal acid-salts with lyophoby group.
5. parts as claimed in claim 1, wherein said metal alkoxide is a silane coupler.
6. parts as claimed in claim 1, wherein said primary coat tunic comprises the plasma polymerization film of silicone compositions, or contains SiO 2, ZnO, NiO, SnO 2, Al 2O 3, ZrO 2, cupric oxide, silver oxide, chromium oxide or iron oxide.
7. parts as claimed in claim 1, wherein said substrate comprises metal material or composite.
8. parts as claimed in claim 1, wherein said substrate comprises resin material.
9. parts as claimed in claim 7, wherein said metal material is a stainless steel.
10. parts as claimed in claim 7, wherein said composite comprises silicon, sapphire or carbon.
11. parts as claimed in claim 8, wherein said resin material comprise at least a compound that is selected from the group of being made up of polytetrafluoroethylene (PTFE), polyethylene, polyimides, polyamidoimide, polyphenylene sulfide, polyether-ether-ketone, polyformaldehyde, polystyrene, acrylonitrile-butadiene-styrene copolymer, polybutylene terephthalate, polyphenylene oxide, potassium titanate fibre compound resin, polypropylene, ethylene-propylene-diene terpolymer, olefin elastomer, polyurethane elastomer, neoprene, polysiloxane rubber and butyl rubber.
12. a nozzle plate that is used for jet head liquid is characterized in that described nozzle plate comprises as any one the described parts in the claim 1 to 11.
13. a jet head liquid is characterized in that comprising nozzle plate as claimed in claim 12.
14. a liquid injection apparatus is characterized in that described liquid injection apparatus is equipped with jet head liquid as claimed in claim 13.
15., it is characterized in that described parts are bonnet body, head cleaning Ink scraper, head cleaning Ink scraper support bar, gear, platen or balladeur train as any one described parts in the claim 1 to 6,8 and 11.
16. a liquid injection apparatus is characterized in that described liquid injection apparatus is equipped with parts as claimed in claim 15.
CN 200420050743 2003-05-07 2004-05-08 Coating element of lyophobic film, liquid injector and parts thereof Expired - Fee Related CN2740401Y (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP129263/2003 2003-05-07
JP129261/2003 2003-05-07
JP2003129261 2003-05-07
JP102925/2004 2004-03-31

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CN1304198C (en) * 2003-05-07 2007-03-14 精工爱普生株式会社 Lyophobic film coating part, liquid spraying device and member
US7914116B2 (en) 2007-11-05 2011-03-29 Seiko Epson Corporation Droplet discharge head, manufacturing method thereof, and droplet discharge apparatus
CN102179982A (en) * 2009-12-28 2011-09-14 施乐公司 Superoleophobic and superhydrophobic devices and method for preparing same
CN102785479A (en) * 2011-05-18 2012-11-21 施乐公司 Enhancing superoleophobicity and reducing adhesion through multi-scale roughness by ald/cvd technique in inkjet application
CN103861786A (en) * 2012-12-17 2014-06-18 通用汽车环球科技运作有限责任公司 Method of coating chrome plated part
CN106914393A (en) * 2015-12-28 2017-07-04 意法半导体股份有限公司 For the method for the surface treatment of semiconductor substrate
CN108501532A (en) * 2018-04-09 2018-09-07 京东方科技集团股份有限公司 The nozzle assembly and preparation method thereof of inkjet print head, printer, printer
CN108976913A (en) * 2017-05-30 2018-12-11 精工爱普生株式会社 Printing ink composition, ink group and recording method
CN109501459A (en) * 2017-09-14 2019-03-22 东芝泰格有限公司 Ink gun and ink-jet printer
CN109501460A (en) * 2017-09-14 2019-03-22 东芝泰格有限公司 Ink gun and ink-jet printer
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Publication number Priority date Publication date Assignee Title
CN1304198C (en) * 2003-05-07 2007-03-14 精工爱普生株式会社 Lyophobic film coating part, liquid spraying device and member
US7914116B2 (en) 2007-11-05 2011-03-29 Seiko Epson Corporation Droplet discharge head, manufacturing method thereof, and droplet discharge apparatus
CN102179982A (en) * 2009-12-28 2011-09-14 施乐公司 Superoleophobic and superhydrophobic devices and method for preparing same
CN102179982B (en) * 2009-12-28 2015-07-22 施乐公司 Superoleophobic and superhydrophobic devices and method for preparing same
CN102785479A (en) * 2011-05-18 2012-11-21 施乐公司 Enhancing superoleophobicity and reducing adhesion through multi-scale roughness by ald/cvd technique in inkjet application
CN102785479B (en) * 2011-05-18 2016-06-29 施乐公司 Superoleophobic property device and the ink jet printing head including it
CN103861786A (en) * 2012-12-17 2014-06-18 通用汽车环球科技运作有限责任公司 Method of coating chrome plated part
CN103861786B (en) * 2012-12-17 2017-05-24 通用汽车环球科技运作有限责任公司 Method of coating chrome plated part
CN106914393A (en) * 2015-12-28 2017-07-04 意法半导体股份有限公司 For the method for the surface treatment of semiconductor substrate
CN108976913A (en) * 2017-05-30 2018-12-11 精工爱普生株式会社 Printing ink composition, ink group and recording method
CN109501459A (en) * 2017-09-14 2019-03-22 东芝泰格有限公司 Ink gun and ink-jet printer
CN109501460A (en) * 2017-09-14 2019-03-22 东芝泰格有限公司 Ink gun and ink-jet printer
CN109501458A (en) * 2017-09-14 2019-03-22 东芝泰格有限公司 Ink gun and ink-jet printer
US10792922B2 (en) 2017-09-14 2020-10-06 Toshiba Tec Kabushiki Kaisha Ink jet head and ink jet printer
CN109501460B (en) * 2017-09-14 2021-04-20 东芝泰格有限公司 Ink jet head and ink jet printer
CN111033319A (en) * 2017-09-29 2020-04-17 日本电产株式会社 Lens, lens unit, and image pickup apparatus
CN108501532A (en) * 2018-04-09 2018-09-07 京东方科技集团股份有限公司 The nozzle assembly and preparation method thereof of inkjet print head, printer, printer

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