CN2399574Y - Piezoelectric pericon valve - Google Patents

Piezoelectric pericon valve Download PDF

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Publication number
CN2399574Y
CN2399574Y CN 99250930 CN99250930U CN2399574Y CN 2399574 Y CN2399574 Y CN 2399574Y CN 99250930 CN99250930 CN 99250930 CN 99250930 U CN99250930 U CN 99250930U CN 2399574 Y CN2399574 Y CN 2399574Y
Authority
CN
China
Prior art keywords
sheet
piezoelectric
elastic electrode
loam cake
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN 99250930
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Chinese (zh)
Inventor
王子成
党李军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuzhong Meter Co ltd
Original Assignee
Wuzhong Meter Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuzhong Meter Co ltd filed Critical Wuzhong Meter Co ltd
Priority to CN 99250930 priority Critical patent/CN2399574Y/en
Application granted granted Critical
Publication of CN2399574Y publication Critical patent/CN2399574Y/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

The utility model relates to a piezoelectric twin crystal valve, which is composed of piezoelectric ceramic crystal sheets. A U-shaped elastic electrode sheet is tightly clamped between an upper and a lower covers which are airtight coupled. An upper and a lower piezoelectric sheets partitioned by an electricity conductive interlayer are clamped between the elastic electrode sheet. The elastic electrode sheet is connected with a positive electrode threading out of the upper cover. The interlayer is connected with a negative electrode threading out of the lower cover. Different electrical voltages are exerted on the positive and the negative electrodes, and as a result, the two piezoelectric sheets can bend upwards or downwards. Consequently, the connection and the cut of gas circuits on the upper and the lower covers can be controlled. The gas inflow and outflow can be controlled. The utility model overcomes the defects of a traditional mechanical lever balance valve, and has the advantages of small volume, low cost, good performance, and intelligence facilitation.

Description

Piezoelectric bimorph body valve
The utility model relates to the gas-electric converter in pneumatic control field, particularly a kind of piezoelectric bimorph body valve of being made by piezoelectric constant.
In the pneumatic control field, people also still rest on and utilize the mechanical lever equilibrium structure to realize electric conversion, the valve of being made thus, and not only volume is big, complex structure, and the cost height.
The purpose of this utility model is to overcome the shortcoming of traditional mechanical lever or gas-electric converter, and the novel piezoelectric bicrystal that a kind of volume is little, cost is low, simple in structure valve is provided.
The purpose of this utility model is achieved in that a kind of piezoelectric bimorph body valve, it is characterized in that having a pair of loam cake that is tightly connected and the lower cover of making by insulating material, end in loam cake and lower cover is crimped with one unequal-sided " U " shape elastic electrode sheet, " U " shape gap of elastic electrode sheet accompanies the last piezo-electric sheet and the lower piezoelectric sheet of being separated by by a conduction interlayer, three's one end is fixed, and the other end is unsettled; On the position, long limit that covers corresponding to " U " shape elastic electrode sheet be provided with an electrode, cover down the minor face afterbody of it " U " shape elastic electrode of lower piezoelectric sheet with it electrical isolation be provided with another electrode, the electrode electrical isolation is passed the lower piezoelectric sheet and is electrically connected with the conduction interlayer; Be provided with outgassing nozzle at loam cake middle part, corresponding on the free end of piezo-electric sheet on cover and be provided with gas source nozzle; Following covering corresponding to lower piezoelectric sheet free end below is provided with a blowdown nozzles.
The utility model is the contrary a kind of novel valve of pressing effect and developing that utilizes piezoelectric constant, when applying the voltage of opposed polarity on two electrodes, on, the polarised direction of lower piezoelectric sheet produces a contraction mutually on the contrary, an extension, thereby will go up, following two bicrystal sheets are crooked up or down, and play the effect of switch gas source nozzle and blowdown nozzles, can adjust the size of gas circuit pressure thus, the utility model has overcome traditional mechanical balance bar stem valve, and to have a volume little, cost is low, simple in structure, reliable advantage of high precision has realized the purpose of this utility model preferably.
Make more detailed description below in conjunction with drawings and Examples.
Fig. 1 is a structural representation of the present utility model.
Embodiment:
Piezoelectric bimorph body valve as mentioned above, comprise insulation loam cake 3, lower cover 5 and elastic electrode compressing tablet 1, positive electrode 2, negative electrode 6, conduction interlayer 7, go up gas source nozzle 9 on piezo-electric sheet 4, lower piezoelectric sheet 8 and the upper and lower cover 3,5, blowdown nozzles 10, outgassing nozzle 11 etc.
With loam cake 3 and lower cover 5 combined pressures, guarantee that elastic electrode compressing tablet 1 is adjacent to the electrode surface of upper and lower piezo-electric sheet 1,2, make circuit turn-on, simultaneously upper and lower piezo-electric sheet 1,2 and conduction interlayer 7 one ends are fixed, and become that an end is fixed, the other end piezoelectric actuator freely.When positive source is received positive electrode 2, when power cathode being received on the negative electrode 6, according to the inverse piezoelectric effect of piezoelectric constant, because 1,2 making alive polarity differences of upper and lower piezo-electric sheet, last piezo-electric sheet 1 polarised direction and institute's making alive be contraction on the contrary mutually; Lower piezoelectric sheet 2 polarised directions are identical with institute making alive direction and uphold, and cause the bicrystal sheet to be bent upwards therefrom, thereby gas source nozzle 9 is closed, and blowdown nozzles 10 is opened, thereby reaches the purpose of adjusting gas circuit pressure size.If otherwise upper and lower piezo-electric sheet 1,2 adds opposite voltage, then upper and lower piezo-electric sheet 1,2 is bent downwardly and gas source nozzle 9 is opened, blowdown nozzles 10 is closed, and the feasible thus gas circuit that is made of outgassing nozzle 11, gas source nozzle 9, blowdown nozzles 10 is finished the function of inlet and outlet.
The utility model and the supporting use of Siemens's intelligent positioner can be converted into frequency signal with the current signal of outside input, and electric current is big more, frequency is high more, then in cycle time, piezoelectric bimorph body valve events number of times is many more, constantly controls inlet and outlet, thereby can control gas circuit pressure.

Claims (1)

1, a kind of piezoelectric bimorph body valve, it is characterized in that having a pair of loam cake that is tightly connected (3) and the lower cover of making by insulating material (5), end in loam cake (3) and lower cover (5) is crimped with unequal-sided " U " shape elastic electrode sheet (1), " U " shape gap of elastic electrode sheet (1) accompanies the last piezo-electric sheet (4) and the lower piezoelectric sheet (8) of being separated by by a conduction interlayer (7), three's one end is fixed, and the other end is unsettled; The position, long limit that loam cake (3) is gone up corresponding to " U " shape elastic electrode sheet is provided with an electrode (2), lower cover (5) go up the minor face afterbody of it " U " shape elastic electrode (1) of lower piezoelectric sheet (8) with it electrical isolation be provided with another electrode (6), electrode (6) electrical isolation is passed lower piezoelectric sheet (8) and is electrically connected with conduction interlayer (7); Be provided with outgassing nozzle (11) at loam cake (3) middle part, corresponding on be provided with gas source nozzle (9) on the loam cake (3) on the free end of piezo-electric sheet (4); Lower cover (5) corresponding to lower piezoelectric sheet (8) free end below is provided with a blowdown nozzles (10).
CN 99250930 1999-11-17 1999-11-17 Piezoelectric pericon valve Expired - Lifetime CN2399574Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 99250930 CN2399574Y (en) 1999-11-17 1999-11-17 Piezoelectric pericon valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 99250930 CN2399574Y (en) 1999-11-17 1999-11-17 Piezoelectric pericon valve

Publications (1)

Publication Number Publication Date
CN2399574Y true CN2399574Y (en) 2000-10-04

Family

ID=34035553

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 99250930 Expired - Lifetime CN2399574Y (en) 1999-11-17 1999-11-17 Piezoelectric pericon valve

Country Status (1)

Country Link
CN (1) CN2399574Y (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100435274C (en) * 2001-07-16 2008-11-19 三星电子株式会社 Shower head of a wafer treatment apparatus having a gap controller
CN103225706A (en) * 2012-01-31 2013-07-31 费斯托股份有限两合公司 Piezo Valve
CN101610704B (en) * 2006-12-06 2014-10-01 瑞亚梵朵斯公司 Beverage dispensing machine and operating method
CN103557331B (en) * 2007-06-19 2016-05-04 株式会社开滋 Use the drive unit of shaft seal mechanism
CN106885023A (en) * 2017-01-11 2017-06-23 山东大学 Piezo-electric type active control thin film restrictor
CN110966444A (en) * 2019-08-09 2020-04-07 浙江中控自动化仪表有限公司 Piezoelectric valve with piezoelectric stack
CN112066005A (en) * 2020-08-17 2020-12-11 费尔顿技术(上海)有限公司 Piezoelectric pilot valve

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100435274C (en) * 2001-07-16 2008-11-19 三星电子株式会社 Shower head of a wafer treatment apparatus having a gap controller
CN101610704B (en) * 2006-12-06 2014-10-01 瑞亚梵朵斯公司 Beverage dispensing machine and operating method
CN103557331B (en) * 2007-06-19 2016-05-04 株式会社开滋 Use the drive unit of shaft seal mechanism
CN103225706A (en) * 2012-01-31 2013-07-31 费斯托股份有限两合公司 Piezo Valve
CN103225706B (en) * 2012-01-31 2016-08-24 费斯托股份有限两合公司 Piezo electric valve
CN106885023A (en) * 2017-01-11 2017-06-23 山东大学 Piezo-electric type active control thin film restrictor
CN110966444A (en) * 2019-08-09 2020-04-07 浙江中控自动化仪表有限公司 Piezoelectric valve with piezoelectric stack
CN112066005A (en) * 2020-08-17 2020-12-11 费尔顿技术(上海)有限公司 Piezoelectric pilot valve
CN112066005B (en) * 2020-08-17 2022-06-24 费尔顿技术(上海)有限公司 Piezoelectric pilot valve

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C17 Cessation of patent right
CX01 Expiry of patent term