CN2453432Y - Detector for small light spot objective lens - Google Patents
Detector for small light spot objective lens Download PDFInfo
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- CN2453432Y CN2453432Y CN00259520U CN00259520U CN2453432Y CN 2453432 Y CN2453432 Y CN 2453432Y CN 00259520 U CN00259520 U CN 00259520U CN 00259520 U CN00259520 U CN 00259520U CN 2453432 Y CN2453432 Y CN 2453432Y
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- 239000000523 sample Substances 0.000 claims abstract description 55
- 239000013307 optical fiber Substances 0.000 claims abstract description 43
- 230000003287 optical effect Effects 0.000 claims description 19
- 230000010287 polarization Effects 0.000 claims description 8
- 238000002310 reflectometry Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 3
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
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Abstract
A detector for small light spot objective lens includes a small light spot generated by irradiating the objective lens with laser beam emitted by laser source, which is detected by the tip of optical fiber probe and converted into electric signal by detecting component, and the electric signal is input into computer via preamplifier. A white light beam emitted by the white light source penetrates through the measured objective lens to irradiate the needle tip of the optical fiber probe, and the needle tip on the image space focal spot of the measured objective lens is reflected to the receiving surface of the camera. The condition that the tip of the optical fiber probe is adjusted to be aligned with the objective lens to be measured can be observed on a monitor connected to the camera, so that the position of the tip detection can be accurately and conveniently adjusted.
Description
The utility model is a kind of detector of small light spot object lens.The small light spot object lens refer to the object lens of large-numerical aperture NA (＞0.5), as the CD drive object lens, and CD master-disc CD writer object lens, microcobjective and lithographic objective.
Detecting the small light spot object lens, comprise its light distribution, size, shape and polarization state, is the most direct thereby the most effective parameter of check small light spot object lens quality.Because the effect of small light spot object lens is converged to a small light spot with laser beam exactly.The light distribution of small light spot, size, shape and polarization state be the quality of the stamper that carves just as the readwrite performance or the CD master-disc CD writer of CD drive of influence directly.Formerly reasonable to the detection of small light spot in the technology is the pick-up unit (referring to patent ZL 00217937.7) that adopts optical far field parameters of optical system.But this device has a shortcoming, and that is exactly that how the optical fiber probe needle point to be adjusted to small light spot place (being the rear focus place of CD object lens) be the comparison difficulty.The small luminous spot dimension of CD drive object lens is about 1 μ m, and the small light spot of CD master-disc CD writer object lens is then littler, and this makes manual or electronic coarse adjustment become very difficult.In addition, often there is the relatively weak speckle of some intensity around the small light spot,, probably needle point adjusted on a certain speckle if there is not suitable MA monitoring agency, rather than on the small light spot that will survey.
The purpose of this utility model provides a kind of detector of small light spot object lens, it can remedy defective that the small light spot pick-up unit in the technology formerly exists, can monitor the adjustment situation, thereby can make things convenient for and detect exactly the small light spot of various small light spot object lens.
The detector of small light spot object lens of the present utility model as shown in Figure 1.Comprise: LASER Light Source 7 is arranged, the optical fiber probe of putting on the piezoelectric scanner 9 inside center axis that are placed on the adjustment rack 10 11 that has that needle point 1101 is exposed.The light signal of optical fiber probe 11 becomes electric signal after prime amplifier 13 input computing machines 14 through probe assembly 12.Computing machine 14 links by high-voltage amplifier 15 and piezoelectric scanner 9, and just computing machine 14 is by the scanning motion of high-voltage amplifier 15 control piezoelectric scanners 9.Tested object lens 8 are to place the focal spot of tested object lens 8 to drop on the position on the needle point 1101 of optical fiber probe 11.Central point O is arranged
0Place the spectroscope 6 on the LASER Light Source 7 optical axis oo.The optical axis oo angle at 45 of the reflecting surface of spectroscope 6 and LASER Light Source 7.The central point O of spectroscope 6 reflectings surface
0With needle point 1101 lines of optical fiber probe 11 be perpendicular line o ' o ' perpendicular to LASER Light Source 7 optical axis oo.What have that central axis overlaps with above-mentioned perpendicular line o ' o ' places the video camera that has monitor 21 on perpendicular line o ' o '.The receiving plane 101 of video camera 1 is relative with the needle point 1101 of optical fiber probe 11 across spectroscope 6.Be equipped with the tube lens 3 that central axis overlaps with perpendicular line o ' o ' on the perpendicular line o ' o ' between spectroscope 6 and video camera 1 receiving plane 101, the focus of tube lens 3 drops on the receiving plane 101 of video camera 1 just.On the perpendicular line o ' o ' between spectroscope 6 and the tube lens 3, be equipped with the half-reflection and half-transmission spectroscope 4 of central point on perpendicular line o ' o '.The reflecting surface of half-reflection and half-transmission spectroscope 4 is towards spectroscope 6, reflecting surface and perpendicular line o ' o ' angle at 45.Reflecting surface facing to half-reflection and half-transmission spectroscope 4 has white light source 5, and the central point that the central axis o " o " of white light source 5 passes half-reflection and half-transmission spectroscope 4 is vertical with perpendicular line o ' o ', and is parallel with the optical axis oo of LASER Light Source 7.
Said white light source 5 is included in same white light source 5 central axis o " o " and goes up by close to being equipped with illuminating lens 501 successively away from half-reflection and half-transmission spectroscope 4, aperture diaphragm 502, field stop 503, convergent lens 504 and incandescent lamp 505.
Said LASER Light Source 7 is laser instruments 701, or laser instrument 701 adds the polarizer 702.
Said probe assembly 12 is photodetectors 1201, or photodetector 1201 adds analyzer 1202.
Said spectroscope 6 is to be coated with on the surface the wavelength X reflectivity of LASER Light Source 7 parallel flat greater than 95% spectro-film, or polarization splitting prism.The reflecting surface of said spectroscope 6 is exactly the surface that is coated with spectro-film.
The aforesaid structure of detector of the present utility model.Monochrome (wavelength is λ) the parallel beam G of LASER Light Source 7 (CD drive and CD master-disc CD writer are all used laser instrument) emission on the direction of advancing, central point O
0Be equipped with spectroscope 6 with the optical axis oo of LASER Light Source 7 with overlapping.When spectroscope 6 is parallel flat, the optical axis oo angle at 45 of its reflecting surface and LASER Light Source 7.The reflecting surface of spectroscope 6 has plated spectro-film, and this spectro-film increases instead the wavelength X of LASER Light Source 7, and promptly the light greater than 7 emissions of 95% LASER Light Source will be reflected, and the light of other wavelength is then seen through.The parallel beam G of LASER Light Source 7 emissions becomes parallel beam G ' after spectroscope 6 reflections.The central optical axis of parallel beam G ' and the central point O that passes through spectroscope 6
0Perpendicular line o ' the o ' vertical with the optical axis oo of LASER Light Source 7 overlaps.On the direction that parallel beam G ' advances, central axis and perpendicular line o ' o ' are equipped with piezoelectric scanner 9 with coinciding.Be equipped with optical fiber probe 11 on the central axis of piezoelectric scanner 9 inside, the needle point 1101 on the optical fiber probe 11 is exposed at the outside of piezoelectric scanner 9 and the direction of advancing facing to parallel beam G '.Optical fiber probe 11 is fixed in the piezoelectric scanner 9, and with the motion campaign of piezoelectric scanner 9, to realize the scanning of the 1101 pairs of tested small light spots of needle point on the optical fiber probe 11.Piezoelectric scanner 9 is fixed on the adjustment rack 10 as coarse adjustment (can be manually also can be by driven by motor electronic), and moving with adjustment rack 10, by manual or electronic adjustment rack 10, with 1101 coarse adjustment of the needle point on the optical fiber probe 11 to the center of tested small light spot.The light signal that needle point 1101 on the optical fiber probe 11 samples is transferred on the probe assembly 12 by the main body (optical fiber probe 11 except that needle point 1101) of optical fiber probe 11.Probe assembly 12 is converted into electric signal with light signal, is input in the computing machine 14 after the amplification of electric signal by prime amplifier 13.Along with the scanning and the light field sampling of 1101 pairs of tested small light spots of the needle point on the optical fiber probe 11, computing machine 14 can demonstrate the light distribution or the polarization state of tested small light spot on its display 1401.Piezoelectric scanner 9 links by high-voltage amplifier 15 and computing machine 14.That is to say that computing machine 14 is the scanning of controlling piezoelectric scanner 9 by the output of control high-voltage amplifier 15.Computing machine 14 not only can be controlled the sweep limit of piezoelectric scanner 9 by the output amplitude of control high-voltage amplifier 15; And can be by the accurate location (accurate adjustment) of the needle point 1101 on the output deviator control piezoelectric scanner 9 realization optical fiber probes 11 of control high-voltage amplifier 15, i.e. accurate adjustment is to the center of tested small light spot.During measurement, tested object lens 8 place between the needle point 1101 on spectroscope 6 and the optical fiber probe 11.And the just tested small light spot of the focal spot of tested object lens 8 should drop on the needle point 1101 just.As shown in Figure 1.
On perpendicular line o ' o ', one side of spectroscope 6, promptly across the relative one side of spectroscope 6 and optical fiber probe 11, the place near spectroscope 6 is equipped with half-reflection and half-transmission spectroscope 4, tube lens 3 and video camera 1 successively.The central point of half-reflection and half-transmission spectroscope 4 overlaps with perpendicular line o ' o '.Half-reflection and half-transmission spectroscope 4 is a parallel flat, its surface and perpendicular line o ' o ' angle at 45.One surface of half-reflection and half-transmission spectroscope 4 is gone up white light has been plated part reflective semitransparent film, and promptly half of white light reflected by it, and second half then sees through, and this surface is the reflecting surface of half-reflection and half-transmission spectroscope 4.By the center of half-reflection and half-transmission spectroscope 4, with vertical parallel with the LASER Light Source 7 optical axis oo parallel lines o " o " that has of perpendicular line o ' o '.These parallel lines o " o " is the central axis o " o " of white light source 5 just.The reflecting surface of half-reflection and half-transmission spectroscope 4 is facing to white light source 5.Then " direction of advancing is facing to the reflecting surface of half-reflection and half-transmission spectroscope 4 for the white light beam G of white light source 5 emissions.The central optical axis of white light beam G " light beam after 4 reflections of half-reflection and half-transmission spectroscope, its direction of advancing faces toward spectroscope 6, the white light beam G after its reflection " overlaps with perpendicular line o ' o '.White light beam G " through the reflection of half-reflection and half-transmission spectroscope 4, spectroscope 6 see through and the focusing of tested object lens 8 after shine on the needle point 1101, this is the illuminating bundle of white light imaging.By needle point 1101 beam reflected again by tested object lens 8 collect, after the seeing through of spectroscope 6, incide on the half-reflection and half-transmission spectroscope 4.Form light beam G through the light behind the half-reflection and half-transmission spectroscope 4, the central optical axis of its light beam G overlaps with perpendicular line o ' o '.Light beam G forms the picture of needle point 1101 on the picture side of tube lens 3 focal plane behind central axis and tube lens 3 that perpendicular line o ' o ' overlaps.Just on the picture side of tube lens 3 focal plane, its central point overlaps with perpendicular line o ' o ' receiving plane 101 of video camera 1.Video camera 1 is delivered to the picture of the needle point 1101 that receives on the monitor 2 and is shown.As shown in Figure 1.
Said LASER Light Source 7 comprises laser instrument 701, need add the polarizer 702 when the polarization state of the small light spot that detects tested object lens 8.The polarizer 702 is between laser instrument 701 and spectroscope 6, and the center of the polarizer 702 and laser instrument 701 all is positioned on the same optical axis oo.Laser instrument 701 emitted light beams will become linearly polarized light after by the polarizer 702, enter tested object lens 8 through spectroscope 6.As shown in Figure 1.
Said tested object lens 8 are meant the small light spot object lens of large-numerical aperture NA (＞0.5), as the CD object lens, or the micro objective of conjugate distance infinite distance, or lithographic objective.
Said probe assembly 12 comprises photodetector 1201, need add analyzer 1202 when the polarization state of the small light spot that detects tested object lens 8.Analyzer 1202 between the end and photodetector 1201 of optical fiber probe 11, the center of the end of analyzer 1202 and optical fiber probe 11 all with the central axes of probe assembly 12.Shine on the receiving plane of photodetector 1201 after by the light of the end of optical fiber probe 11 output by analyzer 1202.As shown in Figure 1.When containing the polarizer 702 in the LASER Light Source 7, must add analyzer 1202 in the probe assembly 12.
Said white light source 5 comprises illuminating lens 501, aperture diaphragm 502, field stop 503, convergent lens 504 and incandescent lamp 505, and their center all is positioned on the parallel lines o " o ", and is arranged in order from the place near half-reflection and half-transmission spectroscope 4.The white light of incandescent lamp 505 emissions incides on the illuminating lens 501 through the convergence of convergent lens 504, forms parallel white light beam G by illuminating lens 501 ".Field stop 503 is positioned at the focus in object space place of illuminating lens 501, and it is controlling the visual field of monitoring system.Aperture diaphragm 502 control white light beam G " bore, thereby controlling the numerical aperture and the depth of focus of monitoring system.As shown in Figure 1.
In the measuring process,, tested object lens 8 are placed between the needle point 1101 on spectroscope 6 and the optical fiber probe 11 as the structure of above-mentioned Fig. 1.Open the power supply of incandescent lamp 505, video camera 1 and monitor 2 then.At this moment, " incide on the half-reflection and half-transmission spectroscope 4,, see through spectroscope 6 and incide on the tested object lens 8 by the white light beam G of white light source 5 emissions by inciding on the spectroscope 6 after its reflection.At this moment, tested object lens 8 are equivalent to a micro objective in light path, it will incide on beam convergence above it needle point 1101 centers and near surface thereof to the optical fiber probe 11, light by 1101 centers of the needle point on the optical fiber probe 11 and near surface reflection scattering thereof is collected by tested object lens 8 again, return along former road, after seeing through spectroscope 6 and half-reflection and half-transmission spectroscope 4, by tube lens 3 with 1101 centers of the needle point on the optical fiber probe 11 and near surface imaging thereof on video camera 1 receiving plane 101.Monitor 2 shows the picture on 1101 centers of the needle point on the optical fiber probe 11 and near surface thereof.If the needle point 1101 on the optical fiber probe 11 not on the focal plane, picture side of tested object lens 8 or near or (and) not near perpendicular line o ' o ', the image that shows of monitor 2 is with unintelligible or do not have so.At this moment, earlier field stop 503 is transferred to maximum, aperture diaphragm 502 is turned down, increases visual field and depth of focus, promptly increases the three-dimensional scope of observing, this moment, resolution descended to some extent certainly.About, front and back and up-down adjustment adjustment rack 10, until the picture of the needle point 1101 on the optical fiber probe 11 clearly appears in monitor 2 central authorities.Again field stop 503 is turned down, aperture diaphragm 502 transfers to maximum, dwindle viewing area, reduce depth of focus, improve resolution, and carefully, front and back and up-down adjustment adjustment rack 10, until the picture of needle point 1101 more clearly appears in monitor 2 central authorities once more, this show on the optical fiber probe 11 needle point 1101 by coarse adjustment to the focal spot of tested object lens 8, promptly be on the center of the small light spot that produces of tested object lens 8.
Open the power supply of photodetector 1201, prime amplifier 13, computing machine 14 and high-voltage amplifier 15 in LASER Light Source 7, the probe assembly 12, make it in running order.Small light spot to tested object lens 8 carries out just sweeping the size of small light spot and position on the observation display 1401 then.Output deviator by computing machine 14 control high-voltage amplifiers 15, make piezoelectric scanner 9 do three-dimensional skew (accurate adjustment), finally make on the display 1401 small light spot minimum and be positioned at the center, at this moment the needle point on the optical fiber probe 11 1101 just accurately has been positioned on the small light spot center of tested object lens 8.Control the output amplitude of high-voltage amplifiers 15 then by computing machine 14, dwindle the sweep limit of piezoelectric scanner 9, improve the resolution of spacescan, continue scanning and detect, obtain final result, comprise light distribution, size, shape and the polarization state of the small light spot of tested object lens 8.
Advantage of the present utility model: at first, the surveillance of having formed a micro-mirror by spectroscope 6, white light source 5, half-reflection and half-transmission spectroscope 4, tested object lens 8, tube lens 3, video camera 1 and monitor 2, needle point 1101 on the monitoring fiber probe 11 whether by coarse adjustment to the center of the small light spot of tested object lens 8, be beneficial to the coarse adjustment of optical fiber probe 11 and prevent that needle point 1101 is positioned at unwanted speckle place, it is easy to adjust accurate to make.Thereby can make things convenient for and detect exactly the small light spot of CD object lens.In addition with the center of 1101 coarse adjustment of the needle point on the optical fiber probe 11 to the small light spot of tested object lens 8, can reduce the influence (this influence is meant: when the small light spot edge of the tested object lens 8 of scanning, the needle point 1101 on the optical fiber probe 11 has slight out of focus) that the swing of piezoelectric scanner 9 brings.Secondly, the scope of detection is wide.Not only can check the CD object lens, also can check the micro objective of conjugate distance infinite distance.Not only can check the object lens of a certain operation wavelength, also can check the object lens (only needing to change LASER Light Source 7, spectroscope 6 this moment) of other operation wavelengths.Small light spot (hot spot is positioned on perpendicular line o ' o ') on not only can proof bar also can the outer small light spot (hot spot is not positioned on perpendicular line o ' o ') of proof bar, and the latter only needs tested object lens 8 in the process of measuring.
Description of drawings:
Fig. 1 is the structural representation of small light spot object lens detector of the present utility model.
Embodiment:
The structure of detector as shown in Figure 1.Laser instrument 701 in the LASER Light Source 7 adopts semiconductor laser, and wavelength X=650nm adds collimation and shaping optical element, emission light beam G bore 8mm.Tested object lens 8 are DVD-ROM CD drive object lens (numerical aperture NA=0.6).The needle point 1101 hole diameter 50nm of optical fiber probe 11 (1720-00 type).The sweep limit 8 μ m of piezoelectric scanner 9.Photodetector 1201 in the probe assembly 12 is photomultiplier (a H6780-04 type).Tube lens 3 focal length 200mm.Video camera 1 is colored CCD camera (a VCC-3912P type).Monitor 2 is 14 inches colour picture monitors (SCM-14MM types).By above-mentioned steps adjustment and measurement small light spot, the coarse adjustment error of the needle point 1101 on the optical fiber probe 11＜0.5 μ m, the spatial resolution that small light spot detects can reach 50nm, and the light signal measuring accuracy is better than 1%.Than formerly technology is convenient and reliable.
Claims (5)
1. the detector of small light spot object lens comprises:
＜1〉LASER Light Source (7) is arranged, the optical fiber probe of putting on piezoelectric scanner (9) the inside center axis that is placed on the adjustment rack (10) (11) that has that needle point (1101) is exposed, the light signal of optical fiber probe (11) becomes electric signal after prime amplifier (13) input computing machine (14) through probe assembly (12), computing machine (14) links by high-voltage amplifier (15) and piezoelectric scanner (9), and tested object lens (8) place the focal spot of tested object lens (8) to drop on the position on the needle point (1101) of optical fiber probe (11);
It is characterized in that:
＜2〉central point (O is arranged
0) place the spectroscope (6) on LASER Light Source (7) optical axis (oo), optical axis (oo) angle at 45 of the reflecting surface of spectroscope (6) and LASER Light Source (7), the central point (O of spectroscope (6) reflecting surface
0) with needle point (1101) line of optical fiber probe (11) be perpendicular line (o ' o ') perpendicular to LASER Light Source (7) optical axis (oo);
What＜3〉have that central axis overlaps with above-mentioned perpendicular line (o ' o ') places the video camera that has monitor (2) (1) on the perpendicular line (o ' o '), and the receiving plane (101) of video camera (1) is relative with the needle point (1101) of optical fiber probe (11) across spectroscope (6);
＜4〉be equipped with the tube lens (3) that central axis overlaps with perpendicular line (o ' o ') on the perpendicular line (o ' o ') between spectroscope (6) and video camera (1) receiving plane (101), the focus of tube lens (3) drops on the receiving plane (101) of video camera (1) just;
＜5〉on the perpendicular line (o ' o ') between spectroscope (6) and the tube lens (3), be equipped with the half-reflection and half-transmission spectroscope (4) of central point on perpendicular line (o ' o '), the reflecting surface of half-reflection and half-transmission spectroscope (4) is towards spectroscope (6), reflecting surface and perpendicular line (o ' o ') angle at 45;
＜6〉reflecting surface facing to half-reflection and half-transmission spectroscope (4) has white light source (5), the central point that the central axis of white light source (5) (o " o ") passes half-reflection and half-transmission spectroscope (4) is vertical with perpendicular line (o ' o '), and is parallel with the optical axis (oo) of LASER Light Source (7).
2. the detector of small light spot object lens according to claim 1, it is characterized in that said white light source (5) is included in same white light source (5) central axis (o " o ") and goes up by close to being equipped with illuminating lens (501) successively away from half-reflection and half-transmission spectroscope (4), aperture diaphragm (502), field stop (503), convergent lens (504) and incandescent lamp (505).
3. the detector of small light spot object lens according to claim 1 it is characterized in that said LASER Light Source (7) is laser instrument (701), or laser instrument (701) adds the polarizer (702).
4. the detector of small light spot object lens according to claim 1 it is characterized in that said probe assembly (12) is photodetector (1201), or photodetector (1201) adds analyzer (1202).
5. the detector of small light spot object lens according to claim 1 is characterized in that said spectroscope (6) is to be coated with on the surface the wavelength X reflectivity of LASER Light Source (7) parallel flat greater than 95% spectro-film, or polarization splitting prism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00259520U CN2453432Y (en) | 2000-12-08 | 2000-12-08 | Detector for small light spot objective lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN00259520U CN2453432Y (en) | 2000-12-08 | 2000-12-08 | Detector for small light spot objective lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2453432Y true CN2453432Y (en) | 2001-10-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00259520U Expired - Lifetime CN2453432Y (en) | 2000-12-08 | 2000-12-08 | Detector for small light spot objective lens |
Country Status (1)
| Country | Link |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112485235A (en) * | 2020-11-13 | 2021-03-12 | 中国科学院物理研究所 | Transmission electron microscope sample rod system with ultrafast time resolution spectral capability and application |
| CN113271405A (en) * | 2021-07-14 | 2021-08-17 | 杭州长川科技股份有限公司 | Wafer calibration camera and probe station with same |
-
2000
- 2000-12-08 CN CN00259520U patent/CN2453432Y/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112485235A (en) * | 2020-11-13 | 2021-03-12 | 中国科学院物理研究所 | Transmission electron microscope sample rod system with ultrafast time resolution spectral capability and application |
| CN112485235B (en) * | 2020-11-13 | 2022-02-18 | 中国科学院物理研究所 | Transmission electron microscope sample rod system with ultrafast time resolution spectral capability and application |
| CN113271405A (en) * | 2021-07-14 | 2021-08-17 | 杭州长川科技股份有限公司 | Wafer calibration camera and probe station with same |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20040421 |
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| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20040421 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |