CN2638084Y - Simplified fly eye type light beam homogenizer - Google Patents
Simplified fly eye type light beam homogenizer Download PDFInfo
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- CN2638084Y CN2638084Y CN 03209958 CN03209958U CN2638084Y CN 2638084 Y CN2638084 Y CN 2638084Y CN 03209958 CN03209958 CN 03209958 CN 03209958 U CN03209958 U CN 03209958U CN 2638084 Y CN2638084 Y CN 2638084Y
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- fly
- homogenizer
- light
- beam homogenizer
- eye
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- 230000003287 optical effect Effects 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 5
- 238000012935 Averaging Methods 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 1
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Abstract
A simplified fly-eye beam homogenizer for excimer laser is composed of two groups of quartz cylindrical mirrors with vertical generatrices, which are stacked to form a fly-eye lens array similar to 3X 3. The central part is a square or rectangular hollow part, and the light receiving width of the cylindrical mirror and the width of the central hollow part form trisection. When excimer laser with rectangular (or square) light spots is irradiated on the homogenizer, the central hollow part is directly light-passed, and the light beams at the edge part are converged by the cylindrical mirror and overlapped at a certain design position behind the cylindrical mirror, i.e. the laser beam is divided into nine parts and then overlapped to achieve the effect of light intensity averaging. Compared with the prior art, the utility model discloses a simplify fly eye formula excimer laser beam homogenizer simple structure, reached the effect of 3 fly eye homogenizer, overcome the difficulty in the aspect of the processing, nimble maneuver.
Description
Technical field:
The utility model relates to a kind of fly eye type lens arra beam homogenizer that is applied to excimer laser of simplification.
Background technology:
The principle of the beam homogenizer of excimer laser is that laser beam is divided into a plurality of beamlets, and then stack again, thereby makes the light intensity of laser obtain on average reaching the inhomogeneity improvement of beam cross section light distribution on stack face.Formerly in the technology, commonly used has two kinds.A kind of be the even device of waveguide tubular type (be published in " Chinese laser " 1995 VolA22, No.12 894～896) though its making is fairly simple, light energy losses is bigger.Another kind is that fly eye type beam homogenizer (be published in " Chinese laser " 1999 Vol A26, No.6 560～564) can be obtained good effect, is even bundle device the most commonly used in present laser lithography and the microfabrication, and shortcoming is that difficulty of processing is bigger.
Summary of the invention:
The purpose of this utility model is to improve the beam quality of excimer laser, simplifies the difficulty of processing of beam homogenizer, and a kind of fly eye type beam homogenizer of simplification is provided.
The purpose of this utility model realizes by following measure:
A kind of fly eye type beam homogenizer of simplification is characterized in being superimposed to form by two groups of mutually perpendicular quartzy cylindrical mirrors of bus the fly_eye lens array of similar 3*3.Core is square or rectangle hollow out, and the width that is subjected to optical width and center hollow out of cylindrical mirror is formed trisection.When the excimer laser irradiation of rectangle (or through being shaped as square) hot spot arrives even device, the directly logical light of center openwork part, and the light beam of marginal portion converges by cylindrical mirror, and overlapping at a certain design attitude thereafter, be about to superpose again to reach the average effect of light intensity after laser beam is divided into nine parts.
Compare with technology formerly, the even device of simplification fly eye type excimer pulsed laser beam of the present utility model is simple in structure, has reached the effect of the even device of 3*3 fly's eye, has overcome the difficulty of processing aspect, and is flexible.
Description of drawings:
Fig. 1 is the structure principle chart of simplification fly eye type beam homogenizer of the present utility model,
Fig. 2 is the light path synoptic diagram of the utility model user mode
Embodiment
See also Fig. 1 and Fig. 2, Fig. 1 is the structure principle chart of simplification fly eye type beam homogenizer of the present utility model, and Fig. 2 is the light path synoptic diagram of the utility model user mode.As seen from the figure, simplification fly eye type beam homogenizer of the present utility model is the fly_eye lens array that is superimposed to form similar 3*3 by two groups of mutually perpendicular quartzy cylindrical mirrors 3,4,5,6 of bus.Core 9 is square or rectangle hollow out, and the width that is subjected to optical width and center hollow out of cylindrical mirror all forms trisection in level and vertical direction respectively.
The light path of the utility model user mode as shown in Figure 2.The output laser of laser instrument 1 incides the even device of being made up of four cylindrical mirrors 3,4,5,68 after attenuator 2 decay, and obtains uniform hot spot at receiving screen 7.With laser spot size horizontal direction 30mm, vertical direction 20mm is an example, and the hollow out of the vertical direction that cylindrical mirror 3,4 constitutes is 6.7mm, and optical axis becomes 0.9 ° with laser direction; And the hollow out of the horizontal direction that cylindrical mirror 5,6 constitutes is 10mm, and focal length all is 200mm, and optical axis becomes 1.4 ° with laser direction.The material of cylindrical mirror is JGS1.Receiving screen 7 is positioned at evenly device 8 400mm places of distance.The even device of Dove prism formula of present embodiment is applied to the 308nmXeCl excimer laser, and good beam uniformity is arranged.
Claims (2)
1, a kind of simplification fly eye type beam homogenizer is characterized in that being superimposed to form by two groups of mutually perpendicular quartzy cylindrical mirrors of bus the fly_eye lens array of a 3*3.
2. simplification fly eye type beam homogenizer according to claim 1, the core that it is characterized in that the fly_eye lens array of described 3*3 are square or rectangle hollow out, and the width that is subjected to optical width and center hollow out of cylindrical mirror is formed trisection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03209958 CN2638084Y (en) | 2003-08-22 | 2003-08-22 | Simplified fly eye type light beam homogenizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03209958 CN2638084Y (en) | 2003-08-22 | 2003-08-22 | Simplified fly eye type light beam homogenizer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2638084Y true CN2638084Y (en) | 2004-09-01 |
Family
ID=34289192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03209958 Expired - Fee Related CN2638084Y (en) | 2003-08-22 | 2003-08-22 | Simplified fly eye type light beam homogenizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2638084Y (en) |
-
2003
- 2003-08-22 CN CN 03209958 patent/CN2638084Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |