CN2653436Y - Optic scanning outer diameter measuring system without scanning objective lens - Google Patents

Abstract

The utility model relates to a measuring system without scanning objective used in the optical scanning of outside diameter. The system comprises two or more than two optical scanning units without scanning objective; every unit is oppositely mounted or mounted at random angle, and every unit is consisted of a light source, a collimation lens, a scanning objective, a receiving objective lens and a photoelectric receiver, which are mutually connected; the photoelectric receiver is connected with the computer through the signal wire. The utility model is relatively easy in manufacture, realizing the computer data complementation for the system errors; and the utility model is great in working stability, good in reliability, convenient in installation, debugging and maintaining as well as low in cost.

Description

The optical scanning outside diameter measuring system of object scanning lens free

Technical field

The utility model relates to the geometric measurement equipment technical field, specifically is meant a kind of optical scanning outside diameter measuring system of object scanning lens free.

Background technology

Existing optical scanning outside diameter measuring system is made up of light source, collimating mirror, reflection tilting mirror, scanning objective, receiving objective and photoelectric device, its course of work is: the light that light source sends is behind the collimating mirror collimation, be incident upon and become deflection light on the deflecting mirror, be scanning survey light again behind scanning objective, the scanning ray measured object blocks the formation shade, receive and measurement shade width, can obtain object size.Prior art manufacture and design with practicality in have a following problem:

1. the scanning system precision depends primarily on the processing and the installation accuracy of high-precision scanning objective, and on the principle scheme, owing to existing the error that exists because of scanning objective design, manufacturing to be difficult to full remuneration, the range of dynamic measurement under the high precision prerequisite is limited.

2. difficulty is all compared in above-mentioned scanning objective design, manufacturing and assembling, so production efficiency is low, manufacturing cost is high, has limited the equipment promotion use.

3. when system used, because influence of temperature change scanning objective precision, system was to the environmental requirement height during actual the use, and in general production environment, system reliability is not high.

4. measurement range is limited by the scanning objective size, and range extension has big difficulty.

Summary of the invention

The purpose of this utility model is exactly in order to solve above-mentioned the deficiencies in the prior art part, a kind of optical scanning outside diameter measuring system of object scanning lens free is provided, this system's manufacture craft is simple, Installation and Debugging make things convenient for, expand measurement range easily, and the good ratio of performance to price makes it can more effectively extend to the detection control procedure of all kinds of wire production.

The optical scanning outside diameter measuring system of a kind of object scanning lens free described in the utility model, it is characterized in that, it is made of the light scanning unit of two or more object scanning lens frees, each unit is relatively or by arbitrarily angled installation, each unit is interconnected successively by light source, collimating mirror, scanning mirror, receiving objective, photelectric receiver to be formed, and photelectric receiver also is connected with computing machine by signal wire.

In order to realize the utility model better, can also increase between described scanning mirror and the receiving objective has plane mirror; Described light source is LASER Light Source or led light source; Described scanning mirror has one or more, and scanning mirror has one or more reflectings surface; Described receiving objective is reflective or refraction type or the two combination; Can install the protective device of optical filter or proofing dust and protecting glass or other transparent material making or the combination of said apparatus before the described photelectric receiver additional; Can install the protective device that proofing dust and protecting glass or other transparent material are made before or after the described scanning mirror additional.

The utility model uses two-way (multichannel) measurement scheme, can effectively eliminate the influence of the errors of principles on the theory and technology, avoid the difficulty that the processing of high precision linear sweep object lens, debugging and maintenance are brought in the prior art simultaneously, debugging is with easy to maintenance, can reach higher measuring accuracy (1um), manufacturing cost reduces relatively, is convenient to extend to general application scenario.

The utility model compared with prior art has following advantage and beneficial effect:

1. the utility model object scanning lens free uses a spherical aberration to obtain the collimation lens of well-corrected, does not have off-axis aberration, analyzing spot on axle and the outer consistance of axle better, be convenient to adjust, pupil location is required to reduce relatively, make relatively easily.

2. the utility model uses two scanning element unitized constructions, does not have uncertain systematic error on the principle, does not also have the influence of scanning objective residual aberration, carries out easily than perfect system error compensation, has realized the computer numerical compensation of systematic error.

3. the utility model is not owing to there is scanning objective, the sensing ring that influence is measured is reduced few, the actual good operating stability of using, reliability improves, measure only relevant with angular velocity, and do not have direct relation with measurement field place sweep trace speed, and the sight when with tradition scanning objective being arranged is different, and the latter requires the sweep trace constant airspeed.

4. the utility model uses two-way (multichannel) Scan Architecture, effectively eliminates systematic error, can reach high measuring accuracy in bigger dynamic range, is applicable to the online detection under the general environment of plant, and stability is better.

5. the utility model Installation and Debugging and maintenance are more simple and convenient, and when being used for the delicate metering purposes, can considering to use in opposite directions, structure (is α _i=0), can reach degree of precision, this moment, structure can be designed to the separate unit form, and Installation and Debugging are simple and fast very.

6. manufacturing cost of the present utility model effectively reduces.

Description of drawings

Fig. 1 is a component units structure principle chart of the present utility model;

Fig. 2 is the scanning outside diameter measuring systematic schematic diagram of being made up of two unit of the present utility model;

Fig. 3 be of the present utility model by two unit form but have only the scanning outside diameter measuring systematic schematic diagram of a scanning mirror;

Fig. 4 is the measuring principle figure of existing system.

Embodiment

Below in conjunction with drawings and Examples, the utility model is done detailed description further.

As shown in Figure 1, each unit is interconnected successively by light source 1, collimating mirror 2, scanning mirror 3, receiving objective 5, photelectric receiver 6 to be formed, and photelectric receiver 6 also is connected with computing machine by signal wire.Light source (LASER Light Source or led light source) 1 is incident upon on the scanning mirror 3 behind collimating mirror 2 collimations and forms scanning light beam, scanning light beam scanning testee 4 backs form the scanning shade, receive by thereafter photelectric receiver 6 through receiving objective 5, treatment circuit send computing machine after with signal Processing, constitutes elementary cell of the present utility model.Scanning mirror 3 has one or more reflectings surface; receiving objective 5 is reflective or refraction type or the two combination; install the protective device that optical filter or proofing dust and protecting glass or other transparent material make or the combination of said apparatus before the photelectric receiver 6 additional, install the protective device that proofing dust and protecting glass or other transparent material are made before or after the scanning mirror 3 additional.As shown in Figure 4, the utility model is compared with existing system, object scanning lens free 13.

As shown in Figure 2, the utility model system is made of two unit, i.e. two unit of light source 1, collimating mirror 2, scanning mirror 3, receiving objective 5, photelectric receiver 6 and light source 7, collimating mirror 8, scanning mirror 9, receiving objective 10, photelectric receiver 11 compositions.Relatively independent on each cellular construction, and press arbitrarily angled installation relatively or according to the triangulation principle, central processing unit (or computing machine) according to specific measurement equation, calculates compensation back output measurement result behind the measuring-signal that receives from two unit.

As shown in Figure 3, the utility model system has introduced two plane mirrors 12, and light source 1, collimating mirror 2, scanning mirror 3 have only a cover, and measuring principle is identical with Fig. 2 with effect, and structure is compact more, can reach the measuring accuracy of higher (micron order).The compensating element, that only increases the sheet glass of character by way of compensation in scanning mirror 3 back or have slight curvature is still a kind of feasible structure.

Measuring principle of the present utility model is: establishing the distance of light between two scanning mirror A, B reflection kernel point is l ₀, testee is 2 θ to light deflection center subtended angle, by concerning between each geometric sense among the figure that can release the testee diameter is:

d＝2kl ₀ (1)

In the formula,

k＝1/(cosα ₁/sinθ ₁+cosα ₂/sinθ ₂) (2)

Equation (1) is a measurement equation of the present utility model.θ ₁, θ ₂Can directly be drawn by counting circuit, two measurement primary optical axis angles are (α ₁+ α ₂), when practical solution is implemented, for determining α ₁, α ₂, following check equations is arranged

sinθ ₁sinα ₁＝sinθ ₂sinα ₂ (3)

The accurate position of decidable baseline AB, α sample by formula (3) by repeatedly measuring ₁, α ₂Can accurately judge thus.System's measurement of correlation data are by Computer Processing, thereby can accurately draw the testee diameter dimension quickly and easily.

The error analysis of the utility model system:

To formula (1) the right respectively about θ _iAnd α _i(i=1,2) differential, can try to achieve because the relative error that measurement of angle causes:

${\mathrm{\Δd}}_{{\mathrm{\θ}}_i}/d=k(\cos {\mathrm{\α}}_i\cos {\mathrm{\θ}}_i/{\sin }^2{\mathrm{\θ}}_i){\mathrm{\Δ\θ}}_i---\left(4\right)$

Δd _ai/d＝-k(sinα _i/sinθ _i)Δα _i (5)

By the ratio relation of investigation formula (5), can draw the relative weighting relation that causes the diameter measurement error under the equal angular error condition with formula (4):

$|{\mathrm{\Δd}}_{{\mathrm{\α}}_i}/d|/|{\mathrm{\Δd}}_{{\mathrm{\θ}}_i}/d|=\tan {\mathrm{\α}}_i{\tan \mathrm{\θ}}_i{\left|({\mathrm{\Δ\α}}_i/\mathrm{\Δ\θ})\right|}_i---\left(6\right)$

As mentioned above, can realize the utility model preferably.

Claims (6)

1. the optical scanning outside diameter measuring system of an object scanning lens free, it is characterized in that, it is made of the light scanning unit of two or more object scanning lens frees, each unit is relatively or by arbitrarily angled installation, each unit is interconnected successively by light source, collimating mirror, scanning mirror, receiving objective, photelectric receiver to be formed, and photelectric receiver also is connected with computing machine by signal wire.

2. the optical scanning outside diameter measuring system of a kind of object scanning lens free according to claim 1 is characterized in that, between described scanning mirror and the receiving objective plane mirror is installed.

3. the optical scanning outside diameter measuring system of a kind of object scanning lens free according to claim 1 is characterized in that, described light source is LASER Light Source or led light source.

4. the optical scanning outside diameter measuring system of a kind of object scanning lens free according to claim 1; it is characterized in that; described scanning mirror has one or more; scanning mirror has one or more reflectings surface, and the protective device that proofing dust and protecting glass or other transparent material are made is installed before or after the described scanning mirror.

5. the optical scanning outside diameter measuring system of a kind of object scanning lens free according to claim 1 is characterized in that, described receiving objective is reflective or refraction type or the two combination.

6. the optical scanning outside diameter measuring system of a kind of object scanning lens free according to claim 1 is characterized in that, installs the protective device of optical filter or proofing dust and protecting glass or other transparent material making or the combination of said apparatus before the described photelectric receiver additional.

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