CN2662251Y - Low measurement range acceleration sensor - Google Patents
Low measurement range acceleration sensor Download PDFInfo
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- CN2662251Y CN2662251Y CN 200320111843 CN200320111843U CN2662251Y CN 2662251 Y CN2662251 Y CN 2662251Y CN 200320111843 CN200320111843 CN 200320111843 CN 200320111843 U CN200320111843 U CN 200320111843U CN 2662251 Y CN2662251 Y CN 2662251Y
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Abstract
The utility model relates to a low range acceleration sensor, comprising an acceleration meter and a specific ASIC circuit; wherein, the range of acceleration measurement is less than 50g. The acceleration meter is developed with the MEMS technique and the micro-electronics technique; the specific ASIC circuit comprises a power supply circuit, an electric bridge amplifier circuit, a temperature compensation circuit, a filter circuit, a saturation control circuit and an input/output interface. The utility model has a compact integral structure, providing excellent consistency; meanwhile, the utility model is easy for batch-type production realization. Moreover, the utility model has the advantages of high precision, low temperature drift, invulnerability to interference, stable output signal as well as strong shock resistance and strong environment adaptability.
Description
Technical field
The utility model relates to a kind of acceleration transducer, particularly relates to a kind of lower range acceleration transducer with anti-HI high impact and rugged surroundings that uses accelerometer and special-purpose ASIC circuit chip to combine.
Background technology
Go up the high-precision accelerometer of making at present both at home and abroad, can be divided into condenser type, semiconductor pressure resistance type, inductance type and piezoelectric accelerometer according to the sensitive signal mode, cost an arm and a leg, bulky, except that military field, other industry is seldom made inquiries.Application along with the U.S., European Community's silicon micromachining technology, developed micro-mechanical accelerometer of new generation (micro-mechanicalaccelerometer MMA), its volume is little, price is low, in light weight, can form the mass production scale, widened the application of accelerometer.Existing accelerometer product mainly is to adopt machinery or silicon materials design.
The structure of existing accelerometer partly is made up of a mass and 4 brace summers that form with the bulk silicon technological corrosion, all contain 2 diffusion resistances on each beam in 4 brace summers, they are connected to each other, form a Wheatstone bridge, when accelerometer bears an acceleration, brace summer will move up and down, cause the resistance value of 4 resistance to increase, the resistance value of all the other 4 resistance reduces, form one and the proportional change in voltage output signal of supply voltage, thereby carry out the measurement of accekeration.
Traditional circuit connecting method is that 6 pin of accelerometer connect the 3V power supply, 10,11,12 pin ground connection, and 2 pin are signal output, other pin is unsettled.The above-mentioned method of attachment of accelerometer does not have the signal transformation amplifying circuit of design specialized, circuit is not carried out Filtering Processing, do not implement saturated control and temperature compensation measure yet, the linearity that causes accelerometer is generally only about 1%, temperature drift is big during work, operating temperature range is narrow, can not adapt to the work under the rugged surroundings.And the output pin of each accelerometer is directly to be connected with the treatment circuit plate with fly line, and Electro Magnetic Compatibility is poor, is disturbed the output signal instability easily.
Summary of the invention
The purpose of this utility model provides a kind of precision height, and temperature drift is little, the measurement acceleration range that environmental suitability is strong＜± the lower range acceleration transducer of 50g.
Lower range acceleration transducer of the present utility model is made up of accelerometer M1 and special-purpose ASIC circuit, and special-purpose ASIC circuit specifically is made of power circuit, electric bridge amplifying circuit, temperature-compensation circuit, filtering circuit, saturated control circuit and IO interface.
Power circuit: the anode of diode D1 connects external+15V direct supply, after electrochemical capacitor C1 and capacitor C 2 are in parallel, and the negative electrode of anode connection diode D1, negativing ending grounding; Resistance R 1 one ends connect the anode of electrochemical capacitor C1, and the other end links to each other the plus earth of stabilivolt W1 with the negative electrode of resistance R 3 with stabilivolt W1; The other end of resistance R 3 is connected to 3 pin of operational amplifier U1 (op27), and 2 pin of operational amplifier U1 connect resistance R 2, R4, the other end ground connection of resistance R 2, and the other end of resistance R 4 links to each other with 6 pin of operational amplifier U1; 6 pin of operational amplifier U1 link to each other with the anode of electrochemical capacitor C5, and output to 6 pin of accelerometer M1; The negativing ending grounding of electrochemical capacitor C5.
The electric bridge amplifying circuit: the negative electrode of diode D1 is connected respectively to 7 pin of operational amplifier U1, U2 (AD620) and 4 pin of U3 (LM124), and the negative electrode of diode D2 connects external-15V direct supply, and anode is connected to 4 pin of operational amplifier U1, U2; Behind the electrochemical capacitor C3 shunt capacitance C4, positive ending grounding, negative terminal links to each other with 4 pin of operational amplifier U2; Receive 2 pin of operational amplifier U2 after the 5 pin connection resistance R 6 of accelerometer M1, receive 3 pin of operational amplifier U2 after the 2 pin connection resistance R 5; Between 1,8 pin of operational amplifier U2, be connected with resistance R 7, the 11 pin ground connection of operational amplifier U3.
Temperature-compensation circuit: the negative electrode of stabilivolt W1 connects resistance R 9, and the other end of resistance R 9 links to each other with 3 pin of resistance R 10, operational amplifier U3 respectively, the other end ground connection of resistance R 10; After linking to each other, 1,2 pin of operational amplifier U3 are connected to 5 pin of operational amplifier U2.
Filtering circuit: 3 pin of capacitor C 6 one end concatenation operation amplifier U2, other end ground connection, resistance R 5 and the capacitor C 6 common filtering circuits of forming; Capacitor C 10 is in parallel with stabilivolt W2, the plus earth of stabilivolt W2, and negative electrode connects 6 pin that operational amplifier U2 is inserted in resistance R 8 backs, and the negative electrode of stabilivolt W2 connects IO interface; Be connected with between 4,5 pin of accelerometer M1 to be connected with between capacitor C 8,5,6 pin and be connected with capacitor C 9,1,4,10,11,12 pin ground connection between capacitor C 7,2,3 pin, other pin is unsettled.By the above circuit outer clutter of filtering band effectively.
Saturated control circuit: resistance R 8 and stabilivolt W2 form output protection circuit jointly, and the protection late-class circuit is not damaged, and can avoid late-class circuit to scurry around the damage of signal to sensor yet.
The accelerometer of this lower range acceleration transducer adopts up-to-date MEMS technology and microelectric technique achievement to develop, signal conditioning circuit is finished by special-purpose ASIC circuit, specifically is to be made of power circuit, high precision electric bridge amplifying circuit, temperature-compensation circuit, filtering circuit, saturated control circuit and IO interface.The compact overall structure of acceleration transducer, consistance and Electro Magnetic Compatibility are good, are not subject to disturb, and stable output signal is easy to realize mass production.
The utility model has adopted the digital compensation technology in signal conditioning circuit, make acceleration transducer to have little temperature drift in bigger temperature range, has only 90ppm/ ℃ in the total temperature scope.The utility model has also carried out the analog linearization processing to acceleration transducer, circuit has been carried out Filtering Processing and implemented the saturated control of output, further improved the precision of acceleration transducer, make its linearity≤0.5%, have the performance of anti-HI high impact and adapt to the ability of under rugged surroundings, working.
Description of drawings
Fig. 1 is the theory diagram of lower range acceleration transducer;
Fig. 2 is the circuit diagram of lower range acceleration transducer.
Embodiment
Lower range acceleration transducer of the present utility model is made up of accelerometer M1 and signal conditioning circuit, signal conditioning circuit is made up of special-purpose ASIC circuit, specifically is made of power circuit, electric bridge amplifying circuit, temperature-compensation circuit, filtering circuit, saturated control circuit and IO interface.
Wherein power circuit is by diode D1, capacitor C 1, C2, C5, resistance R 1, R2, R3, R4, stabilivolt W1 and operational amplifier U1 (op27) form, the anode of diode D1 connects external+15V direct supply, after electrochemical capacitor C1 and capacitor C 2 are in parallel, anode connects the negative electrode of diode D1, negativing ending grounding, resistance R 1 one ends connect the anode of electrochemical capacitor C1, and the other end links to each other with the negative electrode of resistance R 3 with stabilivolt W1, the plus earth of stabilivolt W1, the other end of resistance R 3 is connected to 3 pin of operational amplifier U1, and 2 pin of operational amplifier U1 connect resistance R 2, R4, the other end ground connection of resistance R 2, the other end of resistance R 4 links to each other with 6 pin of operational amplifier U1,6 pin of operational amplifier U1 link to each other with the anode of electrochemical capacitor C5, and output to 6 pin of accelerometer M1, the negativing ending grounding of electrochemical capacitor C5.
The electric bridge amplifying circuit is by operational amplifier U2 (AD620), U3 (LM124), diode D2, capacitor C 3, C4, resistance R 5, R6, R7 forms, the negative electrode of diode D1 is connected respectively to operational amplifier U1,7 pin of U2 and 4 pin of U3, the negative electrode of diode D2 connects external-15V direct supply, anode is connected to operational amplifier U1,4 pin of U2, behind the electrochemical capacitor C3 shunt capacitance C4, positive ending grounding, negative terminal links to each other with 4 pin of operational amplifier U2, receive 2 pin of operational amplifier U2 after the 5 pin connection resistance R 6 of accelerometer M1, receive 3 pin of operational amplifier U2 after the 2 pin connection resistance R 5, at 1 of operational amplifier U2, be connected with resistance R 7 between 8 pin, the 11 pin ground connection of operational amplifier U3.
Temperature-compensation circuit is made up of resistance R 9, R10, the negative electrode of stabilivolt W1 connects resistance R 9, the other end of resistance R 9 links to each other with 3 pin of resistance R 10, operational amplifier U3 respectively, and the other end ground connection of resistance R 10 is connected to 5 pin of operational amplifier U2 after 1,2 pin of operational amplifier U3 link to each other.
Filtering circuit is by capacitor C 6, C7, C8, C9, C10, resistance R 8, stabilivolt W2 forms, 3 pin of capacitor C 6 one end concatenation operation amplifier U2, other end ground connection, resistance R 5 and the capacitor C 6 common filtering circuits of forming, capacitor C 10 is in parallel with stabilivolt W2, the plus earth of stabilivolt W2, and negative electrode connects 6 pin that operational amplifier U2 is inserted in resistance R 8 backs, the negative electrode of stabilivolt W2 connects IO interface, 4 of accelerometer M1, be connected with capacitor C 8,5 between 5 pin, be connected with capacitor C 7,2 between 6 pin, be connected with capacitor C 9 between 3 pin, 1,4,10,11,12 pin ground connection, other pin is unsettled.By the above circuit outer clutter of filtering band effectively.
Saturated control circuit: resistance R 8 and stabilivolt W2 form output protection circuit jointly, and the protection late-class circuit is not damaged, and can avoid late-class circuit to scurry around the damage of signal to sensor yet.
Claims (1)
1, a kind of lower range acceleration transducer is made up of accelerometer M1 and special-purpose ASIC circuit, and special-purpose ASIC circuit specifically is made of power circuit, electric bridge amplifying circuit, temperature-compensation circuit, filtering circuit, saturated control circuit and IO interface,
Power circuit: the anode of diode D1 connects external+15V direct supply, after electrochemical capacitor C1 and capacitor C 2 are in parallel, anode connects the negative electrode of diode D1, negativing ending grounding, resistance R 1 one ends connect the anode of electrochemical capacitor C1, the other end links to each other with the negative electrode of resistance R 3 with stabilivolt W1, the plus earth of stabilivolt W1, the other end of resistance R 3 is connected to 3 pin of operational amplifier U1,2 pin of operational amplifier U1 connect resistance R 2, R4, the other end ground connection of resistance R 2, the other end of resistance R 4 links to each other with 6 pin of operational amplifier U1,6 pin of operational amplifier U1 link to each other with the anode of electrochemical capacitor C5, and output to 6 pin of accelerometer M1, the negativing ending grounding of electrochemical capacitor C5;
The electric bridge amplifying circuit: the negative electrode of diode D1 is connected respectively to operational amplifier U1,7 pin of U2 and 4 pin of U3, the negative electrode of diode D2 connects external-15V direct supply, anode is connected to operational amplifier U1,4 pin of U2, behind the electrochemical capacitor C3 shunt capacitance C4, positive ending grounding, negative terminal links to each other with 4 pin of operational amplifier U2, receive 2 pin of operational amplifier U2 after the 5 pin connection resistance R 6 of accelerometer M1, receive 3 pin of operational amplifier U2 after the 2 pin connection resistance R 5, at 1 of operational amplifier U2, be connected with resistance R 7 between 8 pin, the 11 pin ground connection of operational amplifier U3;
Temperature-compensation circuit: the negative electrode of stabilivolt W1 connects resistance R 9, the other end of resistance R 9 links to each other with 3 pin of resistance R 10, operational amplifier U3 respectively, after linking to each other, the other end ground connection of resistance R 10,1,2 pin of operational amplifier U3 is connected to 5 pin of operational amplifier U2;
Filtering circuit: 3 pin of capacitor C 6 one end concatenation operation amplifier U2, other end ground connection, resistance R 5 and the capacitor C 6 common filtering circuits of forming, capacitor C 10 is in parallel with stabilivolt W2, the plus earth of stabilivolt W2, negative electrode connects 6 pin that operational amplifier U2 is inserted in resistance R 8 backs, the negative electrode of stabilivolt W2 connects IO interface, be connected with capacitor C 8 between 4,5 pin of accelerometer M1,5, be connected with capacitor C 7 between 6 pin, 2, be connected with capacitor C 9,1,4,10,11,12 pin ground connection between 3 pin, other pin is unsettled;
Saturated control circuit: resistance R 8 and stabilivolt W2 form output protection circuit jointly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320111843 CN2662251Y (en) | 2003-12-31 | 2003-12-31 | Low measurement range acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200320111843 CN2662251Y (en) | 2003-12-31 | 2003-12-31 | Low measurement range acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2662251Y true CN2662251Y (en) | 2004-12-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200320111843 Expired - Lifetime CN2662251Y (en) | 2003-12-31 | 2003-12-31 | Low measurement range acceleration sensor |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458466C (en) * | 2005-07-05 | 2009-02-04 | 威海双丰物探设备股份有限公司 | MEMS acceleration earthquake sensor |
| CN101858930A (en) * | 2010-05-25 | 2010-10-13 | 浙江大学 | Temperature compensating device for micro-machined capacitive accelerometer |
| CN102135438A (en) * | 2011-01-13 | 2011-07-27 | 中国工程物理研究院电子工程研究所 | Temperature control device for micro sensor |
-
2003
- 2003-12-31 CN CN 200320111843 patent/CN2662251Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458466C (en) * | 2005-07-05 | 2009-02-04 | 威海双丰物探设备股份有限公司 | MEMS acceleration earthquake sensor |
| CN101858930A (en) * | 2010-05-25 | 2010-10-13 | 浙江大学 | Temperature compensating device for micro-machined capacitive accelerometer |
| CN101858930B (en) * | 2010-05-25 | 2013-04-03 | 浙江大学 | Temperature compensating device for micro-machined capacitive accelerometer |
| CN102135438A (en) * | 2011-01-13 | 2011-07-27 | 中国工程物理研究院电子工程研究所 | Temperature control device for micro sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CU03 | Correction of utility model patent gazette |
Correction item: Termination of patent right Correct: Maintenance of patent right False: Termination of patent right Number: 8 Page: 885 Volume: 24 |
|
| ERR | Gazette correction |
Free format text: CORRECT: CESSATION OF PATENT RIGHT; FROM: CESSATION OF PATENT RIGHT TO: MAINTENANCE OF PATENT RIGHT |
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| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20131231 Granted publication date: 20041208 |