CN2314492Y - Beam 90 rotary annual unstable resonator of laser - Google Patents

Beam 90 rotary annual unstable resonator of laser Download PDF

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Publication number
CN2314492Y
CN2314492Y CN 97231847 CN97231847U CN2314492Y CN 2314492 Y CN2314492 Y CN 2314492Y CN 97231847 CN97231847 CN 97231847 CN 97231847 U CN97231847 U CN 97231847U CN 2314492 Y CN2314492 Y CN 2314492Y
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China
Prior art keywords
mirror
laser
ridge
pool
gaining
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Expired - Fee Related
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CN 97231847
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Chinese (zh)
Inventor
赵彤
金玉奇
周大正
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Dalian Institute of Chemical Physics of CAS
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Dalian Institute of Chemical Physics of CAS
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Priority to CN 97231847 priority Critical patent/CN2314492Y/en
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Publication of CN2314492Y publication Critical patent/CN2314492Y/en
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Abstract

The utility model relates to an annular nonstable cavity a laser beam rotating 90 DEG, which is composed of two sets of ridge mirrors forming an angle of 45 DEG with each other, a laser gaining pool positioned in light paths of the ridge mirrors, a beam enlarging mirror and a scraper mirror, wherein, one ridge mirror composed of two flat mirrors M3, M4 forming 90 DEG with each other is close to one side of the laser gaining pool and is on the same plane with the laser gaining pool, and the other ridge mirror composed of two flat mirrors M6 and an M7 forming 90 DEG with each other is far away from the laser gaining pool and forms an angle of 45 DEG with the laser gaining pool; a planar scraper mirror M5 is obliquely arranged in a light path between the M4 and the M6, and the beam enlarging mirror composed of a concave reflecting mirror M2 and a convex reflecting mirror M1 is arranged in a light path between the M7 and the M3; a small hole is arranged on the light shaft point on the flat mirror M4 of the roof prism, and the centerline of the small hole forms an angle of 45 DEG with the mirror surface of the M4 and is parallel to a light shaft. The utility model has the advantages of good clarity of the light paths in the process of debugging, good secondary debugging collimation and repeatability and high debugging efficiency.

Description

A kind of laser beam is rotated 90 ° of annular unsteady cavities
The utility model relates to laser technology, provides a kind of laser beam to rotate 90 ° of annular unsteady cavities especially.
Adopting bundle to rotate 90 ° of annular unsteady cavities (being called for short UR90) is to make the low gain laser obtain the utmost point effective ways of high power and good light beam quality, the operation principle in this chamber is as follows: the initial point of light running orbit and paraxial rays in the chamber is not in same plane, but with the spiral expansion mode gradually from optical axis, as being the initial luminous point plane of reference to cut open cutter outgoing mirror place, make light beam operation clockwise in the chamber, behind the ridge mirror, just make beam cross section around the optical axis half-twist, and by M 1, M 2Expand bundle, expand directional light after the bundle through the gain pond by M 3, M 4Reverse reflex is again through operation of gain pond and formation closed circuit, and around the operation, light beam has just been realized reproducing certainly like this, is exported by the suitable facula area of scraper mirror intercepting at last, and the part that is intercepted by scraper mirror is not proceeded above-mentioned circulation.The key that realizes the good operation of UR90 is the collimation technique of optical cavity, document Appl.Opt.1986,25 (17): 2939, Appl.Opt.1988, all proposed UR90 chamber adopt chamber in add the collimation technique of beam splitting chip at 27 (21): 4396, as seen guide lights enters in the chamber each chamber mirror of collimation by beam splitting chip, because beam splitting chip makes the guide lights decay comparatively serious, so naked eyes can be seen at most that guide lights circulate and 2.5 enclose in the chamber.Adopt this technology to collimate after the optical cavity, in the laser works correspondence beam splitting chip is withdrawn main optical path, therefore otherwise will increase the loss of optical cavity and make the beam quality variation, just can not circulate in the chamber in laser works and work back guide lights has or not and is offset or shakes to characterize optical element.
The purpose of this utility model is to provide a kind of laser beam to rotate 90 ° of annular unsteady cavities, and its light path clarity in debug process is good, debugging collimation good reproducibility, and debugging efficiency height once more.
The utility model provides a kind of laser beam to rotate 90 ° of annular unsteady cavities, by two groups of ridge mirrors (1) (2) that are mutually 45, is in laser plus pool (3), beam expanding lens (4) and scraper mirror (5) formation in its light path, 90 ° of level crossing M in two 3, M 4The ridge mirror of forming (1) is being in same plane near a side of laser plus pool (3) and with it, by being mutually 90 ° of level crossing M 6, M 7The ridge mirror of forming (2) is away from laser plus pool (3) and angle at 45 with it, at M 4To M 6Light path in, a tilting flat scraper mirror M 5(5), at M 7, M 8In the light path, be equipped with by recessed reflecting surface mirror M 2With protruding reflecting surface mirror M 1The beam expanding lens (4) that constitutes is characterized in that: at the level crossing M of ridge mirror (1) 4An aperture (11) is established in last melatope position, the center line and the M of aperture (11) 4In the minute surface 45 °, and parallel with optical axis.
In addition, in the utility model the diameter of aperture (11) between 1.0~2.0mm.
The utility model in use, guide lights enters by this aperture and circulates in the chamber to finish the optical cavity collimation, because the loss that does not have beam splitting chip to cause, the guiding light intensity improves and the several times that can circulate in the chamber greatly, and can see complete guide lights output facula on the output sightingpiston.The utility model UR90 adopts in the chamber online guide lights collimation technique, can guarantee that not only optical cavity has a stable visible guiding light source, and can adjust the collimation of optical cavity at any time, guarantee the repeatability of the each collimation of optical cavity, debugging collimation institute is time-consuming also shorter than conventional beam splitting chip method, has improved collimation efficient.The utility model is specially adapted to Chemical oxygen-iodine laser, because Chemical oxygen-iodine laser works under vacuum condition, so the laser optical element is very big in atmosphere randomness drift under its dummy status, and general collimation technique is difficult to guarantee that optical axis position is constant; After the collimation technique that has adopted online guide lights, guaranteed that not only laser can have a stable visible guiding light source and an optical axis position constant under the vacuum work condition, make once more the optical cavity of collimation repeat well and to have very high optical cavity to collimate precision, use this collimation technique to shorten the alignment procedure time greatly with original.In a word, the utlity model has following advantage:
1. improve guide lights intensity, improved light path clarity in the optical cavity debug process;
2. debug the collimation good reproducibility than conventional beam splitting chip method at every turn;
3. shorter than conventional beam splitting chip debug time, improved accent chamber efficient.
By embodiment in detail the utility model is described in detail below in conjunction with accompanying drawing.
Accompanying drawing 1 rotates 90 ° of annular unsteady cavity internal structure front schematic view for the chemical oxygen iodine laser bundle;
Accompanying drawing 2 rotates 90 ° of annular unsteady cavity top views for the chemical oxygen iodine laser bundle;
Accompanying drawing 3 rotates 90 ° of annular unsteady cavity left side views for the chemical oxygen iodine laser bundle.
Embodiment
As shown in Figure 1, 2, laser beam is rotated 90 ° of annular unsteady cavities, and by two groups of ridge mirrors (1) (2) that are mutually 45, the laser plus pool (3), beam expanding lens (4) and the scraper mirror (5) that are in its light path constitute, and two are 90 ° of level crossing M 3, M 4The ridge mirror of forming (1) is being in same plane near a side of laser plus pool (3) and with it, by being mutually 90 ° of level crossing M 6, M 7The ridge mirror of forming (2) is away from laser plus pool (3) and angle at 45 with it, at M 4To M 6Light path in, a tilting flat scraper mirror M 5(5), at M 7, M 8In the light path, be equipped with by concavees lens M 2With convex lens M 1The beam expanding lens (4) that constitutes is at the level crossing M of ridge mirror (1) 1An aperture (11) is established in last melatope position, the center line and the M of aperture (11) 1Minute surface is 45 °, and parallel with optical axis.
In the UR90 chamber, be plane of reference (see figure 3) with the scraper mirror output face, hot spot EDCF is by scraper mirror (M 5) oppositely output, light beam remainder AEFB is through ridge mirror (M 6, M 7) make beam cross section around the optical axis half-twist after oppositely, postrotational hot spot A 1B 1F 1E 1Through beam expanding telescope (M 1, M 2) expand bundle, expand directional light (the hot spot A after restrainting 2B 2F 2E 2, its beam cross section size must be consistent with former hot spot ADCB) by the gain pond after through planar inverted mirror (M 3, M 4) reverse reflex overlaps with former hot spot ADCB through gain pond and running orbit again.Like this, still oppositely exported with former hot spot EDCF superposed part, and remainder (promptly with hot spot AEFB superposed part) is proceeded above-mentioned circulation by scraper mirror.The collimation guide lights of optical cavity is by planar inverted mirror M 4Thereby on 45 ° of inclined holes directly enter in the chamber collimation that optical cavity is finished in circulation.

Claims (2)

1. a laser beam is rotated 90 ° of annular unsteady cavities, and by two groups of ridge mirrors (1) (2) that are mutually 45, the laser plus pool (3), beam expanding lens (4) and the scraper mirror (5) that are in its light path constitute, and two are 90 ° of level crossing M 3, M 4The ridge mirror of forming (1) is being in same plane near a side of laser plus pool (3) and with it, by being mutually 90 ° of level crossing M 6, M 7The ridge mirror of forming (2) is away from laser plus pool (3) and angle at 45 with it, at M 4To M 6Light path in, a tilting flat scraper mirror M 5(5), at M 7, M 8In the light path, be equipped with by recessed reflecting surface mirror M 2With protruding reflecting surface mirror M 1The beam expanding lens (4) that constitutes is characterized in that: at the level crossing M of ridge mirror (1) 4An aperture (11) is established in last melatope position, the center line and the M of aperture (11) 4In the minute surface 45 °, and parallel with optical axis.
2. rotate 90 ° of annular unsteady cavities according to the described laser beam of claim 1, it is characterized in that: the diameter of aperture (11) is between 1.0~2.0mm.
CN 97231847 1997-12-25 1997-12-25 Beam 90 rotary annual unstable resonator of laser Expired - Fee Related CN2314492Y (en)

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Application Number Priority Date Filing Date Title
CN 97231847 CN2314492Y (en) 1997-12-25 1997-12-25 Beam 90 rotary annual unstable resonator of laser

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Application Number Priority Date Filing Date Title
CN 97231847 CN2314492Y (en) 1997-12-25 1997-12-25 Beam 90 rotary annual unstable resonator of laser

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CN2314492Y true CN2314492Y (en) 1999-04-14

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103001109A (en) * 2012-12-03 2013-03-27 华中科技大学 Device and method for adjusting ring cavity of excimer laser device
CN105720471A (en) * 2014-12-02 2016-06-29 中国科学院大连化学物理研究所 Hydrogen fluoride laser grating unstable resonator adjusting device
CN106785854A (en) * 2015-11-23 2017-05-31 中国科学院大连化学物理研究所 A kind of hydrogen fluoride optical maser wavelength selection output Foldaway unstable resonator
CN109861068A (en) * 2017-11-30 2019-06-07 中国科学院大连化学物理研究所 A kind of UR90 cavity configuration can be used for minimizing slab laser, UR90 chamber distressed structure and slab laser
CN110380327A (en) * 2019-07-30 2019-10-25 中国人民解放军国防科技大学 Light beam near-field intensity distribution self-homogenizing high-energy laser

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103001109A (en) * 2012-12-03 2013-03-27 华中科技大学 Device and method for adjusting ring cavity of excimer laser device
CN105720471A (en) * 2014-12-02 2016-06-29 中国科学院大连化学物理研究所 Hydrogen fluoride laser grating unstable resonator adjusting device
CN105720471B (en) * 2014-12-02 2018-11-02 中国科学院大连化学物理研究所 A kind of regulating device of hydrogen fluoride laser grating unsteady cavity
CN106785854A (en) * 2015-11-23 2017-05-31 中国科学院大连化学物理研究所 A kind of hydrogen fluoride optical maser wavelength selection output Foldaway unstable resonator
CN106785854B (en) * 2015-11-23 2019-01-25 中国科学院大连化学物理研究所 A kind of hydrogen fluoride optical maser wavelength selection output Foldaway unstable resonator
CN109861068A (en) * 2017-11-30 2019-06-07 中国科学院大连化学物理研究所 A kind of UR90 cavity configuration can be used for minimizing slab laser, UR90 chamber distressed structure and slab laser
CN109861068B (en) * 2017-11-30 2020-02-07 中国科学院大连化学物理研究所 UR90 cavity structure, UR90 cavity deformation structure and slab laser that can be used for miniaturized slab laser
CN110380327A (en) * 2019-07-30 2019-10-25 中国人民解放军国防科技大学 Light beam near-field intensity distribution self-homogenizing high-energy laser
CN110380327B (en) * 2019-07-30 2024-05-28 中国人民解放军国防科技大学 Self-homogenizing high-energy laser for near-field intensity distribution of light beam

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