CN2739606Y

CN2739606Y - Weak phase distortion phase difference amplifying hologram device

Info

Publication number: CN2739606Y
Application number: CN 200420082615
Authority: CN
Inventors: 陈建文; 高鸿奕; 朱化凤; 李儒新; 徐至展
Original assignee: Shanghai Institute of Optics and Fine Mechanics of CAS
Current assignee: Shanghai Institute of Optics and Fine Mechanics of CAS; Shanghai Micro Electronics Equipment Co Ltd
Priority date: 2004-09-07
Filing date: 2004-09-07
Publication date: 2005-11-09
Anticipated expiration: 2014-09-07

Abstract

The utility model discloses a weak phase distortion phase difference amplifying hologram device, respectively comprising a laser source, a telescope, a hologram, a lens, a diaphragm, a lens and a hologram along the direction of optical axis. The laser source is a single mode operative He-Ne laser, and the telescope is an enlarged 100 times beam expanded system. The lens is a high quality aplanatic optical lens. The focal distance of a first lens is f1 and the focal distance of a second lens is f2, and nf1 =f2. The diaphragm is a space filtering device. After the hologram is expanded and illuminated by the laser source through the telescope, positive and negative diffracted waves of all levels are generated through the first lens. Diffracted focal points are generated on the diaphragm, and two apertures on the diaphragm respectively only permit diffracted waves of +M stage and-N stage to pass. The diffracted waves of +M stage-N and stage pass through the second lens and are interlapped on the focal plane of the second lends to generate a new hologram whose phase difference is amplified (M+N) times. The utility model has the advantage of being suited to the staff who are not in optics major.

Description

Weak position phase distortion phasic difference amplifying holographic device

Technical field:

The utility model is about a kind of weak position phase distortion phasic difference amplifying holographic device, the holographic phase difference amplifying technique that particularly relates to phase distortion corrugated, weak position, be mainly used in the face shape detection of the reconstruct of electron hologram, high-accuracy optical element, the amplification test in the weak distortion corrugated or the like, enlargement factor can reach more than 30 times.

Background technology:

The holographic phase difference amplifying technique has obtained to use widely in the electronic holographic reconfiguration technique, owing to adopted this technology, advantageously promotes the development of electronic holographic technology.Undoubtedly, this high-accuracy corrugated measuring technology has great application market potentiality in fields such as the industry of China, national defence, scientific researches.

The high power holographic phase difference amplifying device (application number 03115177.9) that the inventor Gao Hongyi of Shanghai Optics and Precision Mechanics institute, Chinese Academy of Sciences, Chen Jianwen, Xie Honglan, Xu Zhizhan etc. are provided, as Fig. 1 (a) (b) shown in, by two the part form.First is a hologram recording apparatus, and principle is shown in Fig. 1 (a); Second portion is the reconstruct multiplying arrangement, shown in Fig. 1 (b).

First's pen recorder mainly is made up of LASER Light Source 1, telescope 2, beam splitter 3, catoptron 5,6,7, testing sample 4 and recording medium 8; The second portion multiplying arrangement mainly is made up of helium-Ne laser light source 1, beam expanding telescope 2, semi-transparent semi-reflecting lens 9,12, total reflective mirror 10,11, negative rack 13, lens 14, diaphragm 15 and receiver 16.

LASER Light Source 1 output beam is divided into two by beam splitter 3 after telescope 2 expands bundle, and a branch of is reference wave Cb, and another bundle is object wave Wb.

The light beam Wb that reflects from beam splitter 3 reflexes on the dry plate 8 through sample 4 arrival catoptrons 5, and as object wave, the light beam Cb that sees through beam splitter 3 also reflexes on the holographic dry plate 8 through catoptron 6 and 7, as the reference ripple.Object wave and reference wave interfere the back to form hologram, and record is on the plate 8.When behind the good hologram of the device photographs shown in Fig. 1 (a), holographic dry plate 8 is handled, dried up through dark place, be placed on then on the negative rack 13 shown in Fig. 1 (b) and carry out optics phasic difference amplification and reconstruct.

Phasic difference is amplified by your interferometer of optics Mach-Chen Te and is undertaken, and principle is shown in Fig. 1 (b).Mach-Chen Te that interferometer contains helium-Ne laser light source 1, semi-transparent semi-reflecting lens 9,12, total reflective mirror 10,11, negative rack 13, lens 14, diaphragm 15 and receiver 16.

By output wavelength is helium-Ne laser light source 1 emitted light beams of 632.8nm, behind first semi-transparent semi-reflecting lens 9, is divided into A, B two-beam.Light beam A behind the total reflective mirror 11 and second semi-transparent semi-reflecting lens 12, the hologram of illumination on the dry plate 8; Light beam B behind total reflective mirror 10 and semi-transparent semi-reflecting lens 12, the hologram on the dry plate 8 that also throws light on.

A, the B bundle is respectively by the hologram diffraction, produce 0 grade separately, ± 1, ± M, ± N ... order diffraction, adjust completely reflecting mirror 10 respectively, 11, allow A bundle produce on the hologram 8+M level (or-N level) diffracted wave and B bundle produce on hologram 8-N order diffraction ripple, overlapping on the focal plane of lens 14, use the non-overlapped part of diaphragm 15 eliminations again, because from the object wave of reconstruct on the hologram 8 and its ripple of gripping altogether is that the position is mutually opposite, be that A restraints after generation+M order diffraction ripple and the generation of B bundle-N order diffraction ripple stack, to produce interference, phasic difference is amplified to original (M+N) doubly, repeats said process n time, and then phasic difference amplifies 2 ^M+NDoubly.

It is higher that the weak point of this high power holographic phase difference amplifying device is to adjust the technical requirement of interferometer.

Summary of the invention:

The technical problems to be solved in the utility model is to overcome above-mentioned the deficiencies in the prior art, and a kind of weak position phase distortion phasic difference amplifying holographic device is provided, and does not need accurate especially adjustment, and the staff who is particularly suitable for non-optical specialty uses.

Technical solution of the present utility model is as follows:

A kind of weak position phase distortion phasic difference amplifying holographic device, its formation is: it comprises LASER Light Source, telescope, hologram, lens, diaphragm, lens and hologram successively along optical axis direction, and said LASER Light Source is the He-Ne laser instrument of a single mode running; Said telescope is a beam-expanding system that amplifies 100 times; Said first and second lens are the aplanatic optical lenses of a kind of high-quality; The focal length of first lens is f ₁, the focal length of second lens is f ₂, and nf ₁=f ₂Said diaphragm is a kind of spatial filter arrangement; After hologram is expanded Shu Zhaoming by LASER Light Source by telescope, behind first lens, produce positive and negative diffracted waves at different levels, and on diaphragm, produce diffractive spots, two apertures on the diaphragm, only allow respectively+the M level and-N order diffraction ripple passes through, then should+the M level and-N order diffraction ripple is again through second lens and overlapped on the focal plane of second lens, produces new hologram, this hologram has amplified (M+N) times with the phasic difference of hologram.

The utility model is compared with technology formerly, and following advantage is arranged:

Do not need to adopt Mach-Chen Teer to carry out precision adjustment, be applicable to the staff of non-optical specialty.

Description of drawings

Fig. 1 a is the technical notes hologram apparatus formerly

Hologram and reconstruct hologram apparatus are amplified in Fig. 1 b technology phasic difference formerly

The weak position of Fig. 2 the utility model phase distortion phasic difference amplifying holographic device structural representation

Embodiment:

See also Fig. 2, Fig. 2 is the weak position of a utility model phase distortion phasic difference amplifying holographic device structural representation, as seen from the figure, the weak position of the utility model phase distortion phasic difference amplifying holographic device, it comprises LASER Light Source 1, telescope 2, hologram 8, first lens 17, diaphragm 18, second lens 19 and holographic Figure 20 successively along optical axis direction.

Said LASER Light Source 1 is the He-Ne laser instrument of a single mode running, and output power is 5mW; Said telescope 2 is beam-expanding systems that amplify 100 times, and its function is that with diameter be the light beam that the light beam of 1mm is expanded into diameter 100mm; Said hologram 8 is the holograms that obtain with conventional method, as the optical hologram of electron hologram or phasic difference amplification.Said

lens

17 and 19 are the aplanatic optical lenses of a kind of high-quality, and the focal length of lens 17 is f ₁, the focal length of lens 19 is f ₂, and nf ₁=f ₂, this is a gordian technique of the present utility model, hologram is amplified in the phasic difference that it can be taken under any angle.

Said diaphragm 18 is a kind of spatial filter arrangement, and its function is can be by diffracted wave to be amplified and conjugate wave thereof.After hologram 8 is expanded Shu Zhaoming by LASER Light Source 1 by telescope 2, can produce positive and negative diffracted waves at different levels through lens 17, and on diaphragm 18, produce diffractive spots.If on diaphragm 18, opened two apertures, only allow+the M level and-the N level passes through, so+the M level and-N order diffraction ripple is again through lens 19, so on the focal plane of lens 14, two train waves are overlapped, produce new hologram, this hologram has amplified (M+N) doubly with the phasic difference of hologram 8, and this process can be carried out repeatedly.

As mentioned above, the course of work of the present utility model is: at first will take, contain the hologram 8 of object phase information, and after handling in dark place, drying up, be placed on and carry out the phasic difference amplification on the negative rack shown in Figure 2, and take new holographic Figure 20.

Expand Shu Yihou through LASER Light Source 1 and telescope 2, beam lighting hologram 8, the diffracted wave of its generation produce in the focal plane of lens 17 0 grade, ± 1 ... ± M, ± N order diffraction focus, with the unwanted diffracted wave of diaphragm 18 eliminations, only allow needed+M level ,-the N level passes through, again after lens 19, on the focal plane of lens 19, + M level and-N level overlaid, produces new holographic Figure 20, just can be with new holographic Figure 20 reconstruct or continuation amplification again.

Adopt this technology can obtain the above measuring accuracy in λ/100, λ is used laser wavelength.

Claims

1, a kind of weak position phase distortion phasic difference amplifying holographic device, it is characterized in that it comprises LASER Light Source (1), telescope (2), hologram (8), first lens (17), diaphragm (18), second lens (19) and hologram (20) successively along optical axis direction, said LASER Light Source (1) is the He-Ne laser instrument of a single mode running; Said telescope (2) is a beam-expanding system that amplifies 100 times; The said lens first (17) and second lens (19) are the aplanatic optical lenses of a kind of high-quality; The focal length of lens (17) is f ₁, the focal length of lens (19) is f ₂, nf ₁=f ₂Said diaphragm (18) is a kind of spatial filter arrangement.