CN2575690Y - Transparent plate with light induction effect - Google Patents
Transparent plate with light induction effect Download PDFInfo
- Publication number
- CN2575690Y CN2575690Y CN02279415U CN02279415U CN2575690Y CN 2575690 Y CN2575690 Y CN 2575690Y CN 02279415 U CN02279415 U CN 02279415U CN 02279415 U CN02279415 U CN 02279415U CN 2575690 Y CN2575690 Y CN 2575690Y
- Authority
- CN
- China
- Prior art keywords
- layer
- temperature
- waveguide
- refractive index
- temperature compensating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model relates to a temperature-insensitive array waveguide grating, which belongs to an optical communication device, particularly a wave length router, an optical multiplex / demultiplex device and other photonic devices used for optical communication and computer network. The utility model directly covers material having temperature performance which is different from waveguide material on a waveguide chip in order to improve the temperature characteristic of the devices and simplify fabrication technology. The utility model comprises a substrate, a lower cladding layer, a chip layer and a temperature compensating layer, wherein, the material of the chip layer has a positive refractive index coefficient with temperature variation, and the material of the temperature compensating layer has a negative refractive index coefficient with the temperature variation. A buffer layer can be arranged between the temperature compensating layer and the chip layer, and the flexibility of design can be enhanced. A covering layer can be arranged between the temperature compensating layer and the buffer layer in order to improve the polarization correlativity of the devices. The device of the utility model can be used in detectors, lasers, optical multiplex / demultiplex devices, adding / subtracting filters, 1 * N and N * 1 separators and N* N arrays.
Description
Technical field
The utility model belongs to the optic communication device technical field, specially refers to such as lambda router and the photonic devices such as light multiplexing demultiplexing device that are used for optical communication and computer network.
Background technology
(Arrayed Waveguide Grating is a kind ofly can be used for synthetic and the photonic device that separates different wave length luminous energy AWG) to array waveguide grating, its light by specific wavelength selectively from the input port to the delivery outlet.When being used for by from several inlets and/or to different wave length light time of several exits, AWG plays the effect of optical multiplexer and/or resolver, is used for luminous energy synthetic and/or that decompose different wave length.Fig. 1 has shown the schematic diagram of AWG.Input port 1 is accepted light from one or more input optical fibres, is transferred to planar waveguide 3 by input waveguide 2, enters waveguide array 4 again, and is transferred to planar waveguide 5 along waveguide array.The light that enters planar waveguide 5 is transferred to delivery outlet 7 by output waveguide 6, passes to one or more outlet optical fiber again.The length difference that AWG is designed between any two adjacent wave are led in the waveguide array all is identical, is generally the integral multiple of certain wavelength, and this wavelength is called the centre wavelength of AWG.Like this, the light that enters the specific wavelength of planar waveguide 3 from specific input waveguide 2 will accumulate in the ad-hoc location of planar waveguide 5 output terminals, be light relevant reinforcement on specific output waveguide of specific wavelength, the relevant counteracting on all other output waveguides, and on specific output waveguide, the light of other wavelength will can not assembled.Therefore AWG can be used as wavelength filter.Present commercial AWG is general, and the quartz waveguide of making on the thick substrate of a quartz or silicon that adopts is made.
In the practical application, AWG must effectively work in a quite wide temperature range.Therefore, require the operating characteristic of AWG in certain temperature range, to change not quite.Because thermal expansion and change of refractive, variation of temperature causes the variation of the optical path length of waveguide in the array.Because different waveguide has different length in the array, the light path of different waveguide is with different number change.When temperature variation, it will make the centre wavelength of AWG drift about, and influences its work, in present commercial AWG, adopt expensive temperature controller to stablize its working temperature, not only increased cost, and need long-term power supply, seriously hindered the widespread use of AWG.Therefore, temperature-insensitive type AWG earns widespread respect, but the design of temperature-insensitive type AWG is owing to need complicated processing technology mostly, and final certification is unsafty.The patent No. is 6118909 United States Patent (USP), utilizes to cover given shape (as triangle, the trapezoidal etc.) material (as polymeric material) that performance is different with waveguide material on specific region on the waveguide chip, makes the temperature sensitivity of AWG reduce greatly.This patent is compared with other technology, has simplified the manufacture craft of temperature-insensitive type AWG, but still need carry out multiple etching.
Summary of the invention
The temperature insensitive arrayed waveguide grating that the utility model proposed (AWG), by on waveguide chip, directly covering the temperature performance material different with waveguide material, the temperature characterisitic of device is improved, and has simplified the manufacture craft of temperature-insensitive type AWG greatly.
A kind of temperature insensitive arrayed waveguide grating of the present utility model, comprise waveguide core layer and polymeric material, it is characterized in that it comprises substrate, under-clad layer, sandwich layer and temperature compensating layer from bottom to top, described sandwich layer is made of semiconductor material, and its refractive index varies with temperature coefficient for just; The temperature compensating layer that topped polymeric material constitutes on the sandwich layer, its refractive index vary with temperature coefficient for negative; It is definite that its center core layer width W, height H and sandwich layer, temperature compensating layer and under-clad layer refractive index are separated Maxwell equation according to the waveguide design theory by numerical method, makes that the effective refractive index of waveguide is negative with variation of temperature.
Described temperature insensitive arrayed waveguide grating can be provided with the cushion that thickness is T between described temperature compensating layer and sandwich layer and the under-clad layer; Its refractive index can be identical with under-clad layer, it is definite that its center core layer width W, height H, buffer layer thickness and temperature compensating layer, cushion, sandwich layer and under-clad layer refractive index are separated Maxwell equation according to the waveguide design theory by numerical method, makes the effective refractive index of waveguide vary with temperature to negative.
Described temperature insensitive arrayed waveguide grating, can also be provided with the cap rock that thickness is S between described temperature compensating layer and the cushion, its material and substrate have close expansion coefficient, it is definite that its center core layer width W, height H, buffer layer thickness T, depth of cover S and temperature compensating layer, cushion, sandwich layer and under-clad layer refractive index are separated Maxwell equation according to the waveguide design theory by numerical method, makes the effective refractive index of waveguide vary with temperature to negative.
Temperature-insensitive type AWG of the present utility model is when making, behind the good waveguiding structure of etching, temperature compensating layer is covered on the chip, make the effective refractive index of waveguide bear with variation of temperature, the refractive index of width W, height H and temperature compensating layer polymkeric substance by regulating waveguide, can compensate Yin Wendu increases the influence of the waveguide length variation of generation to phase place, thereby improves the temperature independence of device.
Described temperature-insensitive type AWG can have one deck cushion between above-mentioned temperature compensating layer and waveguide when making, increase the dirigibility of design.The refractive index of width W, height H, buffer layer thickness T and temperature compensating layer polymkeric substance by regulating waveguide, make the effective refractive index of waveguide bear with variation of temperature, can compensate Yin Wendu increases the influence of the waveguide length variation of generation to phase place, thereby improves the temperature independence of device.
Described temperature-insensitive type AWG also can add a cap rock, again to improve the polarization correlated of AWG device between above-mentioned temperature compensating layer and cushion when making.Equally, can make the effective refractive index of waveguide bear with variation of temperature, can compensate Yin Wendu increases the influence of the waveguide length variation of generation to phase place, thereby improves the temperature independence of device.
The utility model is the temperature independence that improves device by the cross section structure that changes waveguide.More a step is understood, and except lambda router, the principle of this invention can apply to the electro-optical device of many waveguides of different length.According to device of this invention design can be used in detector, laser instrument, multiplexed/resolver, add/subtract in filtrator, 1 * N and N * 1 separation vessel, the N * N array.These devices can be by any suitable material, is included in that the semiconductor (as Si, InP and GaAs) with other replaces SiO2 in the waveguide, or with other material replacement polymkeric substance that negative dn/dT character is arranged.Different components can be designed to work in the different wavelength range that comprises visible light and microwave.
Description of drawings
Fig. 1 is the schematic diagram of AWG commonly used;
Fig. 2 is the synoptic diagram of a kind of waveguide cross-section of the present utility model;
Fig. 3 is the waveguide cross-section synoptic diagram that is added with cushion;
Fig. 4 is the waveguide cross-section synoptic diagram that is added with cap rock.
Embodiment
Fig. 2,3 and 4 has shown the principle explanation in each root waveguide cross section in an AWG.
Among the embodiment of Fig. 2, waveguide comprises under-clad layer 9, sandwich layer 10 and a temperature compensating layer 11 on substrate 8.Backing material can be quartz or silicon materials, and sandwich layer is a quartz material, and their refractive index is a positive number with the variation of temperature coefficient, is negative and vary with temperature coefficient as the refractive index of the polymeric material of temperature compensating layer.Under specific design, the effective refractive index of waveguiding structure of the present utility model is a negative with the variation of temperature coefficient in certain temperature range.Definition P=nL, n is a waveguide effective refractive index refractive index, L is the distance that light is propagated in material.DP/dT=Ldn/dT+ndL/dT is arranged.Expansion coefficient α=(1/L) dL/dT, then dP/dT=Ldn/dT+nL α=P (1/ndn/dT+ α).When dP/dT=0, temperature is compensated.This moment dn/dT=-n α.For quartz and silicon materials, α＞0 is always arranged.Therefore, under particular design,, separate Maxwell equation by numerical method according to the waveguide design theory, can obtain the refractive index of all layers among the size W of suitable waveguide and H and Fig. 2, make AWG of the present utility model in certain temperature range to temperature-insensitive.For example, when the centre wavelength of AWG is 1550nm, adopt quartz substrate, thick 500 μ m; Under-clad layer is the thick quartz of 15 μ m, and refractive index is 1.445; Ducting layer employing refractive index is 1.454 quartz, the wide 5 μ m of waveguide, high 6 μ m; Quartz all adopts identical positive refractive index to vary with temperature coefficient d n/dT and linear expansion coefficient α T, and numerical value is respectively 1.1 * 10
-5/ K and=5.5 * 10
-7/ K; For the centre wavelength drift that compensation temperature causes, temperature compensating layer employing refractive index is 1.44 polymeric material, and it is negative value that its refractive index varies with temperature coefficient, i.e. dn/dT=-1.1 * 10
-4/ K, temperature compensation layer thickness are 15 μ m, and by the method for finite difference, the centre wavelength drift that calculates temperature variation and be 0～50 maximum when spending is 0.78nm less than 0.03nm and there is not temperature controlled common AWG temperature drift under the same conditions.
In the structure of Fig. 3, between temperature compensating layer 11 and sandwich layer 10, add a cushion 12, the material of cushion can be quartz material, and its refractive index can be identical with under-clad layer, and thickness is T.Under specific design, for example select the refractive index of all layers among the size W of waveguide and H, cushion and Fig. 3, AWG of the present utility model in certain temperature range to temperature-insensitive.As adopting the parameter identical with Fig. 2 embodiment, buffer layer thickness is 0.32 μ m, and in the range of temperature of 0～50K, the maximum wavelength drift value that calculates is less than 0.03nm.
In the structure of Fig. 4, between temperature compensating layer 11 and cushion 12, add a cap rock 13, its material generally has the expansion coefficient close with substrate, can be used for improving the polarization correlated of AWG, and its thickness is S.Under specific design, AWG of the present utility model in certain temperature range to temperature-insensitive.As adopting the parameter identical with Fig. 2 embodiment, buffer layer thickness is 0.1 μ m, and when depth of cover was 0.3 μ m, in the range of temperature of 0～50K, the maximum wavelength drift value that calculates was less than 0.05nm.
Claims (3)
1. temperature insensitive arrayed waveguide grating, comprise waveguide core layer and polymeric material, it is characterized in that it comprises substrate, under-clad layer, sandwich layer and temperature compensating layer from bottom to top, described sandwich layer is made of semiconductor material, and its refractive index varies with temperature coefficient for just; The temperature compensating layer that topped polymeric material constitutes on the sandwich layer, its refractive index vary with temperature coefficient for negative; It is definite that its center core layer width W, height H and sandwich layer, temperature compensating layer and under-clad layer refractive index are separated Maxwell equation according to the waveguide design theory by numerical method, makes that the effective refractive index of waveguide is negative with variation of temperature.
2. temperature insensitive arrayed waveguide grating as claimed in claim 1 is characterized in that being provided with between described temperature compensating layer and sandwich layer and the under-clad layer cushion that thickness is T; Its refractive index can be identical with under-clad layer, it is definite that its center core layer width W, height H, buffer layer thickness and temperature compensating layer, cushion, sandwich layer and under-clad layer refractive index are separated Maxwell equation according to the waveguide design theory by numerical method, makes the effective refractive index of waveguide vary with temperature to negative.
3. temperature insensitive arrayed waveguide grating as claimed in claim 2, it is characterized in that being provided with between described temperature compensating layer and the cushion cap rock that thickness is S, its material and substrate have close expansion coefficient, it is definite that its center core layer width W, height H, buffer layer thickness T, depth of cover S and temperature compensating layer, cushion, sandwich layer and under-clad layer refractive index are separated Maxwell equation according to the waveguide design theory by numerical method, makes the effective refractive index of waveguide vary with temperature to negative.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02279415U CN2575690Y (en) | 2002-09-30 | 2002-09-30 | Transparent plate with light induction effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02279415U CN2575690Y (en) | 2002-09-30 | 2002-09-30 | Transparent plate with light induction effect |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2575690Y true CN2575690Y (en) | 2003-09-24 |
Family
ID=33742485
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02279415U Expired - Fee Related CN2575690Y (en) | 2002-09-30 | 2002-09-30 | Transparent plate with light induction effect |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2575690Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100465677C (en) * | 2005-03-04 | 2009-03-04 | 格姆法尔公司 | Optical device with reduced temperature dependence |
| CN101375192B (en) * | 2006-02-28 | 2012-02-15 | 坡因特可株式会社 | Temperature insensitive arrayed waveguide grating multiplexer for optical property compensation and the manufacturing method thereof |
| CN105571742A (en) * | 2016-02-15 | 2016-05-11 | 欧阳征标 | Ultra-high resolution temperature sensor based on external liquid bag and fixed wavelength |
| CN105606250A (en) * | 2016-02-15 | 2016-05-25 | 欧阳征标 | High-resolution temperature sensor based on built-in liquid capsule and fixed wavelength |
| CN105628247A (en) * | 2016-02-15 | 2016-06-01 | 欧阳征标 | Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point |
| CN105716729A (en) * | 2016-02-15 | 2016-06-29 | 欧阳征标 | High-resolution temperature sensor based on built-in liquid bag and spectrum valley point |
-
2002
- 2002-09-30 CN CN02279415U patent/CN2575690Y/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100465677C (en) * | 2005-03-04 | 2009-03-04 | 格姆法尔公司 | Optical device with reduced temperature dependence |
| CN101375192B (en) * | 2006-02-28 | 2012-02-15 | 坡因特可株式会社 | Temperature insensitive arrayed waveguide grating multiplexer for optical property compensation and the manufacturing method thereof |
| CN105571742A (en) * | 2016-02-15 | 2016-05-11 | 欧阳征标 | Ultra-high resolution temperature sensor based on external liquid bag and fixed wavelength |
| CN105606250A (en) * | 2016-02-15 | 2016-05-25 | 欧阳征标 | High-resolution temperature sensor based on built-in liquid capsule and fixed wavelength |
| CN105628247A (en) * | 2016-02-15 | 2016-06-01 | 欧阳征标 | Ultra-high resolution temperature sensor based on external liquid bag and spectrum valley point |
| CN105716729A (en) * | 2016-02-15 | 2016-06-29 | 欧阳征标 | High-resolution temperature sensor based on built-in liquid bag and spectrum valley point |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6137939A (en) | Method and apparatus for reducing temperature-related spectrum shifts in optical devices | |
| US6169838B1 (en) | Athermal waveguide grating based device having a temperature compensator in the slab waveguide region | |
| EP0880036B1 (en) | Method for altering the temperature dependence of optical waveguide devices | |
| JP4385224B2 (en) | Optical waveguide device and optical waveguide module | |
| WO2011056817A2 (en) | Optical device for wavelength locking | |
| US20020025116A1 (en) | Arrayed waveguide grating type optical multiplexer/demultiplexer | |
| JP4667927B2 (en) | Arrayed waveguide grating optical multiplexer / demultiplexer | |
| KR20200038278A (en) | Echelt grid multiplexer or demultiplexer | |
| CN2575690Y (en) | Transparent plate with light induction effect | |
| CN1402070A (en) | Temp-non-sensitive array waveguide grating | |
| US20030123799A1 (en) | Athermal arrayed waveguide grating | |
| US20030128927A1 (en) | Array waveguide grating | |
| Maru et al. | Athermal and center wavelength adjustable arrayed-waveguide grating | |
| KR20020092209A (en) | Optical waveguide apparatus and method of producing the same | |
| WO2008036251A2 (en) | Tapered composite waveguide for athermalization | |
| US7630602B2 (en) | Optical filter module and method of manufacturing the same | |
| Kamei | Recent progress on athermal AWG wavelength multiplexer | |
| CN105911642B (en) | A kind of design method of multi-mode multiplexing device | |
| WO1999021038A1 (en) | Phased array wavelength multiplexer | |
| Oguma et al. | Compactly folded waveguide-type interleave filter with stabilized couplers | |
| JP4375256B2 (en) | Waveguide-type temperature-independent optical multiplexer / demultiplexer | |
| CA2275800C (en) | Athermal waveguide grating based device having a temperature compensator in the slab waveguide region | |
| US20040240770A1 (en) | Reducing the polarization dependent coupling coefficient in planar waveguide couplers | |
| Mohammed et al. | Low loss a thermal arrayed waveguide grating (AWG) module for passive and active optical network applications | |
| Mohamed et al. | Rapid Progress of a Thermal Arrayed Waveguide Grating Module for Dense Wavelength Division Multiplexing Applications |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |