CN2566980Y - Lapping disc - Google Patents
Lapping disc Download PDFInfo
- Publication number
- CN2566980Y CN2566980Y CN02253918U CN02253918U CN2566980Y CN 2566980 Y CN2566980 Y CN 2566980Y CN 02253918 U CN02253918 U CN 02253918U CN 02253918 U CN02253918 U CN 02253918U CN 2566980 Y CN2566980 Y CN 2566980Y
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- China
- Prior art keywords
- abrasive disk
- main
- driving shaft
- abrasive
- disk
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Abstract
The utility model relates to an abrasive disk which at least comprises a main abrasive disk which is provided with an abrasive end face, wherein, at least one sub-abrasive disk is arranged in the same abrasive end face of the main abrasive disk, and the abrasive end face of the sub-abrasive disk and the abrasive end face of the main abrasive disk are arranged in the same plane; the main abrasive disk and the sub-abrasive disk are driven to rotate by each driving shaft. The utility model can cause emery for abrading to be uniformly laid on a flat plate so as to realize uniform abrading and cutting to meet the requirement of high quality of planeness. Furthermore, the utility model can meet the requirement of planeness by one time abrading, simplify the abrasive processes based on assuring the abrasive quality, improve the machining efficiency, and quickly enhance the planeness of the flat plate.
Description
Technical field
The utility model is that relevant a kind of surface of the work grinds, and is a kind of abrasive disk specifically.
Background technology
Processing request for the flatness of surface of the work is had relatively high expectations adopts abrasive method usually.Existing plane lapping technology is, evenly spread diamond dust at two interplanars, two planes are relatively rotated, when two planes relatively rotate, two motions with respect to surface of the work impose a pressure to the grounds travel as the diamond dust class, and abrasive dust grinds with respect to surface of the work and rolls under the influence of pressure.A kind of method is to utilize a kind of abrasive disk, and this abrasive disk has a face machined flat also can be along its axial rotation.And a large amount of facts have proved, under this motion state, diamond dust is under the effect of the friction on two planes up and down, and the movement locus of sand grains flows to the pivot of abrasive disk, thereby has caused the inhomogeneous grinding of planar surface.
Another kind method is that two dull and stereotyped surfaces to be machined are oppositely arranged, assisting diamond dust between the surface of two flat boards, when driving flat board along its axial rotation, the surface of two flat boards forms motion mode in relative rotation, thereby realizes the relative attrition process of two planar surfaces.The process principle and the said method of this method are identical, therefore treat that the result that must grind after two flat boards grind relatively is a spill, a convex, at this moment need look for the dull and stereotyped of a spill same or same convex to grind mutually again with it, the flatness of plate will improve widely, and two flat boards grind repeatedly until the flatness that reaches specification requirement.Therefore at least three flat boards need be carried out mutual grinding repeatedly, till detection reaches requirement.Be not difficult to find out that though utilize this grinding method can guarantee crudy, operation is many, the time is long.
Said method can be learnt, utilizes the high-precision plane lapping processing of existing techniques in realizing, and certain difficulty is all arranged, and processing technology falls behind, and has unsurmountable defectives such as operation is many, the time is long.
Summary of the invention
The inventor has summed up theory and the experience of being engaged in grinding work for many years at the defective of prior art, finds out to produce the reason that prior art influences the flat plate milling quality, proposes the utility model.
The purpose of this utility model is to provide a kind of abrasive disk, scientifically controls and has changed and grind flowing of diamond dust, makes diamond dust to be tiled on the flat board equably in process of lapping, thereby reaches even lapped face, improves the quality of plane planeness.
Another purpose of the present utility model is to simplify grinding technics, under the situation that guarantees crudy, simplifies grinding process technique to greatest extent, reduces the attrition process cost.
The purpose of this utility model is achieved in that a kind of abrasive disk, includes a main abrasive disk at least, and this main abrasive disk has a face machined flat; In the same face machined flat of this main abrasive disk, be provided with a branch abrasive disk at least, this minute abrasive disk face machined flat and the face machined flat of main abrasive disk in same plane; Described main abrasive disk and branch abrasive disk drive rotation by driving shaft separately.
Abrasive disk can be provided with two or more in described minute, and evenly to be distributed as the best.
Described main abrasive disk driving shaft can be vertically connected at main abrasive disk, and this driving shaft can be supported on the main body.
Described per minute abrasive disk driving shaft can be vertically connected at this minute abrasive disk, and described driving shaft all can be supported on the main body.
In the utility model, but main abrasive disk and branch abrasive disk backward rotation.Also can rotate in the same way.This main abrasive disk can be relative to dividing the abrasive disk differential to rotate.
But mechanical type is in transmission connection between described main abrasive disk driving shaft and the branch abrasive disk driving shaft.
Described main abrasive disk driving shaft can adopt gear to be connected with dividing between the abrasive disk driving shaft.
The pivot place of the face machined flat of described main abrasive disk can be invaginated type.
Operation principle of the present utility model is, the utility model is provided with two face machined flats at least in same ground flat, and these face machined flats rotate along separately center of rotation respectively, like this, make diamond dust in whole ground flat, can not form the trend that a kind of orientation moves, can not produce diamond dust and concentrate the phenomenon that flows to pivot, thereby guarantee fund's emery is uniformly distributed on the ground flat.
In preferred embodiment of the present utility model, on the same ground flat of a main abrasive disk, can be provided with two or more little abrasive disk simultaneously, and this minute, the rotation direction of abrasive disk can be opposite with main abrasive disk, this motion mode of the utility model abrasive disk has destroyed the directed flow of diamond dust effectively, makes diamond dust keep fully evenly distribution in process of lapping, reach cutting and grinding surface, full and uniform ground, improve the quality of plane planeness.
In sum, the beneficial effect that the utility model reached is: 1) improved dull and stereotyped flatness widely; The utility model can be so that grind and to pave on flat board equably with diamond dust in process of lapping, thereby realizing grinding equably cuts the high-quality requirement of the flatness that reaches.2) the utility model is guaranteeing can to simplify grinding technics greatly on the basis of Grinding Quality by once grinding the requirement that reaches flatness, improves working (machining) efficiency, can improve plane planeness fast, reaches surprising effect.
Description of drawings
The basic structure schematic diagram of Fig. 1 the utility model abrasive disk;
The A-A profile of Fig. 2 Fig. 1.
The specific embodiment
Describe the utility model in detail below in conjunction with embodiment and accompanying drawing thereof;
See also Fig. 1, shown in Figure 2, the utility model includes a main abrasive disk 1 at least, and this main abrasive disk 1 has a face machined flat 11; In the same face machined flat 11 of this main abrasive disk 1, be provided with a branch abrasive disk 2 at least, this minute abrasive disk 2 face machined flat 21 with the face machined flat 11 of main abrasive disk 1 in same plane; Described main abrasive disk 1 and branch abrasive disk 2 drive rotation by driving shaft separately.
The ground flat 21 of described minute abrasive disk 2 can be embedded in the face machined flat 11 of main abrasive disk 1, and the ground flat 11 of this ground flat 21 and main abrasive disk 1 is same plane.
Further, can be provided with two or more minutes abrasive disks 2 in the face machined flat of main abrasive disk 1 of the present utility model 11, those minutes abrasive disk 2 face machined flat 21 all with face machined flat 11 in same plane, with assurance by the flatness of ground flat.This two or more minutes abrasive disks 2 can be further evenly distribute along the center of rotation of main abrasive disk 1.As shown in Figure 1, specifically in the present embodiment, abrasive disk 2 was three in described minute, and these three branch abrasive disks 2 evenly distribute with the center of rotation of main abrasive disk 1, and are provided with driving shaft 10 separately.Like this, three branch abrasive disks 2 are to rotate in same ground flat with the main abrasive disk 1 diverse radius of gyration and rotating manner, effectively destroyed the directed flow of diamond dust, make diamond dust in process of lapping, keep fully evenly distribution, reach cutting and grinding surface, full and uniform ground, improve the quality of plane planeness.
Because abrasive disk of the present utility model in same ground flat, has two or more face machined flats simultaneously, these face machined flats edges are drive shaft turns separately.Therefore, diamond dust can not produce the trend of directed flow in this ground flat, has fundamentally avoided the phenomenon of diamond dust uneven distribution in ground flat.And adopt structure of the present utility model, and can control the rotation direction and the speed of branch abrasive disk 2, make it to be different from the rotation direction and the speed of main abrasive disk 1, reach control and change flowing of diamond dust, guarantee fund's emery is tiled in ground flat equably.
As shown in Figure 2, specifically in the present embodiment, main abrasive disk 1 driving shaft 5 can be vertically connected at the opposing face of the face machined flat 11 of main abrasive disk 1.Driving shaft 5 can specifically be threadedly connected to main abrasive disk 1, and is when abrasive disk need be changed, conveniently detachable.This driving shaft 5 can be supported on the main body 4, and is connected with a joggle with the end cap 41 of fixedlying connected with main body 4, rotates to drive main body 4.This driving shaft 5 can be connected in motor or deceleration device, to obtain rotational power, drives main body 4 and rotates with main abrasive disk 1.This driving shaft 5 is connected with a joggle with end cap 41, can specifically on end cap 41, square hole be set, and be set to corresponding square in the relevant position of driving shaft 5, when driving shaft 5 passes the square hole of end cap 41, corresponding square section is matched with square hole and to realize that it is connected with a joggle on the driving shaft 5, drives end cap 41 rotations when being rotated by driving shaft 5.
As shown in Figure 2, divide abrasive disk 2 to be provided with driving shaft 10, this driving shaft 10 is vertically connected at this minute abrasive disk 2, this driving shaft 10 can be supported on the main body 4 by bearing 6 and 7, and keep its face machined flat 21 and the face machined flat 11 of main abrasive disk 1 to be positioned at same plane, like this, face machined flat of the present utility model then combines a complete face machined flat by the face machined flat 11 of main abrasive disk and the face machined flat 21 of branch abrasive disk, and the motion of this face machined flat is made up of different motion modes.
For example, but main abrasive disk 1 and the backward rotation of dividing abrasive disk 2, but its velocity of rotation can be rotated by identical also differential.For realizing above-mentioned rotating manner, the utility model can adopt conventional mechanical transmission structure to realize that specifically in the present embodiment, the other end of driving shaft 5 is fixedly connected with gear 8, and this driving shaft 5 is connected in drive unit.And dividing the other end of the driving shaft 10 of abrasive disk 2 also to be fixedly connected with gear 3, this gear 8 directly meshes with gear 3, thereby carries out transmission of power, and the direction of rotation of main abrasive disk 1 and branch abrasive disk 2, its rotating speed is counted ratio and can be determined by its gear ratio.
During use, open switch, driving shaft 5 rotates, and drives main abrasive disk 1 and main body 4 rotations, and main abrasive disk 1 is stirred the branch abrasive disk 2 that is embedded in it and revolved round the sun along driving shaft 5; Gear 8 rotates under the drive of driving shaft 5 simultaneously, the gear 3 of the branch abrasive disk 2 that drive is engaged with rotates, drive and divide abrasive disk 2 autobiographies, thereby the trend of the directed flow by diamond dust in this minute abrasive disk 2 the destruction ground flat has fundamentally been avoided the phenomenon of diamond dust uneven distribution in ground flat.
Another kind of embodiment of the present utility model is, main abrasive disk 1 is identical with the rotation direction of dividing abrasive disk 2, and main abrasive disk 1 can be relative to dividing abrasive disk 2 differentials to rotate.Can be greater than or less than the rotating speed of branch abrasive disk 2 as the rotating speed of main abrasive disk 1.For realizing this rotating manner, in the present embodiment, main abrasive disk 1 can be driven by different drive units with branch abrasive disk 2.Also can realize by above-mentioned mechanical drive mode, but be with above-mentioned difference, at the gear 8 of main abrasive disk 1 and divide between the gear 3 of abrasive disk 2 and can pass through an excessive gears engaged, to realize main abrasive disk 1 and the equidirectional rotation that divides abrasive disk 2, its rotating speed is counted ratio and can be determined by its gear ratio.
In the present embodiment, when minute abrasive disk 2 is ground flats 11 along main abrasive disk 1 when being evenly distributed, can be the groove 12 of invaginated type at the pivot place of the face machined flat 11 of main abrasive disk 1.Like this, when the Ji Hui of the center of rotation place of main abrasive disk 1 has most diamond dust, can not influence the flatness of ground flat.
The foregoing description is the specific embodiment of the present utility model, and only being used for explanation originally is with novel, but not is used to limit the utility model.
Claims (10)
1, a kind of abrasive disk is characterized in that, includes a main abrasive disk at least, and this main abrasive disk has a face machined flat; In the same face machined flat of this main abrasive disk, be provided with a branch abrasive disk at least, this minute abrasive disk face machined flat and the face machined flat of main abrasive disk in same plane; Described main abrasive disk and branch abrasive disk drive rotation by driving shaft separately.
2, abrasive disk according to claim 1 is characterized in that, abrasive disk can be provided with two or more in described minute.
3, abrasive disk according to claim 1 is characterized in that, described main abrasive disk driving shaft can be vertically connected at main abrasive disk, and this driving shaft can be supported on the main body.
According to claim 1 or 3 described abrasive disks, it is characterized in that 4, described per minute abrasive disk driving shaft can be vertically connected at this minute abrasive disk, described driving shaft all can be supported on the main body.
5, abrasive disk according to claim 1 is characterized in that, described main abrasive disk and the direction of rotation of dividing abrasive disk.
6, abrasive disk according to claim 1 is characterized in that, described main abrasive disk is identical with the rotation direction of dividing abrasive disk.
According to claim 5 or 6 described abrasive disks, it is characterized in that 7, described main abrasive disk can be relative to dividing the abrasive disk differential to rotate.
8, abrasive disk according to claim 1 is characterized in that, but mechanical type is in transmission connection between described main abrasive disk driving shaft and the branch abrasive disk driving shaft.
9, abrasive disk according to claim 8 is characterized in that, described main abrasive disk driving shaft can adopt gear to be connected with dividing between the abrasive disk driving shaft.
10, abrasive disk according to claim 1 is characterized in that, the pivot place of the face machined flat of described main abrasive disk can be invaginated type.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02253918U CN2566980Y (en) | 2002-09-12 | 2002-09-12 | Lapping disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN02253918U CN2566980Y (en) | 2002-09-12 | 2002-09-12 | Lapping disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2566980Y true CN2566980Y (en) | 2003-08-20 |
Family
ID=33722925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN02253918U Expired - Fee Related CN2566980Y (en) | 2002-09-12 | 2002-09-12 | Lapping disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2566980Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110883626A (en) * | 2019-12-06 | 2020-03-17 | 王春宏 | Wafer planarization equipment |
-
2002
- 2002-09-12 CN CN02253918U patent/CN2566980Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110883626A (en) * | 2019-12-06 | 2020-03-17 | 王春宏 | Wafer planarization equipment |
| CN110883626B (en) * | 2019-12-06 | 2021-11-16 | 南京蔚蓝新材料科技有限公司 | Wafer planarization equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |