CN2561096Y - Semiconductor material electric signal measuring apparatus - Google Patents
Semiconductor material electric signal measuring apparatus Download PDFInfo
- Publication number
- CN2561096Y CN2561096Y CN 02234524 CN02234524U CN2561096Y CN 2561096 Y CN2561096 Y CN 2561096Y CN 02234524 CN02234524 CN 02234524 CN 02234524 U CN02234524 U CN 02234524U CN 2561096 Y CN2561096 Y CN 2561096Y
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- screw
- loam cake
- hole
- circular hole
- sample room
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Abstract
The utility model relates to a semiconductor material electrical signal testing device, which comprises an upper cap of a sample chamber, a base seat, an optical glass, a cavity body, a micro-checker and a lens fixing bracket, wherein a circular illumination hole is arranged in the center of the upper part of the upper cap of the sample chamber, and a dummy club equipped with an outer thread is formed on one side face of the illumination hole; a groove equipped with inner thread is arranged on the lower part of the base seat, and a circular hole is arranged in the center of the base seat and connected with the sample chamber through a bolt; the optical glass is arranged between the upper cap of the sample chamber and the base seat; a circular hollow part is arranged in the center of the cavity body, a bolt hole is arranged on a side wall, a propelling screw bolt is connected inside the bolt hole through the bolt, and the cavity body is fixedly connected with the base seat through a screw; an light hole is arranged on the center part of the micro-checker, the small end is embedded into the hollow part of the cavity through a roving keyblock, and a thread is arranged on the outer diameter of the large end; a trapezoid circular hole is arranged on the center part of the lens fixing bracket, a lens is fixed inside the trapezoid circular hole through bolt joint method, an optical cable connector is arranged at the upper end of the lens fixing bracket, and the lens fixing bracket is connected with the micro-checker by bolt.
Description
Technical field
The utility model provides a kind of signal of telecommunication testing apparatus, is meant a kind of semi-conducting material signal of telecommunication testing apparatus especially.
Background technology
Sample is to be placed on the center of sample stage in existing equipment.In experiment, when sample being carried out the temperature scanning test, do not allow sample stage to move.Moving of vertical aspect is unallowed especially, and light source is also just on a fixing center.The test time point must focus on the illumination mouth of being reserved at the sample center, the light transient current that the deviation of luminous point and Strength Changes directly have influence on sample and produced and the variation of light transient capacitance, and the minor variations of sample light transient current and light transient capacitance is vital to impurity in the analyzing semiconductor material and defect level.Existing equipment does not reach accurate test request.
The utility model content
The purpose of this utility model is to provide a kind of semi-conducting material signal of telecommunication testing apparatus, and it has simple and reasonable for structure, and the high advantage of measuring accuracy.
A kind of semi-conducting material signal of telecommunication of the utility model testing apparatus is characterized in that, comprising:
One sample room loam cake, this sample room loam cake are circular, and the center has circular illumination hole above the loam cake of sample room, is formed with one in the side that the illumination hole is arranged and has externally threaded boss;
One tapped groove is arranged below one base, this base, and there is a circular hole at the center, and this base and sample room loam cake are spirally connected;
One optical glass is circle, and this optical glass is placed between sample room loam cake and the base;
One cavity, the hollow space that has a circle in the middle of it has a screw on the one sidewall, the augering screw that in this screw, is spirally connected, this cavity is affixed with screw and base;
One micropositioner, section are T shape, and a loophole is arranged in the centre, and the small end of this micropositioner is embedded in the hollow space of cavity by the key piece that moves about, and on the external diameter of the big end of this micropositioner screw thread is arranged;
One lens fixed mount is trapezoidal cylinder, has a trapezoidal circular hole in the middle of it, is fixed with lens with the mode that is spirally connected in this trapezoidal circular hole, and this lens fixed mount upper end is the optical cable interface, and this lens fixed mount is screwed onto on the micropositioner.
Wherein there is a circular hole position relative with augering screw on the inwall of the hollow space of cavity, and a spring thimble is housed in circular hole.
Wherein on the sidewall of the upper end of lens fixed mount, a set screw is housed.
One vaccum seal ring is wherein arranged between sample room loam cake and optical glass.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
See also shown in Figure 1, a kind of semi-conducting material signal of telecommunication of the utility model testing apparatus, comprising:
One sample room loam cake 12, this sample room loam cake 12 are circular, and the center has circular illumination hole 13 above sample room loam cake 12, is formed with one in the side that illumination hole 13 is arranged and has externally threaded boss 121;
One tapped groove 111 is arranged below one base 11, this base 11, and there is a circular hole 112 at the center, and this base and sample room loam cake 12 are spirally connected; One vaccum seal ring 15 is arranged between sample room loam cake 12 and optical glass 14;
One optical glass 14 is circle, and this optical glass is placed between sample room loam cake 12 and the base 11;
One cavity 7, the hollow space that has a circle in the middle of it has a screw 71 on the one sidewall, the augering screw 9 that in this screw 71, is spirally connected, these cavity 7 usefulness screws and base 11 are affixed; There is a circular hole 10 position relative with augering screw 9 on the inwall of the hollow space of cavity 7, and a spring thimble 101 is housed in circular hole 10;
One micropositioner 5, section are T shape, and a loophole 8 is arranged in the centre, and the small end of this micropositioner 5 is embedded in the hollow space of cavity 7 by the key piece 6 that moves about, and on external diameters of these micropositioner 5 big ends screw thread are arranged;
One lens fixed mount 2, be trapezoidal cylinder, has a trapezoidal circular hole in the middle of it, in this trapezoidal circular hole, be fixed with lens 1 with the mode that is spirally connected, these lens fixed mount 2 upper ends are optical cable interface 3, one set screw 4 is housed on the sidewall of the upper end of lens fixed mount 2, and this lens fixed mount 2 is screwed onto on the micropositioner 5.
The utility model has solved the accurate requirement of semi-conducting material light transient test to luminous point, and can be applicable to light transient current instrument and light transient capacitance testing equipment simultaneously, it is scioptics 1, lens fixed mount 2 and horizontal x, y direction micropositioner 5 reach regulates x, the displacement of y direction, lens 1 are made up of the compound lens of different size, are fixed on (lens can be changed at any time according to requirement of experiment) on the lens fixed mount 2 by screw thread.The upper end of fixed mount 2 is provided with the optical cable interface 3 and the vertical z direction set screw 4 of transmitted beam.The lens fixed mount is fixed on the horizontal direction micropositioner 5 by screw thread.Horizontal fine motion system is the micropositioner 5 that is placed in the cavity 7 by, and two groups of spring thimbles 10 and the augering screw 9 of regulating micropositioner 5xy direction are formed.
During test sample is placed on the sample stage, sample room loam cake 12 is built, with the base 11 of this device by screw fixed on the illumination hole 13 on the sample room loam cake 12.Optical cable is fixed on the optical cable interface 3 of this device, and fixing with set screw 4.Open light source, can scioptics fixed mount 2 on x on z direction adjustable diameter and screw adjusting screw 4 and the horizontal fine motion seat, y direction adjusting screw(rod) 9 carries out the three-dimensional regulation of luminous point and focuses on to reach the required accurate requirement of experiment.
This device is the light transient state signal of telecommunication test of semi-conducting material, and reliable method is provided, and has solved the insurmountable problem of original equipment.And satisfied the requirement of sample temperature variation testing.
Claims (4)
1, a kind of semi-conducting material signal of telecommunication testing apparatus is characterized in that, comprising:
One sample room loam cake, this sample room loam cake are circular, and the center has circular illumination hole above the loam cake of sample room, is formed with one in the side that the illumination hole is arranged and has externally threaded boss;
One tapped groove is arranged below one base, this base, and there is a circular hole at the center, and this base and sample room loam cake are spirally connected;
One optical glass is circle, and this optical glass is placed between sample room loam cake and the base;
One cavity, the hollow space that has a circle in the middle of it has a screw on the one sidewall, the augering screw that in this screw, is spirally connected, this cavity is affixed with screw and base;
One micropositioner, section are T shape, and a loophole is arranged in the centre, and the small end of this micropositioner is embedded in the hollow space of cavity by the key piece that moves about, and on the external diameter of the big end of this micropositioner screw thread is arranged;
One lens fixed mount is trapezoidal cylinder, has a trapezoidal circular hole in the middle of it, is fixed with lens with the mode that is spirally connected in this trapezoidal circular hole, and this lens fixed mount upper end is the optical cable interface, and this lens fixed mount is screwed onto on the micropositioner.
2, semi-conducting material signal of telecommunication testing apparatus according to claim 1 is characterized in that, wherein there is a circular hole position relative with augering screw on the inwall of the hollow space of cavity, and a spring thimble is housed in circular hole.
3, semi-conducting material signal of telecommunication testing apparatus according to claim 1 is characterized in that, wherein on the sidewall of the upper end of lens fixed mount a set screw is housed.
4, semi-conducting material signal of telecommunication testing apparatus according to claim 1 is characterized in that, a vaccum seal ring is wherein arranged between sample room loam cake and optical glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02234524 CN2561096Y (en) | 2002-04-30 | 2002-04-30 | Semiconductor material electric signal measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02234524 CN2561096Y (en) | 2002-04-30 | 2002-04-30 | Semiconductor material electric signal measuring apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2561096Y true CN2561096Y (en) | 2003-07-16 |
Family
ID=33709278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02234524 Expired - Fee Related CN2561096Y (en) | 2002-04-30 | 2002-04-30 | Semiconductor material electric signal measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2561096Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100353171C (en) * | 2004-12-23 | 2007-12-05 | 中国科学院半导体研究所 | Sample holder in use for measuring spectrum of photoluminescence of electrical modulation |
-
2002
- 2002-04-30 CN CN 02234524 patent/CN2561096Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100353171C (en) * | 2004-12-23 | 2007-12-05 | 中国科学院半导体研究所 | Sample holder in use for measuring spectrum of photoluminescence of electrical modulation |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |