CN2573157Y

CN2573157Y - Three clamping feet gripper

Info

Publication number: CN2573157Y
Application number: CN 02260416
Authority: CN
Inventors: 王正官
Original assignee: Shanghai Institute of Technical Physics of CAS
Current assignee: Shanghai Institute of Technical Physics of CAS
Priority date: 2002-09-29
Filing date: 2002-09-29
Publication date: 2003-09-17
Anticipated expiration: 2012-09-29

Abstract

The utility model discloses a pair of three-clamping foot gripper, which can be used for picking and clamping larger flake-shaped samples in the process of electronic device production. The three-clamping foot gripper comprises three pieces of clamping feet, a control component for controlling the three pieces of clamping feet to pick and clamp samples, and a positioning component of the three pieces of clamping feet, wherein, the three pieces of clamping feet are three pieces of arc steel wires, the ends of which are a shovel shape; the control component is composed of a slide rod, a lifting cap, a pressure spring, a shield block, an outlet mouth of the three clamping feet, etc. The utility model can pick and clamp samples by the expansion and contraction state of the three clamping feet which can be controlled by the compressing or the loosening of the pressure spring by the up and down moving of the slide rod. In order to enhance the reliability and the stability for picking and clamping samples, the three-clamping foot gripper is also provided with the positioning component which can be used for positioning the three clamping feet. The utility model has the advantages of convenient operation and simple structure, and is not easy to damage the surface and the rim angle of a picked and clamped sample.

Description

Three pinch tweezers

Technical field

The utility model relates to a kind of instrument used in the electronic device production process, specifically is meant a kind of three pinch tweezers of picking up the bigger sheet sample of folder.

Background technology

Picking up the bigger sheet sample of folder at present, is 3 o'clock, 4 o'clock semi-conductor silicon chip as diameter, and commonly used has two kinds, and a kind of is common tweezers, and another kind is that vacuum holds.It is to realize by two planes up and down that the bipod of tweezers is clamped sample that common tweezers are picked up the folder sample.It is the sucker of being made by rubber that vacuum holds, and sucker is directly inhaled at sample surfaces during use.Therefore, these two kinds of instruments all are directly to contact with sample surfaces, easily cause the damage and the contamination of sample surfaces.Particularly common tweezers, bipod are to make with harder metal material, and technology person is not in order to damage the surface of sample, often clamp very fraction of sample edge, because sample is bigger, often folder is not firm, the firmly big edge that a bit can press from both sides broken sample, this is a very thorny difficult problem.

Summary of the invention

Based on the problem that above-mentioned prior art exists, the purpose of this utility model provides a kind of simple in structure, and is easy to use, is difficult for causing the three pinch tweezers of being picked up the damage of folder sample.

The purpose of this utility model is achieved in that and comprises three pinches, controls three pinches and picks up the control assembly of folder sample and the align member of three pinches.

Said three pinches are three curved steel wires, and three pinch ends are all made pancake, to the invagination hook, form the shovel shape.

The control assembly that three pinches of said control are picked up the folder sample comprises a tubular body, and its endoporus axially is equipped with successively carries cap, stage clip, block, three pinch outlet mouths.Carry cap and place the tubular body top, in the middle of block was positioned at, three pinch outlet mouths placed end.Three's cylindrical and tubular body endoporus close-fitting.Stage clip is positioned to be carried in the middle of cap and the block, has a top to have the slide bar of pressure cap, passes from top to down and carries cap centre bore, stage clip, block centre bore, a terminal fastening piston.Slide bar can drive piston and move up and down in tubular body, and by carrying cap and block is done centralized positioning.There is a back-up ring to place the stage clip top and is fastened on the cylindrical of slide bar.Slide bar moves up and down owing to be subjected to the restriction stage clip of block and back-up ring compacted or lax.Piston one end is fastened on the end of slide bar, and the other end links to each other with three pinches.Three pinches are from piston, pass the certain-length of pinch outlet mouth outside tubular body, when with the finger while carrying, depress slide bar, stage clip is compacted, promotes piston and three pinches and moves down, because pinch is an arc, the effect of elasticity of itself and pinch outlet mouth, three pinch ends outward radial expansion separately forms the gesture of opening.Unclamp slide bar, owing to press yellow effect, the jack-up slide bar drives piston and three pinches and moves up.Because the restriction of pinch outlet mouth forces three pinch ends separately to radially center contraction, forms three pinches and clamps sample state.Because three pinch ends are pancake and roll over hook, just can scoop up sample, clamp the circumference profile of sample, pinch does not contact with sample plane.

In order to improve the reliability and stability of picking up the folder sample, three pinch tweezers also have align member, are used to locate three pinches, make three pinches mutual angle 120 degree on circumference, and this member is made up of sleeve, support bar, equilateral triangle framework.Sleeve endoporus and tubular body cylindrical are fastening, and an end of three support bars was for 120 uniform connections of degree with the lower plane of sleeve, and the other end of three support bars is connected with the equilateral triangle framework of horizontal direction.And three pinches are positioned on three interior angles of equilateral triangle framework respectively.Three pinches are done to clamp and unclamp when moving and move on three angles all the time, guarantee that so just three pinches keep 120 degree uniform on the horizontal plane position.

Three pinch tweezers of the present utility model have following advantage:

1. easy to operate, not fragile surface and corner of being picked up the folder sample.

2. simple in structure, easy to implement.

Description of drawings

Fig. 1 is a stereoscopic schematic diagram of the present utility model;

Fig. 2 is an organigram of the present utility model;

Fig. 3 is pinch shape of the present utility model and terminal end shape schematic diagram;

Fig. 4 is the A-A cutaway view of Fig. 1.

The specific embodiment

According to Fig. 1-Fig. 4 the specific embodiment of the present utility model is described in detail: three pinch tweezers comprise three pinches, control control assembly and three pinch align members that three pinches are picked up the folder sample.

Said three pinches 10 as shown in Figure 3, and are curved, and the terminal likeness in form of three pinches scoop shape 101 is made by steel wire.

Three pinches of said control are picked up the control assembly of folder sample and are seen Fig. 2, comprise a tubular body 4, and its endoporus axially is equipped with successively carries cap 3, stage clip 6, block 7, three pinch outlet mouths 9.Carry cap 3 and place tubular body 4 tops, in the middle of block 7 was positioned at, three pinch outlet mouths 9 placed end.Three's cylindrical all with tubular body 4 endoporus close-fittings.Carry cap 3, block 7 and three pinch outlet mouths, 9 centers and all be processed into through hole.Stage clip 6 is positioned to be carried in the middle of cap 3 and the block 7.The slide bar 2 that one upper end band pressure cap 1 is arranged passes from top to bottom and carries cap 3, stage clip 6 and block 7 centre bores, a terminal fastening piston 8.Slide bar 2 cylindricals with carry cap 3, block 7 centre bore cunnings are joined, and can drive piston as centralized positioning and in tubular body, move up and down.There is a back-up ring 5 to place stage clip 6 tops and is fastened on the cylindrical of slide bar 2.Slide bar 2 moves up and down, and stage clip 6 is subjected to the restriction of back-up ring 5 and block 7 compacted or lax.

Piston 8-end is fastened on the terminal cylindrical of slide bar 2, and it is fastening with it that other end endoporus has three pinches 10 to be 120 degree angles.Three pinches 10 are from piston 8, and the loosening pinch outlet mouth 9 that passes is curved.Pressure cap 1 bottom center processing pore-forming, with slide bar 2 top cylindrical close-fittings, its top is flat camber, improves feel with this.While carrying 3, depress pressure cap 1 with finger, slide bar 2 moves down, and stage clip 6 is compacted, promotes piston 8 and three pinches 10 and moves down.Because pinch 10 is arcs, the centre bore of elastic reaction of itself and pinch outlet mouth 9 is enough little, and the limit is to moving down separately to make three pinches, 10 ends, and the limit forms the gesture of opening to radially expansion.Unclamp pressure cap 1, because the effect of stage clip 6, jack-up back-up ring 5 and then jack-up slide bar 2 drive piston 8 and three pinches 10 and move up.Because pinch outlet mouth 9 centre bores are enough little, force three pinches, 10 ends to move to center radially separately, form the gesture of three pinch clampings.Because three pinch ends are pancake and resemble scoop 101 shapes foldings hook, just can scoop up sample 14, clamp the circumference profile of sample 14, pinch not with sample 14 plane contact.

In order to improve the reliability and stability of picking up the folder sample, three pinch tweezers also have align member, are used to locate three pinches, and it is uniform to make three pinches be 120 degree on the circumference of sample.This member is made up of sleeve, support bar, equilateral triangle framework.Sleeve 11 endoporus and tubular body 4 lower end cylindrical close-fittings.Uniform connections are spent with the lower plane 120 of sleeve 11 in three support bar 12 tops.Its end is connected with three limits of the equilateral triangle framework 13 of horizontal direction.And make on three interior angles of the equilateral triangle framework 13 that three pinches 10 are positioned at respectively.Three pinches do to clamp and also to be each defined in all the time on the interior angle at 13 3 angles of triangular framing when opening action, so just guarantee three pinches 10 on the horizontal plane position and to be 120 degree uniform, make that to pick up the folder sample more reliable and more stable.The length of said three pinches (10) will guarantee that it is each defined on the interior angle at (13) three angles of triangular framing all the time when doing clamping and opening action.Said framework 13 and support bar 12 are made by steel wire.

Claims

1. pinch tweezers comprise three pinches, control three pinches and pick up the control assembly of folder sample and the align member of three pinches, it is characterized in that:

Said three pinches (10) are three curved steel wires, and its three pinches end is all made pancake, to the invagination hook, form shovel shape (101);

Three pinches of said control are picked up the control assembly of folder sample, comprise a tubular body (4), and its endoporus axially is equipped with successively carries cap (3), stage clip (6), block (7), three pinch outlet mouths (9); Carry cap (3) and place tubular body (4) top, in the middle of block (7) was positioned at, three pinch outlet mouths (9) placed end, three's cylindrical all with tubular body (4) endoporus close-fitting; Carry cap (3), block (7) and three pinch outlet mouth (9) centers and all be processed into onesize through hole, stage clip (6) is positioned to be carried in the middle of cap (3) and the block (7); The slide bar (2) that one upper end band pressure cap (1) is arranged passes from top to bottom and carries cap (3), stage clip (6) and block (7) centre bore, and terminal cylindrical is fastening-piston (8); Slide bar (2) cylindrical with carry cap (3), block (7) centre bore cunning is joined; Back-up ring (5) places stage clip (6) top and is fastened on the cylindrical of slide bar (2), and stage clip (6) is subjected to the restriction of back-up ring (5) and block (7) compacted or lax;

It is fastening with it that piston (8) other end endoporus has three pinches (10) to be 120 degree angles, and three pinches (10) are from piston (8), and the loosening pinch outlet mouth (9) that passes is curved;

Said align member is made up of sleeve (11), support bar (12), equilateral triangle framework (13), sleeve (11) endoporus and tubular body (4) lower end cylindrical close-fitting, uniform connections are spent with the lower plane 120 of sleeve (11) in three support bars (12) top, its end is connected with three limits of the equilateral triangle framework (13) of horizontal direction respectively, and makes on three interior angles of the equilateral triangle framework (13) that three pinches (10) are positioned at respectively.

2. according to claim 1 pinch tweezers, it is characterized in that: the length of said three pinches (10) will guarantee that it is each defined on the interior angle at (13) three angles of triangular framing all the time when doing clamping and opening action.

3. according to claim 1 pinch tweezers, it is characterized in that: said three pinches (10) are made by steel wire.