CN2317058Y

CN2317058Y - Ring magnetic steel driven manipulator

Info

Publication number: CN2317058Y
Application number: CN 98236717
Authority: CN
Inventors: 雷震霖; 谢琪; 谢素珍; 李丛茂; 越科新
Original assignee: SHENYANG SCIENT INSTR DEV CT C
Current assignee: SHENYANG SCIENT INSTR DEV CT C
Priority date: 1998-02-24
Filing date: 1998-02-24
Publication date: 1999-05-05
Anticipated expiration: 2008-02-24

Abstract

The utility model belongs to the mechanical device in a vacuum device, which is characterized in that the outside of the utility model is a stainless steel pipe; the inner of the steel pipe is provided with a rotary soft iron and a reciprocating moving soft iron; moving rods are arranged in the soft irons; the external part of the steel pipe is correspondingly provided with a rotary magnetic steel and a reciprocating moving magnetic steel; a left end cover is welded and sealed, and a right end cover is fixedly connected with the vacuum device through a flange. When the utility model works, the ring-typed external magnetic steel is driven to move, rotate and swing to and fro, and the moving rods are driven to do relative movement in vacuum. The utility model has the advantages of simple structure and convenient installation and use. Through the rotation and reciprocating movement of the external magnetic steel, a mechanical hand in the vacuum device can be controlled to do relative movement, so as to complete operation to a sample mechanism.

Description

Ring magnetic steel driving device hand

The utility model belongs to mechanical device in a kind of vacuum equipment.

Along with the new film material constantly occurs and employing, novel technique is continually developed and is perfect, the hyperfrequency ultrahigh-speed device has obtained develop rapidly, and the development of the preparation of material and device all is under vacuum condition, requirement according to each operation, to substrate fetch and deliver, store, join, carry, mutual in conjunction with finishing, mostly adopt the bellows manipulator at present, because bellows argon arc weld seam is long, move back and forth and easily reach fatigue limit, cause gas leakage, reduced service life, can't finely tune to installing and fetching and delivering substrate and bring a lot of inconvenience.

For solving the deficiency of above bellows manipulator, the utility model provides a kind of ring magnetic steel driving device hand, utilizes magnetic induction principle to be implemented under the vacuum condition control to sample.

The structural design of the utility model is achieved in that its structure of ring magnetic steel driving device hand is that shell is to adopt non-magnetic stainless steel tube to make, the left end of steel pipe is the argon arc welded seal, in steel pipe, be placed with round rotation soft iron, the inner end is for moving back and forth soft iron, both become one, move back and forth in the soft iron moving lever is housed, the ring flange of fixing by steel pipe right-hand member and vacuum equipment stretches in the vacuum equipment, connect with the sample of fetching and delivering, be equipped with and inner rotation soft iron and corresponding magnet steel and the reciprocating motion magnet steel of rotatablely moving of reciprocating motion soft iron in the outside of steel pipe, the outer steel assembly is to be used to move back and forth and a ring magnetic steel that is used to rotatablely move by four, the centre is isolated by the aluminium ring, after the polar orientation arrangement, be installed in the non-magnetic rustproof steel bushing, tighten with nut at two ends.

The advantage of the utility model: simple in structure, easy to install, make corresponding sports by the manipulator that the rotation and the reciprocating motion of outer steel just can be controlled in the vacuum equipment, finish control operation to sample.

The detailed structure of the utility model is provided by following examples and accompanying drawing.

Fig. 1 is a ring magnetic steel driving device hand structure principle chart.

Its structure as shown in drawings, 1 is left end cap, 2 are the rotation soft iron, 3 are the magnet steel that rotatablely moves, 4 for moving back and forth magnet steel, and 5 for moving back and forth soft iron, and 6 is moving lever, 7 is stainless steel casing, shell adopts stainless steel, and argon arc welding is adopted in the termination, and the leakage field rate is little, ring magnetic steel adopts neodymium iron boron (Na-Fe-β) permanent-magnet alloy, magnetizing direction, the magnetic pole installation direction decides according to forms of motion, and driven soft iron assembly is made by the pure iron that is better than DT4, work moves back and forth and rotation driving ring-like outer steel, swing, drive moving lever and make corresponding actions in a vacuum, finish every work such as fetching and delivering substrate, stroke is 30～300mm, corner is 0 °～360 °, and pivot angle is 0～± 8 °.

Owing to adopted ring magnetic steel, avoided the bonding of tile fragment type magnet steel, turning, demagnetization, shortcoming such as magnetic field is inhomogeneous has realized rotation, swing, has moved, compound motion, enlarge application, reduced operation easier and the structure of having simplified parts, reduced leakage field rate and discharge quantity simultaneously.

Claims

1. ring magnetic steel driving device hand, it is characterized in that manipulator shell (7) is to adopt non-magnetic stainless steel tube to make, the left end of steel pipe (7) is the argon arc welded seal, in steel pipe (7), be placed with round rotation soft iron (2), the inner end is for moving back and forth soft iron (5), both become one, move back and forth in the soft iron (5) moving lever (6) is housed, the ring flange of fixing by steel pipe (7) right-hand member and vacuum equipment stretches in its null device, connect with the sample of fetching and delivering, be equipped with and inner rotation soft iron (2) and reciprocating motion soft iron (5) corresponding magnet steel that rotatablely move (3) and reciprocating motion magnet steel (4) in the outside of steel pipe (7), the outer steel assembly is to be used to move back and forth and a ring magnetic steel that is used to rotatablely move by four, the centre is isolated by the aluminium ring, after the polar orientation arrangement, be installed in the non-magnetic rustproof steel bushing, tighten with nut at two ends.