CN2502371Y - Quasi-continuous output X-ray generating device - Google Patents

Quasi-continuous output X-ray generating device Download PDF

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Publication number
CN2502371Y
CN2502371Y CN 01253947 CN01253947U CN2502371Y CN 2502371 Y CN2502371 Y CN 2502371Y CN 01253947 CN01253947 CN 01253947 CN 01253947 U CN01253947 U CN 01253947U CN 2502371 Y CN2502371 Y CN 2502371Y
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ray
target
mirror
laser
vacuum
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CN 01253947
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Chinese (zh)
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汤宇辉
张长学
韩申生
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

An X ray generating device which can output continuously is provided, which is suitable for the imaging, detecting and diagnosis of X ray, and can generate subpicosecond X ray. The utility model comprises a laser source and a vacuum target chamber. The laser cluster send by the laser source crosses through the window of the vacuum target chamber to shine on the plane refection mirror in the vacuum target chamber, the laser cluster reflected by the plane reflection mirror is focused on a belt-shaped target material through the front diaphragm in a solid target component by an off-axis paraboloid reflection and focus mirror. One end of the belt-shaped target material in the solid target component arranged in the vacuum target chamber is fixed on the active wheel, which rounds a first assistance movable wheel, a taper hole X diaphragm, a second assistance movable wheel entwined on a driven wheel. A progressing engine and the laser source are controlled by a sync signal generator at the same time. The progressing engine drives an active wheel to rotate, which drives the belt-shaped target material to move. Comparing with the prior art, the utility model has common adaptability and quasi-discontinuity. The utility model is suitable for long pulse or short pulse and various wave lengths, which has good stability, low cost, high degree of coherence and high resolution. The resolution is improved by 10 times by comparing with the prior art.

Description

The X ray generation device of quasi-continuous output
Technical field:
The utility model is the X ray generation device about a kind of quasi-continuous output, and it can be used as small-sized x-ray source and is applied in precision and X-ray intensity, spatial coherence are all had certain requirements in imaging, detection and the diagnosis of X ray.And be applicable to and adopt the ultrashort laser pumping source to produce the subpicosecond X ray.
Background technology:
Technology [1] formerly: utilize light laser and plateau subsystem number (Z) element solid target (mainly being the goldleaf target at present) to interact and produce X ray.This research is a very active field, and the various countries physicist all carried out the research of this respect.The high energy high-density plasma with laser and goldleaf target effect generation that the more representational American of being D.R.Kania and H.Kornblum etc. are done produces X ray as operation material and (publishes an article and see Physical Review A, 46 (12), 7853-7868,1992).Their pumping laser wavelength in experiment is 1.06 microns, and pulsewidth was 1 nanosecond, and pulse energy is 6500 joules.Through frequency-doubling crystal potassium dihydrogen phosphate (KDP) frequency multiplication, focus on again with the randomly changing position mutually after, actual laser wavelength of incidence is 0.53 micron, 1 nanosecond of pulsewidth, pulse energy is 3600 joules.Laser oblique incidence after the focusing and utilizes the X ray of outgoing dorsad to carry out imaging and diagnosis to the goldleaf target.This apparatus cost is lower, simple in structure, the compactness of arranging, good stability, can also reach higher brightness, can be applied to exposure and the less demanding occasion of light source degree of coherence.But in this class device, only pay attention to the index such as intensity, spectral distribution of X-ray radiation, the space stretching of light source is not effectively controlled, make the spatial coherence of outgoing beam low, can not satisfy the requirement of high-resolution imaging.The very important deficiency of another one be the metal forming target with the light laser mechanism in always constantly consumed, behind certain hour, can't produce X ray, so it can not realize the continous-stable output of X-ray.In this case if the frequent target of changing also will inevitably make the course of work very loaded down with trivial details, if particularly interaction process is to carry out in vacuum target chamber, then change the process that target is followed venting always and vacuumized each time, therefore this light source wants to be used in distance quite long in addition in the environment that the X-ray exposure is had higher requirements.
Technology [2] formerly: Chinese Academy of Sciences's Changchun ray machine woods scape congruence inventor carried out laser and cryogenic target and be used as X source (publish an article and see the optics journal, 18 (6), 675-676,1998).Experiment is with solid-state CO 2As target, enter the interior CO of target chamber with the control of high vacuum micrometering valve 2Gas flow.In vacuum target chamber, adopt liquid nitrogen to make the CO that is blown into as cooling medium 2Gas condenses, and forms solid-state CO 2Target.Adopt 1.06 microns of wavelength, 8 nanoseconds of pulsewidth, the laser focusing of single pulse energy erg-ten is as pump light source.Because the CO in this device 2Gas can constantly replenish, and therefore can realize the continuous output of X ray, and the fragment of target is vaporized rapidly, avoids the pollution that is produced by fragment.But solid target needs the continuous cooling of liquid nitrogen in this device, relates to the cyclic process of two kinds of gases, and this just gives device light compactly brings certain difficulty.And CO 2The condensation process of gas and the shape of condensing are wayward, be difficult to guarantee that most of target surface is in the focal spot scope of laser, this just causes the conversion efficiency of X ray low, and the coherence of uncontrollable outgoing X-ray and other characteristic, making in its work aspect the X-ray imaging temporarily can not have general using value.It exists the light source broadening to make the not good problem of X ray spatial coherence too in addition.
Because in the image-forming diagnose work of X-ray, the resolution of imaging is to estimate the deciding factor of imaging results, therefore the X-ray that requires to arrive on the recording medium must have higher signal to noise ratio (S/N ratio), this means that the exposure on the recording medium has a lower limit (to consult document J.Opt.Soc.Am.A, 7 (10), 1847-1861,1990).And in the work of the X ray of laser plasma interactions generation at present, the conversion efficiency of X ray is also lower, need just to reach certain X-ray output energy through the long time shutter, the steady and continuous that therefore realizes X-ray is output into the necessary condition for the x-ray source success.Simultaneously, in theory the research of the quantitative relationship of X ray spatial coherence and imaging resolution is shown that also the reduction of X ray spatial coherence also will cause the remarkable reduction of imaging resolution, (consult document OpticsCommunications, 172,17-22,1999).The laser plasma X source can be regarded the mutual incoherent thermal light source of each point on the face of source as, and the breadth wise dimension that reduces light source can effectively improve the spatial coherence of output X-ray, and then improves the lateral resolution of imaging.In addition, the x-ray source of femtosecond magnitude has very significant meaning for research fields such as biological and molecular chemistries, in recent years along with the development of laser technology, the pulsewidth of present state-of-the-art laser instrument output pulse has reached the femtosecond magnitude, power is also brought up to rapidly more than the terawatt (TW), and the technical conditions that produce the femtosecond X-ray are ripe.But formerly in the technology before laser focusing the transmissive optical element that adopt more can cause the serious broadening of ultrashort pulse, the decline of the laser target shooting power density after causing simultaneously focusing on, this be to obtain ultrashort x-ray source must avoid.
In sum, as can be seen, make x-ray source have little space scale and quasi-continuous output is vital for the X-ray image-forming diagnose.Simultaneously, the x-ray source that obtain ultrashort pulsewidth also will be considered the light path problems such as focusing system of pump light.
Summary of the invention:
The X ray generation device of quasi-continuous output of the present utility model comprises: LASER Light Source 1 and vacuum target chamber 2.Be built-in with plane mirror 3, off axis paraboloid mirror reflect focalization mirror 4, solid target assembly 5 and stepper motor 6 at vacuum target chamber 2.As shown in Figure 1.Said solid target assembly 5 contains banded target 502, and an end of banded target 502 is fixed on the driving wheel 504, is coiled on the follower 505 after walking around the first auxilliary driving wheel 503 and the second auxilliary driving wheel 508.Banded target 502 between the first auxilliary driving wheel 503 and the second auxilliary driving wheel 508 places taper hole X-ray door screen 509 to go on the one side of perforation 5091, with taper hole X-ray door screen 509 on same central axis, be equipped with forward direction diaphragm 501 facing to banded target 502; Each element in the above-mentioned solid target assembly 5 places by chassis 507 and is fixed on the support 506 in the vacuum target chamber 2.As shown in Figure 2.The perforation 5091 of going into of said taper hole X-ray door screen 509 is to place on the focus of off axis paraboloid mirror reflect focalization mirror 4.Said forward direction diaphragm 501 is to place before the focus of off axis paraboloid mirror reflect focalization mirror 4.The window 201 that passes vacuum target chamber 2 by LASER Light Source 1 emitted laser bundle Gr is penetrated on the plane mirror 3 in placing vacuum target chamber 2.Plane mirror 3 laser light reflected bundles focus on through off axis paraboloid mirror reflect focalization mirror 4 and place taper hole X-ray door screen 509 to go on the banded target 502 on the perforation 5091.Driving wheel 504 in the said solid target assembly 5 links to each other with stepper motor 6 in placing vacuum target chamber 2, and stepper motor 6 is connected the synchronous generator 7 of 7-1 when placing vacuum target chamber 2 outer with LASER Light Source 1 continuous.As shown in Figure 1.
The clear aperature of said taper hole X-ray door screen 509 is conical, perforation hole 5092 aperture D Go outGreater than going into perforation 5091 aperture D Go into, i.e. D Go out>D Go into, as shown in Figure 2.Go into the aperture D of perforation 5091 Go intoBe that 1 micron (μ m) is to 30 microns (μ m), i.e. 1 μ m<D Go into<30 μ m.
The aforesaid structure of X ray generation device of the present utility model as shown in Figure 1, can be divided into the two large divisions on function.First comprises pumping laser light source 1, vacuum target chamber 2, and the plane mirror 3 and the off axis paraboloid mirror reflect focalization mirror 4 that are positioned at vacuum target chamber 2, and this part is used to provide focusing target practice light source.Second portion comprises solid target assembly 5, the stepper motor 6 that is fixed in vacuum target chamber 2 centers, and be positioned at vacuum target chamber 2 outer is connected 7-1 and the synchronous generator 7 that is connected with stepper motor 6 respectively with LASER Light Source 1, this part is that realization and pulse laser synchronously upgrade target and continuously to the restriction in the X-radiation zone that produces after laser and the target effect.Wherein solid target assembly 5 comprises forward direction diaphragm 501, banded target 502, taper hole X-ray door screen 509, driving wheel 504, follower 505, the first auxilliary driving wheel 503 and second auxilliary driving wheel 508, chassis 507 and the support 506.
In first, LASER Light Source 1 is used to provide pump light source, and it both can be all kinds of laser instruments of long pulse (pulsewidth is at nanosecond order), also can be the ultrashort ultra-intense laser device (pulsewidth is psec or femtosecond magnitude) that adopts chirped pulse amplification.
The concrete course of work of above-mentioned x-ray source is:
Enter vacuum target chamber 2 after focusing system focuses on back and target interaction from the laser pulse of LASER Light Source 1 output.In order to realize that x-ray source has general applicability, promptly be applicable to the laser beam of distinct pulse widths and wavelength, adopted reflective focusing system.In vacuum target chamber 2, the laser beam that plane mirror 3 will enter in the vacuum target chamber 2 reflexes on the off axis paraboloid mirror reflect focalization mirror 4, and off axis paraboloid mirror reflect focalization mirror 4 focuses on laser beam on the banded target 502 through forward direction diaphragm 501 again.Because the optical axis of off axis paraboloid mirror reflect focalization mirror 4 is parallel with the laser beam optical axis that comes from plane mirror 3 reflections.According to paraboloidal character, the light that is parallel to optical axis incident will be assembled on paraboloidal focus.
In the second portion in the solid target assembly 5, before the laser focusing focus, be placed with forward direction diaphragm 501, its pore size allows the convergent laser bundle to pass through fully just, main effect is to prevent that the sputtering material that produces after laser and banded target 502 interact from polluting the minute surface of vacuum target chamber 2 and off axis paraboloid mirror reflect focalization mirror 4, simultaneously also can the filtering parasitic light.Laser beam after the focusing and the banded target 502 at the focus place interact, and produce high hot high-density plasma, add banded target 502 and then emission X-ray that thermoelectron also passes through electronics heat conduction heats cold.Here, the utility model has adopted solid target, and it is processed as banded membraneous material, promptly banded target 502.The perforation 5091 of going into of taper hole X-ray door screen 509 places on the focus of off axis paraboloid mirror reflect focalization mirror 4, and the banded target 502 of band-like film just places going on the perforation 5091 of taper hole X-ray door screen 509, that is to say that banded target 502 on the perforation 5091 is just at the focus place.Laser has only by being surveyed by different diagnostic instrmentses behind the taper hole X-ray door screen 509 with the X-ray that banded target 502 interactions are produced, other regional X-rays have promptly been formed the X source with minimum area by the diaphragm absorbed beyond taper hole X-ray door screen 509 clear aperatures.Recited above is laser and banded target 502 interactional light path processes.Narrate mechanical transmission course and control system in the solid target assembly 5 below.One end of banded target 502 is fixed on the driving wheel 504, walks around the first auxilliary driving wheel 503, taper hole X-ray door screen 509, second auxilliary driving wheel 508 hub disks on follower 505.Wherein, driving wheel 504, first auxilliary driving wheel 503, second auxilliary driving wheel 508 and follower 505 all are columniform pulleys, are the running parts in the solid target assembly 5.The banded target 502 of coiling all is fixed in the vacuum target chamber 2 by chassis 507 and support 506 on forward direction diaphragm 501, taper hole X-ray door screen 509 and running part and the power wheel 504,503,508,505. Stepper motor 6 and 504 coaxial connections of driving wheel, the driving of stepper motor 6 is controlled by being positioned at vacuum target chamber 2 outer synchronous generators 7.For the quasi-continuous pulse laser of high-power LASER Light Source 1 output, synchronous generator 7 also offers the trigger pip of LASER Light Source 1 simultaneously.In the gap that synchronous generator 7 triggers two pulsed lights of LASER Light Source 1 every output, it triggers stepper motor 6 and rotates, drive banded target 502 by above-mentioned running part and move a segment distance, make and have an effect with the different piece of banded target 502 all the time when each laser pulse arrives, thus the consumption problem of banded target 502 when having avoided continuous the target practice.
The utility model is compared with technology x-ray source formerly, mainly contains the advantage of following several respects:
1. it is universality that general applicability is arranged.Focusing system in the utility model has been considered the progress of current up-to-date laser technology, adopts off-axis parabolic mirror to focus on the pumping laser light source that can be applicable to long pulse and ultrashort pulse simultaneously, can be used in the X ray that produces the subpicosecond magnitude.In addition, reflect focalization is also irrelevant with Wavelength of Laser, and is identical for the focusing focal length of different wavelength of laser.Accomplished generally being suitable for to various LASER Light Source.And the transmission focusing system that formerly adopts in the technology is must redesign processing for the pumping laser light source of different wave length.
2. quasi-continuity.Formerly all there is the consumption phenomenon of target in the common laser of technology-plateau subsystem number (Z) metal foil target X source.This not only makes the output duration of X-ray be restricted, also make can not guarantee laser focal spot the energy density highest point all the time with the metallic target surface interaction.The optical property of exporting X-ray in addition also can change with the change of the target shape that consumes, can not guarantee the outgoing X-ray in time domain evenly.The utility model moves by the banded target of step motor drive, has overcome the defective of above-mentioned technology formerly effectively, can realize the long-time quasi-continuous output of X-ray, and the duration can regulated at will.In technology formerly under all not satisfactory condition of the X ray conversion ratio of laser plasma X-ray source and record by imaging media sensitivity, by continuous exposure so that to obtain higher exposure on the recording medium particularly important.If particularly wish the relation of quantitative examination exposure and imaging results, formerly the X source of technology is to reach this purpose.And the utility model can be accomplished.
3. have high degree of coherence and high resolving power.The utility model utilizes the method for the breadth wise dimension of aperture compression light source, and can guarantee that this yardstick and light source space position keep accurately constant when X ray is exported continuously.Improved the spatial coherence and the stability of outgoing X-ray significantly, made and utilize x-ray source in common lab, to carry out high-resolution imaging etc. to become possibility.Owing to adopt taper hole X-ray door screen, resolution ratio formerly technology has improved 10 times.
4. low-cost.Formerly difficulty is all compared in the preparation of target and part peripherals in the technology, and used all parts of the utility model all are easy to processing and buy.Used banded target can be used the chromium plating tape, can be substrate with common tape also, plates the metallic film of various different atomic numbers according to specific requirement, and its thickness and composition can arbitrarily be controlled, and have the X-ray of varying strength and spectral characteristic with generation.Wherein taper hole X-ray door screen 509 is also than being easier to processing.
5. good stability.Critical piece of the present utility model can be implemented in integrated on the base plate, and each interelement can not produce relative displacement except that the running target system.And the thickness of each point and composition can both keep evenly on the target band, also can make to compare lessly in various mechanical vibration at random in the luminescence process and the technology formerly, can guarantee the stable output and the less trouble of x-ray source.And these are very important to long time shutter and high-resolution imaging.
Description of drawings:
Fig. 1 is the synoptic diagram of the X ray generation device of the quasi-continuous output of the utility model;
Fig. 2 is the structural representation of solid target assembly 5 among Fig. 1.
Embodiment:
As shown in Figure 1, adopt femto-second laser as LASER Light Source 1, the parameter of its light beam is: wavelength 785nm, pulsed frequency 10Hz, pulsewidth 50fs, single pulse energy 100mJ, beam diameter 50mm.The laser pulse of its output enters vacuum target chamber 2 back being reflexed on the off axis paraboloid mirror reflect focalization mirror 4 by plane mirror 3 and focuses on the banded target 502.Wherein the diameter of plane mirror 3 is 100mm, and the bore of off axis paraboloid mirror reflect focalization mirror 4 is 50mm, and focal length is 150mm.In this example, the laser beam vacuum focusing focused spot diameter that is focused is less than 20 microns.The laser beam of line focus enters in the solid target assembly 5.Forward direction diaphragm 501 distance focal point 30mm before focus, the hole diameter on the forward direction diaphragm 501 is 10mm, laser is just seen through fully with banded target 502 interact.Taper hole X-ray door screen 509 is rectangular parallelepipeds of aluminum, and volume is 5mm * 10mm * 10mm.The light hole of taper hole X-ray door screen 509 is conical, wherein goes into the aperture D of perforation 5091 Go into=20 μ m, the aperture D of perforation hole 5092 Go out=5mm.Taper hole X-ray door screen 509 go into the focus place that perforation 5091 places focussed laser beam.The image quality of the X ray by taper hole X-ray door screen 509 is near the ideal coherent light source, and more formerly the technology X source that do not add taper hole X-ray door screen 509 improves a magnitude.
It is 150mm * 300mm that forward direction diaphragm 501, taper hole X-ray door screen 509 and running part integral body are integrated in area, and thick be on the plate shaped support 506 of 10mm, and by chassis 507 be fixed on vacuum target chamber 2 interior in the heart.Synchronous generator 7 sends 10 hertz pulse signal, triggers 7-1 LASER Light Source 1 and stepper motor 6 simultaneously.Stepper motor 6 driving diameter are 25mm, the driving wheel of 1.5 °/s of step angle.Motor whenever makes a move and drives the air line distance that target took away and be 25 / 2 × 2 π × 1.5 360 ≈ 0.327 mm
The focused spot diameter of noticing laser is 20 microns, even complicated factors such as sputter when therefore considering laser target shooting and thermal effect, such step-length can guarantee that also adjacent two target spots distance enough far can not disturbed each other on the target band.
The total length of the duration of every ribbon target 502 with the target band changes.The material of banded target 502 and length etc. all have multiple possibility.Common tape is a kind of good selection.With commercially available maxell chromium plating tape is example, and contained crome metal can be used as the high Z material that produces X ray in the tape.Its total length is about 150 meters, and the duration can reach
So Chang time shutter can make total output intensity considerable, is enough to satisfy generally speaking imaging and the demand used such as detection.

Claims (2)

1. the X ray generation device of a quasi-continuous output comprises:
<1〉LASER Light Source (1) and vacuum target chamber (2), the window (201) that passes vacuum target chamber (2) by LASER Light Source (1) emitted laser bundle (Gr) are penetrated on the plane mirror (3) in placing vacuum target chamber (2);
It is characterized in that:
<2〉vacuum target chamber (2) is built-in with off axis paraboloid mirror reflect focalization mirror (4), solid target assembly (5) and stepper motor (6), by plane mirror (3) laser light reflected beam on off axis paraboloid mirror reflect focalization mirror (4);
<3〉said solid target assembly (5) contains banded target (502), one end of banded target (502) is fixed on the driving wheel (504), walking around the first auxilliary driving wheel (503) and second assists driving wheel (508) and is coiled in afterwards on the follower (505), banded target (502) between the first auxilliary driving wheel (503) and the second auxilliary driving wheel (508) places taper hole X-ray door screen (509) to go on the one side of perforation (5091), with taper hole X-ray door screen (509) on same central axis, be equipped with forward direction diaphragm (501) facing to banded target (502), each element in the above-mentioned solid target assembly (5) places by chassis (507) and is fixed on the interior support (506) of vacuum target chamber (2);
<4〉perforation (5091) of going into of said taper hole X-ray door screen (509) is to place on the focus of off axis paraboloid mirror reflect focalization mirror (4), and said forward direction diaphragm (501) is to place before the focus of off axis paraboloid mirror reflect focalization mirror (4);
<5〉driving wheel (504) in the said solid target assembly (5) links to each other with stepper motor (6), and stepper motor (6) is connected the synchronous generator (7) of (7-1) when placing vacuum target chamber (2) outer with LASER Light Source (1) continuous.
2. the X ray generation device of quasi-continuous output according to claim 1, the clear aperature that it is characterized in that said taper hole X-ray door screen (509) are conical, the aperture D of perforation hole (5092) Go outGreater than the aperture D that goes into perforation (5091) Go into, go into the aperture D of perforation (5091) Go intoBe 1 micron<D Go into<30 microns.
CN 01253947 2001-09-28 2001-09-28 Quasi-continuous output X-ray generating device Expired - Fee Related CN2502371Y (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103310865A (en) * 2013-05-28 2013-09-18 中国工程物理研究院激光聚变研究中心 Photo-anode proton source
CN104735895A (en) * 2013-12-20 2015-06-24 中国工程物理研究院激光聚变研究中心 Laser plasma pulse positron source

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103310865A (en) * 2013-05-28 2013-09-18 中国工程物理研究院激光聚变研究中心 Photo-anode proton source
CN103310865B (en) * 2013-05-28 2016-01-20 中国工程物理研究院激光聚变研究中心 A kind of light anode proton source
CN104735895A (en) * 2013-12-20 2015-06-24 中国工程物理研究院激光聚变研究中心 Laser plasma pulse positron source

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