CN103276366B - Box-type heater suitable for preparation process of roll-to-roll continuous strips - Google Patents
Box-type heater suitable for preparation process of roll-to-roll continuous strips Download PDFInfo
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- CN103276366B CN103276366B CN201310186128.7A CN201310186128A CN103276366B CN 103276366 B CN103276366 B CN 103276366B CN 201310186128 A CN201310186128 A CN 201310186128A CN 103276366 B CN103276366 B CN 103276366B
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- external heat
- roll shaft
- heating
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
- Furnace Details (AREA)
Abstract
The invention relates to a box-type heater suitable for a preparation process of roll-to-roll continuous strips. The box-type heater comprises a multichannel roll shaft, an inner heating cover and an outer heating cover, wherein the inner heating cover is arranged at the inner side of the multichannel roll shaft, the outer heating cover is arranged at the outer side of the multichannel roll shaft, thermocouple groups are respectively arranged on the inner heating cover and the outer heating cover, inner heating infrared-ray quartz lamp tubes are arranged on the inner heating cover, and outer heating infrared-ray quartz lamp tubes are arranged on the outer heating cover. The box-type heater is adjustable, wide in select range, high in repeatability, long in service life, small in size, low in energy consumption, high in efficiency, energy-saving and reasonable and compact in structure, has a uniform-height heating effect, the structure is, and ensures the large area of a constant-temperature region, so that the heating efficiency is greatly improved, the service life of the heating lamp tubes is prolonged, the requirements on industrial preparation of the roll-to-roll continuous strips can be met, and particularly, the requirements on preparation of second-generation high-temperature superconductive long strips can be met.
Description
Technical field
The present invention relates to a kind of box heater, particularly relate to a kind of box heater of applicable suitability for industrialized production plated film, belt material of high temperature superconduct, semiconductor film, photoelectricity coated material and other function film coated material and device arts can be widely used in.Belong to the heating installation in Coating Materials technology of preparing, particularly relate to the box heater in the preparation of a kind of second-generation high-temperature superconductor.
Background technology
Film under vacuum technology of preparing is one of most important technology in the world today, refers to utilize the method for physics or chemistry to deposit at workpiece surface the surface treatment method that one deck has special purpose rete in vacuum environment.It is widely used in industry, military project medicine, space flight, the every field such as scientific research.Up to the present people have developed tens kinds of film preparing technologies, such as direct current magnetron sputtering process, pulsed laser deposition, coevaporation method etc.Many film-forming methods all need suitable well heater, for ensureing the film performance of workpiece surface, generally need by workpiece heat to certain temperature in vacuum plating process, and temperature deviation scope has strict requirement, and therefore the key component in Coating Materials equipment prepared by well heater.It is related to the microtexture of Coating Materials, and then determines the performance index of coated material.
At present, conventional in permanent vacuum coating process workpiece heat method is radiation heating and induction heating.
Infrared radiation heating is by the metallic heating body higher to resistance ratio, pass to big current, make heating element produce larger heat, its temperature reaches 1500 ~ 2000 DEG C, the heating element of high temperature mainly in the thermal-radiating mode of infrared band to graphite base or the high temperature resistant substrate transferring heat of well heater.Structure is simple, heating principle simple, temperature control is convenient to adopt the main advantage of resistive heating to comprise, and as traditional type of heating, its technology is very ripe.It is high that shortcoming mainly contains cost, safeguards relative difficulty, and warming and cooling rate is relatively slow.Generally need rotational workpieces to improve the homogeneity of plated film in vacuum plating process, and when using the method heated parts, workpiece and thermistor are fixed and cannot move, and thus plated film homogeneity is not good.
Induction heating uses close to 80 years in industry member, and high frequency induction heater is the equipment utilizing electromagnetic induction principle to be heat energy electric energy conversion.High-frequency induction heating is by passing to the electric current of high frequency change to coil, the strong flux of polarization instantaneous variation in coil, the heated materials such as metal are placed in coil, flux will through whole heated material, the direction inner contrary with heating current at heated material produces very large eddy current, because the resistance in heated material produces joule heating, the temperature of material self is made to increase rapidly.It has plurality of advantages compared with traditional heating installation: Heating temperature is high, and is non-contact thermal, and this is very superior for baroque cavity; Heating efficiency is high, energy-conservation; Rate of heating is fast, and the surface oxidation of heating object is few; Easy realization controls automatically; Operating environment is good; Totally pollution-free.Shortcoming has skin effect, and high frequency magnetic field can have an impact to the equipment of surrounding.
To well heater, there is higher requirement in the dynamic coating process of serialization.As shown in Figure 1, adopt contact-type flat heater in existing serialization filming equipment, often need in coating process to carry out in certain oxygen atmosphere, so resistive heater is due to problem of oxidation, work-ing life is shorter.At present.Generally use airtight infrared quartz heat lamp pipe 3 as heating source.Infrared quartz heat lamp pipe 3 is positioned at hot-plate 1 back side, in thermal-radiating mode, hot-plate 1 is heated to certain temperature.Metal base band 2 is with multichannel mode close contact hot-plate 1 lower surface.When metal base band 2 is by hot-plate 1, hot-plate 1 with contact-type thermal conduction and thermal radiation two kinds of modes by heat transmission for metal base band 2, and make metal base band 2 reach base reservoir temperature needed for plated film.When using such open type flat heating device heated sample, because of the infrared rays of infrared quartz heat lamp pipe radiation in heating unit, only some passes to hot-plate, other another part infrared rays are wasted, so the heating efficiency of infrared quartz heat lamp pipe itself is not high.With regard to heating efficiency, because hot-plate adopts open type design, so the thermal radiation of hot-plate itself can lose most of heat again.The heat passing to metal base band eventually through hot-plate only accounts for the sub-fraction of well heater total consumed power.In addition, the temperature difference residing for the metal base band back side and front is very large, and the inner through-thickness of metal base band also can be caused to have larger thermograde, more difficult control temperature homogeneity.
Summary of the invention
A kind of box heater being suitable for volume to volume serialization band preparation technology provided by the invention, the Coating Materials that can be quick processability excellent homogeneity good is given security, particularly high-quality second-generation high-temperature superconductor, simultaneously under vacuum, oxygen atmosphere, in high temperature, the stable performance of well heater own material, do not have volatile matter to pollute vacuum chamber, improve heating efficiency and reliability.
In order to achieve the above object, the invention provides a kind of box heater being suitable for volume to volume serialization band preparation technology, this box heater comprises hyperchannel roll shaft, is arranged on the interior heating mantles inside hyperchannel roll shaft, is arranged on the external heat cover outside hyperchannel roll shaft.
Described box heater also comprises some thermopair groups, and this thermopair group is separately positioned on interior heating mantles and external heat cover.
Described box heater also comprises some interior HEATING INFRARED line quartz burners and external heat quartz infrared cooker fluorescent tube, and this interior HEATING INFRARED line quartz burner is arranged on interior heating mantles, and this external heat quartz infrared cooker fluorescent tube is arranged on external heat cover.
Described hyperchannel roll shaft is cylindric, and this hyperchannel roll shaft repeatedly reels sample.
Described interior heating mantles is cylindric.
Described external heat cover is cylindric, and the bottom of this external heat cover has opening.
The material of described hyperchannel roll shaft, interior heating mantles and external heat cover is high temperature alloy.
The outside of described external heat cover adopts thermal insulation material parcel.
The diameter of described interior heating mantles, external heat cover and hyperchannel roll shaft and the size of external heat cover lower openings and the size in plated film district suitable.
The present invention compared with prior art, has the following advantages and technique effect:
1, owing to have employed semi-enclosed type of heating, heating efficiency is substantially increased.
2, compared with open type panel heater, box heater inside has better temperature homogeneity.
3, compared with open type panel heater, owing to there is not side effect, so flat-temperature zone area is large, adds hyperchannel technique, substantially increase effective plated film district area, thus improve plated film speed, be suitable for the requirement of industrialization plated film;
4, because inside and outside heating mantles can the positive and negative of simultaneously heating of metal base band sample, so greatly reduce infrared heating quartz burner load, the work-ing life of infrared heating quartz burner is added.
5, temperature is adjustable and range of choice is wide, by the sheet metal strip maximum heating temperature of open type panel heater by 750-800
oc has brought up to 900
oc.Temperature-controlled precision is by 10
oc has brought up to 5
oc.
6, use this well heater, conveniently determine thin-film technique parameter, and possess better repeatability, long service life.
7, design is more compact, and volume is little, under the condition of equal production capacity, can the volume of corresponding reduction plated film vacuum apparatus cavity, thus save the overall cost of filming equipment, make product have more cost advantage.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the heating unit in background technology;
Fig. 2 is stereographic map of the present invention;
Fig. 3 is front view of the present invention;
Fig. 4 is the stereographic map of hyperchannel roll shaft in the present invention.
Embodiment
Following according to Fig. 2 ~ Fig. 4, illustrate preferred embodiment of the present invention.
As shown in Figure 2, the invention provides a kind of box heater being suitable for volume to volume serialization band preparation technology, this box heater comprises hyperchannel roll shaft 1, is arranged on the interior heating mantles 2 inside hyperchannel roll shaft 1, is arranged on the external heat cover 3 outside hyperchannel roll shaft 1.
As shown in Figure 4, described hyperchannel roll shaft 1 is cylindric, and this hyperchannel roll shaft 1 repeatedly reels sample.
As shown in Figures 2 and 3, described interior heating mantles 2 is cylindric.
As shown in Figures 2 and 3, described external heat cover 3 is cylindric, and the bottom of this external heat cover 3 has opening 31.
As shown in Figures 2 and 3, described box heater also comprises some thermopair groups 4, and this thermopair group 4 is separately positioned on interior heating mantles 2 and external heat cover 3, and this thermopair group 4 controls the temperature of interior heating mantles 2 and external heat cover 3.
As shown in Figures 2 and 3, described box heater also comprises some interior HEATING INFRARED line quartz burners 5 and external heat quartz infrared cooker fluorescent tube 6, this interior HEATING INFRARED line quartz burner 5 is arranged on interior heating mantles 2, and this external heat quartz infrared cooker fluorescent tube 6 is arranged on external heat cover 3.
The material of described hyperchannel roll shaft 1 is the high temperature alloys such as INCONEL.
Described interior heating mantles 2 and external heat cover 3 adopt High-temperature resistant alloy material to make, such as, and Hastelloy (Hastelloy), Inconel(nickel alloys) (Inconel) etc.
The outside of described external heat cover 3 adopts thermal insulation material parcel, and such as, the high-temperature resistant thermal insulating materials such as alumina-ceramic, to reduce thermal losses.
The diameter of described interior heating mantles 2, external heat cover 3 and hyperchannel roll shaft 1 and the size of external heat cover 3 lower openings 31 and the size in plated film district suitable.Heater size is relevant to filming equipment vacuum cavity size.Generally, if the length of hyperchannel roll shaft 1 is 1 meter, diameter is 20 centimetres, plated film flat-temperature zone length, and namely external heat cover lower openings 31 is of a size of: 50 cm long, and 10 centimetres wide.
Described hyperchannel roll shaft 1 repeatedly reels sample, rotate sample, make sample with the walking of the speed of setting, through the plated film district that external heat cover lower openings exposes, so not only can increase plated film speed, and the homogeneity of film can be ensured, electric energy conversion is heat energy by interior HEATING INFRARED line quartz burner 5, part heat energy directly passes to the sample back side on hyperchannel roll shaft 1, part heat energy passes to the back side of the sample on hyperchannel roll shaft 1 again through the reflection of interior heating mantles 2, electric energy conversion is become heat energy by external heat quartz infrared cooker fluorescent tube 6 equally, part heat energy directly passes to the front of the sample on hyperchannel roll shaft 1, part heat energy passes to the front of sample again through the reflection of external heat cover 3.Hyperchannel roll shaft two ends are fixed on the high temperature resistant support of bearing.
Embodiment one
Be suitable for a volume to volume serialization band preparation technology's box heater, this box heater comprises hyperchannel roll shaft 1, is arranged on the interior heating mantles 2 inside hyperchannel roll shaft 1, is arranged on the external heat cover 3 outside hyperchannel roll shaft 1.Respectively thermopair group 4 is set on interior heating mantles 2 and external heat cover 3.Interior heating mantles 2 arranges interior HEATING INFRARED line quartz burner 5, heating mantles 3 is arranged external heat quartz infrared cooker fluorescent tube 6 outside.
This box heater is placed in successive pulse laser deposition equipment, multiple tracks winds sample, the temperature of setting sample is 800 DEG C, open heating unit and laser apparatus, and contrast with the heating unit in background technology, equitemperature starts the high-temperature superconducting thin film plating same thickness after arriving set(ting)value.
Experiment shows: the heating load power of traditional heating unit middle infrared (Mid-IR) quartz heating fluorescent tube needs more than 90% just can reach design temperature, and heating unit of the present invention only needs the heating power of 40-50% can reach design temperature, and flat-temperature zone strengthens, and coating speed improves 3 times.
Embodiment two
Be suitable for a volume to volume serialization band preparation technology's box heater, this box heater comprises hyperchannel roll shaft 1, is arranged on the interior heating mantles 2 inside hyperchannel roll shaft 1, is arranged on the external heat cover 3 outside hyperchannel roll shaft 1.Respectively thermopair group 4 is set on interior heating mantles 2 and external heat cover 3.Interior heating mantles 2 arranges interior HEATING INFRARED line quartz burner 5, heating mantles 3 is arranged external heat quartz infrared cooker fluorescent tube 6 outside.
This box heater is placed in continuous magnetron sputtering equipment, multiple tracks winds sample, the temperature of setting sample is 750 DEG C, open heating unit and shielding power supply, and contrast with the heating unit in background technology, equitemperature starts the aluminum oxide film plating same thickness after arriving set(ting)value.
Experiment shows: the heating power of traditional heating unit middle infrared (Mid-IR) quartz heating fluorescent tube needs more than 70% just can reach design temperature, and heating unit of the present invention only needs the heating power of 30% can reach design temperature, thus substantially increase the utilization ratio of heat energy, and add the work-ing life of quartz burner.
Although content of the present invention has done detailed introduction by above preferred embodiment, will be appreciated that above-mentioned description should not be considered to limitation of the present invention.After those skilled in the art have read foregoing, for multiple amendment of the present invention and substitute will be all apparent.Therefore, protection scope of the present invention should be limited to the appended claims.
Claims (7)
1. one kind is suitable for the box heater of volume to volume serialization band preparation technology, it is characterized in that, this box heater comprises hyperchannel roll shaft (1), be arranged on the interior heating mantles (2) of hyperchannel roll shaft (1) inner side, be arranged on the external heat cover (3) in hyperchannel roll shaft (1) outside, described interior heating mantles (2) is cylindric, and described external heat cover (3) is cylindric, and the bottom of this external heat cover (3) has opening (31).
2. be suitable for the box heater of volume to volume serialization band preparation technology as claimed in claim 1, it is characterized in that, described box heater also comprises some thermopair groups (4), and this thermopair group (4) is separately positioned on interior heating mantles (2) and external heat cover (3).
3. be suitable for the box heater of volume to volume serialization band preparation technology as claimed in claim 2, it is characterized in that, described box heater also comprises some interior HEATING INFRARED line quartz burners (5) and external heat quartz infrared cooker fluorescent tube (6), this interior HEATING INFRARED line quartz burner (5) is arranged on interior heating mantles (2), and this external heat quartz infrared cooker fluorescent tube (6) is arranged on external heat cover (3).
4. be suitable for the box heater of volume to volume serialization band preparation technology as claimed in claim 1, it is characterized in that, described hyperchannel roll shaft (1) is cylindric, and this hyperchannel roll shaft (1) repeatedly reels sample.
5. be suitable for the box heater of volume to volume serialization band preparation technology as claimed in claim 1, it is characterized in that, the material of described hyperchannel roll shaft (1), interior heating mantles (2) and external heat cover (3) is high temperature alloy.
6. be suitable for the box heater of volume to volume serialization band preparation technology as claimed in claim 1, it is characterized in that, the outside of described external heat cover (3) adopts thermal insulation material parcel.
7. as the box heater being suitable for volume to volume serialization band preparation technology in claim 1-6 as described in any one, it is characterized in that, the diameter of described interior heating mantles (2), external heat cover (3) and hyperchannel roll shaft (1) and the size of external heat cover (3) lower openings (31) and the size in plated film district suitable.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310186128.7A CN103276366B (en) | 2013-05-20 | 2013-05-20 | Box-type heater suitable for preparation process of roll-to-roll continuous strips |
| PCT/CN2013/001058 WO2014186924A1 (en) | 2013-05-20 | 2013-09-12 | Box heater suitable for roll-to-roll continuous strip preparation process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310186128.7A CN103276366B (en) | 2013-05-20 | 2013-05-20 | Box-type heater suitable for preparation process of roll-to-roll continuous strips |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103276366A CN103276366A (en) | 2013-09-04 |
| CN103276366B true CN103276366B (en) | 2015-07-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310186128.7A Active CN103276366B (en) | 2013-05-20 | 2013-05-20 | Box-type heater suitable for preparation process of roll-to-roll continuous strips |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103276366B (en) |
| WO (1) | WO2014186924A1 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103276366B (en) * | 2013-05-20 | 2015-07-22 | 上海超导科技股份有限公司 | Box-type heater suitable for preparation process of roll-to-roll continuous strips |
| CN109746142B (en) * | 2017-11-06 | 2021-04-02 | 张家港康得新光电材料有限公司 | Film coating device |
| CN108220888B (en) * | 2017-12-27 | 2019-12-27 | 上海超导科技股份有限公司 | Heating device suitable for pulse laser coating and pulse laser coating device thereof |
| CN108977791B (en) * | 2018-07-24 | 2020-03-27 | 电子科技大学 | A ohmic heating device for coiling deposit film under high temperature |
| CN110791745B (en) * | 2019-12-12 | 2024-02-13 | 上海超导科技股份有限公司 | Orthogonal radiation auxiliary conduction heating equipment suitable for roll-to-roll continuous strip |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5781692A (en) * | 1997-06-04 | 1998-07-14 | Trw Inc. | Quartz lamp heater assembly for thin film deposition apparatus |
| CN201148465Y (en) * | 2007-11-15 | 2008-11-12 | 常州英诺能源技术有限公司 | Double-temperature field chemical vapor deposition apparatus |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5916967A (en) * | 1982-07-20 | 1984-01-28 | Seiko Epson Corp | Apparatus for heating substrate |
| JPS63293158A (en) * | 1987-05-26 | 1988-11-30 | Sumitomo Metal Ind Ltd | Vacuum deposition device |
| US20050005846A1 (en) * | 2003-06-23 | 2005-01-13 | Venkat Selvamanickam | High throughput continuous pulsed laser deposition process and apparatus |
| JP4296263B2 (en) * | 2003-09-11 | 2009-07-15 | 独立行政法人産業技術総合研究所 | Clean ultra-high temperature heater for substrate heating |
| FI117982B (en) * | 2006-01-20 | 2007-05-15 | Metso Paper Inc | Metal belt manufacture for use in paper/board machine or in finishing machine, includes placing metal belt blanks narrower than final belt width side-by-side and/or in succession, and welding joints by friction welding |
| CN103276366B (en) * | 2013-05-20 | 2015-07-22 | 上海超导科技股份有限公司 | Box-type heater suitable for preparation process of roll-to-roll continuous strips |
-
2013
- 2013-05-20 CN CN201310186128.7A patent/CN103276366B/en active Active
- 2013-09-12 WO PCT/CN2013/001058 patent/WO2014186924A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5781692A (en) * | 1997-06-04 | 1998-07-14 | Trw Inc. | Quartz lamp heater assembly for thin film deposition apparatus |
| CN201148465Y (en) * | 2007-11-15 | 2008-11-12 | 常州英诺能源技术有限公司 | Double-temperature field chemical vapor deposition apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2014186924A1 (en) | 2014-11-27 |
| CN103276366A (en) | 2013-09-04 |
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