CN2349536Y - Multi-section four cracking phase indication raster - Google Patents

Multi-section four cracking phase indication raster Download PDF

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Publication number
CN2349536Y
CN2349536Y CN 98233415 CN98233415U CN2349536Y CN 2349536 Y CN2349536 Y CN 2349536Y CN 98233415 CN98233415 CN 98233415 CN 98233415 U CN98233415 U CN 98233415U CN 2349536 Y CN2349536 Y CN 2349536Y
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CN
China
Prior art keywords
section
sections
phase
raster
split
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 98233415
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Chinese (zh)
Inventor
张吉鹏
董德水
周浩
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN 98233415 priority Critical patent/CN2349536Y/en
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Publication of CN2349536Y publication Critical patent/CN2349536Y/en
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Expired - Fee Related legal-status Critical Current

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Abstract

The utility model relates to a multi-section four cracking phase indication raster which belongs to the field of the length measurement and is used for measuring the length. In order to eliminate the higher harmonic of an optoelectronic signal and improve the sine property of the optoelectronic signal, the window of each crack phase of the utility model adopts multi-section, the raster reticles of the upper section and the lower section meet certain phase relationship, the raster reticles of the left section and the right section meet another phase relationship, and the optoelectronic signals which are obtained between the sections can be mutually compensated. Thereby, the sine property of the optoelectronic signal is improved, which provides the condition for the subdivision of the electronics; in addition, the measuring precision is ensured.

Description

A kind of multi-region section four split phase indicative gratings
A kind of multi-region Duan Si that the utility model belongs in the length metering field splits an indication grating, is used for length metering.
Before the utility model, commonly used four split an indication grating, and as shown in Figure 1: the photosignal sine of generation is poor, and high segmentation brings very mistake to electronics, influences measuring accuracy.
In order to overcome above-mentioned shortcoming, the purpose of this utility model is to improve the sine of photosignal, helps eliminating higher hamonic wave, is the high segmentation of electronics, and improving Measurement Resolution provides advantage, and measuring accuracy is improved.
Detailed content of the present utility model is as shown in Figure 2:
Fig. 2 a and Fig. 2 b are two sections, four split phase indicative gratings, and Fig. 2 c is four sections, four split phase indicative gratings.
Two sections, four split phase indicative gratings, be each split the phase window be divided into up and down two sections or about two sections, the grating line of two sections satisfies certain phase relation, the zero-bit coding window groove of below is regardless of section.Four sections four split an indication grating, be that each splits the phase window and is divided into four sections up and down, the grating line of two sections satisfies certain phase relation up and down, about the grating line of two sections satisfy another phase relation, the zero-bit coding window groove of below is regardless of section.
Principle of work explanation: four split each of indication grating splits the photosignal that the phase window obtains and is made up of first-harmonic and higher hamonic wave, and higher hamonic wave is the principal element that influences the photosignal sine, in order to eliminate higher hamonic wave, split each of indication grating with four and split the delineation of phase window grating line employing branch section, grating line between the section will satisfy certain phase difference, the photosignal that each section is obtained compensates mutually, first-harmonic is strengthened, higher hamonic wave is weakened, thereby improved the sine of photosignal, create condition for the high segmentation of electronics, improved Measurement Resolution, guaranteed measuring accuracy.
Good effect of the present utility model: help eliminating the higher hamonic wave of photosignal, improved the sine of photosignal, can realize the height segmentation of electronics, improve Measurement Resolution, guarantee measuring accuracy.
Description of drawings: Fig. 1 prior art four is split an indication grating synoptic diagram, and Fig. 2 is that multi-region Duan Si of the present utility model splits an indication grating synoptic diagram, and Figure of abstract adopts Fig. 2.
Most preferred embodiment: two sections four split an indication grating, and the phase differential of the grating line of two sections adopts 60 °.Four of four sections split an indication grating, and the phase differential of the grating line of two sections adopts 36 ° up and down.

Claims (1)

1, a kind of multi-region section four split phase indicative gratings, split the phase window and the zero-bit coding window is formed by indication grating four, it is characterized in that two sections, four split phase indicative gratings, each split the phase window be divided into up and down two sections or about two sections, the grating line of two sections satisfies certain phase relation, and the zero-bit coding window groove of below is regardless of section; Four sections, four split phase indicative gratings, the grating line of two sections satisfies certain phase relation up and down, about the grating line of two sections satisfy another phase relation, the zero-bit coding window groove of below is regardless of section.
CN 98233415 1998-11-26 1998-11-26 Multi-section four cracking phase indication raster Expired - Fee Related CN2349536Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 98233415 CN2349536Y (en) 1998-11-26 1998-11-26 Multi-section four cracking phase indication raster

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 98233415 CN2349536Y (en) 1998-11-26 1998-11-26 Multi-section four cracking phase indication raster

Publications (1)

Publication Number Publication Date
CN2349536Y true CN2349536Y (en) 1999-11-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 98233415 Expired - Fee Related CN2349536Y (en) 1998-11-26 1998-11-26 Multi-section four cracking phase indication raster

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CN (1) CN2349536Y (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111156906A (en) * 2020-01-10 2020-05-15 中北大学 Two-dimensional micro-displacement sensor based on four-quadrant grating and detector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111156906A (en) * 2020-01-10 2020-05-15 中北大学 Two-dimensional micro-displacement sensor based on four-quadrant grating and detector

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GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee