CN2234933Y - Sheet workpiece conveyer mechanism for vacuum equipment - Google Patents

Abstract

The utility model relates to a sheet workpiece conveyer mechanism for vacuum equipment, which is composed of a drive component and a slide glass frame, wherein the drive component is composed of a profile guiding track, a chain sprocket, and a driver; the slide glass frame is composed of an external frame, a gravity ratchet tooth, a roller, an inner frame, a presser bar, a gravity pin, a gear rack bar, and a pressure wheel which are connected through a shaft. The conveyer mechanism has the advantages of simple and light structure, and online sheet turning over; besides, the utility model is suitable for the manufacturing technique from bottom to top and from top to bottom, the utility model can bear high-temperature baking, the synchronous transmission is not needed, etc. The utility model can be used for the vacuum devices for continuous production, such as curtain wall glass, transparent conductive glass, a semiconductor, etc.

Description

Sheet-like workpiece conveying mechanism in the vacuum apparatus

The utility model relates to a kind of drive transfer machinery.

Continuous in vacuum apparatus, semi-continuous transmit machine be used for from a vacuum chamber to next vacuum chamber or from a vacuum station to next vacuum station substrate transport.Can be applicable to fields such as coated glass, flat-panel monitor, quartz conductor, solar device, compact disk.

To the processing of the substrate of classes such as glass, transmit machine commonly used at present is the roller type piece sending mechanism in vacuum apparatus, and its structure comprises that mainly section bar guide rail, hoop have parts such as the roller bearing, chain sprocket, actuator of rubber band.Several roller bearings of horizontal arrangement in each vacuum cavity, with chain sprocket they are associated in together, an external drive source is with roller bearing driven in synchronism in the different vacuum chambers, the glass sheet that is placed on the roller bearing is bound round after the rubber band on the roller bearing drives, and passes to another vacuum chamber from a vacuum chamber.There is following weak point in this on vacuum coating production line:

1. the roller bearing in each vacuum chamber, chain sprocket structure seem heavy, and vacuum deflation is big, and in order to reach high vacuum state, corresponding extraction equipment wants big, big energy-consuming;

2. rubber band at high temperature toasts, and is unfavorable to vacuum coating;

3. in case the aging distortion of rubber band, workpiece will be passed askew, even the card jail, just must stop to unpack and handle, and production efficiency is descended;

4. only adapt to top-down complex plating process, incompatible complex plating process on following;

5. substrate can't onlinely overturn;

6. need synchronous transmission in the different vacuum chambers.

Task of the present utility model be to provide a kind of can fixed substrate, and can the online workpiece conveying mechanism that turns over the vacuum apparatus of sheet.

Task of the present utility model realizes by following approach: arrange that on pair of parallel section bar guide rail one connects the slide rack that left and right frame constitutes by housing, inside casing, gear respectively through two axles, become to be rotationally connected with axle in the middle of the left and right frame of housing, the left and right frame center of gravity place of inside casing and gear become captive joint, gear to be between the frame of housing and inside casing with axle; 2 rollers that roll are arranged on every limit at least on the section bar guide rail below the left and right frame of housing, on the left and right frame of housing also respectively arrangement interval equal the gravity sour jujube tooth of the dovetail form of chain pitch integral multiple, become swing to be connected through axle and housing, the inboard is provided with breach respectively on the forward and backward horizontal edge frame of housing is middle; On the forward and backward horizontal edge frame of inside casing, arrange the compressing tablet bar of inner bevel respectively, before inside casing, on the front end face of horizontal edge frame, the gravity pin of an energy stop bit in the forward and backward horizontal edge frame of housing breach is set; In the inboard of section bar guide rail in needs upset substrate place, arrange a number of teeth equal the gear number of teeth half, and the tooth bar that is complementary with it.

In the frame of inside casing, arrange a metal gauze.A fixing support is set on the section bar guide rail, and arranges a pinch roller that prevents that housing from lifting in the above.The compressing tablet bar also can be arranged in above the left and right frame of inside casing.

The utlity model has following advantage:

1. slide rack is under the cooperation of gear, tooth bar, can on-line automatic upset substrate, and this can be adapted to from bottom to top, the needs of top-down two kinds of state of the art;

2. owing to be furnished with metal gauze in the slide rack,, create conditions for realizing producing continuously so, avoid vacuum apparatus is worked the mischief in case after the substrate explosion, can all take fragment out of vacuum chamber;

3. this mechanism is made by metallic material, can bear high-temperature baking, and the venting rate is low, helps using in vacuum apparatus;

4. simple in structure light and handy, easy to maintenance.

Fig. 1 is a part-structure partial schematic sectional view of the present utility model;

Fig. 2 is the partial view of the A-A semi-sictional view of Fig. 1.

Describe particular content of the present utility model in detail below in conjunction with accompanying drawing, but in the utility model Hold and be not limited to the description of the drawings.

With reference to Fig. 1, Fig. 2, on pair of parallel section material guide rail 1, inner limit is roller 3 The guide rail that rolls, outer limit is the groove of chain 2, also has the through hole of a chain 2 below the groove, The bottom is the fixture of section material guide rail 1. Chain 2 consists of one by through hole and groove and revolves Go back to the road, dispose respectively a sprocket wheel that matches with chain 2 at the two ends of through hole and groove, Sprocket wheel is rotated by driver drives by axle 25. On section material guide rail 1, arrange one mainly The slide rack that is consisted of by housing 7, inside casing 10, gear 15. The left side of square metal outer frame 7, A horizontal axis hole is respectively opened in the center of left frame, in order to be connected with inside casing; On housing 7 left sides, 2 side openings 17 that gravity sour jujube tooth 18 is installed are respectively opened in the outside of left frame, and side opening velar plate 5 is by spiral shell Nail 6 is fixing, and the lower aperture of side opening 17 leaves ending of one section gravity sour jujube tooth 18 before and after opening Move back rib, the front upper place at 17 ends of side opening is provided with an axis hole of arranging gravity sour jujube tooth 18,2 side openings Distance is the integral multiple of chain 2 pitches between axis hole in 17 and the axis hole; On housing 7 left and right limits The bottom surface of frame respectively has 4 grooves that roller 3 is installed in the inner part; At housing 7 forward and backward horizontal edges The top breach 4 that has in the inner part in the middle of the frame. The metal gravity sour jujube tooth 18 of swallow-tail form Head, 16 one-tenth swings of warp beam are connected the axis hole place in the side opening 17, and half of dovetail drags at side opening 17 Outside the opening, and make in its pitch space that reaches chain 2, play can drive slide rack along with The purpose that chain 2 moves. Metal Contact Rollers 3 warp beams are movably connected in the recessed of left and right frame bottom surface In the groove, and can roll at section material guide rail 1. The left and right frame of square inner metal bezel 10 Position of centre of gravity has one and is connected the horizontal axis hole that connects with housing. Inside casing 10 and housing 7 Left and right frame is connected by axle 14 respectively, and outer rim is for being rotationally connected interior frame and metal gear 15 with axle 14 for being fixedly connected with, fix with taper pin nail 23 between frame and the axle 14 at least one, Fixing with split pin 22 between gear 15 and the axle 14, be furnished with metal between gear 15 and the housing 7 Packing ring 21. Gear 15 is between the left frame of housing 7, inside casing 10. Before inside casing 10 Fix the front compressing tablet bar 12 of 45 ° of inner bevels above the transverse frame, on rear transverse frame Arrange a rear compressing tablet bar 19 with 45 ° of flexible inner bevels, be used for clamping substrate 13, Have elasticity and be that anti-sizes of substrate slightly changes or during expanded by heating, be unlikely to stressed excessive and Go to pot. A stop bit is set in breach 4 at the front end face of inside casing 10 front transverse frames Gravity pin 11. At woven wire 24 of inside casing 10 interior layouts, if substrate 13 fragmentations are fallen at gold Belong on the silk screen 24, can take vacuum chamber out of with slide rack. Turn over sheet in section material guide rail 1 inboard in needs A tooth bar 20 that is complementary with gear 15 is arranged, tooth bar 20 in the vacuum chamber middle part of processing The number of teeth equal half of gear 15 numbers of teeth, gear 15 just in time makes inside casing 10 turn over by tooth bar 20 Turn to 180 °, make gravity pin stop bit in breach 4. By being fixed on the support on the section material guide rail 1 8, arrange the pinch roller 9 of housing 7 left frames, when inside casing overturn, housing 7 was unlikely to take place On lift.

Embodiment:

The inside casing 10 of slide rack is of a size of 400 * 400mm, be equipped with above and be of a size of 356 * 356mm, thickness is the glass substrate 13 of 1.1mm, and housing 7 is of a size of 500 * 500mm, and No. 2 motorcycle chains 2 are arranged on the sprocket wheel at groove, through hole and two ends thereof of section bar guide rail 1 and constitute the loop.This slide rack is arranged in the vacuum apparatus will carry out steam coating silicon dioxide film from bottom to top---450 ℃ of bakings---from top to bottom on the tinuous production of sputter indium tin oxide films.When steam coating silicon dioxide, glass substrate 13 is in the bottom surface of inside casing 10, and evaporation backgear 15 is through tooth bar 20, make inside casing 10 carry 180 ° of glass substrate 13 upsets, send into 450 ℃ vacuum drying tunnel baking, enter sputtered indium tin oxide film operation from top to bottom again, send then.

Claims (4)

1. the sheet-like workpiece conveying mechanism in the vacuum apparatus, comprise by section bar guide rail [1], Pei Zhi chain [2] in the above, sprocket wheel, and the drive disk assembly of actuator composition, it is characterized in that: on a pair of section bar guide rail [1], arrange one by housing [7], inside casing [10], gear [15] through two axles [14] in housing [7], the left side of inside casing [10], the slide rack that connects and composes respectively between the left frame, the left side of housing [7], the centre of left frame becomes to be rotationally connected with axle [14], the left side of inside casing [10], the center of gravity place of left frame and gear [15] become captive joint with axle [14], and gear [15] is between the frame of housing [7] and inside casing [10]; Below the left and right frame of housing [7], 2 rollers [3] are arranged on every limit at least, on the left and right frame of housing [7] also respectively arrangement interval equal the dovetail form of chain [2] pitch integral multiple, become swing bonded assembly gravity sour jujube tooth [18] with housing [7] through axle [16], breach [4] is set respectively in the centre of the forward and backward horizontal edge frame of housing [7]; On the forward and backward horizontal edge frame of inside casing [10], arrange the compressing tablet bar [12,19] of inner bevel respectively, on the front end face of the preceding horizontal edge frame of inside casing [10], the gravity pin [11] of a stop bit in breach [4] is set; Locate in the needs substrate [13] that overturns in the inboard of section bar guide rail [1], arrange a number of teeth equal gear [15] number of teeth half, and the tooth bar that is complementary with it [20].

2. the sheet-like workpiece conveying mechanism in the vacuum apparatus according to claim 1 is characterized in that: arrange a metal gauze [24] in the frame of inside casing [10].

3. the sheet-like workpiece conveying mechanism in the vacuum apparatus according to claim 1 is characterized in that: a fixed support [8] is set on section bar guide rail [1], and arranges a pinch roller [9] that prevents that housing [7] from lifting in the above.

4. the sheet-like workpiece conveying mechanism in the vacuum apparatus according to claim 1 is characterized in that: compressing tablet bar [12,19] also can be arranged in above the left and right frame of inside casing [10].

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