CN221453197U - Reaction raw material supply device for vacuum coating equipment - Google Patents
Reaction raw material supply device for vacuum coating equipment Download PDFInfo
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- CN221453197U CN221453197U CN202322827880.7U CN202322827880U CN221453197U CN 221453197 U CN221453197 U CN 221453197U CN 202322827880 U CN202322827880 U CN 202322827880U CN 221453197 U CN221453197 U CN 221453197U
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- material supply
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- 239000002994 raw material Substances 0.000 title claims abstract description 59
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 53
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 10
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 239000011248 coating agent Substances 0.000 claims abstract description 30
- 238000010438 heat treatment Methods 0.000 claims abstract description 23
- 238000002309 gasification Methods 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 3
- 230000000903 blocking effect Effects 0.000 claims description 22
- 238000005485 electric heating Methods 0.000 claims description 18
- 238000007747 plating Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 abstract description 8
- 238000009825 accumulation Methods 0.000 abstract description 3
- 238000006116 polymerization reaction Methods 0.000 description 7
- 239000002131 composite material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 229920006254 polymer film Polymers 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009828 non-uniform distribution Methods 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Chemical Vapour Deposition (AREA)
Abstract
The utility model provides a reaction raw material supply device for vacuum coating equipment, which comprises a booster pump and a feed pipe, wherein the feed pipe comprises a first feed pipe positioned outside a cavity of the coating device and a second feed pipe connected with the first feed pipe and extending into the cavity, and the feed pipes are respectively provided with a heating device in a matched manner for heating and gasifying materials in the pipe; in the technical scheme, the first feeding pipe is used for primary gasification treatment of the reaction raw materials to avoid accumulation of liquid reaction raw materials; the second feeding pipe can fully gasify the reaction raw material which is subjected to preliminary gasification, so that the reaction raw material which is not completely gasified is reduced or prevented from entering the coating device.
Description
Technical Field
The utility model relates to the field of vacuum coating equipment, in particular to a reaction raw material supply device for vacuum coating equipment.
Background
The plasma polymerization coating technology widely adopted at present has the problems of smaller adhesive force, low ionization rate, poor film forming performance and the like. The plasma polymerization coating technology is widely applied to the fields of aerospace, automobile manufacturing, mechanical reworking and electronic equipment because of the advantages of low deposition temperature, higher deposition rate, excellent film forming performance and the like. Along with the green production demand, the development of the composite coating and the technology update, the plasma polymerization coating technology has good application in the field of the composite coating.
In the plasma polymerization coating process, the reaction raw material used is usually in a liquid phase, and therefore, it is necessary to gasify the reaction raw material in a liquid phase and then introduce it into a coating apparatus. When coating, the interior of the coating device is vacuumized, the raw materials gasified by the gasification equipment are sucked into the coating device through negative pressure, and then a film layer is formed on the surface of a substrate in the coating device in a plasma vapor deposition mode, so that the gasification degree influences the coating deposition effect.
The existing gasification equipment has the following defects:
Firstly, the existing gasification equipment has low gasification efficiency, and the problem of insufficient gasification of the reaction raw materials often occurs, so that the residual liquid reaction raw materials or the insufficiently gasified reaction raw materials in the gasification chamber are sucked into the coating equipment, thereby causing the problems of uneven coating thickness and even coating failure.
Secondly, after the liquid reaction raw material enters the gasification equipment, the liquid reaction raw material is directly heated and evaporated, and the reaction raw material is easy to accumulate, so that the gasification is insufficient.
Finally, the raw materials in different states are gathered in the same chamber, and the gasification outlet of the reaction raw material gas can be blocked by other raw materials, so that the problems of uneven coating thickness and even coating failure are solved.
Disclosure of utility model
The utility model aims to solve the problems of insufficient gasification of reaction raw materials, easy accumulation of the reaction raw materials and blockage of a gasification outlet of reaction raw material gas by other raw materials in the prior art, and provides a reaction raw material supply device for vacuum coating equipment,
The technical scheme adopted by the utility model is as follows: the utility model provides a reaction raw materials lets in device for vacuum composite coating equipment, includes booster pump and inlet pipe, the inlet pipe is including being located the first inlet pipe outside the coating film device chamber and the second inlet pipe that extends to in the chamber that links to each other with first inlet pipe, the inlet pipe all cooperates and is provided with the heating device that makes its gasification of intraductal material heating.
Preferably, a heating belt or a heating sleeve is arranged outside the first feeding pipe, an electric heating element is arranged on the second feeding pipe, and a feeding hole is formed in the second feeding pipe.
Preferably, the second feeding pipe is sleeved with a blocking pipe in an outer matching way, the blocking pipe is provided with slits, and the slits are a plurality of grooves or holes which are uniformly distributed or randomly distributed on the blocking pipe.
In the structure, the first feeding pipe is connected with the booster pump, the heating belt is wound on the first feeding pipe, the second feeding pipe is connected with the electric heating element, the slit of the blocking pipe and the feeding hole of the second feeding pipe are not in the same straight line, namely are not overlapped, and the interval angle between the slit and the feeding hole can be adjusted within the range of 0-180 degrees; wherein the electric heating element can adopt an electric heating plate or a resistance wire.
In the feeding process, the reaction raw materials enter a first feeding pipe through the action of a booster pump, the first feeding pipe is heated through a heating belt, so that the reaction raw materials are gasified for the first time, then the reaction raw materials gasified for the first time enter a second feeding pipe and are heated to be completely gasified through an electric heating element, and finally enter a film plating device through a feeding hole of the second feeding pipe and a slit of a blocking pipe; simultaneously, the blocking pipe can block the raw materials of other phases from blocking the feeding hole of the second feeding pipe.
In summary, according to the technical scheme, after the liquid-phase reaction raw materials are introduced into the device, the reaction raw materials are gasified through the electric heating element and introduced into the coating device, and meanwhile, the blockage of the reaction raw material gas outlet can be avoided.
The utility model has the beneficial effects that the first feeding pipe is matched with the heating device, so that primary gasification treatment can be carried out to avoid accumulation of the liquid reaction raw materials; the second feeding pipe is matched with the heating device, so that the reaction raw materials subjected to preliminary gasification can be fully gasified, and the reaction raw materials which are not completely gasified are reduced or prevented from entering the coating device;
Further, the blocking pipe can block the raw materials of other phases from blocking the feeding hole of the second feeding pipe, so that uneven thickness of the coating film and even failure of the coating film are avoided.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are required in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that it is within the scope of the utility model to one skilled in the art to obtain other drawings from these drawings without inventive faculty.
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is an exploded view of the structure of the present utility model;
FIG. 3 is an enlarged view of a portion of the heating belt of the present utility model mated with a first feed tube;
In the figure: 1-booster pump, 2-heating area, 3-first inlet pipe, 4-stop pipe, 5-stop pipe slit, 6-second inlet pipe, 7-second inlet pipe feed port, 8-electric heating element.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings, for the purpose of making the objects, technical solutions and advantages of the present utility model more apparent.
It should be noted that, in the embodiments of the present utility model, all the expressions "first" and "second" are used to distinguish two entities with the same name but different entities or different parameters, and it is noted that the "first" and "second" are only used for convenience of expression, and should not be construed as limiting the embodiments of the present utility model, and the following embodiments are not described one by one.
The terms of direction and position in the present utility model, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "top", "bottom", "side", etc., refer only to the direction or position of the drawing. Accordingly, directional and positional terms are used to illustrate and understand the utility model and are not intended to limit the scope of the utility model.
[ Example 1]
As shown in figures 1-3, the reaction raw material inlet device for the vacuum composite coating equipment can completely convert liquid reaction raw materials into gas and is introduced into the coating device, and the polymer film layer is formed by polymerization on the surface of a workpiece to be coated under the action of plasma.
Specifically, as shown in fig. 1 to 2, the liquid reaction raw material enters the first feed pipe 3 through the booster pump 1, in the first feed pipe 3, the first feed pipe 3 is heated via the heating belt 2 wound around the first feed pipe 3 so that the reaction raw material is preliminarily gasified in the first feed pipe 3, and then the reaction raw material preliminarily gasified enters the second feed pipe 6, and the second feed pipe 6 is mounted with the electric heating element 8, which electric heating element 8 is located between the second feed pipe 6 and the blocking pipe 4. The electric heating element 8 is an electric heating plate, and the heat radiated by the electric heating plate heats the reaction raw material which is subjected to preliminary gasification in the second feeding pipe 6. The initially gasified reaction raw material in the second feeding pipe 6 is further gasified under the action of the electric heating element 8, then enters the blocking pipe 4 through the feeding hole 7 of the second feeding pipe, finally enters the coating device from the slit 5 of the blocking pipe, and is polymerized on the surface of the workpiece to be coated under the action of plasma to form a polymer film.
[ Example 2]
Based on the embodiment 1, the blocking pipe slits 5 on the blocking pipe 1 can be regular, even wavy, zigzag or nonuniform and non-uniform distribution; the blocking tube 4 may also be sector-shaped or even square-shaped.
Since the blocking tube 4 surrounds the second feeding tube 6, the reaction raw material vaporized by the electric heating element 8 is required to enter the coating device through the blocking tube slit 5, and thus, in order to shorten the time for polymerization of the reaction raw material to form a polymer film on the surface of the workpiece to be coated, the blocking tube slit 5 on the blocking tube 4 may be made into various shapes.
[ Example 3]
The booster pump 1 also can be a water bath heating device, and the liquid phase reaction raw material is heated through the water bath device to be primarily gasified, and the primarily gasified reaction raw material passes through the first feeding pipe 3, so that the first feeding pipe 3 needs to be subjected to heat preservation treatment, and the primary gasified reaction raw material is prevented from being liquefied in the pipe. The heating belt 2 can also be an electromagnetic induction heating device, the first feeding pipe 3 is heated by the electromagnetic induction heating device, and the first feeding pipe 3 is heated by heat generated by induction heating to primarily gasify liquid reaction gas in the pipe.
The difference from the embodiment 1 is that the electric heating element 8 is a resistance wire, the initially gasified reaction raw material of the second feeding pipe 6 is heated by the heat radiated by the resistance wire, the reaction raw material is gasified further, the reaction raw material is introduced into the coating device, and the polymer film layer is formed by polymerization on the surface of the workpiece to be coated under the action of the plasma.
The foregoing disclosure is illustrative of the present utility model and is not to be construed as limiting the scope of the utility model, which is defined by the appended claims.
Claims (7)
1. A reaction raw material supply device for vacuum coating equipment is characterized in that: including booster pump (1) and inlet pipe, the inlet pipe is including being located the first inlet pipe (3) outside the coating film device chamber and the second inlet pipe (6) that extend to in the chamber that link to each other with first inlet pipe, the inlet pipe all cooperates and is provided with the heating device who makes its gasification of intraductal material heating.
2. The reaction raw material supply device for a vacuum coating apparatus according to claim 1, wherein: the heating device comprises a heating belt (2) or a heating sleeve arranged outside the first feeding pipe (3), and an electric heating element (8) arranged on the second feeding pipe (6).
3. The reaction raw material supply device for a vacuum coating apparatus according to claim 1, wherein: the second feeding pipe (6) is provided with a plurality of feeding holes (7) which are distributed along the second feeding pipe (6).
4. The reaction raw material supply device for a vacuum coating apparatus according to claim 1, wherein: the second feeding pipe (6) is sleeved with a blocking pipe (4) in an outer matching mode, and a slit (5) is formed in the blocking pipe.
5. A reaction raw material supply apparatus for a vacuum plating apparatus according to claim 4, wherein: the second feeding pipe (6) is provided with a plurality of feeding holes (7) which are distributed along the second feeding pipe (6), and the slit (5) is not overlapped with the feeding holes (7) of the second feeding pipe.
6. A reaction raw material supply apparatus for a vacuum plating apparatus according to claim 4, wherein: the slits (5) are a plurality of grooves or holes which are uniformly distributed or randomly distributed on the blocking pipe (4).
7. A reaction raw material supply apparatus for a vacuum plating apparatus according to claim 2, wherein: the electric heating element (8) is a resistance wire or an electric heating sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322827880.7U CN221453197U (en) | 2023-10-21 | 2023-10-21 | Reaction raw material supply device for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322827880.7U CN221453197U (en) | 2023-10-21 | 2023-10-21 | Reaction raw material supply device for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221453197U true CN221453197U (en) | 2024-08-02 |
Family
ID=92359812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322827880.7U Active CN221453197U (en) | 2023-10-21 | 2023-10-21 | Reaction raw material supply device for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221453197U (en) |
-
2023
- 2023-10-21 CN CN202322827880.7U patent/CN221453197U/en active Active
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