CN2293069Y - High accuracy X-ray single crystal orientation instrument - Google Patents
High accuracy X-ray single crystal orientation instrument Download PDFInfo
- Publication number
- CN2293069Y CN2293069Y CN 97223822 CN97223822U CN2293069Y CN 2293069 Y CN2293069 Y CN 2293069Y CN 97223822 CN97223822 CN 97223822 CN 97223822 U CN97223822 U CN 97223822U CN 2293069 Y CN2293069 Y CN 2293069Y
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- crystal
- ray
- flitch
- direction finder
- slide plate
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Abstract
The utility model relates to a high accuracy x-ray single crystal orientation instrument used for measuring the geometric surface and the inner angle of one crystal surface of various single crystal materials such as the crystal, the silicon and germanium signal crystal, the laser crystal, etc. The utility model is composed of an x-ray pipe, a pipe sleeve, an air-cooling electric machine, a measured crystal, a counter, an amplifier, a digital displayer, an electric meter, a voltage stabilizer, a controller, a high-voltage generator, a high-voltage cable, a sucking pump, etc. The utility model is mainly characterized in technical field in that a light measuring circuit is composed of the x-ray pipe, a monochromator, the measured crystal, and the counter; the monochromator is a crystal sheet with a definite crystal-surface tangent angle. The crystal orientation instrument can make use of the monochromator to make the primary x-ray carry out the monochromizing operation; the utility model can select one x-ray with a single wavelength to measure the angle of the crystal surface of the measured crystal; therefore, the utility model can enhance the measuring accuracy so as to reach the positive and negative 15 ' stage and the utility model can realize the high accuracy measurement.
Description
The utility model relates to a kind of according to the X-ray diffraction principle, be used to measure geometric jacquard patterning unit surface and its inner a certain interplanar angle of various monocrystal materials such as crystal, silicon germanium single crystalline, laser crystal, with the optical, mechanical and electronic integration fine measuring instrument of the performance requirements such as device temperature coefficient that guarantee to make.
Existing homemade hand-rail type plain edition direction finder and Japanese like product, it forms structure generally is by X-ray tube, pipe box, ventilated machine, slit, tested crystal, counter, amplifier, device for digit-displaying, ammeter, voltage stabilizer, controller, high pressure generator, high-tension cable, compositions such as sucking pump, wherein by X-ray tube, slit, tested crystal will be to counter to the light path that counter constituted, amplifier input detection signal, slit the dispersion angle that purpose is to limit ray is set, but this method exists the control angle of divergence more little, measuring accuracy is high more, also can only reach ± 30 ", also cause the signal intensity that enters counter to reduce; When angle of divergence increase, signal intensity increases, and precision but reduces significantly, and in the Chinese patent technology, being called " X-ray orientation device " as the CN94230385.7 name had description to this type of technology.As can be seen, the technical problem underlying that the direction finder of this structure exists be its angle measurement accuracy only can reach ± 30 " class; research and analyse from the X-ray crystallography principle; its basic reason is that X-ray tube produces be used to measure the elementary X ray wavelength of crystal single inadequately due to, cause this type of direction finder precision to be difficult to further raising.
Goal of the invention of the present utility model is to provide a kind of X ray monocrystalline direction finder that can further improve angle measurement accuracy, especially provides a kind of measuring accuracy of its crystal face angle to reach ± 15 " the high precision X ray monocrystalline direction finders of class.
Another goal of the invention of the present utility model is to provide a kind of X ray monocrystalline direction finder that can solve high precision crystal bar haftplatte problem.
Realize the high precision X ray monocrystalline direction finder of the present utility model purpose, its technical scheme is: this direction finder includes compositions such as X-ray tube, pipe box, ventilated machine, tested crystal, counter, amplifier, device for digit-displaying, ammeter, voltage stabilizer, controller, high pressure generator, high-tension cable, sucking pump, its major technique characteristics: between X-ray tube and tested crystal, be provided with a monochromator, the measurement light path that formation is made up of to counter X-ray tube, monochromator, tested crystal, monochromator wherein are to have the fixedly quartz plate of crystal face corner cut.In the present technique, the monochromator that is provided with between X-ray tube and the tested crystal, its purpose is will penetrate thereon elementary X ray produces monochromatization because of diffraction X ray by this monochromator, be radiated on the tested crystal, producing diffraction again enters counter and detects, solve technical matters how to choose single wavelength radionetric survey crystal crystal face angle, thereby realized the high-acruracy survey of crystal face angle.
In the technical program, be the unwanted wavelength ray of closing in the elementary X ray to be given filtering with diffraction mode, so that only utilize the high-acruracy survey of single wavelength ray realization to crystal crystal face angle by monochromator.But when selecting single wavelength to carry out high-acruracy survey with diffraction principle, twice diffraction process can make the transmitted intensity that enters counter reduce greatly, even is lower than the sensitivity of equipment, and surveying instrument can't be worked.Therefore, have only the transmitted intensity that improves X-ray tube, just can make counter and subsequent detecting instrument carry out normal surveying work.The method that improves the X-ray tube transmitted intensity is the X-ray tube power supply for adopting permanent high voltage direct current generator, improve transmitted intensity, its concrete grammar is to be connected with the voltage-multiplying circuit of being made up of two commutation diodes and two electric capacity at the secondary two ends of the high-tension transformer of high pressure generator.
In technique scheme, available single X-ray tube sends two bundle horizontal rays and two worktable about constituting to both sides, improves the utilization factor of this monocrystalline direction finder.Can be angular instrument on this two worktable, also can make both sides dispose angular instrument and the crystal bar haftplatte device that is specifically designed to the crystal bar haftplatte respectively, enlarge the range of application of this direction finder.
The measuring accuracy of instrument has improved, and the angle display device of enough accuracy must be arranged, and having adopted precision in the present technique is 1 " device for digit-displaying.For making such high precision instrument work more reliable, its amplifier has been taked comprehensive moisture preventive measure.
High precision X ray monocrystalline direction finder provided by the utility model owing on it measures light path, adopted monochromator, filtering close on the clutter ray, thereby the measuring accuracy of crystal face angle is improved greatly, its measuring accuracy is reached ± 15 " class.Also having adopted permanent high voltage direct current generator, least count as remedying X ray intensity in the present technique is 1 " device for digit-displaying and multiple means such as the design of crystal bar haftplatte mechanism and improvement, further guaranteed the realization of the high-acruracy survey purpose of this direction finder.
Describe technology contents of the present utility model in detail below in conjunction with accompanying drawing.
Fig. 1 is a whole composition diagram of the present utility model
Fig. 2 is the vertical view of Fig. 1
Fig. 3 is a measurement light path principle figure of the present utility model
Fig. 4 is the circuit theory diagrams of high pressure generator
Fig. 5 is a crystal bar haftplatte master TV structure synoptic diagram
Fig. 6 is the vertical view of Fig. 5
Fig. 7 is a crystal bar haftplatte annex master TV structure synoptic diagram
Fig. 8 is the vertical view of Fig. 7
Fig. 9 is another enforcement structural representation of crystal bar haftplatte device
Figure 10 is the vertical view of Fig. 9.
As shown in the figure, the designed high precision X ray monocrystalline direction finder of the utility model is by the X-ray tube 1 that is installed on the work top 17, ventilated machine 10, tested crystal 3, counter 4, amplifier 5, ammeter 8, device for digit-displaying 7 and the voltage stabilizer 14 that is installed in table top 17 belows, high pressure generator 15, compositions such as high-tension cable 13 and air pump 16, principal feature of the present utility model is to be provided with a monochromator 2 on the measurement light path of this direction finder, as shown in Figure 3, its measurement light path is by X-ray tube 1, monochromator 2, tested crystal constitutes to counter 4, the quartz plate of monochromator 2 wherein for having certain crystal face corner cut, and be arranged on the angle position that makes the elementary K α of X-ray tube spectral line produce the diffraction ray just.
The course of work of the present utility model is: send elementary X ray by X-ray tube 1, shine on the monochromator 2, make its produce diffraction and with its diffraction ray of monochromatization inject tested crystal, present embodiment is to be example with the hand-rail type angular instrument, as shown in Figure 3, change the tested crystal 3 angle that is fixed on the worm gear by rotary worm handle 9, make it produce diffraction, by the ray signal behind counter 4 these diffraction of reception, the photoelectric encoder 6 that be connected on the worm screw this moment will send and the corresponding a series of pulses of tested crystal corner, after single-chip microcomputer is handled, send into device for digit-displaying 7, the angle value of the geometric jacquard patterning unit surface crystal face a certain of the tested crystal in the time of will demonstrating ammeter 8 maximal values by device for digit-displaying 7 like this with it.Because the utility model is with monochromator 2 elementary X ray to be carried out monochromatization, the X ray of having chosen single wavelength detects the crystal face angle of tested crystal, so has improved measuring accuracy greatly.Certainly, also want the display precision of corresponding raising device for digit-displaying 7 this moment, realize the high-acruracy survey of crystal crystal face angle, preferably selecting least count for use is 1 " device for digit-displaying.
In the technical solution of the utility model, because monochromator 2 and tested crystal carry out diffraction twice to X ray, and the transmitted intensity that finally enters into counter 4 is reduced greatly, sometimes even can't carry out normal surveying work.For making this direction finder reliable operation, will improve the input signal strength that enters counter 4, promptly improve the intensity of elementary X ray, the technological means of its solution is to adopt permanent high voltage direct current generator to improve the intensity of the X ray that ray tube sends, schematic circuit as shown in Figure 4, its implementation is that the secondary two ends of the high-tension transformer in high pressure generator connect the voltage-multiplying circuit of being made up of commutation diode D1, D2 and capacitor C 1, C2, is the X-ray tube power supply.
In present technique, for guaranteeing the measuring accuracy of direction finder, make the output of amplifier more stable, also must take certain moisture preventive measure to this direction finder, in the present embodiment, take sealing, solidified the protection against the tide except the amplification plate in the pair amplifier 5, equally its power transformer, counter high voltage unit have been taked sealing, solidified moisture preventive measure, improved its humidity resistance.
In the present embodiment, tested crystal can be wafer in its light path, also can be crystal bar.For improving the utilization factor of this direction finder, the two bundle horizontal rays of sending with single ray tube in the present embodiment, two workbenches about formation, these two platforms can be angular instrument, be used to measure the crystal face angle of wafer, piece, rod, can also make wherein a workbench install the crystal bar haftplatte device of realizing that the accurate haftplatte of crystal bar is used specially.Owing to utilize present technique to improve the light path detection method of measuring accuracy, can realize the high precision haftplatte, as Fig. 5, Fig. 6, Fig. 9, crystal bar haftplatte device shown in Figure 10, it is by the support 24 that is fixed on the work top 17, slide plate 21 and flitch 22 are formed, slide plate 21 is slidingly arranged on the support 24 by the higher line slideway 20 of precision, flitch 22 is pressed the angle of the formed diffraction ray of monochromator crystal face corner cut, accurately locate on slide plate 21 by angle regulator, its angle regulator is by flitch fixed block 26, recliner 28,29, fastening button 27 constitutes, they lay respectively on the different straight flanges of flitch 22, as shown in the figure, recliner 28,29 and fastening button 27 lay respectively at the offside of flitch 22, recliner 28,29 can be pad or reading wheel, preferably adopt the milscale structure to guarantee precision; Also be provided with across the beam body 40 on the slide plate 21 fixed installation one crystal bar register pin 25 on it on the support 24; For further improving crystal bar haftplatte precision, on this beam body 40, also be provided with the crystal bar micro-adjusting mechanism, it is made up of with clock gauge 42 and the milscale 43 of forming one the press button 41 that is fixed on the beam body 40, when with hand with crystal bar 23 Primary Location after, push down on the crystal bar 23 a bit with press button 41, the measuring staff of clock gauge 42 is leaned against on crystal bar 23 1 sides, adjusting milscale 43 makes being designated as of table 42 zero, the both sides of careful again adjustment crystal bar 23 1 ends, when making simulate electric energy meter 8 indications reach maximal value, haftplatte is located again.Be more accurate reflection crystal bar diffraction phenomena, also configurable one digital ammeter 8 behind counter 4 ', make indication more accurate.In present technique, crystal bar haftplatte annex can also be contained on the angular instrument, carry out the work of crystal bar haftplatte, promptly use as Fig. 7, crystal bar haftplatte annex shown in 8, this annex by support 24 ' on pilot hole 30 be installed on the main shaft of angular instrument, realize the adjustment of flitch angle by handwheel 9 and worm-and-wheel gear thereof, slide plate 21 by line slideway 20 be slidingly mounted on support 24 ' on, on slide plate 21, be provided with the flitch stationary installation, this device is by flitch locating piece 26, backup plate 29 ' and the fastening button 27 of flitch 22 form, and lay respectively at the different sides of flitch 22, crystal bar 23 by be fixedly mounted on support 24 ' on register pin 25 ' location.
Claims (10)
1, a kind of high precision X ray monocrystalline direction finder of measuring the crystal face angle, it includes X-ray tube (1), ventilated machine (10), tested crystal (3), counter (4), amplifier (5), device for digit-displaying (7), ammeter (8), voltage stabilizer (14), controller, high pressure generator (15), high-tension cable (13), sucking pump compositions such as (16), it is characterized in that being provided with a monochromator (2) between X-ray tube (1) at this direction finder and the tested crystal (3), formed by X-ray tube (1), monochromator (2), tested crystal (3) is to the measurement light path of counter (4), and monochromator wherein (2) is for having the fixedly quartz plate of crystal face corner cut.
2, X ray monocrystalline direction finder according to claim 1, the secondary two ends that it is characterized in that the high-tension transformer (15) at high pressure generator are connected with by commutation diode (D1, D2) and electric capacity (C1, C2) forms voltage-multiplying circuit.
3, X ray monocrystalline direction finder according to claim 1, it is characterized in that this direction finder one platform (17) is provided with the crystal bar haftplatte device that is specifically designed to the crystal bar haftplatte, it includes support (24), slide plate (21) and the fixing flitch of crystal bar (22), support (24) is provided with one across the beam body (40) on the slide plate (21), fixed installation one register pin (25) on it, slide plate (21) is slidingly arranged on the support (24) by line slideway (20), and slide plate (21) is provided with the angle regulator of flitch (22).
4, X ray monocrystalline direction finder according to claim 3, it is characterized in that described angle regulator is made up of the fastening button (27) that is fixed in flitch fixed block (26), recliner (28,29) and flitch (22) on the slide plate (21), fixed block (26), recliner (28,29) and fastening button (27) lay respectively on the different straight flanges of flitch (22), and recliner wherein (28,29) is reading wheel, pad or milscale mechanism.
5, X ray monocrystalline direction finder according to claim 3 is characterized in that also being provided with the crystal bar micro-adjusting mechanism on the crystal bar haftplatte device, and it is by being clock gauge (42), milscale (43) formation that is fixed in the press button (41) on the beam body (40) and forms one.
6,, it is characterized in that being provided with simulate electric energy meter (8) and Lou word formula ammeter (8 ') behind the counter (4) according to claim 1,3 or 5 described X ray monocrystalline direction finders.
7, X ray monocrystalline direction finder according to claim 1, it is characterized in that being provided with by support (24 '), slide plate (21), flitch (22) and be fixed on the crystal bar haftplatte annex that the register pin (25 ') on the support (24 ') constitutes, support (24 ') bottom is provided with the pilot hole (30) that is installed on the angular instrument main shaft, slide plate (21) is slidingly arranged on the support (24 ') by line slideway (20), and slide plate (21) is provided with the stationary installation of flitch.
8, X ray monocrystalline direction finder according to claim 7, it is characterized in that described flitch stationary installation is to be made of the flitch locating piece (26) on the slide plate (21), backup plate (29 ') and fastening button (27), locating piece (26), backup plate (29 ') and fastening button (27) lay respectively at the different straight flanges of flitch (22).
9, X ray monocrystalline direction finder according to claim 1 is characterized in that device for digit-displaying is that precision is 1 " high-precision digital display device.
10, X ray monocrystalline direction finder according to claim 1 is characterized in that the high voltage unit of pair amplifier (5) and power transformer are taked to seal, the curing moisture preventive measure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97223822 CN2293069Y (en) | 1997-06-05 | 1997-06-05 | High accuracy X-ray single crystal orientation instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 97223822 CN2293069Y (en) | 1997-06-05 | 1997-06-05 | High accuracy X-ray single crystal orientation instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2293069Y true CN2293069Y (en) | 1998-09-30 |
Family
ID=33938400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 97223822 Expired - Lifetime CN2293069Y (en) | 1997-06-05 | 1997-06-05 | High accuracy X-ray single crystal orientation instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2293069Y (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101071112B (en) * | 2006-05-11 | 2010-07-21 | 赵久 | Silicon single crystal ingot X-ray directing instrument |
| CN102778463A (en) * | 2012-07-16 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | Crystal X-ray material sticking feeder |
| CN106370679A (en) * | 2016-11-02 | 2017-02-01 | 中国电子科技集团公司第四十六研究所 | Semiconductor wafer notch groove crystal orientation measuring device and use method |
| CN108168475A (en) * | 2017-12-18 | 2018-06-15 | 中国航发贵州黎阳航空动力有限公司 | The measuring method of transporter burner inner liner shaped air film hole Special angle |
| CN108562601A (en) * | 2018-03-29 | 2018-09-21 | 德清晶生光电科技有限公司 | Single crystal orientation instrument orientation sizing structure |
| CN109596650A (en) * | 2018-12-18 | 2019-04-09 | 山东新升光电科技有限责任公司 | A kind of sapphire ingot direction finder |
| CN110341060A (en) * | 2019-06-28 | 2019-10-18 | 河北远东通信系统工程有限公司 | A kind of cutting technique of high-accuracy double corner quartz wafers |
-
1997
- 1997-06-05 CN CN 97223822 patent/CN2293069Y/en not_active Expired - Lifetime
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101071112B (en) * | 2006-05-11 | 2010-07-21 | 赵久 | Silicon single crystal ingot X-ray directing instrument |
| CN102778463A (en) * | 2012-07-16 | 2012-11-14 | 铜陵市琨鹏光电科技有限公司 | Crystal X-ray material sticking feeder |
| CN106370679A (en) * | 2016-11-02 | 2017-02-01 | 中国电子科技集团公司第四十六研究所 | Semiconductor wafer notch groove crystal orientation measuring device and use method |
| CN108168475A (en) * | 2017-12-18 | 2018-06-15 | 中国航发贵州黎阳航空动力有限公司 | The measuring method of transporter burner inner liner shaped air film hole Special angle |
| CN108168475B (en) * | 2017-12-18 | 2020-07-21 | 中国航发贵州黎阳航空动力有限公司 | Method for measuring special-shaped angle of special-shaped air film hole of flame tube of conveyor |
| CN108562601A (en) * | 2018-03-29 | 2018-09-21 | 德清晶生光电科技有限公司 | Single crystal orientation instrument orientation sizing structure |
| CN109596650A (en) * | 2018-12-18 | 2019-04-09 | 山东新升光电科技有限责任公司 | A kind of sapphire ingot direction finder |
| CN109596650B (en) * | 2018-12-18 | 2021-06-22 | 山东新升光电科技有限责任公司 | Sapphire crystal bar orientation instrument |
| CN110341060A (en) * | 2019-06-28 | 2019-10-18 | 河北远东通信系统工程有限公司 | A kind of cutting technique of high-accuracy double corner quartz wafers |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |