CN2487455Y - Cleaner for waste gas treating tank - Google Patents
Cleaner for waste gas treating tank Download PDFInfo
- Publication number
- CN2487455Y CN2487455Y CN 01219921 CN01219921U CN2487455Y CN 2487455 Y CN2487455 Y CN 2487455Y CN 01219921 CN01219921 CN 01219921 CN 01219921 U CN01219921 U CN 01219921U CN 2487455 Y CN2487455 Y CN 2487455Y
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- China
- Prior art keywords
- cleaning mechanism
- exhaust
- gas treatment
- fluted disc
- waste gas
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Abstract
The utility model discloses a cleaner for waste gas treating tank used in semiconductor exhaust gas treating apparatus, comprising a main body, wherein the main body is provided with a cleaning mechanism controlled by a drive mechanism to rotate 360 degrees and a drive mechanism capable of adjusting rotating speed and torsional force of the cleaning mechanism; moreover, the drive mechanism matches with a pneumatic cooling mechanism to convey cooling gas so as to clean out the attachment of the cleaning mechanism inside a waste gas treating tank; overheating of the drive mechanism is caused by resistance; meanwhile, normal work efficiency of the cleaning mechanism is maintained to prevent influence on semiconductor manufacture due to overheaped attachment on the internal wall of waste gas treating tank.
Description
The utility model relates to a kind of scavenge unit of exhaust-gas treatment groove, more particularly, relate to a kind of in the semiconductor waste gas treatment facility scavenge unit of exhaust-gas treatment groove, this device has multistage speed change cleaning capacity.
In present semiconductor production manufacture process, the waste gas that all can produce high temperature and have toxicity, for fear of this waste gas environment is polluted and public hazards, must be at first the oxious component in this waste gas be filtered removal, could discharge after temperature being reduced to proper temperature again.
As shown in Figure 6, solution processing mode commonly used is in the workshop at present: at first the waste gas that produces in the manufacture of semiconductor is injected in the exhaust-gas treatment groove, the passage via exhaust-gas treatment groove below enters in the waste gas cleaning and filtering groove again.Be provided with a removing device and a cooling water flusher in exhaust-gas treatment groove lower end, cooled off by the waste gas of cooling water flusher earlier high temperature; The impurity such as sediment that utilize pumping of removing device will be attached on the exhaust-gas treatment groove inwall again scrape, thereby prevent that impurity such as sediment are frozen into piece and are attached on the inwall of exhaust-gas treatment groove.Wherein, the effect of waste gas cleaning and filtering groove is that the waste gas through the cooling of cooling water flusher is further cooled off, and via after washing, filtering, discharges through the outlet of waste gas cleaning and filtering groove top again.
Utilize that aforesaid removing device and cooling water flusher implement strike off, cooling operations, be the some of daily operation in the manufacture of semiconductor.As long as semiconductor-fabricating device is in the running, this covering device just must carry out exhaust-gas treatment work, with the waste gas that prevents to produce in manufacture of semiconductor environment is made and is polluted and public hazards.
But in actual use, find that the semiconductor waste gas treatment facility when long-time running, also can accumulate the hard attachment of one deck on exhaust-gas treatment groove inwall, and can be long-pending more thick more, just the exhaust-gas treatment groove can be stopped up at last, and then influence the semi-conductive manufacturing.Therefore, after the long-time running of semiconductor waste gas treatment facility, must shut down and carry out preventative removing operation, the attachment that is about to be attached on the exhaust-gas treatment groove inwall is removed.
At present, the more novel scavenge unit that uses on the exhaust-gas treatment groove in the workshop is the patented technology that is disclosed among the United States Patent (USP) NO.6010576, the scavenge unit of this kind exhaust-gas treatment groove is that the circumference of three scrapers along an annulus equidistantly is provided with, the equal and opposite in direction of this annulus and exhaust-gas treatment groove inwall.Utilize the reciprocal transmission of tooth bar, make three scrapers can do the reciprocal rotation of 120 degree separately, thereby back and forth rotate in the ring week that forms 360 degree, the attachment on the exhaust-gas treatment groove inwall is disposed.
Yet the scavenge unit of exhaust-gas treatment groove in the above-mentioned United States Patent (USP) in actual use, revolves continuously and scrapes operation because of can't equal circumference implementing 360 degree, and can't effectively utilize the rotating speed that revolves when scraping, so that its elimination efficiency is not high.
For this reason, seek a kind of mode with preferable cleaning capacity and operating efficiency or device and handle that the attachment on the exhaust-gas treatment groove inwall has been problem extremely to be solved in the art in the manufacture of semiconductor.
The purpose of this utility model is to provide a kind of scavenge unit that can promote the exhaust-gas treatment groove of cleaning capacity.
Another purpose of the present utility model is to provide a kind of scavenge unit that can keep exhaust-gas treatment groove operate as normal efficient.
To achieve these goals, the scavenge unit of exhaust-gas treatment groove includes a main body in the utility model, and this main body is provided with a cleaning mechanism and a transmission mechanism.Wherein:
Described main body is that a circular skeleton frame is provided with a upper cover plate and a lower cover, offer in this circle skeleton frame inside cooling but gas communication passage and can be ccontaining the space of fluted disc rotation;
Described cleaning mechanism be a circle framework rotating disk equal intervals be surrounded with one or many scrapers, the knife edge of this scraper is close to the inwall of exhaust-gas treatment groove, this rotating disk is arranged on the fluted disc, and fluted disc is hubbed in the above-mentioned circular skeleton frame;
Described transmission mechanism is arranged at a side of described circular skeleton frame, and it utilizes a servo motor to drive a worm screw, this worm screw and travelling gear engagement, and the engagement of the fluted disc in travelling gear and the cleaning mechanism.
In addition, when the circle framework rotating disk of described cleaning mechanism is provided with many scrapers, can between waiting, one support be set around the scraper front-end edge place that is provided with.
In addition, also can be provided with an air pressure cooling body in described body peripheral edge, this air pressure cooling body is interconnected by a plurality of T connectors, L type joint and air hose and forms, and is connected with passage that circular skeleton frame inside is offered.By this air pressure cooling body with the refrigerating gas transmission, be delivered in the passage of offering circular skeleton frame inside, when reducing the attachment of cleaning mechanism on scavenging treatment trough inwall, transmission mechanism simultaneously, can prevent that powder from entering in this transmission mechanism owing to resistance causes superheating phenomenon.
Above-mentioned scavenge unit utilizes a transmission mechanism to promote the cleaning capacity and the torsion of cleaning mechanism, and makes this cleaning mechanism have the multistage variable speed capability by this transmission mechanism.In addition, this scavenge unit utilizes an air pressure cooling device to reduce the temperature of waste gas, thereby keeps the operate as normal efficient of this scavenge unit.
The specific embodiment of the utility model is described in further detail below in conjunction with accompanying drawing.
Fig. 1 is the stereogram of scavenge unit in the utility model;
Fig. 2 is the exploded perspective view of scavenge unit in the utility model;
Fig. 3 is the elevation cross-sectional view of scavenge unit in the utility model;
Fig. 4 is the side cutaway view of scavenge unit in the utility model;
Fig. 5 is another enforcement illustration of scavenge unit in the utility model;
Fig. 6 is the schematic diagram of existing semiconductor waste gas treatment facility.
As shown in Figure 1, the scavenge unit of exhaust-gas treatment groove is designed at the exhaust-gas treatment groove of partly leading in the waste gas treatment equipment in the utility model.This device comprises a main body 1, and main body 1 is provided with a cleaning mechanism 3, a transmission mechanism 2 and an air pressure cooling body 4.
Wherein, as shown in Figure 2, main body 1 is made up of in conjunction with a circular skeleton frame 13 upper cover plate 11 and lower cover 12.Offer in circular skeleton frame 13 inside cooling but the passage 14 and of gas communication can be ccontaining the space of fluted disc 31 rotations.On upper cover plate 11 and lower cover 12, all offer an annular recess 15 and an annular orbit 16, and in the annular recess 15 of upper cover plate 11 and lower cover 12, be provided with a supporting bead 17.
Cleaning mechanism 3 is to be surrounded with one or many scrapers 33 in a circle framework rotating disk 32 first-class distances, and the knife edge 331 of this scraper 33 is close on the inwall 61 of exhaust-gas treatment groove 6.And be located on the fluted disc 31 on the rotating disk 32, a downward ring-type fin 311 and the mobile passage 312 of a plurality of supplied gas of being shaped on the inner edge of this fluted disc 31, simultaneously, this fluted disc 31 is located in the circular skeleton frame 13, as shown in Figure 2, drive this fluted disc 31 by means of the gear 22 in the transmission mechanism 2.
Transmission mechanism 2 is located at a side of circular skeleton frame 13, as shown in Figure 4, this transmission mechanism is driven by a servo motor 5 of being located on the support 51, and link by a shaft coupling 23 worm screw 21 is arranged, drive a travelling gear 22 by this worm screw 21 again, drive fluted disc 31 through travelling gear 22 and rotate, as shown in Figure 3, thereby make the circular skeleton frame of being located on the fluted disc 31 32 along with rotation, and then the knife edge 33 1 of drive scraper 33 is close to the inwall 61 dos 360 degree rotations of exhaust-gas treatment groove 6.Simultaneously, the rotary speed of scraper 33 can be adjusted the rotating speed of servo motor 5 as required, makes the rotating speed of cleaning mechanism 3 be able to relative lifting, and bigger torsion is provided.In addition, be provided with a lubricator cup 7, as shown in Figure 1, be convenient to lubricated worm screw 21 and gear 22, to improve its service life worm screw 21 and gear 22 upper set.
Air pressure cooling body 4 is made up of many T connectors 41, L type joint 42 and air hose 43.This air pressure cooling body 4 is arranged at the periphery of circular skeleton frame 13, as shown in Figure 2, to transmit, to carry in refrigerating gas the passage 14 and the passage 312 on the fluted disc 31 that extremely circular skeleton frame 13 inside are offered, thereby when reducing the attachment of cleaning mechanism 3 on scavenging treatment trough 6 inwalls 61, overheated mistake resembles transmission mechanism 2 owing to resistance causes, simultaneously, can also prevent that powder from entering in the transmission mechanism 2.
When placing the scavenge unit in the utility model in the exhaust-gas treatment groove, make in its annular orbit 16 that is hubbed at upper cover plate 11 and lower cover 12 by the ring-type fin 311 on the fluted disc 31, as shown in Figure 3, can't move arbitrarily and depart from original position.Simultaneously, supporting role by annular recess 15 interior supporting beads 17, make on the fluted disc 31 ring-type fin 311 can be not directly when rotating and annular orbit 16 rub, and the knife edge 331 of one or many scraper 33 in the cleaning mechanism 3 can be close to do 360 degree rotations on exhaust-gas treatment groove 6 inwalls 61, thus the attachment on scavenging treatment trough 6 inwalls 61.
When the attachment of cleaning mechanism 3 on scavenging treatment trough 6 inwalls 61, transmission mechanism 2 can cause superheating phenomenon because of resistance, this superheating phenomenon can be carried refrigerating gas, be passed in the passage 312 of the passage 14 offered circular skeleton frame 13 inside and fluted disc 31 and cool off by a plurality of T connectors 41 in the air pressure cooling body 4, L type joint 42 and air hose 43, as shown in Figure 1, thus reduce temperature and keep normal operating efficiency.Simultaneously, the powder that utilizes this refrigerating gas that enters continuously to be produced when scavenging treatment trough 6 inwalls 61 blows out, thereby prevents that powder from entering in the transmission mechanism 2.
When the folded long-pending poststack of attachment of exhaust-gas treatment groove inner product through accumulating over a long period, can be close on the surface of exhaust-gas treatment groove 6 inwalls 61, therefore, can adjust rotating speed and torsion that servo motor promotes cleaning mechanism 3, thereby promote the speed of rotation, and the strength of reinforcement scraper 33, and then the cleaning capacity and the operating efficiency of raising cleaning mechanism 3.
If when the speed of cleaning mechanism 3 has been promoted to maximum speed and torsion, still can't be when being close to attachment on exhaust-gas treatment groove 6 inwalls 61 and removing, cleaning mechanism 3 revolution automatically falls back, again rotation is advanced again, once more the attachment of being close on exhaust-gas treatment groove 6 inwalls 61 is removed operation, program repeats three times according to this.
If, this program is also failed when being close to attachment on exhaust-gas treatment groove 6 inwalls 61 and disposing, and cleaning mechanism 3 just can stop operation automatically, and signal simultaneously gives a warning, notify the maintenance personal to check or maintenance activity, to guarantee the security in use of this cleaning device.
In addition, because the cleaning mechanism 3 in the utility model can be close to the rotation of making 360 degree on exhaust-gas treatment groove 6 inwalls 61, so the scraper 33 in this cleaning mechanism 3 can be organized as required and be provided with one or many, and equally all have the ability of attachment on scavenging treatment trough 6 inwalls 61, as shown in Figure 5.But, the clear cleaning mechanism that group is provided with many scrapers 33 is best cleaning mechanism, because when 33 pairs of exhaust-gas treatment grooves of the scraper in the cleaning mechanism 3,6 inwalls 61 are rotated the removing operation, can produce torsion because of rotation relationship, if establish many scrapers 33 around group between can waiting, and between front end of many scrapers 33 inner edges 332 etc., be provided with support 34 around group, as shown in Figure 1, thereby the torsion that its rotation produces can reach balance because of support 34, and make its influence that can not be subjected to reaction force by means of the supporting role of support 34, if rock arbitrarily then can influence its cleaning capacity.
In sum, scavenge unit in the utility model utilizes servo motor driven worm screw and gear to come transferring power, make one or many scrapers do 360 degree rotations in the cleaning mechanism 3, and can adjust the rotating speed of servo motor according to need, thereby the rotating speed that makes cleaning mechanism 3 is able to relative lifting, and preferable cleaning capacity and torsion is provided.Utilize many T connectors 41, L type joint 42 and air hose 43 in the air pressure cooling body 4 to carry, transmit refrigerating gas again, when reducing the attachment of cleaning mechanism 3 on scavenging treatment trough inwall, the superheating phenomenon that transmission mechanism 2 causes owing to resistance.Simultaneously, can also prevent that powder from entering in the transmission mechanism 2, to keep cleaning mechanism 3 normal operating efficiencies.Therefore, the cleaning device in the utility model can promote its cleaning capacity really, can also keep its normal operating efficiency simultaneously, has progressive and stability on industry.
Claims (3)
1. the scavenge unit of an exhaust-gas treatment groove, include a main body, this main body is provided with a cleaning mechanism and a transmission mechanism, it is characterized in that: described main body is that a circular skeleton frame is provided with a upper cover plate and a lower cover, offer in this circle skeleton frame inside cooling but gas communication passage and can be ccontaining the space of fluted disc rotation;
Described cleaning mechanism be a circle framework rotating disk equal intervals be surrounded with one or many scrapers, the knife edge of this scraper is close to the inwall of exhaust-gas treatment groove, this rotating disk is arranged on the fluted disc, and fluted disc is hubbed in the above-mentioned circular skeleton frame;
Described transmission mechanism is arranged at a side of described circular skeleton frame, and it utilizes a servo motor to drive a worm screw, this worm screw and travelling gear engagement, and the engagement of the fluted disc in travelling gear and the cleaning mechanism.
2. according to the scavenge unit described in the claim 1, it is characterized in that: first-class of circle framework rotating disk at described cleaning mechanism is surrounded with many scrapers, and is provided with a support at scraper inner edge front end place.
3. according to the scavenge unit described in the claim 1, it is characterized in that: be provided with an air pressure cooling body in described body peripheral edge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01219921 CN2487455Y (en) | 2001-04-23 | 2001-04-23 | Cleaner for waste gas treating tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01219921 CN2487455Y (en) | 2001-04-23 | 2001-04-23 | Cleaner for waste gas treating tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2487455Y true CN2487455Y (en) | 2002-04-24 |
Family
ID=33637633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01219921 Expired - Fee Related CN2487455Y (en) | 2001-04-23 | 2001-04-23 | Cleaner for waste gas treating tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2487455Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1328757C (en) * | 2004-12-31 | 2007-07-25 | 友达光电股份有限公司 | Gas processing equipment having clearing device |
| CN112958546A (en) * | 2021-02-03 | 2021-06-15 | 青岛科技大学 | Device for removing attachments |
-
2001
- 2001-04-23 CN CN 01219921 patent/CN2487455Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1328757C (en) * | 2004-12-31 | 2007-07-25 | 友达光电股份有限公司 | Gas processing equipment having clearing device |
| CN112958546A (en) * | 2021-02-03 | 2021-06-15 | 青岛科技大学 | Device for removing attachments |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |