CN2475740Y - Automatic rotary heating device for preparing large-area thin film - Google Patents
Automatic rotary heating device for preparing large-area thin film Download PDFInfo
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- CN2475740Y CN2475740Y CN 01218242 CN01218242U CN2475740Y CN 2475740 Y CN2475740 Y CN 2475740Y CN 01218242 CN01218242 CN 01218242 CN 01218242 U CN01218242 U CN 01218242U CN 2475740 Y CN2475740 Y CN 2475740Y
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- Prior art keywords
- plate
- hot
- rotation
- film
- gear
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 13
- 239000010409 thin film Substances 0.000 title description 6
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000005350 fused silica glass Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 14
- 238000002360 preparation method Methods 0.000 abstract description 10
- 238000012545 processing Methods 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 28
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 3
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Abstract
The utility model relates to a preparation large tracts of land film technical field. The utility model discloses constitute by the rotary heating board of heater base, step type, sample stationary blade, gear etc.. By adopting the method that the heating plate drives the substrate to rotate, a uniform film can be prepared. The utility model discloses heating area is big and even, and the film each point performance that prepares is good and unanimous. The utility model discloses simple structure, easily processing, convenient to use, the low price, and be suitable for the preparation of various films.
Description
The utility model relates to the film preparation field, particularly relates to the Technology field for preparing large area film.
Utilized the Technology of laser thin films in the past, what adopt usually is that well heater is fixed, and target is scanned and rotary target is finished the work that (document 1 is used to prepare the silicon single crystal radiation heater of film, the patent No.: ZL95224595.7) by laser.Continuous increase along with substrate, the size of target and well heater also continues to increase, laser is also wanted corresponding increase to the sweep limit of target, and exceed the focusing range of laser when light path after, will cause laser excessive in target surface energy density difference and then plumage brightness that scanning the time is sputtered out is not of uniform size, destroy the whole homogeneity of film.(as shown in Figure 1) on the other hand, because target 9 is parallel placement with heating unit 10, after laser 11 focused on by condenser lens 12, directive completely reflecting mirror 13, speculum were installed on the laser scanner 18.Drive speculum by scanning device and ceaselessly do two-dimensional scan, laser is beaten can be in the enterprising line scanning of target surface when target.The plumage brightness 14 that it sputters sprays to the substrate 15 on opposite, thereby reaches the purpose of growing film.If heating unit and laser scanning scope are excessive, will certainly block the laser scanning light path, cause the downgrade of film.Experiment showed, that aforesaid method all has adverse influence for the preparation large area film.
The purpose of this utility model is to overcome the shortcoming of above-mentioned prior art, providing a kind of is made up of motor, gear, rotatable step type hot-plate, the device of preparation big area single or double film, the large area film excellent property that this device is prepared has high homogeneity.
The purpose of this utility model is finished like this:
By shown in Figure 2, the rotation hot-plate 2 of step type is placed in the groove of well heater base 1, because two goods accessory processings, so, rotate hot-plate and also can in the well heater base, rotate freely, and be unlikely to drop out although the well heater base be vertically to place.For the ease of rotation, hot-plate is done circular, and periphery is a gear.Substrate 3 is placed on the step of hot-plate, and the sample fixed plate 4 by the hot-plate two ends is fixed.Fixed plate screws with screw, makes the sample fixed plate push down the substrate two ends respectively, thereby guaranteeing that substrate is unlikely when rotated drops out, and damages sample.The gear interlock of gear 5 with hot-plate installed.The rotation hot-plate rotates by gear driven like this, and gear passes through magnetic coupling rotating shaft 6 by stepper-motor 7 driven rotary outside the vacuum chamber 8, and rotating speed can regulated at will.Magnetic coupling is compared not only sealing reliably, vacuum tightness height, and long service life with rubber ring sealing coupling.Adopt hot-plate to drive the method for substrate rotation, be to consider if substrate is excessive, laser is also wanted corresponding increase to the sweep limit of target, and exceed the focusing range of laser when light path after, the plumage brightness that laser sputters out when the target interscan will be not of uniform size, destroys the whole homogeneity of film.And substrate rotates, and will solve this difficult problem very successfully.In addition, excessive when heating unit and laser scanning scope, when the laser scanning light path was blocked by heating unit, the method that we also can take to rotate was prepared uniform film.
But in order to make not only level but also can vertically be placed in the vacuum chamber of heating unit, there are two little sample fixed plate 4 (see figure 3)s at rotation hot-plate 2 two ends, and the sample fixed plate that screw passes two ends inserts in the pickup groove 16.And in order to prepare high-quality two-side film membrane, we are processed into step type 17 with heater plate surface.After substrate lies on the step of hot-plate, the fixed plate at two ends is screwed with screw, make the sample fixed plate push down the sample two ends respectively, thereby guarantee that when hot-plate rotated, substrate can not drop out.Even so vertically place well heater, the hot-plate rotation, substrate also can be placed on the hot-plate, is beneficial to prepare easily film.And when preparation second of two-side film membrane, prepare the one side of film, also because the unique design of step type can not be close to hot-plate, thereby play a protective role.
To rotate hot-plate 2 is installed in the process furnace base 1.Step shape 17 can be done circular or square according to the different shapes of substrate in the rotation hot-plate.Match with the prepared film sample, hot-plate can be designed to all size according to sizes of substrate, as φ 80mm, φ 50mm, 40 * 40mm
2, 60 * 60mm
2Deng.Heating board material can and be decided according to system film temperature and the requirement of system film.
The utility model is because the rotation hot-plate can rotate freely, and the film for preparing much areas all can keep the good operation condition.Thereby the excellent property and the unanimity of the feasible large area film each point for preparing are for the research of large area film is laid a good foundation.The utility model is simple in structure, is easy to processing, and is easy to use, cheap, is applicable to the preparation of various films.
Below in conjunction with drawings and Examples the utility model is described in detail:
Fig. 1 is the laser scanning synoptic diagram;
Fig. 2 is the structural representation of the utility model heating unit;
Fig. 3 is the step type design diagram of hot-plate of the present utility model;
Fig. 4 is the structural representation of circular substrate hot-plate of the present utility model;
Fig. 5 is the structural representation of square substrate hot-plate of the present utility model.
Embodiment 1: the preparation area is circular yttrium barium copper oxide (YBCO) superconducting thin film of φ 43mm.
The utility model is finished jointly by circular substrate hot-plate 2 among process furnace base 1, circular substrate 3, sample fixed plate 4, gear 5, magnetic coupling rotating shaft 6, stepper-motor 7, vacuum chamber 8 and Fig. 4 among Fig. 2.Wherein process furnace base 1 is made for stupalith, and the making material of round large area film hot-plate 2 is stainless material.Earlier the process furnace base vertically is installed in the vacuum chamber up and down on two electrodes, hot-plate is placed in the process furnace base again, the gear interlock of gear and hot-plate is good.Substrate is placed on the hot-plate, tightens the screw on the sample fixed plate, compress substrate, make it to be difficult for dropping out.Closing vacuum chamber, vacuum tightness is adjusted to 70pa, regulate the size of heating current, is 870 ℃ with the substrate surface temperature regulation, opens motor, and hot-plate is rotated by driven by motor by gear, and rotating speed is 3 revolutions per seconds.Use the laser pulse deposition technology, prepared 40 minutes, obtain the YBCO superconducting thin film that thickness is about 6000 , the film color even of preparing.This film is divided into 9 zones, measures the superconducting transition temperature Tc in each zone respectively, obtain Tc
1=90.6K, Tc
2=89K, Tc
3=91K, Tc
4=90.8K, Tc
5=91.2K, Tc
6=91.8K, Tc
7=92K, Tc
8=90.2K, Tc
9=92K, this explanation has obtained the film of excellent property and each point performance unanimity with this method.
Embodiment 2: the preparation area is 60 * 60mm
2Square yttrium barium copper oxide (YBCO) superconducting thin film.
The utility model is finished jointly by square substrate rotation hot-plate 2 among process furnace base 1, square substrate 3, sample fixed plate 4, gear 5, magnetic coupling rotating shaft 6, stepper-motor 7, vacuum chamber 8 and Fig. 5 among Fig. 2.Wherein process furnace base 1 is made for the fused quartz material, and the making material of square large area film hot-plate 2 is stainless material.Earlier process furnace base level is placed in the vacuum chamber, connects two electrodes, hot-plate is placed in the process furnace base again, the gear interlock of gear and hot-plate is good.Substrate is placed on the hot-plate, tightens the screw on the sample fixed plate, compress substrate, make it to be difficult for dropping out.Close vacuum chamber, the preparation method is identical with embodiment 1, prepares the square YBCO superconducting thin film of high-quality big area.
Claims (5)
1. automatic rotatable heater that is used to prepare large area film, it is characterized in that: rotation hot-plate (2), sample fixed plate (4), gear (5) by well heater base (1), step type are formed;
The rotation hot-plate (2) of step type is placed in the groove of well heater base (1); Well heater base (1) vertically is positioned in the vacuum chamber (8) up and down on two electrodes; Rotation hot-plate (2) is done circular, and its periphery has gear that it is rotated freely in the well heater base and do not drop out; Gear (5) is installed with the gear interlock of hot-plate; Circular substrate (3) is placed on the step cutting pattern (17) of hot-plate; There are two little sample fixed plates (4) at rotation hot-plate (2) two ends, and the sample fixed plate that screw passes two ends inserts in the pickup groove (16) and fixes substrate; The outer stepper-motor (7) of vacuum chamber (8) drives magnetic coupling rotating shaft (6) rotation, the rotation of magnetic coupling rotating shaft (6) driven gear, and gear drives hot-plate (2) rotation.
2. by the described automatic rotatable heater that is used to prepare large area film of claim 1, it is characterized in that: the well heater base can also be placed horizontally in the vacuum chamber.
3. by the described automatic rotatable heater that is used to prepare large area film of claim 1, it is characterized in that: the step of rotation hot-plate also can be done squarely.
4. by the described automatic rotatable heater that is used to prepare large area film of claim 1, it is characterized in that: the rotation heating board material can and be decided according to system film temperature and the requirement of system film.
5. by the described automatic rotatable heater that is used to prepare large area film of claim 1, it is characterized in that: the material of well heater base can be pottery or fused quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01218242 CN2475740Y (en) | 2001-03-27 | 2001-03-27 | Automatic rotary heating device for preparing large-area thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01218242 CN2475740Y (en) | 2001-03-27 | 2001-03-27 | Automatic rotary heating device for preparing large-area thin film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2475740Y true CN2475740Y (en) | 2002-02-06 |
Family
ID=33636314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 01218242 Expired - Fee Related CN2475740Y (en) | 2001-03-27 | 2001-03-27 | Automatic rotary heating device for preparing large-area thin film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2475740Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897927A (en) * | 2015-06-04 | 2015-09-09 | 中国科学院物理研究所 | Measuring rod including sample stage capable of rotating at multiple degrees of freedom |
| CN105212247A (en) * | 2015-10-14 | 2016-01-06 | 石狮北记食品有限公司 | A kind of frozen food fermentation temperature control device |
-
2001
- 2001-03-27 CN CN 01218242 patent/CN2475740Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897927A (en) * | 2015-06-04 | 2015-09-09 | 中国科学院物理研究所 | Measuring rod including sample stage capable of rotating at multiple degrees of freedom |
| CN104897927B (en) * | 2015-06-04 | 2018-04-27 | 中国科学院物理研究所 | The measurement bar of sample stage is rotated including multiple degrees of freedom |
| CN105212247A (en) * | 2015-10-14 | 2016-01-06 | 石狮北记食品有限公司 | A kind of frozen food fermentation temperature control device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |