CN2548116Y - Capacitor-type angle-incidence sensitive device structure - Google Patents
Capacitor-type angle-incidence sensitive device structure Download PDFInfo
- Publication number
- CN2548116Y CN2548116Y CN 02238821 CN02238821U CN2548116Y CN 2548116 Y CN2548116 Y CN 2548116Y CN 02238821 CN02238821 CN 02238821 CN 02238821 U CN02238821 U CN 02238821U CN 2548116 Y CN2548116 Y CN 2548116Y
- Authority
- CN
- China
- Prior art keywords
- working shaft
- annular
- fixed electorde
- billiard table
- inclination angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
A capacitance dip angle sensitive device structure is composed of a supporting seat (1), a capacitance fixing electrode (2), an insulation dielectric layer (3), an interlayer cavity structure (4) and a liquid conductor (5). The supporting seat is made of insulation material, and coordinates with the capacitance fixing electrode to compose the interlayer cavity structure which is rotationally symmetric to the working shaft, the interlayer cavity is installed with proper liquid conductor, the insulation dielectric layer on the surface of the capacitance fixing electrode composes the dielectric layer of the capacitance, and insulates and separates the liquid conductor from the capacitive fixing electrode, the contacting surface of the liquid conductor and the insulation dielectric layer forms the movable electrode of the variable capacitance, when the working shaft rotates to make the dip angle changed, the capacity of the capacitance also changes.
Description
The utility model relates to the inclination angle sensing technology, particularly a kind of condenser type inclination angle sensitive device structure.
Now in the similar techniques, the motion actuating medium that is used to change capacitance value is liquid high cleanliness dielectric substance, because its effect is the dielectric substance part that constitutes electric capacity, so also need consider parameter characteristics such as its specific inductive capacity simultaneously, so prior art is difficult to take into account requirements such as the material of sensor sensing device and performance.
The purpose of this utility model is: a kind of condenser type inclination angle sensitive device structure is provided, this sensing arrangement cooperates the structure of suitable interlayer cavity, adopt liquid electric conductor as the motion capacitance electrode, the insulation dielectric layer that cooperates the fixed capacity electrode and generate on its surface, constitute variable capacitor structure, when the sensor sensing device when its working shaft rotates, the electric capacity of variable capacitance changes, and realizes detection to the inclination angle variable quantity by measuring electric capacity with the variation at inclination angle.
Formation of the present utility model: condenser type obliquity sensor sensitive device structure comprises supporting base, capacitance electrode, the composite bed that insulation dielectric layer or dielectric layer and insulation course constitute, interlayer cavity body structure and liquid electric conductor, supporting base adopts insulating material to make, it mainly acts on is to support to connect the capacitor fixing electrode, constitute structure by supporting base and capacitor fixing electrode with interlayer cavity, generate the rete that has insulating effect and capacitor dielectric effect concurrently at the capacitor fixing electrode surface, perhaps generate the composite bed that constitutes by dielectric layer and insulation course, the liquid electric conductor of in the interlayer cavity, packing into, capacitor fixing electrode surface insulation dielectric layer or composite bed constitute the dielectric layer of electric capacity, and liquid electric conductor and capacitor fixing electrode insulation are isolated, the surface of contact of liquid electric conductor and capacitor fixing electrode surface insulation dielectric layer or composite bed forms the motion electrode of variable capacitance, constitute independent variable capacitive way or differential variable capacitance mode structure, the amount of getting of liquid electric conductor is generally according to following condition in the interlayer cavity: when the inclination angle of obliquity sensor Sensitive Apparatus when zero changes to full scale or maximum detection amount pitch angle, for the independent variable capacitive way, the surface of contact of liquid electric conductor and capacitor fixing electrode surface insulation dielectric layer is generally from covering whole released states fully, perhaps from being separated to whole covering states fully, for differential variable capacitance mode, liquid electric conductor generally covers two right electrodes of differential capacitor fixed electorde from homalographic, be changed to all move to the differential capacitor fixed electorde to one of in the pairing cavity of electrode, perhaps on the contrary from all the differential capacitor fixed electorde to one of the pairing cavity of electrode, move and be changed to two right electrodes of homalographic covering differential capacitor fixed electorde, when condenser type inclination angle Sensitive Apparatus during around the rotation of single axis of operation or a plurality of axis of operation, the inclination angle changes, for the independent variable capacitive way, single independent capacitance or change corresponding to a plurality of independent capacitances of multidimensional working shaft are corresponding respectively, for differential variable capacitance mode, make up in twos in each group that the differential capacitor of packet configuration is corresponding to be increased respectively simultaneously and reduce.At least one deck insulation dielectric layer (3) (8) (13) (18) (23) (28) (33) (38) (43) (48) (53) (58) (63) (68) (73) (78) is arranged, the composite bed that perhaps has one deck at least to constitute by dielectric layer and insulation course on the relevant work surface of capacitor fixing electrode (2) (7) (12) (17) (22) (27) (32) (37) (42) (47) (52) (57) (62) (67) (72) (77).The interlayer cavity has correlativity with the inclination that takes place when working shaft rotates, when normal operating conditions, for one dimension working shaft condenser type obliquity sensor Sensitive Apparatus, the interlayer cavity body structure generally is with respect to rotational symmetric cylinder annular of working shaft or billiard table annular, or with respect to perpendicular to surface level and comprise the non-complete circle band of column shape or the billiard table annular of the plane symmetry of working shaft, for multidimensional working shaft condenser type obliquity sensor Sensitive Apparatus, the interlayer cavity body structure generally is the combination shape that constitutes corresponding to each the dimension rotational symmetric cylinder annular of working shaft or billiard table annular by respectively, or by with respect to perpendicular to surface level and comprise a plurality of non-complete circle band of column shape of each plane symmetry of respectively tieing up working shaft or the combination shape that the billiard table annular constitutes respectively, particularly when the separate sealing of each interlayer cavity, the interlayer cavity body structure is the combination shape that a plurality of one dimension working shaft condenser type obliquity sensor sensitive device structure constitute, above-mentioned working shaft is the rotation axes of symmetry of cylinder annular or billiard table annular, the variable capacitance fixed electorde is the ingredient of interlayer cavity body structure, for the independent variable capacitive way, be positioned at corresponding to the independent capacitance fixed electorde of working shaft dimension on the arc surface of cylinder annular or billiard table annular gap cavity body structure or on the transverse plane, the capacitor fixing electrode generally is non-complete circle band of column shape or billiard table annular, or annular, arc or remove the remainder of the circle after arc, and with respect to perpendicular to surface level and comprise the plane symmetry of working shaft, for differential variable capacitance mode, corresponding to the capacitor fixing electrode pair of working shaft dimension according to differential capacitor to structural requirement, the symmetrical combining and configuring of dividing into groups in twos, the capacitor fixing electrode pair is with respect to the working shaft symmetry, perhaps with respect to perpendicular to surface level and comprise the plane symmetry of working shaft, each is organized the capacitor fixing electrode pair and combines with supporting base and constitute corresponding cylinder annular or billiard table annular gap cavity body structure, and is positioned on the arc surface of cylinder annular or billiard table annular or on the transverse plane.The capacitor fixing electrode is the one dimension inclination angle Sensitive Apparatus of arc surface, by supporting base (1) (11) and at least one is the non-complete circle arc surfaced independent capacitance fixed electorde (2) in axle center with the working shaft, perhaps with at least one group of differential capacitor fixed electorde of isolating with respect to the axisymmetric insulation of work to (12), constitute the cylinder annular gap cavity (4) (14) of sealing liquid electric conductor (5) (15), similarly, can be by non-complete billiard table annular independent capacitance fixed electorde or billiard table annular differential capacitor fixed electorde to constituting billiard table annular gap cavity.The capacitor fixing electrode is at the one dimension inclination angle of transverse plane Sensitive Apparatus, constitute the cylinder annular gap cavity (9) (19) of sealing liquid electric conductor (10) (20) by the capacitor fixing electrode on supporting base (6) (16) and the end face, cylinder annular gap cavity has the differential capacitor fixed electorde that at least one independent capacitance fixed electorde (7) or at least one group of insulation isolation are arranged on the end face at least to (17), electrode shape is non-complete annular, working shaft is the rotation center axis of cylinder annular, similarly, the interlayer cavity can be a billiard table annular gap cavity, and the diameter of the cylinder annular inboard of interlayer cavity body structure or the diameter of billiard table annular inboard are greater than the maximum fluid fluctuation and change difference that causes because of liquid electric conductor volume change in the interlayer cavity.When with normal during perpendicular to the planar interception cylinder annular gap cavity of cylinder ring oblique crank Z line, by at least one independent capacitance fixed electorde (22) on supporting base (21) (26) and the arc surface or at least one group of differential capacitor fixed electorde (27) are cooperated, or (37) are cooperated by at least one independent capacitance fixed electorde (32) on supporting base (31) (36) and the transverse plane or at least one group of differential capacitor fixed electorde, constitute the non-complete circle band of column shape symmetry interlayer cavity (24) (29) (34) (39) of sealing liquid electric conductor (25) (30) (35) (40), working shaft is the symcenter axis of cylinder annular, similarly, the interlayer cavity can the complete billiard table annular gap of right and wrong cavity.The capacitor fixing electrode is at the multidimensional working shaft inclination angle of arc surface position Sensitive Apparatus, by supporting base (41) (51) and number cylinder annular independent capacitance fixed electorde (42) corresponding to the working shaft dimension, perhaps organize number corresponding to the cylinder of working shaft dimension annular differential capacitor fixed electorde to (52), constitute the cylinder annular gap cavity (44) (54) of quantity corresponding to the liquid electric conductor (45) of sealing (55) of working shaft dimension, the multidimensional working shaft intersects at a central point, each cylinder annular gap cavity is the axle center with the relevant work axle respectively, and form an assembly, similarly, can be by billiard table annular independent capacitance fixed electorde or billiard table annular differential capacitor fixed electorde to constituting billiard table annular gap cavity.The capacitor fixing electrode is perpendicular to the multidimensional working shaft inclination angle Sensitive Apparatus on the plane of relevant work axle, by supporting base (46) (56) and number corresponding to the working shaft dimension, and perpendicular to the annular independent capacitance fixed electorde (47) on the plane of relevant work axle, perhaps organize number corresponding to the working shaft dimension, and perpendicular to the annular differential capacitor fixed electorde on the plane of relevant work axle to (57), constitute the annulus cylindricality interlayer cavity (49) (59) of sealing liquid electric conductor (50) (60), the multidimensional working shaft intersects at a central point, form an assembly, similarly, the interlayer cavity can be a billiard table annular gap cavity, and the cylinder annular inboard of each interlayer cavity body structure or the diameter of billiard table annular inboard are greater than the maximum fluid fluctuation and change difference that causes because of liquid electric conductor volume change in the interlayer cavity.The capacitor fixing electrode is at the multidimensional working shaft inclination angle of arc surface position Sensitive Apparatus, by supporting base (61) (66) and number corresponding to the working shaft dimension, and be the non-complete circle band of column shape independent capacitance electrode (62) in axle center with the working shaft, perhaps organize number corresponding to the working shaft dimension, and be that the non-complete circle band of column shape differential capacitor electrode pair (67) in axle center combines with working shaft, constitute the non-complete circle band of column clevis layer cavity (64) (69) of sealing liquid electric conductor (65) (70), the multidimensional working shaft intersects at a central point, and form an assembly, similarly, can be by non-complete billiard table annular independent capacitance fixed electorde or billiard table annular differential capacitor fixed electorde to constituting billiard table annular gap cavity.The capacitor fixing electrode is perpendicular to the multidimensional working shaft inclination angle Sensitive Apparatus on the plane of relevant work axle, by supporting base (71) (76) and number corresponding to the working shaft dimension, and perpendicular to the non-complete annular independent capacitance electrode (72) on the plane of relevant work axle, perhaps organize number corresponding to the working shaft dimension and perpendicular to the non-complete annular differential capacitor electrode pair (77) on the plane of relevant work axle, constitute the non-complete billiard table annular gap cavity (74) (79) of quantity corresponding to the liquid electric conductor (75) of sealing (80) of working shaft dimension, the multidimensional working shaft intersects at a central point, and form an assembly, similarly, can be by non-complete circle band of column shape independent capacitance fixed electorde or cylinder annular differential capacitor fixed electorde to constituting non-complete circle band of column clevis layer cavity.
Compare with present similar techniques, the movable body that is used to change capacitance value is not the liquid dielectric material part that constitutes electric capacity, but the motion capacitance electrode that forms by liquid electric conductor interface, therefore can independent optimization select parameter characteristics such as capacitor dielectric material and specific inductive capacity, can take into account requirements such as the various materials that constitute Sensitive Apparatus and performance simultaneously.
Accompanying drawing 1, accompanying drawing 2, accompanying drawing 3, accompanying drawing 4 are with respect to the synoptic diagram of one dimension working shaft cylinder annular gap cavity body structure in the utility model.Working shaft is the rotation axes of symmetry of cylinder annular.
Accompanying drawing 5, accompanying drawing 6, accompanying drawing 7, accompanying drawing 8 are with respect to the synoptic diagram of the non-complete circle band of column clevis layer cavity body structure of one dimension working shaft in the utility model.Working shaft is the rotation axes of symmetry of complete circle band of column shape.
Accompanying drawing 9, accompanying drawing 10, accompanying drawing 11, accompanying drawing 12 are respectively with respect to the synoptic diagram of rotational symmetric cylinder annular of two-dimentional working shaft or billiard table annular gap cavity body structure in the utility model.Working shaft is each dimension cylinder annular or the corresponding rotation axes of symmetry of billiard table annular.
Accompanying drawing 13, accompanying drawing 14, accompanying drawing 15, accompanying drawing 16 are respectively with respect to the work synoptic diagram of axisymmetric non-complete circle band of column shape or billiard table annular gap cavity body structure of two dimension in the utility model.Working shaft is each dimension complete circle band of column shape or the corresponding rotation axes of symmetry of billiard table annular.
Embodiment 1 of the present utility model and embodiment 2: as shown in Figures 1 and 2, by forming the motion capacitance electrode corresponding to liquid electric conductor (5) (10) in the cylinder annular gap cavity (4) (9) of one dimension working shaft, cooperate supporting base (1) (6), independent capacitance fixed electorde (2) (7), with and surface insulation dielectric layer (3) (8), constitute the inclination angle sensitive structure that electric capacity changes with the inclination angle; Working shaft is the symcenter axle of cylinder annular, the independent capacitance fixed electorde is positioned on the cambered surface of cylinder annular or on the cross section accordingly, and with respect to plane symmetry perpendicular to surface level and mistake cylinder annular central axis, the core of supporting base is one with respect to the rotational symmetric cylindrical rings of working shaft, during work, liquid electric conductor is along with working shaft rotates in the interlayer cavity, the inclination angle changes and moves in cavity, variable capacitance is changed, realize detection with the variation at inclination angle the inclination angle variable quantity by measuring electric capacity.
Embodiment 3 of the present utility model and embodiment 4: shown in accompanying drawing 3 and accompanying drawing 4, by forming the motion capacitance electrode corresponding to liquid electric conductor (15) (20) in the cylinder annular gap cavity (14) (19) of one dimension working shaft, the differential capacitor fixed electorde that cooperates supporting base (11) (16), mutually insulated is to (12) (17), with and surface insulation dielectric layer (13) (18), constitute the inclination angle sensitive structure that electric capacity changes with the inclination angle; Working shaft is the symcenter axle of cylinder annular, the differential capacitor fixed electorde is on the cambered surface that is positioned at the cylinder annular accordingly or on the cross section, and with respect to plane symmetry perpendicular to surface level and mistake cylinder annular central axis, the core of supporting base is one with respect to the rotational symmetric cylindrical rings of working shaft, during work, liquid electric conductor moves in cavity along with the working shaft rotation in the interlayer cavity, differential variable capacitance is increased respectively simultaneously to electric capacity and reduce, by measuring differential variable capacitance, realize detection to the inclination angle variable quantity to the differential change of electric capacity with the inclination angle.
Embodiment 7 of the present utility model and embodiment 8: shown in accompanying drawing 7 and accompanying drawing 8, corresponding to the non-complete circle cylindricality interlayer cavity (34) (39) of one dimension working shaft with respect to the plane symmetry of crossing working shaft, working shaft is complete columniform symcenter axle, form the motion capacitance electrode by liquid electric conductor (35) (40) in the interlayer cavity, cooperate supporting base (31) (36), independent stationary electrode (32) and differential capacitor are to (37), with and surface insulation dielectric layer (33) (38), constitute independent variable electric capacity that electric capacity changes with the inclination angle and differential variable capacitance to structure; Fixed electorde is positioned on the cross section of non-complete circle band of column shape, and with respect to plane symmetry perpendicular to surface level and mistake cylinder annular central axis, during work, liquid electric conductor moves in cavity along with the working shaft rotation in the interlayer cavity, variable capacitance is changed, realize detection with the variation at inclination angle the inclination angle variable quantity by measuring electric capacity.
Embodiment 9 of the present utility model and embodiment 10: shown in accompanying drawing 9 and accompanying drawing 10, form the motion capacitance electrode by liquid electric conductor (45) (50) in the cylinder annular (44) (49) of one of two-dimentional working shaft of correspondence, cooperate supporting base (41) (46), independent capacitance fixed electorde (42) (47), with and surface insulation dielectric layer (43) (48), constitute the inclination angle sensitive structure that electric capacity changes with the inclination angle; Working shaft is the symcenter axle of cylinder annular, the independent capacitance fixed electorde is positioned on the cambered surface of cylinder annular or on the cross section accordingly, and with respect to plane symmetry perpendicular to surface level and excessively corresponding cylinder annular central axis, during work, liquid electric conductor moves in cavity along with corresponding working shaft rotation in the interlayer cavity, variable independent capacitance is changed, realize detection with the variation at inclination angle the inclination angle variable quantity by measuring electric capacity.The interlayer cavity of other one dimension is the billiard table annular in accompanying drawing 9 and the accompanying drawing 10, and principle of work is identical.
Embodiment 11 of the present utility model and embodiment 12: shown in accompanying drawing 11 and accompanying drawing 12, by forming the motion capacitance electrode corresponding to liquid electric conductor (55) (60) in the cylinder annular gap cavity (54) (59) of one of two-dimentional working shaft, the differential capacitor fixed electorde that cooperates supporting base (51) (56), mutually insulated is to (52) (57), with and surface insulation dielectric layer (53) (58), constitute the inclination angle sensitive structure that electric capacity changes with the inclination angle; Working shaft is the symcenter axle of cylinder annular, the differential capacitor fixed electorde is on the cambered surface that is positioned at the cylinder annular accordingly or on the cross section, and with respect to plane symmetry perpendicular to surface level and excessively corresponding cylinder annular central axis, during work, liquid electric conductor is along with corresponding working shaft rotates in the interlayer cavity, the inclination angle changes and moves in cavity, differential variable capacitance increases respectively simultaneously electric capacity and reduces, by measuring differential variable capacitance, realize detection to the inclination angle variable quantity to the differential change of electric capacity with the inclination angle.The principle of work of the billiard table annular gap cavity of one dimension correspondence is identical in addition in accompanying drawing 11 and the accompanying drawing 12.
Embodiment 13 of the present utility model and embodiment 14: shown in accompanying drawing 13 and accompanying drawing 14, corresponding to the non-complete circle band of column clevis layer cavity (64) (69) of one of two-dimentional working shaft with respect to the plane symmetry of crossing working shaft, working shaft is the symcenter axle of complete circle band of column shape, form the motion capacitance electrode by liquid electric conductor (65) (70) in the interlayer cavity, cooperate supporting base (61) (66), independent stationary electrode (62) and differential capacitor are to (67), with and surface insulation dielectric layer (63) (68), constitute independent variable electric capacity that electric capacity changes with the inclination angle and differential variable capacitance to structure; Fixed electorde is positioned on the cambered surface of non-complete circle band of column shape, and with respect to plane symmetry perpendicular to surface level and the corresponding non-complete circle band of column shape central axis of mistake, during work, liquid electric conductor moves in cavity along with the working shaft rotation in the interlayer cavity, variable capacitance is changed, realize detection with the variation at inclination angle the inclination angle variable quantity by measuring electric capacity.The principle of work of the other one dimension of corresponding billiard table annular gap cavity is identical in accompanying drawing 13 and the accompanying drawing 14.
Embodiment 15 of the present utility model and embodiment 16: shown in accompanying drawing 15 and accompanying drawing 16, corresponding to the non-complete billiard table annular gap cavity (74) (79) of one of two-dimentional working shaft with respect to the plane symmetry of crossing working shaft, working shaft is the symcenter axle of complete billiard table annular, form the motion capacitance electrode by liquid electric conductor (75) (80) in the interlayer cavity, cooperate supporting base (71) (76), independent stationary electrode (72) and differential capacitor are to (77), with and surface insulation dielectric layer (73) (78), constitute independent variable electric capacity that electric capacity changes with the inclination angle and differential variable capacitance to structure; Fixed electorde is positioned on the cross section of non-complete circle band of column shape, and with respect to plane symmetry perpendicular to surface level and the corresponding billiard table annular center axis of mistake, during work, liquid electric conductor is along with working shaft rotation, inclination angle change and move in cavity in the interlayer cavity, variable capacitance is changed, realize detection with the variation at inclination angle the inclination angle variable quantity by measuring electric capacity.The interlayer cavity of other one dimension is the cylinder annular in accompanying drawing 15 and the accompanying drawing 16, and principle of work is identical.
Claims (10)
1, a kind of condenser type inclination angle sensitive device structure, by supporting base, capacitance electrode, the combination layer of insulation dielectric layer or dielectric layer and insulation course, interlayer cavity body structure and liquid electric conductor are formed, it is characterized in that: supporting base adopts insulating material to make, it mainly acts on is to support to connect the capacitor fixing electrode, constitute structure by supporting base and capacitor fixing electrode with interlayer cavity, generate the insulation dielectric layer at the capacitor fixing electrode surface, perhaps generate the composite bed that constitutes by dielectric layer and insulation course, the liquid electric conductor of in the interlayer cavity, packing into, capacitor fixing electrode surface insulation dielectric layer or composite bed constitute the dielectric layer of electric capacity, and liquid electric conductor and capacitor fixing electrode insulation are isolated, the surface of contact of liquid electric conductor and capacitor fixing electrode surface insulation dielectric layer or composite bed forms the motion electrode of variable capacitance, constitute independent variable capacitive way or differential variable capacitance mode structure, the amount of getting of liquid electric conductor is generally according to following condition in the interlayer cavity: when the inclination angle of obliquity sensor Sensitive Apparatus when zero changes to full scale or maximum detection amount pitch angle, for the independent variable capacitive way, the surface of contact of liquid electric conductor and capacitor fixing electrode surface insulation dielectric layer is generally from covering whole released states fully, perhaps from being separated to whole covering states fully, for differential variable capacitance mode, liquid electric conductor generally covers two right electrodes of differential capacitor fixed electorde from homalographic, be changed to all move to the differential capacitor fixed electorde to one of in the pairing cavity of electrode, perhaps on the contrary from all the differential capacitor fixed electorde to one of the pairing cavity of electrode, move and be changed to two right electrodes of homalographic covering differential capacitor fixed electorde, when condenser type inclination angle Sensitive Apparatus during around the rotation of single axis of operation or a plurality of axis of operation, the inclination angle changes, for the independent variable capacitive way, single independent capacitance or change corresponding to a plurality of independent capacitances of multidimensional working shaft are corresponding respectively, for differential variable capacitance mode, make up in twos in each group that the differential capacitor of packet configuration is corresponding to be increased respectively simultaneously and reduce.
2, a kind of condenser type according to claim 1 inclination angle sensitive device structure, it is characterized in that: one deck insulation dielectric layer (3) (8) (13) (18) (23) (28) (33) (38) (43) (48) (53) (58) (63) (68) (73) (78) is at least arranged, the composite bed that perhaps has one deck at least to constitute on the relevant work surface of capacitor fixing electrode (2) (7) (12) (17) (22) (27) (32) (37) (42) (47) (52) (57) (62) (67) (72) (77) by dielectric layer and insulation course.
3, a kind of condenser type according to claim 1 inclination angle sensitive device structure, it is characterized in that: the interlayer cavity has correlativity with the inclination that takes place when working shaft rotates, when normal operating conditions, for one dimension working shaft condenser type obliquity sensor Sensitive Apparatus, the interlayer cavity body structure generally is with respect to rotational symmetric cylinder annular of working shaft or billiard table annular, or with respect to perpendicular to surface level and comprise the non-complete circle band of column shape or the billiard table annular of the plane symmetry of working shaft, for multidimensional working shaft condenser type obliquity sensor Sensitive Apparatus, the interlayer cavity body structure generally is the combination shape that constitutes corresponding to each the dimension rotational symmetric cylinder annular of working shaft or billiard table annular by respectively, or by with respect to perpendicular to surface level and comprise a plurality of non-complete circle band of column shape of each plane symmetry of respectively tieing up working shaft or the combination shape that the billiard table annular constitutes respectively, particularly when the separate sealing of each interlayer cavity, the interlayer cavity body structure is the combination shape that a plurality of one dimension working shaft condenser type obliquity sensor sensitive device structure constitute, above-mentioned working shaft is the rotation axes of symmetry of cylinder annular or billiard table annular, the variable capacitance fixed electorde is the ingredient of interlayer cavity body structure, for the independent variable capacitive way, be positioned at corresponding to the independent capacitance fixed electorde of working shaft dimension on the arc surface of cylinder annular or billiard table annular gap cavity body structure or on the transverse plane, the capacitor fixing electrode generally is non-complete circle band of column shape or billiard table annular, or annular, arc or remove the remainder of the circle after arc, and with respect to perpendicular to surface level and comprise the plane symmetry of working shaft, for differential variable capacitance mode, corresponding to the capacitor fixing electrode pair of working shaft dimension according to differential capacitor to structural requirement, the symmetrical combining and configuring of dividing into groups in twos, the capacitor fixing electrode pair is with respect to the working shaft symmetry, perhaps with respect to perpendicular to surface level and comprise the plane symmetry of working shaft, each is organized the capacitor fixing electrode pair and combines with supporting base and constitute corresponding cylinder annular or billiard table annular gap cavity body structure, and is positioned on the arc surface of cylinder annular or billiard table annular or on the transverse plane.
4, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: the capacitor fixing electrode is the one dimension inclination angle Sensitive Apparatus of arc surface, by supporting base (1) (11) and at least one is the non-complete circle arc surfaced independent capacitance fixed electorde (2) in axle center with the working shaft, perhaps with at least one group of differential capacitor fixed electorde of isolating with respect to the axisymmetric insulation of work to (12), constitute the cylinder annular gap cavity (4) (14) of sealing liquid electric conductor (5) (15), similarly, can be by non-complete billiard table annular independent capacitance fixed electorde or billiard table annular differential capacitor fixed electorde to constituting billiard table annular gap cavity.
5, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: the capacitor fixing electrode is at the one dimension inclination angle of transverse plane Sensitive Apparatus, constitute the cylinder annular gap cavity (9) (19) of sealing liquid electric conductor (10) (20) by the capacitor fixing electrode on supporting base (6) (16) and the end face, cylinder annular gap cavity has the differential capacitor fixed electorde that at least one independent capacitance fixed electorde (7) or at least one group of insulation isolation are arranged on the end face at least to (17), electrode shape is non-complete annular, working shaft is the rotation center axis of cylinder annular, similarly, the interlayer cavity can be a billiard table annular gap cavity, and the diameter of the cylinder annular inboard of interlayer cavity body structure or the diameter of billiard table annular inboard are greater than the maximum fluid fluctuation and change difference that causes because of liquid electric conductor volume change in the interlayer cavity.
6, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: when with normal during perpendicular to the planar interception cylinder annular gap cavity of cylinder ring oblique crank Z line, by at least one independent capacitance fixed electorde (22) on supporting base (21) (26) and the arc surface or at least one group of differential capacitor fixed electorde (27) are cooperated, or (37) are cooperated by at least one independent capacitance fixed electorde (32) on supporting base (31) (36) and the transverse plane or at least one group of differential capacitor fixed electorde, constitute the non-complete circle band of column shape symmetry interlayer cavity (24) (29) (34) (39) of sealing liquid electric conductor (25) (30) (35) (40), working shaft is the symcenter axis of cylinder annular, similarly, the interlayer cavity can the complete billiard table annular gap of right and wrong cavity.
7, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: the capacitor fixing electrode is at the multidimensional working shaft inclination angle of arc surface position Sensitive Apparatus, by supporting base (41) (51) and number cylinder annular independent capacitance fixed electorde (42) corresponding to the working shaft dimension, perhaps organize number corresponding to the cylinder of working shaft dimension annular differential capacitor fixed electorde to (52), constitute the cylinder annular gap cavity (44) (54) of quantity corresponding to the liquid electric conductor (45) of sealing (55) of working shaft dimension, the multidimensional working shaft intersects at a central point, each cylinder annular gap cavity is the axle center with the relevant work axle respectively, and form an assembly, similarly, can be by billiard table annular independent capacitance fixed electorde or billiard table annular differential capacitor fixed electorde to constituting billiard table annular gap cavity.
8, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: the capacitor fixing electrode is perpendicular to the multidimensional working shaft inclination angle Sensitive Apparatus on the plane of relevant work axle, by supporting base (46) (56) and number corresponding to the working shaft dimension, and perpendicular to the annular independent capacitance fixed electorde (47) on the plane of relevant work axle, perhaps organize number corresponding to the working shaft dimension, and perpendicular to the annular differential capacitor fixed electorde on the plane of relevant work axle to (57), constitute the annulus cylindricality interlayer cavity (49) (59) of sealing liquid electric conductor (50) (60), the multidimensional working shaft intersects at a central point, form an assembly, similarly, the interlayer cavity can be a billiard table annular gap cavity, and the cylinder annular inboard of each interlayer cavity body structure or the diameter of billiard table annular inboard are greater than the maximum fluid fluctuation and change difference that causes because of liquid electric conductor volume change in the interlayer cavity.
9, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: the capacitor fixing electrode is at the multidimensional working shaft inclination angle of arc surface position Sensitive Apparatus, by supporting base (61) (66) and number corresponding to the working shaft dimension, and be the non-complete circle band of column shape independent capacitance electrode (62) in axle center with the working shaft, perhaps organize number corresponding to the working shaft dimension, and be that the non-complete circle band of column shape differential capacitor electrode pair (67) in axle center combines with working shaft, constitute the non-complete circle band of column clevis layer cavity (64) (69) of sealing liquid electric conductor (65) (70), the multidimensional working shaft intersects at a central point, each interlayer cavity, independent capacitance electrode or differential capacitor electrode pair are with respect to the plane symmetry perpendicular to surface level and excessively corresponding cylinder annular central axis, and form an assembly, similarly, can be by non-complete billiard table annular independent capacitance fixed electorde or billiard table annular differential capacitor fixed electorde to constituting billiard table annular gap cavity.
10, according to claim 1 and the described a kind of condenser type of claim 3 inclination angle sensitive device structure, it is characterized in that: the capacitor fixing electrode is perpendicular to the multidimensional working shaft inclination angle Sensitive Apparatus on the plane of relevant work axle, by supporting base (71) (76) and number corresponding to the working shaft dimension, and perpendicular to the non-complete annular independent capacitance electrode (72) on the plane of relevant work axle, perhaps organize number corresponding to the working shaft dimension and perpendicular to the non-complete annular differential capacitor electrode pair (77) on the plane of relevant work axle, constitute the non-complete billiard table annular gap cavity (74) (79) of quantity corresponding to the liquid electric conductor (75) of sealing (80) of working shaft dimension, the multidimensional working shaft intersects at a central point, and form an assembly, similarly, can be by non-complete circle cylindricality independent capacitance fixed electorde or annulus cylindricality differential capacitor fixed electorde to constituting non-complete circle band of column clevis layer cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02238821 CN2548116Y (en) | 2002-06-13 | 2002-06-13 | Capacitor-type angle-incidence sensitive device structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02238821 CN2548116Y (en) | 2002-06-13 | 2002-06-13 | Capacitor-type angle-incidence sensitive device structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2548116Y true CN2548116Y (en) | 2003-04-30 |
Family
ID=33712421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02238821 Expired - Fee Related CN2548116Y (en) | 2002-06-13 | 2002-06-13 | Capacitor-type angle-incidence sensitive device structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2548116Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101050701B (en) * | 2006-11-16 | 2011-04-13 | 杨敏 | Non-intervention type capacitor oil medium sensor |
| CN102901487A (en) * | 2012-10-31 | 2013-01-30 | 北京邮电大学 | Reluctance type inclination angle sensor |
| CN103837134A (en) * | 2014-03-06 | 2014-06-04 | 湖南科技学院 | Differential capacitor type obliquity sensor |
| CN104006737A (en) * | 2014-04-28 | 2014-08-27 | 哈尔滨工业大学 | Method and device for measuring dip angle of concentric coplanar ring, quartering ring and circle nested polar plate |
| CN107402646A (en) * | 2017-07-06 | 2017-11-28 | 深圳市华星光电技术有限公司 | Act perception device, the method and VR handles of sensed activation |
| CN108691531A (en) * | 2018-05-09 | 2018-10-23 | 中国地质大学（武汉） | A kind of tool face azimuth sensor based on conductance principle |
| CN109737942A (en) * | 2019-02-20 | 2019-05-10 | 京东方科技集团股份有限公司 | A kind of sensor and terminal |
-
2002
- 2002-06-13 CN CN 02238821 patent/CN2548116Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101050701B (en) * | 2006-11-16 | 2011-04-13 | 杨敏 | Non-intervention type capacitor oil medium sensor |
| CN102901487A (en) * | 2012-10-31 | 2013-01-30 | 北京邮电大学 | Reluctance type inclination angle sensor |
| CN102901487B (en) * | 2012-10-31 | 2015-01-21 | 北京邮电大学 | Reluctance type inclination angle sensor |
| CN103837134A (en) * | 2014-03-06 | 2014-06-04 | 湖南科技学院 | Differential capacitor type obliquity sensor |
| CN104006737A (en) * | 2014-04-28 | 2014-08-27 | 哈尔滨工业大学 | Method and device for measuring dip angle of concentric coplanar ring, quartering ring and circle nested polar plate |
| CN104006737B (en) * | 2014-04-28 | 2016-08-24 | 哈尔滨工业大学 | The nested pole plate inclination angle measurement method of concentric coplanar ring-quartering ring-circle and device |
| CN107402646A (en) * | 2017-07-06 | 2017-11-28 | 深圳市华星光电技术有限公司 | Act perception device, the method and VR handles of sensed activation |
| CN108691531A (en) * | 2018-05-09 | 2018-10-23 | 中国地质大学（武汉） | A kind of tool face azimuth sensor based on conductance principle |
| CN109737942A (en) * | 2019-02-20 | 2019-05-10 | 京东方科技集团股份有限公司 | A kind of sensor and terminal |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2548116Y (en) | Capacitor-type angle-incidence sensitive device structure | |
| CN1307406C (en) | Capacitive displacement sensor | |
| EP0376631B1 (en) | Differential capacitive pressure sensor with over-pressure protection and method of providing over-pressure protection to a capacitive pressure sensor | |
| MY131846A (en) | Multi-layer capacitor and method for manufacturing same | |
| CN85108657A (en) | Electrostatic capacity type encoder | |
| CN102844827A (en) | Vacuum capacitor | |
| CN101846562A (en) | Pressure sensor | |
| CN203337591U (en) | Multi-column moisture content measurement capacitance sensor | |
| CN107942143B (en) | Experimental device for measure solid medium relative dielectric constant | |
| CN102278981A (en) | Gyroscope and manufacturing method thereof | |
| CN113764188A (en) | Vacuum capacitor capable of changing capacitance capacity | |
| CA2049963A1 (en) | Electronic capacitive level with automatic electrode selection | |
| CN1637391A (en) | Differential capacitive type mems sensor apparatus with capacitance compensator having mems structure | |
| CN1920480A (en) | Two-rotor statically stable electromagnetic suspension micro-rotary gyro | |
| CN202614451U (en) | Compound pressure transducer | |
| CN102239534B (en) | Vacuum capacitor | |
| CN2733311Y (en) | Capacitance-type inclination angle sensor | |
| CN109186573A (en) | A kind of micro- hemispherical resonator device | |
| CN202041342U (en) | Electric insulation structure of differential metal capacitance bellows and metal shell assembly | |
| CN202008926U (en) | Floating type electrode multilayer ceramic capacitor | |
| US4852140A (en) | X-ray tube bearing arc suppressor | |
| CN203432648U (en) | Capacitive fuel sensor | |
| CN110336487B (en) | Road piezoelectric transduction device and method | |
| CN114674483B (en) | Three-dimensional force flexible touch sensor with high tangential angle resolution | |
| US4934198A (en) | Displacement and torque sensor using resistance element that is progressively shorted |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |