CN2734775Y - Slide block reciprocating type target sputtering and heating transmission device - Google Patents
Slide block reciprocating type target sputtering and heating transmission device Download PDFInfo
- Publication number
- CN2734775Y CN2734775Y CN 200420118600 CN200420118600U CN2734775Y CN 2734775 Y CN2734775 Y CN 2734775Y CN 200420118600 CN200420118600 CN 200420118600 CN 200420118600 U CN200420118600 U CN 200420118600U CN 2734775 Y CN2734775 Y CN 2734775Y
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- slide block
- heating
- ceramic matrix
- case
- specimen holder
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Abstract
The slide block reciprocating type target sputtering and heating transmission device of the utility model consists of a case. A reciprocating mouth for a sample rack and a worm screw are arranged at the bottom of the case, and a slide block is connected with the worm screw; a support rod which enters in the case is connected with the upper end of the slide block while the sample rack is connected with the upper end of the support rod; a heating ceramic matrix is respectively arranged in the front side and the rear side of the case, and a square sputtering mouth is respectively arranged on the front and the back corresponding side of the case. The sample rack is of a rectangular structure with at least two base-plate fixing slots are evenly arranged on the rectangular sample rack. Snakelike heater strips are arranged on the heating ceramic matrix and a soaking quartz plate is arranged at the inner side of the heating ceramic matrix. The utility model has the advantages of simple structure and convenient use, and can efficiently satisfy the method of direct current sputtering to prepare a large area of superconductive film with high performance, high temperature and favorable uniformity and meet the requirements of mass production.
Description
Technical field
It is reciprocating type to target sputter heating transmission gear that the utility model relates to the slide block that uses when a kind of utilization prepares large area superconducting film to target sputter method, and that uses when particularly substrate reciprocating, magnetically controlled DC sputtering large area two-side high-temperature superconducting thin film is reciprocating type to target sputter heating transmission gear.
Background technology
At present, high-temperature superconducting thin film is the base mateiral in the superconducting electronics device.Adopt magnetically controlled DC sputtering to prepare high-temperature superconducting thin film,, require to provide even, stable temperature field because preparation technology, particularly temperature range are narrower.Prepare the large area two-side high-temperature superconducting thin film in the sputter mode, the most important thing is to guarantee the identity of two-side film membrane composition, structure, performance.With twice method preparation of single face, prepare heat treatment process of the many experience of face in early days, cause performance identity to be difficult to control, therefore preferably can be so that target sputter mode is once prepared double sided superconducting film.Sample hold period motion when sputter simultaneously not only helps the homogeneity of thin film composition, helps the temperature field that provides stable simultaneously, thus the homogeneity of guaranteed performance.At present can also single target, substrate spin mode carries out sputter, but fixes owing to substrate and well heater, can't guarantee once to prepare in enormous quantities.
Prepare the requirement of large area two-side high-temperature superconducting thin film to homogeneous temperature field, mass preparation at magnetron sputtering, the utility model patent the utility model has designed a kind of heating unit and running gear novel, that use when utilization prepares large area superconducting film to target sputter method.Well heater adopts the square chest structure, comprises two long parallel plates of two end faces and setting-in heater strip.Sample moves reciprocatingly along end guide rail or with the slide block drive in the wheel shaft mode in the heating casing by the adjustable speed motor control speed; Running gear adopts the specimen holder that installs the high temperature resistant stainless steel wheel additional, can place the multi-disc substrate as required, is easy to expansion, increases sample size.The utility model has guaranteed the uniform temperature of sputter procedure by the to-and-fro movement principle, and satisfies the needs of practical preparation in enormous quantities, has obtained good effect in actual the use.
Summary of the invention
The purpose of this utility model provides a kind of reciprocating type to target sputter heating transmission gear, it is simple in structure, easy to use, can satisfy the large area high temperature superconductive film that the d.c. sputtering method prepares high-performance, good uniformity efficiently, and satisfies the requirement of mass preparation.
For achieving the above object, the utility model is taked following design:
A kind of slide block is reciprocating type to target sputter heating transmission gear, it is characterized in that: it includes a casing, be provided with specimen holder in the bottom of casing and move back and forth mouth, bottom at casing is provided with worm screw, be connected with slide block on this worm screw, the upper end of this slide block is connected with and enters the intravital support bar of case, is connected with specimen holder in the upper end of this support bar, in the casing front-back, be provided with the heating ceramic matrix, before and after casing, be provided with square sputter mouth on the corresponding surface.
Described specimen holder is a rectangle structure, evenly has fixedly slotted eye of at least two substrates on rectangular specimen holder.
On the heating ceramic matrix, be provided with snakelike heater strip.
Be provided with the soaking quartz plate in heating ceramic matrix inboard.
For satisfying the long-range heating needs of reciprocating, the utility model adopts long box-shaped well heater, setting-in heater strip on two long heating ceramic parallel plate matrixes, and leave the square sputter mouth of sputtered samples.For guaranteeing the sample homogeneous heating, outside heater plate, be covered with the thin quartz plate of one deck.The motion specimen holder is a rectangle, adopts the bottom to install the high temperature resistant stainless steel wheel additional, moves reciprocatingly along guide rail, and power system adopts the step motor of adjustable speed, the reciprocating speed of may command.For guaranteeing the mass preparation, can open fixedly slotted eye of a plurality of sample substrate on the specimen holder as required, can disposablely carry out the sputter preparation of the two-sided large area superconducting film of multi-disc.
The utility model has the advantages that:
1, adopt the reciprocating heated substrate, heating casing uniform temperature is good, has guaranteed that uniform temperature distributes on the substrate, thereby guarantees the homogeneity of composition, performance;
2, to target with same processing condition, a sputter prepares the large area two-side superconducting thin film, has guaranteed the consistence of two-side film membrane performance;
3, at ceramic parallel plate matrix heater surfaces, design has the thin quartz plate of one deck, helps soaking;
4, in the position of the corresponding sputtering target material of well heater, leave square sputter mouth, when guaranteeing the sample to-and-fro movement, any some shift motion unanimities of sputtering zone on the large area substrates, the homogeneity of assurance sputter;
5, reciprocating actuator adopts the step motor of adjustable speed to drive the specimen holder to-and-fro movement, can one-time fix a plurality of substrates on the specimen holder, and sputter simultaneously prepares the large area two-side superconducting thin film, satisfies the requirement in enormous quantities of actual production;
When 6, specimen holder moves in the heating casing, along worm movement, direction unanimity when guaranteeing motion, thereby the homogeneity of assurance sputtered film.
Description of drawings
Fig. 1 is a body structure synoptic diagram of the present utility model
Fig. 2 is a casing sectional structure synoptic diagram of the present utility model
Fig. 3 is a thermal Ceramics parallel plate matrix cross-sectional schematic of the present utility model
Fig. 4 is the diagrammatic cross-section of specimen holder and sputtering target material relative position
Fig. 5 is for being provided with the structural representation of specimen holder on the worm screw
Embodiment
Referring to Fig. 1, shown in Figure 2:
A kind of slide block is reciprocating type to target sputter heating transmission gear, it includes a casing 1, be provided with specimen holder in the bottom of casing and move back and forth mouth 7, be provided with worm screw 8 in the bottom of casing, be connected with slide block 19 on this worm screw, the upper end of this slide block is connected with and enters the intravital support bar 18 of case, is connected with specimen holder 14 in the upper end of this support bar, in the casing front-back, be provided with heating ceramic matrix 2, before and after casing, be provided with square sputter mouth 6 on the corresponding surface.
Described specimen holder 14 is a rectangle structure, evenly has fixedly slotted eye 15 of at least two substrates on rectangular specimen holder.
On heating ceramic matrix 2, be provided with snakelike heater strip 10 (see figure 3)s.
Be provided with soaking quartz plate 3 in heating ceramic matrix 2 inboards.
In the heater compartment made from high temperature resistant stainless steel among Fig. 11, the both sides inwall of being close to the heating cavity length direction is fixed with well heater ceramic matrix 2, and heater strip is fixed on the ceramic matrix, and heater strip 10 is provided with around coiling burr road 9; For making sample when heating obtain the uniform heating field, two inboards of heating matrixes relatively are fixed with the thin quartzy soaking plate 3 of two rows; When carrying out magnetron sputtering plating, plasma body drops on the specimen holder on the fixed sputter substrate by sputter mouth 6.For guaranteeing large area two-side superconducting thin film substrate when moving back and forth, on-chip each accepted the stroke unanimity of sputter in the sputter mouth, thereby guarantees the homogeneity of thickness, and the shaped design of sputter mouth is a square.
This heater strip can adopt various heating members efficiently, as Ni-Cr alloy silk, platinum wire etc.
Fig. 4 has provided the sectional view of specimen holder and sputtering target material relative position.The large size hollow sputter cathode 13 that cylinder hollow sputtering target material 12 is housed is to be distributed in the two ends of well heater sputter mouth over against form.Specimen holder 14 to-and-fro movement on interior straight line worm screw of establishing.Have fixedly slotted eye 15 (or a plurality of) of two substrates on the specimen holder, to satisfy the mass needs that once prepare two (or a plurality of) large area two-side superconducting thin films.Specimen holder is connected on the screw rod puopulsion unit of adjustable speed step motor control by union lever 16, controls reciprocating direction and speed.
Fig. 5 is the structural representation of worm screw and specimen holder.Specimen holder bottom is evenly distributed with the support bar that refractory metal material is made, and the support bar that guarantees motion does not deform in the time of can at high temperature not carrying out magnetron sputtering, thus motion-affecting steadily and the homogeneity of sputter.
Claims (4)
1, a kind of slide block is reciprocating type to target sputter heating transmission gear, it is characterized in that: it includes a casing 1, be provided with specimen holder in the bottom of casing and move back and forth mouthful (7), be provided with worm screw (8) in the bottom of casing, on this worm screw (8), be connected with slide block (19), the upper end of this slide block is connected with and enters the intravital support bar of case (18), be connected with specimen holder (14) in the upper end of this support bar (18), in the casing front-back, be provided with heating ceramic matrix (2), before and after casing, be provided with square sputter mouth (6) on the corresponding surface.
2, slide block according to claim 1 is reciprocating type to target sputter heating transmission gear, it is characterized in that: described specimen holder (14) is a rectangle structure, evenly has fixedly slotted eye (15) of at least two substrates on rectangular specimen holder.
3, slide block according to claim 1 is reciprocating type to target sputter heating transmission gear, it is characterized in that: be provided with snakelike heater strip (10) on heating ceramic matrix (2).
4, slide block according to claim 1 is reciprocating type to target sputter heating transmission gear, it is characterized in that: be provided with soaking quartz plate (3) in heating ceramic matrix (2) inboard.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420118600 CN2734775Y (en) | 2004-10-14 | 2004-10-14 | Slide block reciprocating type target sputtering and heating transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420118600 CN2734775Y (en) | 2004-10-14 | 2004-10-14 | Slide block reciprocating type target sputtering and heating transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2734775Y true CN2734775Y (en) | 2005-10-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420118600 Expired - Lifetime CN2734775Y (en) | 2004-10-14 | 2004-10-14 | Slide block reciprocating type target sputtering and heating transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2734775Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101705473B (en) * | 2009-11-25 | 2011-04-13 | 南开大学 | Physical vapor deposition equipment for use in study on light trapping structure of silicon thin-film battery |
-
2004
- 2004-10-14 CN CN 200420118600 patent/CN2734775Y/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101705473B (en) * | 2009-11-25 | 2011-04-13 | 南开大学 | Physical vapor deposition equipment for use in study on light trapping structure of silicon thin-film battery |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20141014 Granted publication date: 20051019 |