CN2689168Y - Surface roughness measuring apparatus - Google Patents

Surface roughness measuring apparatus Download PDF

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Publication number
CN2689168Y
CN2689168Y CN 200320129256 CN200320129256U CN2689168Y CN 2689168 Y CN2689168 Y CN 2689168Y CN 200320129256 CN200320129256 CN 200320129256 CN 200320129256 U CN200320129256 U CN 200320129256U CN 2689168 Y CN2689168 Y CN 2689168Y
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CN
China
Prior art keywords
surface roughness
measuring apparatus
roughness measuring
light
batch
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200320129256
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Chinese (zh)
Inventor
石岩
雷彬
石敬谊
雷亮
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Individual
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Individual
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Priority to CN 200320129256 priority Critical patent/CN2689168Y/en
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Publication of CN2689168Y publication Critical patent/CN2689168Y/en
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Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a surface roughness measuring apparatus. A central processor of the surface roughness measuring apparatus is externally connected with a storage, a display, a controlling keyboard and an optical control circuit. An optical fiber sensor is connected with the optical control circuit and the central processor. The surface roughness measuring apparatus can store single or a batch of measure data which is associated with the measuring work piece through typing instructions by the controlling keyboard, and the surface roughness measuring apparatus can call the measure data out after the storage, or the surface roughness measuring apparatus is connected with a computer to print the batch of measure data as an evaluation basis or file. The surface roughness measuring apparatus has a simple structure and is easy to carry, the operation is convenient, and the surface roughness measuring apparatus can measure the single or batch of work piece on site. The surface roughness measuring apparatus can realize the digitization, simplification and scientific to measure the surface roughness, so the surface roughness measuring apparatus can ensure the real implementation of national standard.

Description

Surfagauge
Technical field
The utility model relates to a kind of surface finish measurement device.
Background technology
With " surfaceness " replacement " surface smoothness ", be the 1980s China formulate and the new standard that the mechanical component machining precision is weighed of promulgation.It is multiple that the measuring method of existing surfaceness includes relative method, pin is retouched method, light cross-section method, interferometric method and impression method etc., mainly is to use multiple instrument and gauging instruments such as model, electric profile apparatus, light-section microscope, interference microscope.Except that the model relative method, other various measuring methods all need to carry out measuring operation by the professional in measuring room, and this is unfavorable for on-the-spot the detection in real time and operation in the workpiece process very much.The fundamental purpose that " surface smoothness " replaced by " surfaceness " is exactly to cancel " the model relative method " of determining index with rank evaluation, to avoid determining dispute and the error in dipping that the workpiece processing precision is caused with eye-observation.But for many years, because of producing and check on-the-spot a kind of measurement mechanism and the detection means that can measure the concrete numerical value of processing work surfaceness intuitively, easily that lack, therefore can only continue to employ now in original model evaluation mode, the i.e. still check of surface smoothness.When disputable generation, measure the concrete numerical value of decision table surface roughness again by the specialty of metrological service.This just brings inconvenience to real work.
The utility model content
The purpose of this utility model just provides a kind of can production and the on-the-spot surfagauge that uses of check so that the metering of " surfaceness " oversimplify, scientific, quantize, the relevant criterion that country is formulated can really put into practice.
The utility model is achieved in that surfagauge is external memorizer, display, supervisory keyboard and a light-operated circuit on central processing unit, and Fibre Optical Sensor connects light-operated circuit and central processing unit.When the probe of Fibre Optical Sensor is mobile on measured workpiece, the voltage signal of Fibre Optical Sensor output can change along with the trickle concavo-convex variation of surface of the work, determine the surface state of workpiece thus, and with the voltage change signal of correspondence input central processing unit, and detection accounting procedure by pre-depositing, calculate one group of related datas such as " profile arithmetic average errors ", on display, show simultaneously.This i.e. the surfaceness of this measured workpiece.Key in instruction by supervisory keyboard, can store the relevant continuous data of batch measured workpiece, and can access data analysis concentrating afterwards, or and computer interconnection, the detection data of printout batch, as test and appraisal according to or file.
The utility model is simple in structure, be easy to carry, operate intuitive and convenient, can processing site to workpiece carry out single or batch the detection metering.Realized datumization, simplification and scientific that surfaceness detects, guaranteed that real the paying of national standard annotated enforcement.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is a surface structure synoptic diagram of the present utility model.
Embodiment
As shown in Figure 1, 2, this measuring instrument is external memorizer, display, supervisory keyboard and a light-operated circuit on central processing unit, and Fibre Optical Sensor connects light-operated circuit and central processing unit.Central processing unit can select for use 51 Series chip and peripheral circuit to connect to form, storer detects accounting procedure and detects data in order to storage, display and supervisory keyboard are man-machine dialogue interface, light-operated circuit can adopt existing conventional circuit mode to constitute, and the light intensity knob of a scalable Fibre Optical Sensor intensity of light source should be set routinely also in light-operated circuit, with under various external environment conditions, by regulating the intensity of light source, guarantee the reliable and stable work of Fibre Optical Sensor, guarantee the accurate of this instrument detecting data, can realize that thus the round-the-clock metering of this measuring instrument is used.Fibre Optical Sensor selects for use the typing commercially available prod to get final product.
Among Fig. 2, this gauge can be concentrated to make and be installed in the small and exquisite casing 1, and indicator gate 2 and supervisory keyboard 4 are arranged on the casing surface, and light intensity knob 3 is at casing surface inferior horn.The I/O interface and the light-operated circuit of the central processing unit of Fibre Optical Sensor 6 in optical cable 5 and casing 1 are connected, and provide illumination in the Fibre Optical Sensor by light-operated circuit, and the voltage signal input central processing unit that detects after the conversion carries out calculating correction values.

Claims (2)

1, a kind of surfagauge is characterized in that this device is external memorizer, display, supervisory keyboard and a light-operated circuit on central processing unit, and Fibre Optical Sensor connects light-operated circuit and central processing unit.
2, surfagauge according to claim 1 is characterized in that being provided with in the described light-operated circuit light intensity knob of adjustable light sources intensity.
CN 200320129256 2003-12-29 2003-12-29 Surface roughness measuring apparatus Expired - Fee Related CN2689168Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200320129256 CN2689168Y (en) 2003-12-29 2003-12-29 Surface roughness measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200320129256 CN2689168Y (en) 2003-12-29 2003-12-29 Surface roughness measuring apparatus

Publications (1)

Publication Number Publication Date
CN2689168Y true CN2689168Y (en) 2005-03-30

Family

ID=34662266

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200320129256 Expired - Fee Related CN2689168Y (en) 2003-12-29 2003-12-29 Surface roughness measuring apparatus

Country Status (1)

Country Link
CN (1) CN2689168Y (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103292747A (en) * 2013-05-20 2013-09-11 北京大学 Method and device for measuring surface roughness of side walls of FinFET (fin field-effect transistor) devices
CN104132629A (en) * 2014-08-12 2014-11-05 太仓思比科微电子技术有限公司 Visible infrared light smoothness detection device
WO2020102995A1 (en) * 2018-11-20 2020-05-28 深圳市大耳马科技有限公司 Adaptive adjustment method, device and system for optical fiber sensor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103292747A (en) * 2013-05-20 2013-09-11 北京大学 Method and device for measuring surface roughness of side walls of FinFET (fin field-effect transistor) devices
CN103292747B (en) * 2013-05-20 2016-03-02 北京大学 A kind of method and device measuring FinFET side wall surfaceness
CN104132629A (en) * 2014-08-12 2014-11-05 太仓思比科微电子技术有限公司 Visible infrared light smoothness detection device
WO2020102995A1 (en) * 2018-11-20 2020-05-28 深圳市大耳马科技有限公司 Adaptive adjustment method, device and system for optical fiber sensor
CN112996437A (en) * 2018-11-20 2021-06-18 深圳市大耳马科技有限公司 Self-adaptive adjustment and regulation method, device and system for optical fiber sensor

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C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20050330

Termination date: 20100129