CN2575575Y - Digital control vapour-water exchanging constant temperature water supply device - Google Patents
Digital control vapour-water exchanging constant temperature water supply device Download PDFInfo
- Publication number
- CN2575575Y CN2575575Y CN 02282480 CN02282480U CN2575575Y CN 2575575 Y CN2575575 Y CN 2575575Y CN 02282480 CN02282480 CN 02282480 CN 02282480 U CN02282480 U CN 02282480U CN 2575575 Y CN2575575 Y CN 2575575Y
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- China
- Prior art keywords
- heater
- cartridge type
- temperature
- furnace
- furnace body
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- Expired - Lifetime
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Abstract
The utility model discloses a cylindrical radiation type heater, which comprises a cylindrical furnace body. The furnace wall of the furnace body is wound with a heating wire. The outer side of the furnace body is provided with an insulating layer. The heating wire is controlled by a temperature controlling unit device. The periphery of the furnace bottom of the furnace body is uniformly distributed with a plurality of holes. The heater has a reasonable and compact structure. The area of the constant temperature zone for temperature is provided with a large enough size, which can satisfy the requirement of fabricating superconducting films of large areas and double faces. The cylindrical radiation type heater also has the advantages of adjustable temperature, wide selecting range, good repeatability, long service life and strong anti-damage capability.
Description
Technical field
The utility model belongs to the firing equipment in the film preparing technology, relates in particular to the cartridge type radiant heater in a kind of superconducting thin film preparation.
Background technology
The preparation method of film has direct current magnetron sputtering process, pulse laser method, coevaporation method or the like.Many film-forming methods all need suitable heater, so heater is the key component in the preparation membrane equipment.It is related to the quality of film quality.Usually the heater that adopts has Halogen lamp LED heating, carbon dioxide laser heating, monocrystalline silicon heating etc.All have service life short with upper heater, shortcomings such as flat-temperature zone instability will influence film quality undoubtedly, increased the difficulty of definite film optimal processing parameter, influence the repeatability of technological parameter, particularly the preparation of large area two-side superconducting thin film is had higher requirement to heater.
Summary of the invention
The purpose of this utility model provides a kind of cartridge type radiant heater, its large area two-side superconducting thin film that can be the good good uniformity of processability is given security, simultaneously under vacuum, oxygen atmosphere, in the high temperature, the stable performance of heater self material does not have volatile matter to pollute vacuum chamber.
For achieving the above object, the utility model is taked following design: a kind of cartridge type radiant heater, comprise a cartridge type body of heater, and on the furnace wall of body of heater, be wound with heater strip, there is thermal insulation layer in the outside of body of heater, and described heater strip is controlled by a temperature control cell arrangement; The uniform some holes of furnace bottom.
The utility model has the advantages that: heater structure is rationally compact; Temperature flat-temperature zone area has enough big size, can satisfy the requirement of preparation large area two-side superconducting thin film; Temperature is adjustable and range of choice is wide, good reproducibility, and long service life, survivability is strong.
Description of drawings
Fig. 1 is the utility model structural representation
Fig. 2 is another example structure schematic diagram of the utility model
The specific embodiment
The utility model is described in further detail below in conjunction with accompanying drawing
As shown in Figure 1, the utility model cartridge type radiant heater comprises a cartridge type body of heater 1, is wound with heater strip 2 on the furnace wall of body of heater, and there is thermal insulation layer 3 in the outside of body of heater, and described heater strip is controlled by a temperature control cell arrangement.The core of this temperature control cell arrangement is a temperature controller 8 (can adopt Continental Europe 818 temperature controllers), and its control end output is through transformer 7 (B
L) connect heating wire, one is positioned over the input of the thermocouple 6 signal termination temperature controllers 8 in the furnace chamber.In furnace bottom 5 uniform some holes, be mainly used in the temperature uniformity that improves in the burner hearth.
Described heater strip can be used nickel filament, platinum filament or other refractory metal silk, and heater strip adopts double wrap or erects around mode on the stainless steel cylinder outer wall or inwall of body of heater, is with porcelain tube in case of necessity on heater strip.
According to the size of body of heater furnace chamber and heater strip around mode and orientation determine whether adding soaking tube 4 in the inboard of body of heater, generally when heater strip on the stainless steel cylinder inwall of body of heater and body of heater should add the soaking tube when higher.
The thermocouple of described temperature control cell arrangement places in the furnace chamber, looks the furnace chamber size and decides thermocouple location, and when furnace chamber was low, the position can be random, should be positioned at 1/3rd high places of stove when furnace chamber is higher.
Body of heater can be selected metal or nonmetal exotic material for use, and the soaking tube is also selected metal or nonmetallic materials too for use, the heat conduction good; Thermal insulation layer selects for use very thin metallic plate to make, and requires the material of poor thermal conduction; Above material must guarantee not have in vacuum high-temperature, oxygen atmosphere volatile matter to pollute vacuum chamber.
Operation principle of the present utility model is: the test value that temperature controller transmits according to thermocouple is constantly adjusted output control, the temperature of heater strip heating is remained on the predetermined steady state value, to satisfy the preparation of the thin-film material under the relevant temperature.
The utility model cartridge type radiant heater is equally applicable to the preparation of other thin-film material.
Below be specific embodiment:
Embodiment 1: be used for the cartridge type radiant type heating of magnetically controlled DC sputtering equipment
With reference to shown in Figure 2, the cartridge type body of heater, 53mm in the high 63mm, Φ, wall thickness 3mm makes of stainless steel material; Heater strip adopts nickel filament or other high temperature resistant heating wire, and the double wrap mode is on body of heater stainless steel cylinder outer wall; According to body of heater size decision stove filament length degree.Thermal insulation layer adopts the thick corrosion resistant plate of 1mm to make, the furnace bottom thick corrosion resistant plate of 5mm, uniform 6 holes on Φ 59mm size; Thermocouple location is random; Transformer, input AC 220V, output 40V, 150A; Adopting Continental Europe 818 temperature controllers, precision reaches ± and 0.1 ℃.Adopt dc magnetron sputtering method.Yttrium barium copper oxide (YBCO) superconducting thin film Tc＞90K (77K, 0T) of heater preparation.
Embodiment 2: be used for the cartridge type radiant type heating of magnetically controlled DC sputtering equipment
50mm in the high 60mm of cartridge type body of heater, Φ, wall thickness 3mm makes of stainless steel material; Heater strip adopts nickel filament or other high temperature resistant heating wire, and is perpendicular around mode, perpendicular on inboard wall of furnace body, and overlaps porcelain tube on heater strip; Can also can use without the soaking tube; Thermal insulation layer is adopted and is done the thick corrosion resistant plate making of 1mm; Furnace bottom is with thick 5mm corrosion resistant plate, uniform 6 holes on Φ 56mm size; Thermocouple location can arbitrarily be put to furnace chamber; Adopt strong current transformer, input AC 220V, output 20V, 400A; With Continental Europe 818 temperature controllers, precision reaches ± and 0.1 ℃.Adopt dc magnetron sputtering method, and the YBCO superconducting thin film Tc＞91K for preparing with this utility model heater (77K, OT).
Embodiment 3: be used for the cartridge type radiant type heating of magnetically controlled DC sputtering equipment
The cartridge type body of heater, 75mm in the high 78mm, Φ, wall thickness 3mm makes with stainless steel; Heater strip adopts platinum filament or other and the high temperature heating wire, the double wrap mode, and double wrap is on the inwall of cartridge type body of heater.Be provided with the soaking tube, 73mm in the high 78mm, Φ, wall thickness 1mm uses quartz material; Thermal insulation layer adopts the thick corrosion resistant plate of 0.5mm to make; Furnace bottom is made of the corrosion resistant plate of thick 8mm, uniform 3-6 hole on the size of Φ 81mm, and thermocouple location is located (side on the lower side) in one of stove Senior Three, and transformer input AC 200V exports 40V, 150A; Adopting Continental Europe 818 temperature controllers, precision reaches ± and 0.1 ℃, use dc magnetron sputtering method, use this utility model heater to prepare the YBCO double sided superconducting film, the two sides performance all reaches: Tc＞90K, Jc＞10
6A/cm
2(77K, OT), Rs＜0.84m Ω (77K, 10GHz).
Claims (6)
1, a kind of cartridge type radiant heater comprises a cartridge type body of heater, it is characterized in that: be wound with heater strip on the furnace wall of body of heater, there is thermal insulation layer in the outside of body of heater, and described heater strip is controlled by a temperature control cell arrangement.
2, cartridge type radiant heater according to claim 1 is characterized in that: described heater strip adopts the double wrap mode on body of heater stainless steel cylinder outer wall.
3, cartridge type radiant heater according to claim 1 is characterized in that: described heater strip adopts and erects around mode on inboard wall of furnace body, and is with porcelain tube on the heater strip.
4, cartridge type radiant heater according to claim 1 is characterized in that: described heater strip adopts the double wrap mode on inboard wall of furnace body.
5, according to claim 4 or 5 described cartridge type radiant heaters, it is characterized in that: be equipped with the soaking tube in the inboard of body of heater.
6, cartridge type radiant heater according to claim 5 is characterized in that: described heater strip adopts platinum filament.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02282480 CN2575575Y (en) | 2002-11-04 | 2002-11-04 | Digital control vapour-water exchanging constant temperature water supply device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02282480 CN2575575Y (en) | 2002-11-04 | 2002-11-04 | Digital control vapour-water exchanging constant temperature water supply device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2575575Y true CN2575575Y (en) | 2003-09-24 |
Family
ID=33744554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02282480 Expired - Lifetime CN2575575Y (en) | 2002-11-04 | 2002-11-04 | Digital control vapour-water exchanging constant temperature water supply device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2575575Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101463459B (en) * | 2008-11-26 | 2012-01-25 | 王新田 | Aluminizing furnace |
| CN104515378A (en) * | 2013-09-27 | 2015-04-15 | 江苏恒力炉业有限公司 | Energy-saving furnace body structure of large-type pit furnace |
-
2002
- 2002-11-04 CN CN 02282480 patent/CN2575575Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101463459B (en) * | 2008-11-26 | 2012-01-25 | 王新田 | Aluminizing furnace |
| CN104515378A (en) * | 2013-09-27 | 2015-04-15 | 江苏恒力炉业有限公司 | Energy-saving furnace body structure of large-type pit furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20121104 Granted publication date: 20030924 |