CN2619948Y - Automatic film-coating multi-arc ion film coating machine - Google Patents
Automatic film-coating multi-arc ion film coating machine Download PDFInfo
- Publication number
- CN2619948Y CN2619948Y CN 03229462 CN03229462U CN2619948Y CN 2619948 Y CN2619948 Y CN 2619948Y CN 03229462 CN03229462 CN 03229462 CN 03229462 U CN03229462 U CN 03229462U CN 2619948 Y CN2619948 Y CN 2619948Y
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- arc
- water
- cylindrical shell
- cooled tube
- cylinder
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Abstract
The utility model relates to a special device which can plate metallic films on the metal surface. The utility model comprising: a cylinder with a front door, an upper cover arranged on the cylinder, a base arranged at the bottom of the cylinder, a revolving work rest arranged in the vacuum chamber of the cylinder and a vacuum-pumping system connected with the vacuum cavity; wherein, the wall of the cylinder is provided with a plurality of evaporator sources of voltaic arc which are directly connected with the control circuit of the PLC and are connected with the vacuum control instrument of microcomputer; therefore, the whole procedure is in full automatic programmed logic program control. As compared to the prior art, the utility model is good in stabilizing arc stabilization, high precise in the temperature control and great plating binding force; the utility model also can prevent the drop of the fluid and increase the sedimentation rate.
Description
Technical field
The utility model relates to a kind of specific equipment that can be coated with multiple metallic diaphragm on various metallic surfaces, particularly adopts ZrN, the CrN that physicals is coated with in the metallic surface, the equipment of superhard retes such as TiN, CiN.
Background technology
Known multi-arc ion plating film machine has its velocity of evaporation fast, the ionization level height, and the working vacuum wide ranges, advantages such as non-environmental-pollution, progressively substituted chemistry is electroplated.But existing multi-arc ion plating film machine was easy to generate thick particle (drop) because velocity of evaporation is fast, caused film surface coarse, and compactness is poor, causes the work range of original conventional ion coating equipment to significantly reduce.In addition, existing operation of equipment complexity, fully by manually operating, therefore, working strength of workers is big.
The utility model content
The purpose of the utility model is to overcome above-mentioned defective, and a kind of automatic multi-arc ion plating film machine is provided.It can eliminate the existence of drop effectively, makes the workpiece surface that plates out more careful, and compactness is good, and can realize automated operation.
For achieving the above object, the technical solution of the utility model is such: it is by the cylindrical shell that has the Qianmen, cover the loam cake on cylindrical shell, the base rotational workpieces frame interior with placing the cylindrical shell vacuum chamber that is contained in the cylindrical shell bottom reaches the vacuum-pumping system that is connected with vacuum chamber and forms, a plurality of arc evaporation sources are distributing on its middle cylinder body perisporium, these arc evaporation sources directly are connected with PLC time variable control circuit, and be connected with microcomputer type vacuum control instrument, realize full-automatic logical program control.
Above-mentioned arc evaporation source comprises the water-cooled tube, is contained in cover, permanent magnet on the water-cooled tube successively, is fixed on the cathode targets of water-cooled tube bottom, is enclosed within the blanking disc of cathode targets bottom, double as supplementary anode; Be enclosed within the terminal pad on the water-cooled tube, between terminal pad and the water-cooled tube upper and lower insulation covering be housed, to prevent short circuit between the positive and negative electrode; The cathode targets periphery is with shield ring; The striking pull bar is housed on the terminal pad, and the striking pull bar is provided with the striking silk, and the arc power anode is installed on the striking silk, and one of striking silk is rectified the anticathode target.Under specific vacuum condition, touch cathode targets, produce arc discharge by the striking wire connection.Cathode targets is connected contact with the water-cooled tube, is in order to cool off cathode targets.Because blanking disc double as supplementary anode after opening arc power, remains a tiny arc voltage between blanking disc and the negative electrode, make not arc extinguishing of its negative electrode.Thereby solved the conventional ion evaporation source because the cathode material that will repeatedly ignite causes the unstable defective of workpiece to be plated rete.
The utility model compared with prior art, it is good to have an arc-stabilising, temperature control tolerance range height, binding force of cladding material is strong, and can effectively eliminate drop, improves sedimentation rate.
Below in conjunction with embodiment shown in the drawings, the utility model is described in further detail.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is the utility model arc evaporation source structure iron.
Embodiment
Referring to Fig. 1, automatic film coating multi-arc ion plating film machine comprises that the tube that has Qianmen 2 stops 3, cover at tube and stop loam cake 5 on 3, be contained in the base 1 of cylindrical shell 3 bottoms, the vacuum-pumping system that places the rotational workpieces frame (figure does not draw) in cylindrical shell 3 vacuum chambers and be connected with vacuum chamber.Cylindrical shell 3 upper ends are shaped on flange 3b, fixedly connected with loam cake 5.The rotational workpieces frame hangs on the loam cake 5, and can planetaryly revolve round the sun; Be uniform-distribution with flange 3a on cylindrical shell 3 sidewalls, arc evaporation source 4 is housed on the flange 3a, arc evaporation source 4 is connected with PLC time variable control circuit, microcomputer type vacuum control instrument, and supplies with its signal by low-vacuum load-tripping device, realizes automatic logical program control.Operation interface adopts 14 color touch screen, makes the operator intuitively control this equipment effectively.Have viewing window 2a on the Qianmen 2, so that see processing work plated film situation intuitively.
Referring to Fig. 2, arc evaporation source 4 comprises cathode targets 19, place the water-cooled tube 14 on the cathode targets 19, be fixed on the cover 12 on the water-cooled tube 14, be fixed on permanent magnet 11 on the cover 12 with hold-down nut 13, magnet fixed ring 6, be contained in the terminal pad 7 on the water-cooled tube 14, insulation covering 15 and following insulation covering 18 be housed, between terminal pad 7 and the water-cooled tube 14 to prevent short circuit between the positive and negative electrode; Be provided with sealing-ring 10 between last insulation covering 18 and water-cooled tube 14, the terminal pad 7; Be socketed with the blanking disc 21 of band supplementary anode in cathode targets 19 bottoms; The outer ring of cathode targets 19 is provided with shield ring 22, and shield ring 22 usefulness insulation magnetic support 24, locking double-screw bolt 23 are fixed on the terminal pad 7.Striking pull bar 17 also is housed on the terminal pad 7, striking silk 20 is housed on the striking pull bar 17, the other end of striking silk 20 is over against cathode targets 19; Be provided with insulation covering 16 between striking pull bar 17 and the terminal pad 7.Be provided with insulation pressed seat 8 and clamping screw 9 between terminal pad 7 and the water-cooled tube 14.Because blanking disc 21 supplementary anodes are connected with the output of arc power supplementary anode, behind the negative electrode that ignites, there is a self-holding arc light to put a little between blanking disc 21 and the negative electrode all the time, when negative electrode is about to current interruption, light negative electrode rapidly by supplementary anode, reach the not purpose of arc extinguishing.
Arc power adopts contravariant DC arc power supply, and the arc automatic starting device is housed on it, the refinement circuit, and supplementary anode output guarantees to eliminate effectively drop, makes ionization level more reasonable.
Claims (4)
1, a kind of automatic film coating multi-arc ion plating film machine, by the cylindrical shell that has Qianmen (2) (3), cover the loam cake (5) on cylindrical shell (3), base (1) the rotational workpieces frame interior with placing cylindrical shell (3) vacuum chamber that is contained in cylindrical shell (3) bottom reaches the vacuum-pumping system that is connected with vacuum chamber and forms, it is characterized in that: a plurality of arc evaporation source (4) that distributing on cylindrical shell (3) perisporium, this arc evaporation source (4) is connected with PLC time variable control circuit.
2, according to the described automatic film coating multi-arc ion plating film of claim 1 machine, it is characterized in that: described arc evaporation source (4) comprising: water-cooled tube (14), be contained in the cover (12) on the water-cooled tube (14) successively, permanent magnet (11), be fixed on the cathode targets (19) of water-cooled tube (14) bottom, be enclosed within the blanking disc (21) of cathode targets (19) bottom double as supplementary anode, be contained in the terminal pad (7) on the water-cooled tube (14), be equipped with between terminal pad (7) and the water-cooled tube (14), following insulation covering (15,18), cathode targets (19) outer ring is with shield ring (22), striking pull bar (17) is housed on the terminal pad (7), striking pull bar (17) is provided with striking silk (20), and one of striking silk (20) is rectified anticathode target (19).
3, according to the described automatic film coating multi-arc ion plating film of claim 1 machine, it is characterized in that: described arc power adopts contravariant DC arc power supply, and is connected to the arc automatic starting device.
4, according to claim 1 or 2 described automatic film coating multi-arc ion plating film machines, it is characterized in that: have viewing window (2a) on described Qianmen (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03229462 CN2619948Y (en) | 2003-03-13 | 2003-03-13 | Automatic film-coating multi-arc ion film coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03229462 CN2619948Y (en) | 2003-03-13 | 2003-03-13 | Automatic film-coating multi-arc ion film coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2619948Y true CN2619948Y (en) | 2004-06-09 |
Family
ID=34247304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03229462 Expired - Fee Related CN2619948Y (en) | 2003-03-13 | 2003-03-13 | Automatic film-coating multi-arc ion film coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2619948Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1995445B (en) * | 2006-12-29 | 2010-08-11 | 友达光电股份有限公司 | Vacuum evaporation source device of vacuum evaporation machine and its vacuum evaporation method |
| CN107557735A (en) * | 2017-10-17 | 2018-01-09 | 东莞市典雅五金制品有限公司 | Cathode arc target assembly and vacuum multi-arc ion plating machine |
| CN108193174A (en) * | 2018-01-04 | 2018-06-22 | 陕西理工大学 | The high vacuum electric arc arc stabilizer and sputtering method of heavy caliber truncated cone-shaped target |
| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN109930117A (en) * | 2017-12-15 | 2019-06-25 | 湘潭宏大真空技术股份有限公司 | Ion plating film device |
| CN113481478A (en) * | 2021-06-23 | 2021-10-08 | 合肥联顿恪智能科技有限公司 | Sputtering coating device and film forming method |
| CN114318249A (en) * | 2021-12-30 | 2022-04-12 | 广东鼎泰高科技术股份有限公司 | Droplet-free plasma coating arc source structure, coating system and coating method |
-
2003
- 2003-03-13 CN CN 03229462 patent/CN2619948Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1995445B (en) * | 2006-12-29 | 2010-08-11 | 友达光电股份有限公司 | Vacuum evaporation source device of vacuum evaporation machine and its vacuum evaporation method |
| CN107557735A (en) * | 2017-10-17 | 2018-01-09 | 东莞市典雅五金制品有限公司 | Cathode arc target assembly and vacuum multi-arc ion plating machine |
| CN109930117A (en) * | 2017-12-15 | 2019-06-25 | 湘潭宏大真空技术股份有限公司 | Ion plating film device |
| CN108193174A (en) * | 2018-01-04 | 2018-06-22 | 陕西理工大学 | The high vacuum electric arc arc stabilizer and sputtering method of heavy caliber truncated cone-shaped target |
| CN109852931A (en) * | 2019-01-07 | 2019-06-07 | 纳狮新材料(浙江)有限公司 | The film plating process of vacuum coating equipment and composite coating |
| CN113481478A (en) * | 2021-06-23 | 2021-10-08 | 合肥联顿恪智能科技有限公司 | Sputtering coating device and film forming method |
| CN114318249A (en) * | 2021-12-30 | 2022-04-12 | 广东鼎泰高科技术股份有限公司 | Droplet-free plasma coating arc source structure, coating system and coating method |
| CN114318249B (en) * | 2021-12-30 | 2023-11-17 | 广东鼎泰高科技术股份有限公司 | Non-drop plasma coating arc source structure, coating system and coating method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |