CN2619360Y - Plane display package device - Google Patents

Plane display package device Download PDF

Info

Publication number
CN2619360Y
CN2619360Y CNU022846883U CN02284688U CN2619360Y CN 2619360 Y CN2619360 Y CN 2619360Y CN U022846883 U CNU022846883 U CN U022846883U CN 02284688 U CN02284688 U CN 02284688U CN 2619360 Y CN2619360 Y CN 2619360Y
Authority
CN
China
Prior art keywords
substrate
sealing
plane display
packaging device
display packaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU022846883U
Other languages
Chinese (zh)
Inventor
郑同昇
苏怡帆
林燕华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RiTdisplay Corp
Original Assignee
RiTdisplay Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RiTdisplay Corp filed Critical RiTdisplay Corp
Priority to CNU022846883U priority Critical patent/CN2619360Y/en
Application granted granted Critical
Publication of CN2619360Y publication Critical patent/CN2619360Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Abstract

The utility model relates to an encapsulation device for the flat panel display comprising a working chamber, a decompression operation chamber and a pressing mechanism. Therein, the working chamber is provided with a closed space. The decompression operation chamber is positioned in the closed space. The pressing mechanism is connected with the decompression operation chamber which is used to provide a decompression operation environment. One end of the pressing mechanism can move in the decompression operation chamber to press the first substrate and the second substrate.

Description

Plane display packaging device
Technical field
The utility model relates to a kind of display packaging system, particularly a kind of flat-panel screens (flat-panel display, packaging system FPD).
Background technology
Along with advances in electronic technology, display in light weight, that efficient is high is also along with vigorously developing, and the volume of display also reduces effectively along with the development of flat-panel screens, for example LCD (LCD), organic light emitting display (Organic Light-Emitting Display) etc., wherein, organic light emitting display with its self-luminous, no visual angle, power saving, advantage such as processing procedure is easy, cost is low, high answer speed and full-colorization, make organic light emitting display that great application potential be arranged, be expected to become the main flow of flat-panel screens of future generation.Organic Light Emitting Diode is the assembly that a kind of self luminous characteristic of utilizing organic functional material (organic functional materials) reaches display effect.
Generally speaking, flat-panel screens is usually by an electroluminescent substrate (electroluminescentsubstrate) and a glass substrate is packaged forms, and the program that encapsulates electroluminescent substrate and glass substrate usually comprises: a glass substrate is provided; Then on glass substrate, be coated with sealing; One electroluminescent substrate is provided again; Pressing glass substrate and electroluminescent substrate more afterwards.
Above-mentioned encapsulation flow process can be carried out in a plane display packaging device, please refer to shown in Figure 1A, and existing plane display packaging device 2 comprises an operating room (chamber) 21, a curing system 22 and a laminating mechanism 23.Wherein, operating room 21 has a confined space (airtight space), wherein be full of the content that inert gas reduces moisture and oxygen, when encapsulation, be subjected to the destruction of moisture and oxygen so that prevent electroluminescent substrate, and reduced the durability (durability) of prepared flat-panel screens.Curing system 22 comprises a supporting part 221 and a ultraviolet source 223 usually, and supporting part 221 is a quartz plate (quartz plate), and it is in order to carry above-mentioned glass substrate, and ultraviolet source 223 is positioned at supporting part 221 belows.Laminating mechanism 23 and curing system 22 are relative and establish, and the one end is arranged in operating room 21 and for removable, and electroluminescent substrate is attached to it, so that move in the operating room 21.
Shown in Figure 1B, glass substrate 31 is placed on the supporting part 221; At this moment, normally cooperate a mechanical arm (not shown),, and be positioned on the supporting part 221 so that utilize mechanical arm that glass substrate 31 is moved in the operating room 21.
Then, shown in Fig. 1 C, it utilizes a glue applying mechanism (not shown) to be coated with sealing 32 on glass substrate 31, and wherein, the material of sealing 32 can be epoxy resin (epoxy), and the mode of its coating is divided into closed usually and reserve two kinds of ventilation cellular types; Be depicted as closed coating as Fig. 2 A, sealing 32 forms an enclosed areas on glass substrate 31, and it is in order to surround the protected part of prepared flat-panel screens fully; In addition, be depicted as the coating of reservation ventilation cellular type as Fig. 2 B, sealing 32 forms a zone and is reserved with one or more air vent hole 321 on glass substrate 31, it is in order to when pressing glass substrate and the electroluminescent substrate, make the gas between glass substrate and the electroluminescent substrate overflow via air vent hole 321, at this moment, sealing 32 can be squeezed in the pressing process and air vent hole 321 is closed.
From the above, sealing 32 can also be to coat on the glass substrate 31 in another point glue equipment, and then the glass substrate 31 that will be coated with sealing 32 moves in the operating rooms 21 and is placed on the supporting part 221.In addition; have when being coated with sealing 32 on glass substrate 31 and the glass substrate 31 when putting on supporting part 221, can activate ultraviolet source 223 usually to send ultraviolet light, it passes supporting part 221 and glass substrate 31; shine then in sealing 32, so that pre-hardening sealing 32.
Shown in Fig. 1 D, electroluminescent substrate 33 is put an end that is attached to laminating mechanism 23; At this moment, normally cooperate a mechanical arm (not shown),, and be arranged at an end of laminating mechanism 23 so that utilize mechanical arm that electroluminescent substrate 33 is moved in the operating room 21.Generally speaking, an end of laminating mechanism 23 is a vacuum cups, and it is in order to hold electroluminescent substrate 33, and in addition, an end of laminating mechanism 23 can also be anchor clamps, in order to clamping electroluminescent substrate 33.
Shown in Fig. 1 E, laminating mechanism 23 can move down with pressing glass substrate 31 and electroluminescent substrate 33, and binds by sealing 32 between glass substrate 31 and the electroluminescent substrate 33.Wherein, electroluminescent substrate 33 is aimed at glass substrate 31 in advance, and laminating mechanism 23 can be to utilize spiral or mode such as pneumatic moves; Before pressing glass substrate 31 and electroluminescent substrate 33, can be full of inert gas earlier in the operating room 21, be enclosed between glass substrate 31, sealing 32 and the electroluminescent substrate 33 to avoid moisture or oxygen.
Generally speaking, after pressing glass substrate 31 and electroluminescent substrate 33, can activate ultraviolet source 223 usually to send ultraviolet light, it passes journey supporting part 221 and glass substrate 31, shines then in sealing 32, so that sclerosis sealing 32.
Yet, in the process of pressing glass substrate 31 and electroluminescent substrate 33, to two side flow, therefore can make the space between glass substrate 31, sealing 32 and the electroluminescent substrate 33 diminish because sealing 32 can be squeezed, can make that relatively the pressure in this space rises; Particularly when carrying out the high temperature test of prepared assembly, gas in this space is understood expanded by heating and is made pressure therebetween become bigger, the result can produce the adhesion between stress rupture sealing 32 and glass substrate 31 or the electroluminescent substrate 33, and then has reduced the durability of flat-panel screens.
In addition, in the process of pressing glass substrate 31 and electroluminescent substrate 33, glass substrate 31, space between sealing 32 and the electroluminescent substrate 33 can diminish gradually, and the gas in this space may be overflowed in the middle of sealing 32, so will in sealing 32, form bubble or worm hole (warm holes), it is that bubble moves left vestige in sealing 32, thus, will reduce sealing 32 moisture to external world and the barrier of oxygen, that is be that extraneous moisture passes sealing 32 via worm hole or formation bubble place easily with oxygen and enters package panel, and then can influence the normal start of flat-panel screens.
In addition, because sealing 32 contains volatile materials usually, as organic solvent, this volatile materials can disengage (out gassing) in sealing 32, it may be the pernicious gas of flat-panel screens, for example this volatile materials can destroy the electroluminescence material in the electroluminescent substrate 33, and then causes the not generation of light-emitting zone (dark spot), that is can influence the durability of flat-panel screens.
As mentioned above, how a kind of pressure that can effectively control between glass substrate 31, sealing 32 and the electroluminescent substrate 33 is provided, avoid in sealing 32, forming bubble or worm hole, and the plane display packaging device that can remove residual pernicious gas, one of manufacturing important topic of current just flat-panel screens.
Summary of the invention
At the problems referred to above, the purpose of this utility model is for providing a kind of plane display packaging device that can effectively control the pressure between glass substrate, sealing and electroluminescent substrate.
Another purpose of the present utility model is for providing a kind of plane display packaging device of avoiding forming bubble or worm hole in sealing.
Another purpose of the present utility model is for providing a kind of plane display packaging device that can remove residual pernicious gas.
For reaching above-mentioned purpose, according to the state of pressure for reducing pressure of plane display packaging device of the present utility model control operating environment when encapsulating flat-panel screens.
Plane display packaging device of the present utility model comprises an operating room, a decompression operation chamber and a laminating mechanism.In the utility model, the operating room has a confined space, and the decompression operation chamber then is arranged in this confined space, and the operating environment of a decompression is provided, and laminating mechanism and decompression operation chamber are connected with, and the one end can move in the decompression operation chamber; Wherein, the decompression operation chamber comprises a housing, a curing system and a decompressor, housing and curing system form an operating space, and be provided with one first substrate and one second substrate in this operating space, second substrate attachment is being connected with in an end of the laminating mechanism of housing, so second substrate can move along with being displaced in the housing of laminating mechanism, curing system has one in order to carry the supporting part of first substrate, decompressor is in order to this operating space of reducing pressure, so that form the usefulness that the operating environment of decompression offers first substrate and the second substrate pressing.
As mentioned above, owing to provide the operating environment of a decompression just to carry out the action of pressing first substrate and second substrate then earlier according to plane display packaging device of the present utility model, so can effectively control the pressure between first substrate, sealing and second substrate, produce excessive pressure to prevent that when gases are heated, they expand therebetween, destroy the adhesion between the sealing and first substrate or second substrate; In addition, it can avoid in sealing forming bubble or worm hole, enters package panel so can avoid extraneous moisture to pass sealing with oxygen via worm hole or formation bubble place, and influences the normal start of flat-panel screens; In addition, the utility model can also remove residual pernicious gas, avoiding the destruction of this pernicious gas to the electroluminescence material of flat-panel screens, and then can prevent the not generation of light-emitting zone.
Description of drawings
Figure 1A is a schematic diagram, shows the schematic diagram of existing plane display packaging device;
Figure 1B~1E is a key diagram, shows the state description figure of existing plane display packaging device when carrying out encapsulation;
Fig. 2 A is a schematic diagram, shows the signal of closed coating sealing;
Fig. 2 B is a schematic diagram, shows the signal of reserving ventilation cellular type coating sealing;
Fig. 3 is a schematic diagram, shows the schematic diagram according to the plane display packaging device of the utility model preferred embodiment;
Fig. 4 A~4E is a key diagram, shows the state description figure of plane display packaging device when carrying out encapsulation according to the utility model preferred embodiment.
Symbol description among the figure
2 plane display packaging device
21 operating rooms
22 curing systems
221 supporting parts
223 ultraviolet sources
23 laminating mechanisms
31 glass substrates
32 sealings
321 air vent holes
33 electroluminescent substrates
4 plane display packaging device
41 operating rooms
411 workbenches
412 housings
413 atmosphere controlling organizations
Decompression operation chambers 42
421 housings
422 curing systems
423 decompressors
424 control device
425 supporting parts
426 ultraviolet sources
43 laminating mechanisms
431 lowering or hoisting gears
432 facies posterior hepatises
61 first substrates
62 sealings
63 second substrates
Embodiment
Hereinafter with reference to relevant drawings, the plane display packaging device according to the utility model preferred embodiment is described, wherein identical assembly will be illustrated with identical reference marks.
Please refer to shown in Figure 3ly, comprise an operating room 41, a decompression operation chamber 42 and a laminating mechanism 43 according to the plane display packaging device 4 of the utility model preferred embodiment.
Operating room 41 is made of a workbench (basement) 411, a housing 412 and an atmosphere controlling organization 413.In the present embodiment, workbench 411 forms a confined space with housing 412, and the material of workbench 411 and housing 412 has the characteristic that prevents that ultraviolet light from penetrating; Atmosphere controlling organization 413 control input one inert gas is so far in the confined space, so that utilize inert gas to reduce moisture and oxygen content in the confined space, be subjected to the destruction of moisture and oxygen so can prevent prepared product when encapsulation, above-mentioned inert gas for example is a nitrogen.
Decompression operation chamber 42, it is arranged in above-mentioned confined space, and provides an operating environment that reduces pressure to follow-up pressing program.In the present embodiment, decompression operation chamber 42 has a housing 421, a curing system 422, a decompressor 423 and a control device 424.Wherein, housing 421 forms an operating space with curing system 422; Curing system 422 has a supporting part 425 and a ultraviolet source 426, the material of supporting part 425 is generally quartz glass in order to carry a planar substrates, ultraviolet source 426 is in order to sending a ultraviolet light, when this UV-irradiation during in a sealing, and can pre-hardening or this sealing of hardening; Decompressor 423 is extracted out in order to the air in the operating space that will be made of housing 421 and curing system 422, so that the operating environment of a decompression is provided, for example be below the atmospheric pressure, decompressor 423 can be that existing vacuum pump or telescopic vacuum tube constitute; Control device 424 is connected with decompressor 423 signals, so that the pressure in the operating space is adjusted in the running of control decompressor 423, generally speaking, control device 424 can receive the pressure default value that the user sets, control activates the vacuum pump of decompressor 423 then, and when the pressure in the operating space reaches default value, just stop the vacuum pump start of decompressor 423.Allly be familiar with this operator and all understand, utilize decompressor 423 that the gas in the operating space is extracted out, the operating environment of a decompression not only can be provided, can also effectively volatile materials harmful in the sealing be got rid of.
Laminating mechanism 43 is connected with decompression operation chamber 42, and an end of laminating mechanism 43 can move in decompression operation chamber 42.In the present embodiment, laminating mechanism 43 comprises a lowering or hoisting gear 431 and a facies posterior hepatis 432; Wherein, facies posterior hepatis 432 is arranged in decompression operation chamber 42, and facies posterior hepatis 432 is located at an end of lowering or hoisting gear 431, so when lowering or hoisting gear 431 moved up and down, facies posterior hepatis 432 can be along with moving up and down.Lowering or hoisting gear 431 can be a ball bearing screw (ball bearing screw) or vapour-pressure type elevating lever, facies posterior hepatis 432 can be a mechanical clips so that clamp a planar substrates, it can also be a vacuum cups, so that adsorb a planar substrates.Be noted that, be placed on the supporting part 425 and the planar substrates that is attached on the facies posterior hepatis 432 can be respectively glass substrate and organic electroluminescent substrate.
In addition, can more comprise a glue applying mechanism (not shown) according to the plane display packaging device 4 of the utility model preferred embodiment, it is in order to form sealing in the planar substrates that is seated on the supporting part 425.In the present embodiment, the mode of sealing formation can be closed or reserve ventilation cellular type (shown in Fig. 2 A and 2B).
For content of the present utility model is more readily understood, below will lift an example, with the flat-panel screens packaging process for packaging of explanation according to the utility model preferred embodiment.
Please refer to shown in Fig. 4 A, first substrate 61 is placed on the supporting part 425; In the present embodiment, its first substrate 61 moves in the operating room 41 with a mechanical arm (not shown), and is positioned on the supporting part 425.
Then, shown in Fig. 4 B, utilize a glue applying mechanism (not shown) on first substrate 61, to form sealing 62 again.In the present embodiment, the material of sealing 62 can be an epoxy resin, and the mode of its formation is divided into closed usually and reserve ventilation two kinds of cellular types (shown in Fig. 2 A and 2B).
From the above, sealing 62 can also be to be formed in another point glue equipment on first substrate 61, and then first substrate 61 that will be formed with sealing 62 moves in the operating rooms 41 and is placed on the supporting part 425.In addition; have when being formed with sealing 62 on first substrate 61 and first substrate 61 when putting on supporting part 425, the ultraviolet source 426 that can activate curing system 422 usually is to send ultraviolet light, and it passes the supporting part 425 and first substrate 61; shine then in sealing 62, so that pre-hardening sealing 62.
Shown in Fig. 4 C, second substrate 63 is put an end that is attached to laminating mechanism 43; In the present embodiment, second substrate 63 moves in the operating room 41 with a mechanical arm (not shown), and is arranged at an end of laminating mechanism 43, promptly on the facies posterior hepatis 432.Brought forward is described, and facies posterior hepatis 432 can be a mechanical clips so that clamp second substrate 63, and it can also be a vacuum cups so that adsorb second substrate 63.
Shown in Fig. 4 D, at first housing 421 is moved downward to contact hardening device 422 earlier, so housing 421 can form an operating space with curing system 422 and first substrate 61, sealing 62 and second substrate 63 are placed in this operating space.Be noted that, before moving down housing 421, can utilize atmosphere controlling organization 413 input inert gases usually earlier to workbench 411 and housing 412 formed confined spaces, so that utilize inert gas to reduce moisture and oxygen content in the confined space.
Then, control device 424 for example is 100 to 600 holders (torr) according to the pressure default value that is received, and controls the vacuum pump that activates decompressor 423, air in the operating space that will be made of housing 421 and curing system 422 is extracted out, so that the operating environment of a decompression to be provided.As previously mentioned, comprise the inert gas that riddles in advance in the confined space at this gas of extracting out, and the pernicious gas that in sealing, volatilizes.
Shown in Fig. 4 E, laminating mechanism 43 can move down with pressing first substrate 61 and second substrate 63, and binds by sealing 62 between first substrate 61 and second substrate 63.In the present embodiment, second substrate 63 is aimed at first substrate 61 in advance, and laminating mechanism 43 can be to utilize spiral way or pneumatic mode moves down.Generally speaking, after pressing first substrate 61 and second substrate 63, the ultraviolet source 426 that can activate curing system 422 usually is to send ultraviolet light, and it passes the supporting part 425 and first substrate 61, shines then in sealing 62, so that sclerosis sealing 62.
From the above, in the present embodiment, the pressure that is arranged in first substrate 61, second substrate 63 and sealing 62 formed spaces can be controlled by control device 424, so after finishing the pressing program, pressure in this space can be less than utilizing the existing prepared assembly of mode, be generally and be slightly larger than 760 holders, promptly be slightly larger than 1atm; Therefore, even at the high temperature test that carries out prepared assembly, and the gas in this space is can expanded by heating the time, and the gas pressure in this space can be not excessive, so can stress between the sealing 62 and first substrate 61 or second substrate 63 and destroyed.
In addition, in the present embodiment, first substrate 61 and second substrate 63 can be respectively a protective substrate (cover substrate) and an electroluminescent substrate (electroluminescentsubstrate); In addition, first substrate 61 and second substrate 63 can also be respectively an electroluminescent substrate and a protective substrate.Above-mentioned protective substrate for example is a glass substrate, and electroluminescent substrate for example is an organic electroluminescent substrate.
In sum, because according to plane display packaging device of the present utility model is to provide the operating environment of a decompression just to carry out the action of pressing first substrate and second substrate then earlier, so can effectively control the pressure between first substrate, sealing and second substrate, produce excessive pressure to prevent that when gases are heated, they expand therebetween, destroy the adhesion between the sealing and first substrate or second substrate, and then can strengthen the durability of prepared flat-panel screens; In addition, the utility model can be avoided in sealing forming bubble or worm hole, influences the normal start of flat-panel screens so can avoid extraneous moisture to pass sealing with oxygen via worm hole or formation bubble place; Moreover the utility model can also remove residual pernicious gas, avoiding the destruction of this pernicious gas to the electroluminescence material of flat-panel screens, and then can prevent the not generation of light-emitting zone, and strengthen the durability of prepared flat-panel screens.
The above only is an illustrative, but not is restricted.Anyly do not break away from spirit of the present utility model and category, and, all should be contained in the scope of claims its equivalent modifications of carrying out or change.

Claims (11)

1. a plane display packaging device is characterized in that, comprises:
One operating room, it has a confined space;
One decompression operation chamber, it is arranged in this confined space, and the operating environment of a decompression is provided; And
One laminating mechanism, itself and this decompression operation chamber is connected with, and an end of this laminating mechanism moves in this decompression operation chamber.
2. plane display packaging device as claimed in claim 1 is characterized in that, this decompression operation chamber comprises:
One housing, this laminating mechanism and this housing are connected with, and this second substrate is arranged in this housing and is attached to an end of this laminating mechanism, with along with being displaced in this housing of this laminating mechanism moved;
One curing system, it is positioned at this housing one side and in order to form an operating space with this housing, this curing system has one in order to carry the supporting part of this first substrate; And
One decompressor, its in order to this operating space of reducing pressure to form the operating environment of this decompression.
3. plane display packaging device as claimed in claim 2 is characterized in that, this laminating mechanism moves with this first substrate of pressing and this second substrate.
4. plane display packaging device as claimed in claim 2 is characterized in that, this first substrate is a protective substrate, and this second substrate is an electroluminescent substrate.
5. plane display packaging device as claimed in claim 2 is characterized in that, this first substrate is an electroluminescent substrate, and this second substrate is a protective substrate.
6. plane display packaging device as claimed in claim 2 is characterized in that, this decompression operation chamber more comprises:
One control device, it is in order to control the running of this decompressor, to adjust the pressure in this operating space; And
One glue applying mechanism, it is in order to form a sealing on this first substrate, and this first substrate and this second substrate stick together mutually by this sealing.
7. plane display packaging device as claimed in claim 6 is characterized in that, the pressure in this first substrate, this second substrate and this formed space of sealing is for being slightly larger than 760 holders.
8. plane display packaging device as claimed in claim 6 is characterized in that, this sealing is formed on this first substrate with closed.
9. plane display packaging device as claimed in claim 6 is characterized in that, this sealing is formed on this first substrate to reserve the ventilation cellular type.
10. plane display packaging device as claimed in claim 6 is characterized in that, the material of this supporting part is quartzy, and this curing system has a ultraviolet source, and its ultraviolet light that sends penetrates this supporting part and this first substrate, and this sealing of irradiation sclerosis.
11. plane display packaging device as claimed in claim 1 is characterized in that, more comprises:
One atmosphere controlling organization, its input inert gas is to this confined space, to control moisture and the oxygen content in this confined space.
CNU022846883U 2002-11-27 2002-11-27 Plane display package device Expired - Fee Related CN2619360Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU022846883U CN2619360Y (en) 2002-11-27 2002-11-27 Plane display package device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU022846883U CN2619360Y (en) 2002-11-27 2002-11-27 Plane display package device

Publications (1)

Publication Number Publication Date
CN2619360Y true CN2619360Y (en) 2004-06-02

Family

ID=34238543

Family Applications (1)

Application Number Title Priority Date Filing Date
CNU022846883U Expired - Fee Related CN2619360Y (en) 2002-11-27 2002-11-27 Plane display package device

Country Status (1)

Country Link
CN (1) CN2619360Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100364138C (en) * 2002-11-27 2008-01-23 铼宝科技股份有限公司 Apparatus and method for packaging plane display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100364138C (en) * 2002-11-27 2008-01-23 铼宝科技股份有限公司 Apparatus and method for packaging plane display device

Similar Documents

Publication Publication Date Title
CN1212662C (en) Package structure of display element
CN1201416C (en) Plate display and its protecting layer forming process
CN1246898C (en) Seal structure used for high wet sensitive electronic device element and its producing method
CN1249495C (en) Liquid crystal displaying apparatus and substrate assembling-apparatus making method
JP3903204B2 (en) Manufacturing method of display device
KR100761766B1 (en) Printing apparatus, controlling method thereof and manufacturing method of flat panel display
CN1681360A (en) Panel display and manufacture thereof
CN1622700A (en) Organic electroluminescent devices
CN101080121A (en) An organic EL part and its making method
EP1804310A3 (en) Organic light emiting device and method of manufacturing the same
CN1575055A (en) Electroluminescence panel and manufacturing process therefor
CN1945794A (en) Substrate bonding method and device
CN101069453A (en) Sealing device and sealing method
CN1794483A (en) Manufacturing method of self-luminous panel
JP2000036384A (en) Manufacture of organic thin film el device
TWI258316B (en) FPD encapsulation apparatus and method for encapsulating ehereof
CN100346498C (en) Production device and production method for organic EL dispaly
CN1221156C (en) Substrate for seal and making method display device and electronic instrument thereof
WO2009152672A1 (en) Encapsulating apparatus for solar cells and encapsulating method for solar cells
KR20040036667A (en) OLED package and method for fabricating the same
CN2619360Y (en) Plane display package device
CN1485929A (en) Organic light emitting diode
CN1200464C (en) Method for packaging electroluminescence element
CN1503600A (en) Apparatus and method for packaging plane display device
CN1516989A (en) Production device and production method for organic EL display

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee