A kind of vertical synthetic quartz glass cvd furnace
Technical field
The utility model relates to a kind of cvd furnace, specifically is a kind of vertical synthetic quartz glass cvd furnace.
Background technology
Existing quartz glass deposition stove all adopts horizontal chamber oven, the basic rod of this stove is an arranged transversely, one end is positioned at furnace body inside, be fixed with a stone roller face with the basic rod port, as shown in Figure 1, body of heater is the open type setting, wherein the middle part is a chimney, the body of heater one end outside is provided with burner, and the other end break-through has basic rod, and the end that basic rod passes body of heater is connected with a lathe; Burner blanking crystallization formation is normally accepted in synthesizing of silica glass on the stone roller face.Horizontal chamber oven is provided with and has three aspect problems: first basic rod is an arranged transversely, and along with the growth of weight increase of deposition stone roller and basic rod length, pressure and tension force that basic rod bore are doubled and redoubled, and then cause the gravity of basic rod to fracture; Its two basic rod passes across room temperature to 1500 ℃ pyritous temperature field, because deposition is a process slowly, basic rod is for a long time in such temperature field, can cause crystallization, reduce the intensity that basic rod bears weight, thereby cause the basic rod fracture, thereby limited production large size, large diameter silica glass; Its three this horizontal chamber oven is open type production, and its furnace temperature is low, energy consumption is big and efficient is low.Because the problems referred to above, the general 10-20 kilogram of the silica glass ingot that horizontal chamber oven is produced, diameter are at the 150-180 millimeter, and sedimentation rate is the 40-100 Grams Per Hour, and be in light weight, diameter is little, efficient is low.
The utility model content
The purpose of this utility model provides and a kind ofly can solve the basic rod strength problem, but the vertical synthetic quartz glass cvd furnace of production large size, large diameter silica glass and the higher sedimentation effect of tool.
To achieve these goals, the utility model is by the following technical solutions: a kind of vertical synthetic quartz glass cvd furnace, it comprises body of heater, be arranged at the basic rod in the described body of heater, and the deposited weight surface of basic rod termination, place the outer lathe that links to each other with basic rod and control basic rod lifting and rotation of body of heater, place on the described body of heater burner to the deposited weight surface blanking, and the chimney that is used to discharge flue gas in the body of heater, it is characterized in that: described basic rod is placed on the described lathe, stretches into from bottom to top in the described body of heater; Deposited weight surface is established on described basic rod top, and described deposited weight surface diameter is at 250~500 millimeters; Described body of heater sealing is provided with.
Described burner is located at the top of body of heater, and burner is set to 2-8, and uniform distribution is arranged at the body of heater top.
Described chimney stands is located at described body of heater one side.
Described basic rod lower end and described lathe clamping.
The tremie pipe of described burner is set to 1-3.
The utility model adopts technique scheme, and its advantage is as follows:
1. basic rod is erected and put, its basic rod center of gravity can be offset with the increase of deposited weight surface weight, thereby can bear the weight of self and deposited weight surface to greatest extent, even so in the hot environment of body of heater, can deposit the silica glass emery wheel for cutting or polishing jade that weight is bigger, diameter is bigger thereby basic rod can support the bigger deposited weight surface of diameter; Be fixed on the lathe under the basic rod, lathe orientable adjustment basic rod lifting and top deposited weight surface thereof rotate, its weight is increased and during the growth of basic rod length when accept burner blanking deposition along with deposited weight surface, lathe is adjusted the feeding of basic rod, make deposited weight surface and tremie pipe be maintained fixed distance and angle, to obtain depositing uniform bulk silica glass.
2. single burner is changed into a plurality of burners and the blanking of same burner multiple spot, can be realized the fast deposition of deposited weight surface, improve its production efficiency;
3. adopt sealed body of heater, can make full use of heat energy, effectively keep furnace temperature, improve sedimentation effect; Can also make energy consumption reduce save energy.
Description of drawings
Fig. 1 is existing horizontal quartz glass deposition furnace structure synoptic diagram;
Fig. 2 is the utility model structural representation;
Fig. 3 is the nozzle exit synoptic diagram of a plurality of tremie pipes of burner arrangement in the utility model;
Structural representation when Fig. 4 adopts multi-combustor to be provided with for the utility model.
Embodiment
Embodiment one
As shown in Figure 2, the utility model is a kind of vertical synthetic quartz glass cvd furnace, and it comprises chimney 1, body of heater 2, deposited weight surface 3, burner 4, basic rod 5 and lathe 6.
Deposited weight surface 3 stretches in the body of heater 2 from body of heater 2 bottoms under basic rod 5 supports, basic rod 5 is blouing ﹠ melting quartz rods, screens is installed on the lathe 6 vertically, along with silica dioxide granule constantly deposits at deposited weight surface 3, deposited weight surface 3 weight constantly increase, basic rod 5 length also constantly increase, this moment, lathe 6 can be adjusted basic rod 5 and deposited weight surface 3 moves up and down, and regulated the degree of depth that they stretch into body of heater 2 and was in the optimal deposition position to adjust deposited weight surface 3.Because basic rod 5 perpendicular putting, its center of gravity can not be offset the easier weight that self reaches of bearing, be not easy relatively to bend, so, can produce heavier deal, larger-diameter silica glass ingot thereby can support bigger deposited weight surface 3 even in the hot environment of burner hearth.
Body of heater 2 is a sealed construction, and body of heater 2 inside are pressure-fired, can keep the hot environment in the stove, helps the silica dioxide granule crystallization and generates silica glass; Burner 4 is arranged in the top of body of heater 2, and the tremie pipe 41 of burner 4 embeds the inwall of described body of heater 1 and over against deposited weight surface 3, tremie pipe 41 is apart from deposited weight surface 3 certain distances, and its distance setting is decided according to manufacturing technique requirent; Body of heater 2 one sides are established chimney 1, the flue entrance place of chimney 1 is lower than deposited weight surface 3 and is provided with, can guarantee that like this deposited weight surface 3 is in inner flue gas of the stove and forms in the steady flow condition and help at high temperature depositing on the deposited weight surface 3 fast, evenly, effectively from the silica dioxide granule from body of heater 2 tops, and can not fly away with flue gas;
Burner 4 is burners 4 of the preparation silica glass used always, hydrogen and oxygen burn in burner 4 and produce water vapour, water vapour again with tremie pipe 41 in the gaseous state silicon tetrachloride reaction of injection produce silica dioxide granule, spray to the deposited weight surface 3 in the body of heater 2, and on deposited weight surface 3, deposit and the formation silica glass.In the present embodiment, burner 4 is established a tremie pipe 41, and the discharging speed of silica dioxide granule can be regulated by the airshed of adjustment burner and the issuing velocity of tremie pipe 41.
Embodiment two
Still adopt the structure setting of embodiment one, difference is that burner 4 establishes a plurality of tremie pipes, tremie pipe 41,41 ' and 41 " be uniformly distributed in burner 4 hydrogen chamber 42 middle parts, as shown in Figure 3.
Embodiment three
Still adopt the structure setting of embodiment one, it is a plurality of that difference is that burner 4 is set to, evenly be arranged at the body of heater top, Fig. 4 illustrates the situation of establishing two burners 4, in concrete enforcement, the quantity that can determine burner 4 according to the size and the throughput of body of heater 2 can be provided with 8 at most, in this diagram one by one.
In this embodiment, each burner 4 can only be established single tremie pipe 41, also can be with the burner 4 of establishing a plurality of tremie pipes among the embodiment two, and all tremie pipes form silica glass simultaneously to deposited weight surface 3 spraying of material.
Adopt a plurality of burners 4 and the blanking of same burner multiple spot, can accelerate the sedimentation velocity of deposited weight surface, improved production efficiency.
The utility model adopts above-mentioned numerous embodiments, can production weight reach the 30-50 kilogram, and diameter is at the silica glass ingot of 250-500 millimeter, and sedimentation rate can reach the 200-500 Grams Per Hour, and the more horizontal cvd furnace of production efficiency improves 1-5 doubly.
The above only is preferred embodiment of the present utility model, can not limit the scope that the utility model is implemented with this, and all simple equivalent of being done according to the utility model description change and modify, and still belong to the content of the utility model patent disclosure.