CN2735356Y - Double-probe 3D micromotion coupling test bench for optoelectronic device die - Google Patents

Double-probe 3D micromotion coupling test bench for optoelectronic device die Download PDF

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Publication number
CN2735356Y
CN2735356Y CN 200420077018 CN200420077018U CN2735356Y CN 2735356 Y CN2735356 Y CN 2735356Y CN 200420077018 CN200420077018 CN 200420077018 CN 200420077018 U CN200420077018 U CN 200420077018U CN 2735356 Y CN2735356 Y CN 2735356Y
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China
Prior art keywords
probe
tube core
fine motion
adjusting bracket
motion coupling
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Expired - Lifetime
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CN 200420077018
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Chinese (zh)
Inventor
丁国庆
刘兴瑶
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Wuhan Telecommunication Devices Co Ltd
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Wuhan Telecommunication Devices Co Ltd
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Priority to CN 200420077018 priority Critical patent/CN2735356Y/en
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Abstract

The utility model discloses a double-probe 3D micromotion coupling test bench for an optoelectronic device die. The double-probe 3D micromotion coupling testing bench relates to a test bench for an optoelectronic device die in the technical field of optical communication. The utility model comprises metal probes 1, a die bench 2, double-probe adjustable brackets 3, an optical fiber clamping slot 4, a 3D micromotion coupling bracket 5, a supporting board 6 and a seat 7. The position and connecting relation of the components are that the front and back of the seat 7 are vertically provided with the supporting board 6 and the 3D micromotion coupling frame 5. From left to right, a first probe adjustable bracket 3. 1, the die bench 2 and a second probe adjustable bracket 3. 2 are arranged on the upper part of the supporting board 6. A first metal probe 1. 1 is connected with the first probe adjustable bracket 3. 1. A second metal probe 1. 2 is connected with the second probe adjustable bracket 3. 2. The optical fiber clamping slot 4 is connected with the front end of the 3D micromotion coupling bracket 5. The utility model has the advantages of compact structure, elaborate adjustment, convenient use, high efficiency, less waste and low cost.

Description

The optoelectronic device tube core three-dimensional fine motion coupling of two probes test boards
Technical field
The utility model relates to a kind of optoelectronic device die testing platform in the optical communication technique field; Specifically, relate to the three-dimensional fine motion coupling of a kind of pair of probe test board.This test board can be advantageously used in the coupling and the photoelectric characteristic test of optical communication optoelectronic device tube core, just can pick out qualified tube core thereby need not dress up sub-piece.
Background technology
Owing to the continuous development of optical communication technique, begun to occur the report of 40Gb/s optical communication system and optoelectronic device, it has represented the highest level of current optical communication technique development.
Critical component is 40Gb/s optical transmission module and 40Gb/s Optical Receivers in the 40Gb/s optical communication equipment.And in 40Gb/s optical transmission module and Optical Receivers, its crucial optoelectronic device is hypervelocity laser instrument and 40Gb/s photo-detector.
Because the restriction of transfer rate and bandwidth, the die-size of hypervelocity laser instrument and 40Gb/s photo-detector is all very little, is difficult to tube core directly is coupled and the photoelectric characteristic test simultaneously, and this selects to tube core and has brought very big difficulty.For this reason, the way that laser instrument is taked is, by technologies such as bonding, gold wire bondings, laser tube core is contained in heat sink the going up of transition forms sub-piece (or claiming transition block), and the antithetical phrase piece is coupled and tests again; To the 40Gb/s photo-detector, also be by technologies such as bonding, gold wire bondings, it is contained on the sub-piece, the antithetical phrase piece is coupled and tests again.Because the discreteness of tube core is contained in the tube core on the sub-piece, generally has 10%--40% can not satisfy the photoelectric properties index request of regulation, this seed block also just is done for.This has not only wasted the time, and has wasted resource.What is more, and to 40Gb/s photo-detector, prime amplifier assembly, if the 40Gb/s photo-detector can not satisfy the regulation requirement, then whole assembly has all cancelled, and the waste of its resource is very big.Therefore,, pressure welding not bonding to tube core and directly be coupled and test is exactly a very significant thing, and it not only can save time bonding, that bond technology is used and manpower, and can save ample resources.
If before dressing up assembly, can test, evaluate and select the qualification of tube core, then dress up assembly after, the qualification of tube core is not just worried.
A tree name is looked into, and does not at present also have data to show to have a kind of the device to be coupled and the workbench of photoelectricity test to the optoelectronic device tube core.
Summary of the invention
The purpose of this utility model is to overcome the above-mentioned shortcoming and defect that prior art exists, and promptly earlier tube core is dressed up sub-piece and tube core is coupled and photoelectricity test again, thereby pick out qualified tube core; Provide a kind of optoelectronic device tube core with the three-dimensional fine motion coupling of two probes test board,, solve the problem of selecting of optoelectronic device tube core conveniently, economically, saved time, manpower and resource by in same device, being coupled simultaneously and photoelectricity test.
Design philosophy of the present utility model is, two probe electric tests and optically-coupled test are combined, and realizes tube core coupling and photoelectric characteristic test in a little operation, proving installation simultaneously.
Specifically, as shown in Figure 1, the utility model is made up of metal probe 1, tube core platform 2, two probe adjusting bracket 3, optical fiber clip slot 4, three-dimensional fine motion coupling shelf 5, support plate 6, base 7;
Each position component and annexation thereof are: the front and back on base 7 are vertically installed with support plate 6 and three-dimensional fine motion coupling shelf 5; On support plate 6 tops, be disposed with the first probe adjusting bracket 3.1, tube core platform 2 and the second probe adjusting bracket, 3.2, the first probe adjusting brackets 3.1 from left to right and be connected with first metal probe, 1.1, the second probe adjusting brackets 3.2 and be connected with second metal probe 1.2; The front end of three-dimensional fine motion coupling shelf 5 is connected with optical fiber clip slot 4.
In addition, as observation, debugging and monitoring means, must be equipped with a stereomicroscope.
Described pair of probe adjusting bracket 3 is a flat strip shaped slide block structure, comprises the first probe adjusting bracket 3.1 and the second probe adjusting bracket 3.2, and it is provided with left and right directions adjusting screw a, fore-and-aft direction adjusting screw b, above-below direction adjusting screw c and guide-track groove d; Three adjusting screw a, b, c all arrange in adjusting bracket middle part vertical direction, and guide-track groove is in the middle part of adjusting bracket horizontal direction; Regulate a and can make the metal probe that is fixed in the strip slide block structure do left and right directions (horizontal direction) motion, see Fig. 2.Front end at adjusting bracket 3 is equipped with a metal probe 1; By three adjusting screw, can make about the tip of two metal probes 1, about continuous precise and tiny fine motion and swing; Maximum moving range can reach 2.0 millimeters, and (the tube core out to out is 0.4 * 0.5 millimeter 2);
Described metal probe 1 curved shape, its tip can compress two electrodes that are positioned over platform leading edge tube core; It plays and compresses tube core and test the effect that is connected.
Described tube core platform 2 is a rectangular sheet metal.
Described support plate 6, middle part scrapes out the sheet metal of U type on it.
Described base 7 is a rectangular flat shape, plays support, connection and cushioning effect.
Described three-dimensional fine motion coupling shelf 5 is a kind of external member of combination, has 3 to regulate the spiral shell pole, can make the optical fiber that is held do independent moving on X, Y, Z direction, and maximum moving range can reach 3.0 millimeters; It plays grip optical fiber and the effect of being coupled and aligned.Adjust three-dimensional fine motion coupling shelf 5, can make most advanced and sophisticated bright dipping (or light inlet) district of accurately aiming at tube core of coupling with ordinary optic fibre, and can with tube core front end minimum spacing less than 5 microns.
Described stereomicroscope is used to observe and adjust the relative position between fiber optic tip and the tube core front end.
The utility model uses step to be:
1. open the stereomicroscope light source, regulate focus knob, make its observed zone of clear demonstration;
2. with meticulous tweezers tube core is put on the tube core platform 2, carefully it is fiddled with to the position of two metal probes, 1 middle, close tube core platform 2 forward edge, and make tube core active area side parallel with tube core platform 2 forward edge crest lines;
3. regulate two probes 1, make it accurately compress two strip electrodes of tube core;
4. coupled fiber is placed in the optical fiber clip slot 4 of three-dimensional fine motion coupling shelf 5, make optical fiber head stretch out 3-5mm;
5. regulate the pivot arm of three-dimensional fine motion coupling shelf 5, optical fiber head and tube core active area are tentatively aimed at;
6. connect probe line, light source and other measuring instrument;
The pivot arm of the three-dimensional fine motion coupling shelf 5 of 7. meticulous adjusting makes coupling efficiency the highest;
8. regulate measuring instrument, carry out the photoelectric characteristic test.
The utlity model has following advantage:
1. structure is tightly played, and regulates exquisite, easy to use;
2. improve work efficiency, reduced waste, saved cost.
Description of drawings
Fig. 1-the utility model structural drawing;
Fig. 2-probe carriage, probe structure figure;
Fig. 3-support plate, tube core platform structure figure.
Wherein:
The 1-metal probe comprises first metal probe 1.1 and second metal probe 1.2;
2-tube core platform;
The two probe adjusting brackets of 3-comprise the first probe adjusting bracket 3.1 and the second probe adjusting bracket 3.2,
A-left and right directions adjusting screw, b-fore-and-aft direction adjusting screw,
C-above-below direction adjusting screw, the d-guide-track groove;
4-optical fiber clip slot;
The three-dimensional fine motion coupling shelf of 5-;
The 6-support plate;
The 7-base.
Embodiment
Further specify below in conjunction with drawings and Examples.
* the utility model adopts manual operation.For easy to operate, overall dimension is controlled in 30cm * 25cm * 25cm scope.
* base 7 is a rectangular flat shape, and thick is 0.8-1.2cm.
* tube core platform 2 is installed in metal support plate 6 middle parts that scrape out the U type, and its material is a red copper, is of a size of 3 millimeters of 8 cm x, 2 cm x, and its surface is vertical mutually with leading flank, and smooth finish is 5- 7.
* the middle part U type groove of metal support plate 6 metal support plates (6), thick is 2.8-3.2 centimetre, its flat is about 9-11 centimetre.
* three-dimensional fine motion coupling shelf 5, can select for use Beijing to stand upright finished product that Chinese light company produces, model is ASN-13XYZ-1.
* fit dimension requirement between parts.
The utility model will make things convenient for, solve economically the problem of selecting of optoelectronic device tube core, not only will make metal probe 1 accurately compress the tube core electrode, and will make optical fiber front end and tube core bright dipping (or light inlet) district coaxial alignment, and stably keeps suitable distance.Therefore, cooperatively interacting between the precise and tiny control of part displacements and parts is crucial.Usually, optical communication is of a size of the mm of (0.3-0.4) mm * (0.4-0.5mm) * (0.1-0.2) with the optoelectronic device tube core, its metal electrode width is (30-60) μ m, and tube core bright dipping (or light inlet) district area is generally the μ m into (0.2-0.6) μ m * (2-8).Can the optoelectronic device tube core be coupled and carry out the photoelectric characteristic test efficiently, and key issue is the accurate control of micron-submicron order displacement.The present invention design and the probe of installing 1 can be at the three-dimensional independent displacements in (1-3) mm scope is made on optical fiber front end both sides precise and tinyly, and the needle point of probe 1 accurately are pressed on the electrode of tube core; And the optical fiber front end, can be at the three-dimensional independent displacement of tube core bright dipping (or light inlet) district work (2-5) mm scope.By regulating, tube core side, probe front and optical fiber front end can converge in the very little zone, and its positional precision reaches micron-sub-micrometer scale.Fit dimension requirement between parts that Here it is.

Claims (5)

1, a kind of optoelectronic device tube core three-dimensional fine motion coupling of two probes test boards, comprise three-dimensional fine motion coupling shelf (5), it is characterized in that: form by metal probe (1), tube core platform (2), two probe adjusting bracket (3), optical fiber clip slot (4), three-dimensional fine motion coupling shelf (5), support plate (6), base (7);
Each position component and annexation thereof are: the front and back on base (7) are vertically installed with support plate (6) and three-dimensional fine motion coupling shelf (5); On support plate (6) top, be disposed with the first probe adjusting bracket (3.1), tube core platform (2) and the second probe adjusting bracket (3.2) from left to right, the first probe adjusting bracket (3.1) is connected with first metal probe (1.1), and the second probe adjusting bracket (3.2) is connected with second metal probe (1.2); The front end of three-dimensional fine motion coupling shelf 5 is connected with optical fiber clip slot (4);
Described pair of probe adjusting bracket (3), it is a flat strip shaped slide block structure, comprise the first probe adjusting bracket (3.1) and the second probe adjusting bracket (3.2), it is provided with left and right directions adjusting screw (a), fore-and-aft direction adjusting screw (b), above-below direction adjusting screw (c) and guide-track groove (d); Three adjusting screw (a, b, c) are all arranged in the middle part vertical direction of adjusting bracket (3), and guide-track groove (d) is in the middle part of adjusting bracket horizontal direction;
The curved shape of described metal probe (1);
Described tube core platform (2) is a rectangular sheet metal;
Described support plate (6), for a kind of on it middle part scrape out the sheet metal of U type;
Described base (7) is a rectangular flat shape.
2, press the described a kind of optoelectronic device tube core of claim 1 with the three-dimensional fine motion coupling of two probes test boards, it is characterized in that: the thick 0.8-1.2cm of being of base (7).
3, by the described a kind of optoelectronic device tube core of the claim 1 three-dimensional fine motion coupling of two probes test boards, it is characterized in that: its material of tube core platform (2) is a red copper, be of a size of 3 millimeters of 8 cm x, 2 cm x, its surface is vertical mutually with leading flank, and smooth finish is 5- 7.
4, by the described a kind of optoelectronic device tube core of the claim 1 three-dimensional fine motion coupling of two probes test boards, it is characterized in that: the middle part U type groove of metal support plate (6), thick is 2.8-3.2 centimetre, its flat is about 9-11 centimetre.
5, by the described a kind of optoelectronic device tube core of claim 1 with the three-dimensional fine motion coupling of two probes test boards, it is characterized in that: three-dimensional fine motion coupling shelf (5) select for use Beijing to stand upright finished product that Chinese light company produces, model is ASN-13XYZ-1.
CN 200420077018 2004-10-19 2004-10-19 Double-probe 3D micromotion coupling test bench for optoelectronic device die Expired - Lifetime CN2735356Y (en)

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100422846C (en) * 2006-08-10 2008-10-01 张云 Monorail swing and tilt big range changeable camera
CN102507159A (en) * 2011-11-28 2012-06-20 成都优博创技术有限公司 Light emission end focal length measurement positioning device and measurement method thereof
CN103616585A (en) * 2013-11-26 2014-03-05 南通大学 Image locating control dual-probe automatic testing device based on midpoint tracking
CN102135419B (en) * 2010-01-23 2015-02-11 鸿富锦精密工业(深圳)有限公司 Micro-motion measuring device
CN105806597A (en) * 2016-03-17 2016-07-27 苏州德凡检测科技有限公司 Multi-angle multi-directional optical testing platform
CN106707068A (en) * 2017-02-07 2017-05-24 武汉灿光光电有限公司 Alternating current-direct current automatic testing device of PTTO
CN108645759A (en) * 2018-05-07 2018-10-12 大连海事大学 A kind of metallic particles fixing device and method for electromagnetic detection
CN110376406A (en) * 2019-08-14 2019-10-25 大连藏龙光电子科技有限公司 A kind of miniature probe platform and its operating method
CN110530616A (en) * 2019-09-02 2019-12-03 武汉鑫联兴精密机电有限公司 A kind of optical platform accurately measuring correction mechanism with levelness
CN111123072A (en) * 2019-12-26 2020-05-08 武汉邮电科学研究院有限公司 Hybrid probe card applied to wafer-level online test of silicon-based optoelectronic chip

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100422846C (en) * 2006-08-10 2008-10-01 张云 Monorail swing and tilt big range changeable camera
CN102135419B (en) * 2010-01-23 2015-02-11 鸿富锦精密工业(深圳)有限公司 Micro-motion measuring device
CN102507159A (en) * 2011-11-28 2012-06-20 成都优博创技术有限公司 Light emission end focal length measurement positioning device and measurement method thereof
CN102507159B (en) * 2011-11-28 2015-05-20 成都优博创技术有限公司 Light emission end focal length measurement positioning device and measurement method thereof
CN103616585A (en) * 2013-11-26 2014-03-05 南通大学 Image locating control dual-probe automatic testing device based on midpoint tracking
CN103616585B (en) * 2013-11-26 2016-01-13 南通大学 Framing based on middle point tracking controls the sample test method of two probe automatic testing equipment
CN105806597A (en) * 2016-03-17 2016-07-27 苏州德凡检测科技有限公司 Multi-angle multi-directional optical testing platform
CN105806597B (en) * 2016-03-17 2017-12-26 苏州德凡检测科技有限公司 A kind of multi-faceted optic test platform of multi-angle
CN106707068A (en) * 2017-02-07 2017-05-24 武汉灿光光电有限公司 Alternating current-direct current automatic testing device of PTTO
CN106707068B (en) * 2017-02-07 2023-08-29 武汉灿光光电有限公司 PTTO AC/DC automatic testing device
CN108645759A (en) * 2018-05-07 2018-10-12 大连海事大学 A kind of metallic particles fixing device and method for electromagnetic detection
CN110376406A (en) * 2019-08-14 2019-10-25 大连藏龙光电子科技有限公司 A kind of miniature probe platform and its operating method
CN110530616A (en) * 2019-09-02 2019-12-03 武汉鑫联兴精密机电有限公司 A kind of optical platform accurately measuring correction mechanism with levelness
CN111123072A (en) * 2019-12-26 2020-05-08 武汉邮电科学研究院有限公司 Hybrid probe card applied to wafer-level online test of silicon-based optoelectronic chip

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GR01 Patent grant
C17 Cessation of patent right
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Expiration termination date: 20141019

Granted publication date: 20051019