CN2579622Y

CN2579622Y - Rotary positioning mechanism for separating fragile material

Info

Publication number: CN2579622Y
Application number: CN 02287346
Authority: CN
Inventors: 陈贵荣; 江锦忠
Original assignee: Industrial Technology Research Institute ITRI
Current assignee: Industrial Technology Research Institute ITRI
Priority date: 2002-11-29
Filing date: 2002-11-29
Publication date: 2003-10-15
Anticipated expiration: 2012-11-29

Abstract

The utility model mainly comprises a bearing element, a rotary table, and a driving mechanism which are assembled on a base of a brittle material piece spitting machine for supporting brittle materials. The brittle materials are rotated and positioned in the corresponding position favorable for marking or cutting, wherein the driving mechanism is a mechanism making use of a flexible driving piece to circle a rotary table for driving the brittle materials to rotate. Because of the flexible characteristics of the driving mechanism and the mode that the driving mechanism is fixedly arranged on the rotary table, the problems of the back clearance generated between the driving mechanism and a drive wheel or the rotary table or fine particles generated by friction with each other, etc. can be avoided. The generation of particles can be effectively reduced, and the precision can be improved. The flexible driving piece has easy manufacture and low cost, and the accurate adjustment action does not need to be carried out during the installation process. The assembly is easy.

Description

The rotation contraposition mechanism of separating fragile material

Technical field

The utility model relates to a kind of rotation contraposition mechanism of separating fragile material, refer to especially a kind of be common to carrying one fragile material and it can be rotated contraposition be beneficial to the mechanism of ruling or cutting.

Technical field

The equipment of wafer factory is important document indispensable in the manufacturing process, it requires nothing more than the generation for improving precision and reducing particulate, with present wafer pen machine or sliver machine, the motion that it drives the wafer rotation often utilizes the multiple sets of teeth wheel as driving element.Yet gear is the organ of a rigidity, between the different gears in intermeshing motion process, tend to produce the back clearance problem, this type of problem can influence the precision of wafer pen machine or sliver machine relatively, for the desired high precision characteristic of wafer, influences bigger.In addition, the gear motion between two rigid gears, also regular meeting produces particulates such as chip because of friction, requires very high wafer to dustproof, have to the especially problem paid attention to of this point.

The inventor in line with the spirit of actively creating, urgently thinks a kind of " rotation contraposition mechanism of separating fragile material " that can address the above problem based on this problem, and several times research experiment is eventually to finishing this creation.

Summary of the invention

Technical problem to be solved in the utility model is that a kind of rotation contraposition mechanism of separating fragile material is being provided, so that can and be fixedly arranged on the mode of turntable by the flexible nature of flexible actuator, with prevent to produce between itself and other element back clearance or each other friction produce particulate, and can effectively realize reducing the purpose that particulate produces, improves precision; Simultaneously flexible actuator be easy to make and cost low, and in installation process, also need not carry out precision adjustment, so also very easy on assembling.

For realizing above-mentioned purpose, the utility model provides a kind of rotation contraposition mechanism of separating fragile material, mainly include a bearing element, a turntable and a driving mechanism, this rotation contraposition mechanism is mounted on the pedestal of a fragile material sliver machine, so as with carry a fragile material and it can be rotated contraposition and be beneficial to the line or the cutting; Wherein, bearing element includes one first ring body, and it is fixedly arranged on the pedestal of fragile material sliver machine, and other bearing element still includes one second ring body and is mounted on above-mentioned first ring body with an additional ring is coaxial, so that can rotatablely move with respect to first ring body; One turntable be fixedly arranged on second ring body of above-mentioned bearing element, and the turntable outer peripheral edges is formed with an outer edge surface; One driving mechanism, include a flexible actuator, one CD-ROM drive motor and a driving wheel, this live axle is located on the output shaft of CD-ROM drive motor, and flexible actuator is set around between driving wheel and the turntable outer edge surface, so after CD-ROM drive motor starts rotation, by output shaft drive driving wheel and and then drive flexible actuator, because flexible actuator is set around the outer edge surface of turntable, so flexible actuator can drive the turntable that is fixedly arranged on bearing element second ring body again and rotatablely moves with respect to first ring body, and the fragile material that is carried on turntable just can rotatablely move whereby and rotate and locate with convenient line or cutting.

Because the utility model is to utilize a flexible actuator as the mechanism that drives the fragile material rotation, so because of its flexible nature and the mode that is fixedly arranged on turntable, can prevent to produce between itself and driving wheel or the turntable back clearance or each other friction produce problems such as particulate, can effectively realize reducing particulate generation, improve the purpose of precision.In addition, flexible actuator be easy to make and cost low, in installation process, also need not carry out very accurate adjustment simultaneously, so assembling is also very easy.

Bearing element of the present utility model, its second ring body and additional ring can screw mutually combine and form a ring groove, and the first ring body inner edge surface convexes with a ring flange and be able to embed in the ring groove, impelling second ring body and additional ring coaxially to be mounted on first ring body also can rotatablely move with respect to first ring body, the sliding bearing that this promptly is commonly called as also can use other as equivalent Bearning mechanisms such as ball bearing, needle bearings certainly.In addition, being formed with an oil lamella between ring groove and the ring flange can be in order to increase lubricant effect.

In the utility model, flexible actuator can at least one retaining element, is located at the outer edge surface of turntable as pressing plate etc. with pressure, so that rotate with the driven rotary platform.This flexible actuator can be an odontoid belt, also can use equivalent mechanism with flexible elements such as chain, sprocket wheel, and it more can be by tension adjustment wheel so that to adjust its tension force simultaneously.

Description of drawings

Fig. 1 is the enforcement state diagram of the utility model in wafer sliver machine.

Fig. 2 is a three-dimensional exploded view of the present utility model.

Fig. 3 is the profile of the utility model turntable and bearing element.

Fig. 4 is a three-dimensional combination figure of the present utility model.

The specific embodiment

For understanding technology contents of the present utility model better, be described as follows especially exemplified by a preferred embodiment.

At first see also Fig. 1, it is the enforcement state diagram of the utility model in wafer sliver machine 8.Seeing also Fig. 2, is three-dimensional exploded view of the present utility model, and it mainly includes a bearing element 2, a turntable 3 and a driving mechanism 4.Please consult Fig. 2 simultaneously, Fig. 3, wherein, bearing element 2 includes one first ring body 21, its by screw (figure do not show) screw lock on the pedestal 1 of wafer sliver machine 8 (seeing also Fig. 1), the inner edge surface of this first ring body 21 also convexes with a ring flange 211, in addition, bearing element 2 still includes one second ring body 22, its coaxial being mounted on first ring body 21, also group is established an additional ring 221 below this second ring body 22, this additional ring 221 and second ring body 22 mutually combine with screw and form a ring groove 222, and this ring groove 222 so that ring flange 211 can embed in this ring groove 222, and borrows it that second ring body 22 can be rotatablely moved with respect to first ring body 21 with additional ring 221 corresponding to above-mentioned ring flange 211; And be to increase by first ring body 21 and

additional ring

221 and 22 fluency that rotatablely move of second ring body, present embodiment more is formed with an oil lamella 23 to increase lubricant effect between ring groove 222 and ring flange 211.Above-mentioned bearing element 2 is a sliding bearing, also can use other as ball bearing, needle bearing certainly ... etc. equivalent Bearning mechanism.

In addition, a turntable 3 utilizes screw 7 to be fixedly arranged on second ring body 221 of above-mentioned bearing element 2, and it is by the drive of a driving mechanism 4 and can rotatablely move with respect to first ring body 21.This driving mechanism 4 includes a flexible actuator 41, a CD-ROM drive motor 42, a driving wheel 43 and tension adjustment wheel 44.Wherein, CD-ROM drive motor 42 is to be fixed on the motor seat 46, and motor seat 46 is fixed on the pedestal 1 with a junction piece 47 again, and afterwards, 43 of driving wheels are located on the output shaft 421 of CD-ROM drive motor 42.In addition on the said motor seat 46 and be concaved with a long shrinkage pool 461, one rotating shaft 49 is to be sheathed in this long shrinkage pool 461, and after tension adjustment wheel 44 is sheathed in the rotating shaft 49, can in long shrinkage pool 461, slippage re-use holder 48 after to be adjusted the finishing rotating shaft 49 is fixed on the motor seat 46 to adjust the position of tension adjustment wheel 44.In addition, the some of flexible actuator 41 is compressing tablets 453 before borrowing, pressing plate 451 and the back retaining element 45 formed of compressing tablet 454 and flexible actuator 41 pressed be located on the formed outer edge surface 31 of outer peripheral edges of above-mentioned turntable 3, wherein, pressing plate 451 is pushed down flexible actuator 41 earlier, if flexible actuator 41 is wide inadequately, then can be placed on flexible actuator 41 tops by later again compressing tablet 454, and then with screw 452 with preceding compressing tablet 453, pressing plate 451, back compressing tablet 454 and flexible actuator 41 are locked, make flexible actuator 41 can lock on the outer edge surface 31 of turntable 3, but impel flexible actuator 41 driven rotary platforms 3 to rotate.Another part as for flexible actuator 41 then is set around on the above-mentioned driving wheel 43, and relends mentioned strain adjustment wheel 44 to adjust its tension force.In the present embodiment, this flexible actuator 41 is odontoid belts, also can utilize equivalent flexible members such as sprocket wheel, chain certainly.

In addition, in present embodiment, wafer 9 is carried and is arranged on the turntable 3 by a wafer retainer ring 5, though present embodiment is to be example with wafer 9, also can be applicable to other fragile material.Above-mentioned wafer retainer ring 5 is a hollow ring body, ring-type hollow part part has then been depended on a glued membrane 52 in the middle of it, and wafer 9 promptly is paste to pay in this glued membrane 521, and the therefore little wafer of constituent parts that is produced after wafer 9 cuts can be subjected to the adhesive of glued membrane 52 and can not be scattered.This wafer retainer ring 5 includes two locating slots 51 in addition, and turntable 3 still includes two alignment pins 32, so wafer retainer ring 5 can locating slot 51 and alignment pin 32 correspondences be positioned turntable 3, and with pull of vacuum or magnetic force suction type wafer retainer ring 5 is fixed on the turntable 3 again.

See also Fig. 4, be above-mentioned each combination of elements figure, after CD-ROM drive motor 42 starts rotation, by output shaft 421 power is transferred on the driving wheel 43, and driving wheel 43 can drive flexible actuator 41 again, because the some of flexible actuator 41 is to press on the outer edge surface of being located at turntable 3 31 with retaining element 45, therefore flexible actuator 41 again driven rotary platform 3 rotatablely move, make the wafer 9 rotatable contrapositions that are carried on the turntable 3 be beneficial to line or cutting.In the present embodiment, for the anglec of rotation that makes turntable 3 can be subjected to effective control, the preceding compressing tablet 453 of said fixing element 45 can be designed to the L type, and can be in 211 groups of inductors 6 of establishing more than two of first ring body of bearing element 2, the L sheet of compressing tablet 453 and inductor 6 interact so that in order to detect the angle of control turntable 3 rotations before impelling, in the present embodiment, control turntable 3 can rotate in 90 ° ± 10 °.Certainly, inductor 6 also can be arranged on as substrate 1 and wait other place, be not limited to be mounted on first ring body 21 of bearing element 2, and the form of inductor 6 can be utilized optical sensor, limit switch elements such as (Limit Switch), then is to use the optical sensor mode to reach the purpose of turntable 3 anglec of rotation sensings in the present embodiment.

Because in the utility model, mainly utilize the mechanism of a flexible actuator 41 as turntable 3 rotations that drive carrying wafer 9, so because of its flexible nature and the mode that is fixedly arranged on turntable 3, can prevent to produce between itself and driving wheel 43 or the turntable 3 back clearance or each other friction produce problems such as particulate, can effectively reach the generation that reduces particulate, the purpose that improves precision.In addition, flexible actuator 41 be easy to make and cost low, in installation process, also must not carry out very accurate adjustment action simultaneously, so also very easy in the assembling.

State that to sum up above-mentioned many embodiment of the present utility model only are to give an example for convenience of explanation, the interest field that the utility model is advocated should be as the criterion with claimed scope.

Claims

1. the rotation contraposition mechanism of a separating fragile material is characterized in that, comprising:

One bearing element includes on the pedestal that one first ring body is fixedly arranged on a fragile material sliver machine, and one second ring body is mounted on this first ring body with an additional ring is coaxial, and can be with respect to this first ring body rotation;

One turntable is fixedly arranged on second ring body of this bearing element, and these turntable outer peripheral edges are formed with an outer edge surface; And

One driving mechanism, include a flexible actuator, a CD-ROM drive motor and a driving wheel, this live axle is located on the output shaft of this CD-ROM drive motor, and this flexible actuator is set around between this driving wheel and this turntable outer edge surface, and can be subjected to the driving of this CD-ROM drive motor to drive this turntable to rotate.

2. the rotation contraposition mechanism of separating fragile material as claimed in claim 1 is characterized in that described second ring body and additional ring mutually combine to form a ring groove, and this first ring body inner edge surface convexes with a ring flange and be able to embed in this ring groove.

3. the rotation contraposition mechanism of separating fragile material as claimed in claim 1 or 2 is characterized in that described second ring body and this additional ring are to mutually combine with screw.

4. the rotation contraposition mechanism of separating fragile material as claimed in claim 2 is characterized in that being formed with between described ring groove and this ring flange lubricating oil rete.

5. the rotation contraposition mechanism of separating fragile material as claimed in claim 1 is characterized in that described flexible actuator is meant an odontoid belt.

6. the rotation contraposition mechanism of separating fragile material as claimed in claim 1 is characterized in that described driving mechanism more includes tension adjustment wheel so that to adjust the tension force of this flexible actuator.

7. the rotation contraposition mechanism of separating fragile material as claimed in claim 1, it is characterized in that described driving mechanism more includes at least one retaining element so that will this flexible actuator be fixed in the outer edge surface of this turntable, compressing tablet, a pressing plate, a back compressing tablet and an a plurality of screw before above-mentioned this retaining element includes one, and this screw will be somebody's turn to do the outer edge surface that preceding compressing tablet, this pressing plate, this back compressing tablet and this flexible actuator are fixed on this turntable.

8. the rotation contraposition mechanism of separating fragile material as claimed in claim 7 is characterized in that described preceding compressing tablet is the L type, and can interact and detect the anglec of rotation of this turntable of control with at least two inductors.

9. the rotation contraposition mechanism of separating fragile material as claimed in claim 1, it is characterized in that, more include a retainer ring, be a hollow ring body shape and be arranged on this turntable, this retainer ring still includes at least one locating slot, and this turntable also includes at least one alignment pin, and this alignment pin is located this retainer ring by this locating slot.

10. the rotation contraposition mechanism of separating fragile material as claimed in claim 1, it is characterized in that described CD-ROM drive motor is fixed on the motor seat, this motor seat is fixed on this pedestal by a junction piece, this motor seat is provided with a long shrinkage pool, and tension adjustment wheel is installed on this long shrinkage pool by a rotating shaft.