CN221472879U - Polymer cleaning device for vacuum chamber - Google Patents
Polymer cleaning device for vacuum chamber Download PDFInfo
- Publication number
- CN221472879U CN221472879U CN202323554339.XU CN202323554339U CN221472879U CN 221472879 U CN221472879 U CN 221472879U CN 202323554339 U CN202323554339 U CN 202323554339U CN 221472879 U CN221472879 U CN 221472879U
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- China
- Prior art keywords
- fixedly connected
- sleeve
- jacking
- vacuum chamber
- plate
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- 229920000642 polymer Polymers 0.000 title claims abstract description 28
- 238000004140 cleaning Methods 0.000 title claims abstract description 21
- 238000001179 sorption measurement Methods 0.000 claims abstract description 19
- 238000009434 installation Methods 0.000 claims description 16
- 230000002457 bidirectional effect Effects 0.000 claims description 12
- 230000003068 static effect Effects 0.000 claims description 6
- 244000309464 bull Species 0.000 claims 2
- 238000003825 pressing Methods 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/62—Plastics recycling; Rubber recycling
Landscapes
- Cleaning In General (AREA)
Abstract
The utility model relates to the technical field of cleaning and discloses a vacuum chamber polymer cleaning device which comprises a base, wherein a cavity is formed in the top of the base, a mechanical arm is fixedly connected to the right side of the cavity, a vertical plate is fixedly connected to the rear side of the top of the base, a transverse plate is fixedly connected to the top of the front side of the vertical plate, an electrostatic adsorption disc is slidingly connected to the bottom of the transverse plate, a mounting block is fixedly connected to the top of the electrostatic adsorption disc, clamping grooves are formed in the left side and the right side of the mounting block, a sleeve is slidingly connected to the inside of the front side of the transverse plate, a pressing disc is fixedly connected to the front side of the sleeve, and a pressure spring is fixedly connected to the rear side of the sleeve. According to the utility model, through the mutual matching among the mounting cavity, the mounting block, the sleeve, the pressing disc and the sliding rod, the pressing disc is pressed, the sleeve drives the connecting plates at two sides to move, the push rod rotates around the rotating shaft, the other end of the push rod pushes the clamping block to slide on the periphery of the fixing rod, and the polymer generated in the production process is cleaned through the mounting of the electrostatic adsorption disc.
Description
Technical Field
The utility model relates to the technical field of cleaning, in particular to a polymer cleaning device for a vacuum chamber.
Background
In modern semiconductor manufacturing facilities, vacuum chambers are used to effect wafer processing and film deposition, and in the semiconductor industry, the design and performance of vacuum chambers have a significant impact on the quality of manufacture of the apparatus, the efficiency of production, and the performance of the final product. However, the vacuum chamber of the machine table can generate a large amount of polymers in the production process, the polymer generated by the vacuum chamber of the vacuum chamber robot arm falls off and falls on the robot arm in the wafer taking process, and the polymers on the arm contact the wafer to cause the arc of the wafer in the production process, so that the wafer is scrapped, and therefore, the vacuum chamber polymer cleaning device is provided to solve the problems.
Disclosure of utility model
In order to make up for the defects, the utility model provides a polymer cleaning device for a vacuum chamber, which aims to solve the problem that a polymer falls on a robot arm in the production process in the prior art so as to contact a wafer to cause wafer rejection.
In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides a vacuum chamber polymer cleaning device, includes the base, the top of base is equipped with the cavity, the right side fixedly connected with arm of cavity, base top rear side fixedly connected with riser, riser front side top fixedly connected with diaphragm, diaphragm bottom sliding connection has the static adsorption dish, the top fixedly connected with installation piece of static adsorption dish, the draw-in groove has all been seted up to the left and right sides of installation piece, the inside sliding connection of diaphragm front side has the sleeve, telescopic front side fixedly connected with presses the dish, sleeve rear side fixedly connected with pressure spring, telescopic inside sliding connection has the slide bar, the equal fixedly connected with connecting plate of sleeve left and right sides, two the equal fixedly connected with pivot of one end that the connecting plate is far away from mutually, two equal swivelling joint in pivot periphery has the push rod, two the push rod is kept away from respectively the one end swivelling joint has the fixture block of connecting plate, base top front side is equipped with drive assembly.
Further, the drive assembly includes the drive plate, drive plate right side bottom fixedly connected with mounting panel, mounting panel top fixedly connected with motor, motor output fixedly connected with two-way threaded rod, two-way threaded rod periphery is equipped with jacking subassembly.
Further, the jacking subassembly includes two movable blocks, two movable block threaded connection is in the periphery of two-way threaded rod, two the inside all rotation of movable block is connected with the jacking board, two the jacking board is kept away from respectively two the one end rotation of movable block is connected with a jacking piece, the top fixedly connected with fixed disk of jacking piece.
Further, an installation cavity is formed in the transverse plate, and the installation block is specifically and slidably connected in the installation cavity.
Further, the left side and the right side of the inside of the transverse plate are fixedly connected with fixing blocks, and the two clamping blocks are respectively and slidably connected to the periphery of the fixing blocks.
Further, a first rotating rod is fixedly connected to the inside of the movable block, and the jacking plate is specifically connected with the movable block in a rotating mode through the first rotating rod.
Further, the left side and the right side of the inside of the jacking block are fixedly connected with a second rotating rod, and the jacking plate is specifically connected with the jacking block in a rotating mode through the second rotating rod.
Further, a plurality of evenly distributed supporting feet are fixedly connected to the bottom of the base.
The utility model has the following beneficial effects:
1. According to the utility model, through the mutual matching among the mounting cavity, the mounting block, the sleeve, the pressing disc, the sliding rod, the pressure spring, the connecting plate, the push rod and the clamping block, the pressing disc is pressed, the sleeve extrudes the pressure spring and drives the connecting plates at two sides to move, when the connecting plates move, the push rod rotates around the rotating shaft, the other end of the push rod pushes the clamping block to slide on the periphery of the fixing rod, and the polymer generated in the production process is cleaned through the mounting of the electrostatic adsorption disc.
2. According to the utility model, through the mutual matching between the driving assembly and the jacking assembly, the motor is used for driving the bidirectional threaded rod to rotate, and when the bidirectional threaded rod rotates, the two movable blocks move bidirectionally along the axis of the bidirectional threaded rod, so that the jacking rod pushes the jacking block to enable the top cavity and the mechanical arm to move towards the electrostatic adsorption disc, and the inner cavity is cleaned.
Drawings
FIG. 1 is a schematic perspective view of a polymer cleaning device with vacuum chamber according to the present utility model;
FIG. 2 is a schematic view of a two-way threaded rod of a vacuum chamber polymer cleaning device according to the present utility model;
Fig. 3 is a schematic structural view of a mounting block of a vacuum chamber polymer cleaning device according to the present utility model.
Legend description:
1. a base; 2. a driving plate; 3. a mounting plate; 4. a motor; 5. a two-way threaded rod; 6. a movable block; 7. a first rotating rod; 8. a jacking plate; 9. a second rotating rod; 10. a jacking block; 11. a fixed plate; 12. a cavity; 13. a mechanical arm; 14. a riser; 15. a cross plate; 16. an electrostatic chuck; 17. a sleeve; 18. pressing a disc; 19. a slide bar; 20. a pressure spring; 21. a connecting plate; 22. a rotating shaft; 23. a push rod; 24. a clamping block; 25. a fixed block; 26. a mounting cavity; 27. a mounting block; 28. and supporting the feet.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1 and 3, one embodiment provided by the present utility model is: the utility model provides a vacuum chamber polymer cleaning device, the on-line screen storage device comprises a base 1, the top of base 1 is equipped with cavity 12, the right side fixedly connected with arm 13 of cavity 12, 1 top rear side fixedly connected with riser 14 of base, riser 14 front side top fixedly connected with diaphragm 15, diaphragm 15 bottom sliding connection has static adsorption dish 16, the top fixedly connected with installation piece 27 of static adsorption dish 16, the draw-in groove has all been seted up in the left and right sides of installation piece 27, the inside sliding connection of diaphragm 15 front side has sleeve 17, the front side fixedly connected with of sleeve 17 presses the dish 18, sleeve 17 rear side fixedly connected with pressure spring 20, the inside sliding connection of sleeve 17 has slide bar 19, sleeve 17 both sides all fixedly connected with connecting plate 21, the equal fixedly connected with pivot 22 of one end that two connecting plates 21 are mutually far away from, two pivot 22 periphery all rotates and is connected with push rod 23, two push rod 23 are kept away from the one end rotation of connecting plate 21 respectively and are connected with fixture block 24, the inside of diaphragm 15 has been seted up installation piece 26, the inside of installation piece 27 is specifically sliding connection in the inside of installation piece 26, inside of diaphragm 15 inside left and right sides, inside left and right sides 15 fixedly connected with pressure plate 25, evenly distributed at the inside of two fixedly connected with base of two fixedly connected with bottom of foot 25, evenly distributed at the bottom of the base 25 is fixed with 25.
Specifically, the base 1 provides a basic support of the whole system, the fixing plate 11 fixes a platform of the cavity 12, the mechanical arm 13 is used for executing grabbing work, the vertical plate 14 provides a vertical structure for supporting the transverse plate 15, the transverse plate 15 provides a horizontal structure for supporting and connecting other components, the electrostatic adsorption plate 16 adsorbs polymers on the surface of the mechanical arm 13 by electrostatic force, the sleeve 17 is used for transmitting motion, the pressing plate 18 is used for driving the sleeve 17 to move, the slide bar 19 is used for protecting the pressure spring 20 from deformation when being pressed, the pressure spring 20 provides elastic support, the connecting plate 21 is used for connecting other components to drive the other components to move, the rotating shaft 22 provides a rotating fulcrum, the push rod 23 is used for transmitting power to push the clamping block 24 to move, the clamping block 24 is used for fixing the mounting block 27 in the mounting cavity 26, the fixing block 25 provides a space for sliding the clamping block 24, the mounting cavity 26 is used for fixing other components, the mounting block 27 is used for connecting the electrostatic adsorption disk 16 to facilitate the installation of the electrostatic adsorption disk 16, when in use, the electrostatic adsorption disk 16 is firstly arranged at the bottom of the transverse plate 15 through the mounting block 27, the pressing disk 18 is pressed, the pressing disk 18 drives the sleeve 17 to squeeze the pressure spring 20, when the sleeve 17 moves, the connecting plates 21 at two sides move along with the movement of the sleeve 17, the push rod 23 rotates around the rotating shaft 22, the other end rotates in the clamping block 24, the clamping block 24 is pushed by the pushing force generated by the push rod 23 to move along the fixing block 25, then the mounting block 27 is placed in the mounting cavity 26, the clamping grooves are arranged at the left side and the right side of the mounting block 27 to facilitate the clamping block 24 to be embedded in the clamping grooves so as to fix the mounting block 27, when the mounting block 27 enters the mounting cavity 26, the clamping block 24 is ensured to be matched with the clamping grooves, then the pressing disk 18 is released, the pushing force is generated by the reset of the pressure spring 20 to push the sleeve 17 to move, the clamping block 24 is embedded in the clamping grooves when the sleeve 17 moves, the mounting block 27 has a fixed effect.
Referring to fig. 1-2, the front side of the top of the base 1 is provided with a driving component, the driving component comprises a driving plate 2, the bottom of the right side of the driving plate 2 is fixedly connected with a mounting plate 3, the top of the mounting plate 3 is fixedly connected with a motor 4, the output end of the motor 4 is fixedly connected with a bidirectional threaded rod 5, the periphery of the bidirectional threaded rod 5 is provided with a jacking component, the jacking component comprises two movable blocks 6, the two movable blocks 6 are in threaded connection with the periphery of the bidirectional threaded rod 5, jacking plates 8 are rotatably connected inside the two movable blocks 6, one ends, which are respectively far away from the two movable blocks 6, of the two jacking plates 8 are rotatably connected with a jacking block 10, the top of the jacking block 10 is fixedly connected with a fixed disc 11, a first rotating rod 7 is fixedly connected inside the movable block 6, the jacking plate 8 is rotatably connected with the movable block 6 through a first rotating rod 7, two rotating rods 9 are fixedly connected to the left side and the right side of the inside of the jacking block 10, and the jacking plate 8 is rotatably connected with a second rotating rod 9 through the second rotating rod 9.
Specifically, the driving plate 2 is used for holding the bi-directional threaded rod 5 and the movable block 6, the mounting plate 3 is used for mounting the motor 4, the motor 4 provides mechanical motion and drives the power source of other parts motion, the bi-directional threaded rod 5 transmits motion to drive the movable block 6 to move, the movable block 6 is used for moving along the axis of the bi-directional threaded rod 5 and driving the jacking plate 8 to rotate, the second rotating rod 9 and the first rotating rod 7 are used for providing the function of rotating around the jacking plate 8, the jacking block 10 is used together with the jacking plate 8 to support lifting motion, in use, the motor 4 is started, the motor 4 drives the bi-directional threaded rod 5 to rotate, when the bi-directional threaded rod 5 rotates, the two movable blocks 6 move bi-directionally along the axis of the bi-directional threaded rod 5, when the two movable blocks 6 move bi-directionally, one end of the two jacking plates 8 rotate around the first rotating rod 7, and the other end of the two jacking plates rotate around the second rotating rod 9 to enable the jacking block 10 to ascend, and when the jacking block needs to descend, the motor 4 is reversely driven, and the lifting motion of the whole cavity 12 is achieved.
Working principle: when the polymer in the cavity is cleaned after the work is finished, the electrostatic adsorption disc 16 is firstly arranged at the bottom of the transverse plate 15, the pressing disc 18 is pressed, the sleeve 17 moves and presses the pressure spring 20, the push rod 23 rotates around the rotating shaft 22, the other end pushes the clamping block 24 to move the fixing block 25, then the mounting block 27 is placed in the mounting cavity 26, the clamping block 24 can be matched with the clamping groove, the pressing disc 18 is released, the pressure spring 20 is reset to generate thrust to push the sleeve 17 to move, and the clamping block 24 is embedded into the clamping groove when the sleeve 17 moves, so that the electrostatic adsorption disc 16 is fixed at the bottom of the transverse plate 15.
Subsequently, the lifting cavity 12 and the mechanical arm 13 are started, the motor 4 and the bidirectional threaded rod 5 are started to rotate, when the bidirectional threaded rod 5 rotates, the two movable blocks 6 move bidirectionally along the axis of the bidirectional threaded rod 5, one end of the two lifting plates 8 rotate around the first rotating rod 7, the other end of the two lifting plates rotate around the second rotating rod 9 and enable the lifting blocks 10 to lift, the cavity 12 at the top of the lifting blocks 10 and the mechanical arm 13 move towards the electrostatic adsorption disc 16, and then the electrostatic adsorption disc 16 is started to adsorb and clean polymers.
Finally, it should be noted that: the foregoing description of the preferred embodiments of the present utility model is not intended to be limiting, but rather, it will be apparent to those skilled in the art that the foregoing description of the preferred embodiments of the present utility model can be modified or equivalents can be substituted for some of the features thereof, and any modification, equivalent substitution, improvement or the like that is within the spirit and principles of the present utility model should be included in the scope of the present utility model.
Claims (8)
1. A vacuum chamber polymer cleaning device comprising a base (1), characterized in that: the top of base (1) is equipped with cavity (12), right side fixedly connected with arm (13) of cavity (12), base (1) top rear side fixedly connected with riser (14), riser (14) front side top fixedly connected with diaphragm (15), diaphragm (15) bottom sliding connection has static adsorption dish (16), the top fixedly connected with installation piece (27) of static adsorption dish (16), draw-in groove has all been seted up in the left and right sides of installation piece (27), inside sliding connection in diaphragm (15) front side has sleeve (17), the front side fixedly connected with of sleeve (17) presses dish (18), sleeve (17) rear side fixedly connected with pressure spring (20), the inside sliding connection of sleeve (17) has slide bar (19), sleeve (17) both sides all fixedly connected with connecting plate (21), two equal fixedly connected with pivot (22) of the one end that connecting plate (21) are far away from each other, two pivot (22) periphery are connected with sleeve (17), two push rod (23) are kept away from each other, push rod (21) are equipped with drive assembly (24) top (24) respectively.
2. A vacuum chamber polymer cleaning apparatus as claimed in claim 1, wherein: the driving assembly comprises a driving plate (2), the right side bottom of the driving plate (2) is fixedly connected with a mounting plate (3), the top of the mounting plate (3) is fixedly connected with a motor (4), the output end of the motor (4) is fixedly connected with a bidirectional threaded rod (5), and the periphery of the bidirectional threaded rod (5) is provided with a jacking assembly.
3. A vacuum chamber polymer cleaning apparatus as claimed in claim 2, wherein: the jacking assembly comprises two movable blocks (6), the two movable blocks (6) are in threaded connection with the periphery of the bidirectional threaded rod (5), the two jacking plates (8) are connected inside the movable blocks (6) in a rotating mode, the two jacking plates (8) are respectively far away from the two movable blocks (6), one end of each jacking plate is connected with one jacking block (10) in a rotating mode, and the top of each jacking block (10) is fixedly connected with a fixing disc (11).
4. A vacuum chamber polymer cleaning apparatus as claimed in claim 1, wherein: the inside of diaphragm (15) has seted up installation cavity (26), installation piece (27) are specific sliding connection is in the inside in installation cavity (26).
5. A vacuum chamber polymer cleaning apparatus as claimed in claim 1, wherein: the left side and the right side of the inside of the transverse plate (15) are fixedly connected with fixing blocks (25), and the two clamping blocks (24) are respectively and slidably connected to the periphery of the fixing blocks (25).
6. A vacuum chamber polymer cleaning apparatus according to claim 3, wherein: the inside fixedly connected with bull stick one (7) of movable block (6), jacking board (8) specifically pass through bull stick one (7) with movable block (6) rotates to be connected.
7. A vacuum chamber polymer cleaning apparatus according to claim 3, wherein: the left side and the right side of the inside of the jacking block (10) are fixedly connected with a second rotating rod (9), and the jacking plate (8) is specifically connected with the jacking block (10) in a rotating mode through the second rotating rod (9).
8. A vacuum chamber polymer cleaning apparatus as claimed in claim 1, wherein: the bottom of the base (1) is fixedly connected with a plurality of evenly distributed supporting feet (28).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323554339.XU CN221472879U (en) | 2023-12-26 | 2023-12-26 | Polymer cleaning device for vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323554339.XU CN221472879U (en) | 2023-12-26 | 2023-12-26 | Polymer cleaning device for vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221472879U true CN221472879U (en) | 2024-08-06 |
Family
ID=92350616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323554339.XU Active CN221472879U (en) | 2023-12-26 | 2023-12-26 | Polymer cleaning device for vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221472879U (en) |
-
2023
- 2023-12-26 CN CN202323554339.XU patent/CN221472879U/en active Active
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| GR01 | Patent grant | ||
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