CN2423581Y - Optical far field parameter detection device of optical system - Google Patents
Optical far field parameter detection device of optical system Download PDFInfo
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- CN2423581Y CN2423581Y CN 00217937 CN00217937U CN2423581Y CN 2423581 Y CN2423581 Y CN 2423581Y CN 00217937 CN00217937 CN 00217937 CN 00217937 U CN00217937 U CN 00217937U CN 2423581 Y CN2423581 Y CN 2423581Y
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- 230000003287 optical effect Effects 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 title description 4
- 239000000523 sample Substances 0.000 claims abstract description 44
- 239000013307 optical fiber Substances 0.000 claims abstract description 36
- 239000000835 fiber Substances 0.000 claims abstract description 22
- 230000001681 protective effect Effects 0.000 claims description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 239000012528 membrane Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 238000009826 distribution Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 5
- 230000033228 biological regulation Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 15
- 230000007246 mechanism Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- 210000003128 head Anatomy 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
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Abstract
A device for detecting optical far field parameters of an optical system. The optical fiber scanner with three-dimensional coarse and fine regulation has optical fiber probe set in the central axis, which scans the focus of the tested sample and the positions before and after the focus and transmits the received light signal to the photoelectric detector and the phase-locked amplifier to the computer. The computer controls the scanning of the fiber probe through the high-voltage amplifier. The method has the characteristics of high precision of the optical far field of the measured sample and real-time two-dimensional or three-dimensional distribution of optical parameters.
Description
The utility model is a kind of pick-up unit of optical far field parameters of optical system.Be mainly used in the detection of optical system small light spot.
The measuring light far field is (from the zone of sample surface distance above 1/2nd wavelength exactly, be called the light far field) parameter, the character and the application in optical system light far field can be further studied, also the characteristic of light source or the quality of detection optical system can be judged exactly.For example utilize small light spot to detect the image quality of judgement optical system or the crudy of optical element.Formerly in the technology detection of small light spot is mainly contained the device of knife edge scanning (referring to " optical measurement ", the Su Datu of Beijing university of technology chief editor, China Machine Press, in June, 1988,262 pages) and (referring to " optical workshop check ", D. horse traction OK a karaoke club is edited, China Machine Press by the structure of the light distribution that calculates small light spot to measure the light distribution at optical system emergent pupil place and wave aberration, August nineteen eighty-three, 47 pages).When the size of focused light spot diameter during near half (λ/2) of wavelength, can't accurately measure the intensity distributions of hot spot with the device of above-mentioned knife edge scanning, it is very complicated that a kind of light distribution of measuring optical system emergent pupil place in back and wave aberration are calculated the light distribution of hot spot used measurement mechanism and measuring process, and real-time and environmental suitability are also very poor.Above-mentioned two kinds of measurement mechanisms all can only be measured the intensity distributions of light field, and energy measurement does not comprise the complete information of light field polarization state etc.And formerly the Near-field Optical Microscope in the technology only is used for the measurement of light near field parameter (referring to Near-Fie1d Optics:Microscopy, Spectroscopy, and Surface Modification Beyondthe Diffraction Limit, Eric Betzig and Jay K.Trautman, SCIENCE Vol.257,10July 1992).
The purpose of this utility model provides a kind of pick-up unit that detects the sample optical far field parameters, and it can remedy defective that the small light spot measurement mechanism in the technology formerly exists, and can carry out the measurement of optical far field parameters real-time and easily of high-space resolution high precision.
Pick-up unit of the present utility model comprises: light source 1, and on the direction that light source 1 emission light beam G advances, central axis O
1O
1Be equipped with fibre optic scanner 3 with the optical axis OO of light source 1, the central axis O in the fibre optic scanner 3 with coinciding
1O
1On be equipped with optical fiber probe 4, the direction that the needle point 401 of optical fiber probe 4 advances facing to light source 1 emission light beam G, the optical fiber 404 of optical fiber probe 4 is sent to light beam on the photodetector 6, and the output of photodetector 6 is input on the computing machine 8 after amplifying by lock-in amplifier 7.The electric signal of 8 pairs of lock-in amplifiers of computing machine 7 output carries out the A/D conversion and gathers, and shows the light far-field distribution situation (three-dimensional or two dimension) of measurement result again after Flame Image Process.Fibre optic scanner 3 links to each other with computing machine 8 by high-voltage amplifier 5.That is to say that the high pressure of computing machine 8 control high-voltage amplifiers 5 outputs on the fibre optic scanner 3, thus the scanning of computing machine 8 control fibre optic scanners 3.During measurement, sample 2 places between light source 1 and the fibre optic scanner 3, as shown in figures 1 and 3.
Said fibre optic scanner 3 has the 3-D scanning direction, and it comprises scanner main body 303, and scanner main body 303 places in the support 302 of being with move up and down motor 301 and move left and right motor 304, and support 302 places on the guide rail 305 of being with the motor 306 that seesaws.As shown in Figure 2.
Said scanner main body 303 comprises the cylinder 3035 that has through wires hole 3038 on the barrel, and the front end of cylinder 3035 has needle point protective cover 3033, and there is back protective cover 3037 rear end of cylinder 3035, cylinder 3035 interior and cylinder 3035 concentricity axes O
1O
1Be equipped with thin cylinder 3036, the both ends of the surface of cylinder 3035 walls are concave-convexes, have and cylinder 3035 concentricity axes O at the recessed end face internal fixation of cylinder 3035 front ends
1O
1Piezoelectric ceramic scanatron 3034, be with dead ring 3032 on piezoelectric ceramic scanatron 3034 front ends, covering on dead ring 3032 front ends has soft iron cover 3031.In the above-mentioned scanner main body 303, the needle point protective cover 3033 of front end, soft iron cover 3031, thin cylinder 3036 to the protective cover 3037 of rear end all is total to central axis O
1O
1Have a central through hole that passes for optical fiber probe 4.As shown in Figure 3.
Said optical fiber probe 4 comprises that front end has the needle point 401 of aperture 402 of the nanometer diameter of metal-coated membrane, is wearing long optical fiber 404 behind the needle point 401.Near optical fiber 404 overcoats of the needle point 401 1 ends piece 403 that is magnetic, optical fiber probe 4 and scanner main body 303 concentricity axes O
1O
1And place on the center of scanner main body 303 of fibre optic scanner 3, then optical fiber probe 4 passes needle point protective cover 3033, soft iron cover 3031, the central through hole of thin cylinder 3036 and back protective cover 3037.Wherein the needle point 401 of optical fiber probe 4 is contained in the central through hole of needle point protective cover 3033 just, plays a protective role in order to 3033 pairs of needle points 401 of needle point protective cover.Magnetic block 403 is adsorbed on the soft iron cover 3031.By thin cylinder 3036 optical fiber probe 4 is fixed in the scanner main body 303.
The lead that piezoelectric ceramic scanatron 3034 in the above-mentioned scanner main body 303 is drawn by the through wires hole 3038 on cylinder 3035 walls is connected on the high-voltage amplifier 5 that drives piezoelectric ceramic scanatron 3034 realization high precision two-dimensionals or three dimensions scanning; The external diameter of optical fiber probe 4 is unified body with the hose lining of thin cylinder 3036, therefore by thin cylinder 3036 optical fiber probe 4 is fixed in the cylinder 3035.Optical fiber 404 on magnetic block 403 and the optical fiber probe 4 is fixed as one, utilize magnetic force magnetic block 403 to be fixed on the end face of soft iron cover 3031, the needle point 401 that can guarantee optical fiber probe 4 carries out scanning with the scanning of piezoelectric ceramic scanatron 3034 and is not subjected to external interference; The photosurface of the optical fiber 404 tail end alignment light electric explorers 6 of optical fiber probe 4; Can protect needle point 401 injury-free when needle point protective cover 3033 screws out, precession needle point protective cover 3033 exposes needle point 401 and just can measure during measurement.(see figure 3)
Said light source 1 is a laser instrument, or incandescent lamp, or other light sources, and the selection of light source is to decide according to the service band of sample 2.Sample 2 also can itself be with light source, also can not be with light source certainly; Sample 2 can be a complete optical system, also can be optics component or optical element.Sample 2 places between light source 1 and the fibre optic scanner 3, and sample 2 and light source 1 are with optical axis or different optical axis.
In the measuring process, structure as above-mentioned Fig. 1, sample 2 is placed between light source 1 and the fibre optic scanner 3, behind the light beam G process sample 2 that light source 1 sends, converge on the focus, at first open the motor 301 that moves up and down on the fibre optic scanner 3, the side-to-side movement motor 304 and the motor 306 that seesaws with needle point 401 coarse regulation of optical fiber probe 4 near hot spot, control the high-voltage signal of high-voltage amplifier 5 outputs then by the control signal of computing machine 8 outputs, promote 401 pairs of focal beam spots of piezoelectric ceramic scanatron 3034 drive optical fiber probe 4 needle points and carry out bidimensional scanning, after light signal is received by the aperture on the needle point 401 402, be transferred to photodetector 6 through optical fiber 404, light signal is after the opto-electronic conversion of photodetector 6, its output signal is input to computing machine 8 behind 7 amplifications of lock-in amplifier spare and noise reduction, computing machine 8 is at first to signal A/D conversion and sampling, and handle last display result.Again according to the result who measures, computing machine 8 is adjusted the position of the needle point 401 of optical fiber probe 4 automatically, until the emitted hot spot of sample 2 on the center of the scanning area of needle point 401, and the spot size of gained is minimum, at this moment the needle point 401 of optical fiber probe 4 is positioned on the focal plane, from image, can obtain the size of focal plane hot spot, respectively record two hot spots by five times of depth of focus D distance and position places after being transferred to the position of leaving the first five times of focus depth of focus D distance and leaving focus again, two defocused spot before and after being, can observe the distribution of burnt preceding defocused light field, compare three hot spots that obtained, judge the image quality of sample 2.
Advantage of the present utility model: the fibre optic scanner 3 of measurement mechanism of the present utility model drives optical fiber probe 4 and does the coarse adjustment of three-dimensional and the fine tuning of three-dimensional, especially the piezoelectric ceramic scanatron 3034 (output of 16 D/A control of computing machine 8 usefulness high-voltage amplifier 5 of the 3-D scanning of energy high-space resolution is adopted in fine tuning, thereby the 401 pairs of focal beam spots of needle point and the defocused spot that the scanning of control piezoelectric ceramic scanatron 3034) drive the aperture 402 (hole diameter I reach several nanometers) of the nanometer diameter that has metal-coated membrane with high spatial resolution are carried out high-space resolution bidimensional or 3-D scanning and sampling, can realize that light far field high precision optical parameter measures.So can provide the bidimensional or the distributed in three dimensions of optical parameter in real time.Measurement mechanism measurement range of the present utility model is wide.The sample 2 that at first can detect is extensive, can be optical system, the optics component, and optical element etc., secondly the parameter of measuring is many, can be light distribution, polarization state distribution, spectrum situation, optical quality etc.Measurement mechanism of the present utility model is simple in structure.Light source 1 can carry out intensity modulation, and receiving unit adopts lock-in amplifier spare 7 can effectively eliminate various noises (optics or electronics), and is strong to the adaptability of environment.
Description of drawings:
Fig. 1 is the pick-up unit synoptic diagram in optical system light of the present utility model far field.
Fig. 2 is fibre optic scanner 3 positive facial contour synoptic diagram.
Fig. 3 is the scanner main body 303 in the fibre optic scanner 3 and the structure cut-open view of optical fiber probe 4.
Embodiment:
Device is as Fig. 1, Fig. 2, shown in Figure 3.Light source 1 is selected He-Ne (He-Ne) laser instrument for use, and sample 2 is the subassembly of the condenser lens 202 in general collimating and beam expanding system 201 and the DVD shaven head.Selecting the diameter that has metal-coated membrane for use is the aperture 402 of 50 nanometers, and the back of needle point 401 has long optical fiber 404.The photomultiplier of photodetector 6 usefulness H6780-04 types.Measure the optical quality of the optical module of above-mentioned sample 2, measurement spatial resolution is 50nm, and the optical parameter measuring accuracy is better than 1%.
Claims (4)
1. the pick-up unit of an optical far field parameters of optical system comprises: light source (1), and photodetector (6) and computing machine (8) is characterized in that:
﹠amp; #601﹠amp; #62 on the direction that light source (1) emission light beam (G) advances, central axis (O
1O
1) being equipped with fibre optic scanner (3) with the optical axis (OO) of light source (1) with coinciding, sample (2) places between light source (1) and the fibre optic scanner (3);
﹠amp; #602﹠amp; Central axis (O in the #62 fibre optic scanner (3)
1O
1) on be equipped with the optical fiber probe (4) of needle point (401) facing to light source (1) emission light beam (G) working direction;
﹠amp; #603﹠amp; The optical fiber (404) of #62 optical fiber probe (4) is sent to light beam on the photodetector (6), and the output of photodetector (6) is input on the computing machine (8) after amplifying by lock-in amplifier (7);
﹠amp; #604﹠amp; The high pressure of #62 computing machine (8) control high-voltage amplifier (5) outputs on the fibre optic scanner (3).
2. the pick-up unit of optical far field parameters of optical system according to claim 1, it is characterized in that said fibre optic scanner (3) comprises the scanner main body (303) that places in the support (302) of being with move up and down motor (301) and move left and right motor (304), support (302) places on the guide rail (305) of being with motor (306) that seesaw.
3. the pick-up unit of optical far field parameters of optical system according to claim 1 and 2; the scanner main body (303) that it is characterized in that said fibre optic scanner (3) comprises the cylinder (3035) that has through wires hole (3038) on the barrel; the front end of cylinder (3035) has needle point protective cover (3033); there is back protective cover (3037) rear end of cylinder (3035), the interior and concentricity axis (O of cylinder (3035) of cylinder (3035)
1O
1) be equipped with thin cylinder (3036), the both ends of the surface of cylinder (3035) wall are concave-convexes, have and the concentricity axis (O of cylinder (3035) at the recessed end face internal fixation of cylinder (3035) front end
1O
1) piezoelectric ceramic scanatron (3034), be with dead ring (3032) on piezoelectric ceramic scanatron (3034) front end, covering on dead ring (3032) front end has soft iron cover (3031).The needle point protective cover (3033) of above-mentioned front end, soft iron cover (3031), thin cylinder (3036) to the back protective cover (3037) of rear end all is total to central axis (O
1O
1) have for the central through hole that passes of optical fiber probe (4).
4. the pick-up unit of optical far field parameters of optical system according to claim 1 is characterized in that the said interior central axis (O of fibre optic scanner (3) that places
1O
1) on needle point (401) comprise that facing to the optical fiber probe (4) of light source (1) emission light beam (G) working direction front end has the needle point of the aperture of the nanometer diameter of metal-coated membrane (402) (401), wearing optical fiber (404) behind the needle point (401), near needle point (401) one end optical fiber (404) the overcoats piece (403) that is magnetic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00217937 CN2423581Y (en) | 2000-06-08 | 2000-06-08 | Optical far field parameter detection device of optical system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 00217937 CN2423581Y (en) | 2000-06-08 | 2000-06-08 | Optical far field parameter detection device of optical system |
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| CN2423581Y true CN2423581Y (en) | 2001-03-14 |
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| CN 00217937 Expired - Fee Related CN2423581Y (en) | 2000-06-08 | 2000-06-08 | Optical far field parameter detection device of optical system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104618017A (en) * | 2015-01-21 | 2015-05-13 | 中国科学院上海光学精密机械研究所 | Device and method for improving wavefront quality of atmosphere laser communication link |
| CN108226045A (en) * | 2016-12-13 | 2018-06-29 | 英飞凌科技股份有限公司 | Gas analyser |
| CN108646254A (en) * | 2018-05-15 | 2018-10-12 | 中国科学院上海天文台 | A kind of comprehensive nothing draws the laser ranging emitter of circle |
-
2000
- 2000-06-08 CN CN 00217937 patent/CN2423581Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104618017A (en) * | 2015-01-21 | 2015-05-13 | 中国科学院上海光学精密机械研究所 | Device and method for improving wavefront quality of atmosphere laser communication link |
| CN104618017B (en) * | 2015-01-21 | 2017-07-14 | 中国科学院上海光学精密机械研究所 | The apparatus and method for improving lasercom link beam quality |
| CN108226045A (en) * | 2016-12-13 | 2018-06-29 | 英飞凌科技股份有限公司 | Gas analyser |
| CN108646254A (en) * | 2018-05-15 | 2018-10-12 | 中国科学院上海天文台 | A kind of comprehensive nothing draws the laser ranging emitter of circle |
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| CF01 | Termination of patent right due to non-payment of annual fee |