CN2303856Y

CN2303856Y - Oblique-arm type bucket-electroplating apparatus

Info

Publication number: CN2303856Y
Application number: CN 97218401
Authority: CN
Inventors: 阮连通
Original assignee: Hongli Machinery Industry Co L
Current assignee: Hongli Machinery Industry Co L
Priority date: 1997-06-02
Filing date: 1997-06-02
Publication date: 1999-01-13
Anticipated expiration: 2007-06-02

Abstract

The utility model relates to an oblique-arm type electroplating barrel apparatus which comprises an electroplating tank, a transmission mechanism and an electroplating barrel. The oblique-arm type electroplating barrel apparatus is characterized in that the electroplating barrel is arranged in the electroplating tank with an appropriate inclined angle, and the electroplating barrel is fixed on the transmission mechanism and driven by the transmission mechanism to be rotated. The utility model has good stirring effect on fine plated objects, so that the electroplating efficiency is improved, the plated objects can be conveniently taken out of the electroplating barrel, the efficacy that the electroplating barrel is put in the electroplating tank is achieved, and the production efficiency is improved.

Description

Oblique arm formula Electroplating barrel device

The utility model relates to a kind of Electroplating barrel device, relevant especially a kind of the raising by the oblique arm formula Electroplating barrel device of electronplate laminar surface homogeneity and increase electrolytic efficiency.

The structure of the Electroplating barrel of generally commonly using, as shown in Figure 8, this Electroplating barrel is installed in the electrolyzer A, rotate via a transmission rig transmission, stretch into an opening for feed C1 on the bucket wall of this Electroplating barrel C, and be provided with a plurality of fluid hole C2, be provided with a cathode taps C3 by stretching on its sidewall again.During work, the opening for feed C1 of plated body by Electroplating barrel C can be inserted in the bucket, when starting transmission rig, this Electroplating barrel C rotates transmission, plated body is constantly stirred, and fully contact, to reach preferable electrolysis effectiveness with electrolytic solution, and electrolytic solution can constantly be substituted the electrolytic solution in the Electroplating barrel C from fluid hole C2 turnover.

But the structure of the Electroplating barrel C of this kind plating usefulness is with so-called horizontal Electroplating barrel, and it will electroplate tiny flat again plated body, during as wafer (CHIP) etc., will have the undesirable part of following points:

1, the rolling property of plated body is not good: when tiny flat again plated body (as wafer etc.) is rolled in Electroplating barrel C, and attempt is when improving contacting of plated body and electrolytic solution, there are many plated bodies to be formed on and produce smooth phenomenon in the Electroplating barrel C, and can not stir along with the rolling of Electroplating barrel C fully, therefore tiny plated body then can't contact with electroplate liquid fully, and will influence electrolysis effectiveness, this kind phenomenon can be referring to extremely shown in Figure 11 as Fig. 9, when this Electroplating barrel C rolls, place the interior tiny plated body of Electroplating barrel C then can produce smooth phenomenon.

2, the ccontaining generation bag of plated body heart phenomenon: when promptly tiny wafer is desired to stir along with the rolling of Electroplating barrel C, as shown in figure 12, because smooth by the gross result, this plated body group B that is positioned at a large amount of plated bodies center can't be stirred out, form the phenomenon of the bag heart easily, as shown in figure 13, the plated body that is wrapped can't fully be contacted with electrolytic solution, make the plating of plated body inhomogeneous.

3, the replacement of plated body position is not good: because above-mentioned the rolling property that has is good and have the phenomenon of the bag heart, substitute so the position of plated body can't be done effectively.

4, plated body will have the phenomenon that is held: promptly when Electroplating barrel is constantly stirred, to make partly tiny plated body be held on cathode bar and fixing Electroplating barrel side sheet room, and when crooked phenomenon being arranged when the cover plate of opening for feed C1 use for some time, will produce the slit and clamping by thing, make to produce insufficient galvanized effect.

5, electroplating effect is relatively poor: general these Electroplating barrels, and its two ends are the side plate of sealing, and tiny fluid hole is only arranged on the wall, the negative electrode number that can be provided with is limited, so current efficiency is lower, causes electroplating efficiency poor.

6, production efficiency is low: insert in the Electroplating barrel because this plated body is opening for feed C1 by Electroplating barrel, or electroplate and also to take out after finishing by opening for feed C1, when so desire is taken out plated body, need whole Electroplating barrel C is taken out in plating tank A, again with plated body taking-up slowly, thereby, will influence the operation of whole production line, production efficiency is lowered.

Because the electroplating thickness uniformity coefficient of general electronic component is more and more exquisite, therefore traditional plating can't reach this requirement with the electroplating effect of Electroplating barrel C.

Main purpose of the present utility model is to provide a kind of oblique arm formula Electroplating barrel device, and it can make tiny plated body have the preferable efficient of stirring, to reach the purpose that improves electroplating efficiency.

Another purpose of the present utility model is to provide a kind of oblique arm formula Electroplating barrel device, and it has is convenient to from electroplate to take out plated body and Electroplating barrel put effect within the ground plating tank, to reach the purpose of production efficiency.

The purpose of this utility model is achieved in that a kind of oblique arm formula Electroplating barrel device, include a plating tank, a transmission rig and an Electroplating barrel, it is characterized in that described Electroplating barrel is to be equipped in the plating tank with an appropriate tilt angle, and be fixed on the transmission rig, drive by this transmission rig and rotate.

The purpose of this utility model also can be realized by following measure, " staving that a square aperture is doliform is formed on shape sheet and chassis to described Electroplating barrel by four, four " the both sides of shape sheet, one side is a grooving, and opposite side is the cover bamboo shoot, and does its root edge and be provided with end cover bamboo shoot, and the chassis is provided with a square pickup groove, four " the shape sheet is with grooving, cover bamboo shoot phase fit in twos, and is fixed in the square pickup groove on chassis with end cover bamboo shoot cover, and is fixing through welding for this; Convex with three reference columns under the chassis of described Electroplating barrel, and be concaved with three locating slots on the rotating disk of transmission rig, can be nested with mutually.

Effect of the present utility model is, because the utility model is to rotate in the mode that tilts, plated body is rolled by a barrel wall, not only moves inward, and more direction moves at the bottom of bucket, plated body stops the rubbing stirring mutually, plated body conversion change location reaches preferable electrolytic functional, and the utility model Electroplating barrel does not have cover plate in addition, plated body is unlikely by cover plate and the clamping of Electroplating barrel break joint, the exhausted uneven phenomenon of electroless plating; Electroplating barrel combination steadiness is strong: with " grooving of shape sheet, cover bamboo shoot fit, and be nested with by the pickup groove on chassis, fixing to weld, steadiness is strong, and combination is rapidly; The production efficiency height: be nested with three locating slots of transmission rig with three fixed legs of Electroplating barrel, Electroplating barrel takes out easily, saves time, and maybe can plated body directly be taken out according to the opening that tilts; The scarp can reduce the degree of piling up at the bucket end; Electroplating barrel is a square aperture, anistree urn, and capacity is big, and plated body is difficult for dropping out.

The explanation of accompanying drawing drawing:

Fig. 1 side-view of the present utility model;

Fig. 2 three-dimensional exploded view of the present utility model;

Fig. 3 stereographic map of the present utility model;

The vertical view of Fig. 4 the utility model Electroplating barrel;

The side-view of Fig. 5 the utility model Electroplating barrel;

The vertical view of Fig. 6 the utility model Electroplating barrel base;

The sectional view of Fig. 7 the utility model Electroplating barrel base;

Fig. 8 commonly uses the stereographic map of Electroplating barrel;

Fig. 9 commonly uses the action synoptic diagram () of Electroplating barrel;

Figure 10 commonly uses the action synoptic diagram (two) of Electroplating barrel;

Figure 11 commonly uses the action synoptic diagram (three) of Electroplating barrel;

Figure 12 commonly uses the action synoptic diagram (four) of Electroplating barrel;

Figure 13 commonly uses the action synoptic diagram (five) of Electroplating barrel;

Describe the utility model in detail below in conjunction with embodiment and accompanying drawing thereof:

Please extremely shown in Figure 3 referring to Fig. 1 earlier, the utility model includes transmission rig 1 and Electroplating barrel 2, is placed in the electrolyzer A that is marked with electrolytic solution;

Transmission rig 1 is to drive first gear 11 by motor 10, first gear, 11 transmissions, second gear 12, and the 3rd gear 13, the three gears 13 central authorities that 12 transmissions one of second gear are tilted are provided with a rotating disk 14, rotating disk 14 is provided with three locating slots 15, can be nested with the location for three reference columns 222 of Electroplating barrel 2.

See also Fig. 1 to shown in Figure 7, Electroplating barrel 2 is that " shape sheet 21 combines with chassis 22, is that a square aperture 20 stretches into for cathode taps C3, and is the doliform body, as shown in Figure 4 by four.Four " both sides one of shape sheet 21 are that grooving 210, is cover bamboo shoot 211, and in its four " root edge of shape sheet 21 is provided with end cover bamboo shoot 212, and chassis 22 be provided with a quadrate pickup groove 221, and the chassis convexes with three reference columns 222 for 22 times, as shown in Figure 2.Electroplating barrel 2 is that " shape sheet 21 is with the cover bamboo shoot 221 of grooving 210 phase fit in twos, and is fixed in chassis 22 set three reference columns 222 with end cover bamboo shoot 212 covers and is sleeved on set last three locating slots 15 on the rotating disk 14 of transmission rig 1, as Fig. 3 and shown in Figure 5 by four.By the transmission of transmission rig 1, make plated body in the Electroplating barrel 2 with inclination stirrings of rolling, be beneficial to uniformly-coating, and plated body is easy to taking-up, ccontaining after electroplating, or is placed on another Electroplating barrel again, to enhance productivity.

Characteristics of the present utility model are:

1, stirring property is good: because the utility model is that the mode that tilts is rotated, plated body is subjected to bucket Wall rolls, and not only moves inward, and more direction moves at the bottom of the bucket, and plated body stops that mutually rubbing stirs Mix, plated body conversion change location reaches better electrolytic functional.

2, Electroplating barrel does not have cover plate: plated body is unlikely by cover plate and the clamping of Electroplating barrel break joint, absolutely not electricity Plate inhomogeneous phenomenon.

3, Electroplating barrel combination steadiness is strong: with " grooving of shape sheet, cover bamboo shoot fit, and by the chassis Holddown groove is nested with, and to be welded and fixed, steadiness is strong, and combination rapidly.

4, production efficiency height: be nested with three locating slots of transmission rig with three fixed legs of Electroplating barrel, Electroplating barrel takes out easily, saves time, and maybe can plated body directly be taken out according to the opening that tilts.

5, the scarp can reduce the degree of piling up at the bucket end.

6, Electroplating barrel is a square aperture, anistree urn, and capacity is big, and plated body is difficult for dropping out.

In sum, the utility model arm-type Electroplating barrel device that tilts, it really can reach the purpose of this utility model by the above-mentioned structure that discloses, can make tiny plated body have the preferable effect of stirring, to reach the raising electroplating efficiency, and can be convenient in Electroplating barrel to take out plated body and Electroplating barrel is placed effect in the electrolyzer, to reach the purpose of enhancing productivity.

Claims

1, a kind of oblique arm formula Electroplating barrel device, include a plating tank, a transmission rig and an Electroplating barrel, it is characterized in that described Electroplating barrel is to be equipped in the plating tank with an appropriate tilt angle, and be fixed on the transmission rig, drive by this transmission rig and rotate.

2, according to a kind of oblique arm formula Electroplating barrel device of claim 1, it is characterized in that " staving that a square aperture is doliform is formed on shape sheet and chassis to described Electroplating barrel by four, four " the both sides of shape sheet, one side is a grooving, and opposite side is the cover bamboo shoot, and is provided with end cover bamboo shoot in its root edge, and the chassis is provided with a square pickup groove, four " the shape sheet is with grooving, cover bamboo shoot phase fit in twos, and is fixed in the square pickup groove on chassis with end cover bamboo shoot cover, and is fixing through welding for this.

3, according to a kind of oblique arm formula Electroplating barrel device of claim 1 or 2, it is characterized in that convexing with three reference columns under the chassis of described Electroplating barrel, and be concaved with three locating slots on the rotating disk of transmission rig, can be nested with mutually.