CN221444387U - Composite energy-saving environment control system - Google Patents
Composite energy-saving environment control system Download PDFInfo
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- CN221444387U CN221444387U CN202323137485.2U CN202323137485U CN221444387U CN 221444387 U CN221444387 U CN 221444387U CN 202323137485 U CN202323137485 U CN 202323137485U CN 221444387 U CN221444387 U CN 221444387U
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- 239000002131 composite material Substances 0.000 title claims abstract description 22
- 238000004378 air conditioning Methods 0.000 claims abstract description 35
- 230000007613 environmental effect Effects 0.000 claims abstract description 35
- 239000003507 refrigerant Substances 0.000 claims abstract description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims 1
- 238000005265 energy consumption Methods 0.000 abstract description 2
- 239000007788 liquid Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
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- Air Conditioning Control Device (AREA)
Abstract
A composite energy-saving environment control system comprises a shell unit, an air control unit, an air conditioning unit, an energy-saving unit and a ring control unit. The casing unit comprises an air inlet and an air outlet. The wind control unit comprises an air duct and a fan. The air conditioning unit comprises a refrigerant evaporator which is positioned between the air inlet and the air duct and takes a refrigerant as a working medium. The energy-saving unit comprises a water-cooled evaporator which is connected in series with the refrigerant evaporator and the working medium is water. The environmental control unit is electrically connected with the air conditioning unit and the energy saving unit and can control switching start, the air conditioning unit is started when the low-temperature low-humidity airflow is needed in the environmental condition, and the energy saving unit is started when the low-temperature low-humidity airflow is not needed in the environmental condition. The environmental control unit can alternatively start the design of the air conditioning unit or the energy saving unit, and can reduce the overall energy consumption of the system.
Description
Technical Field
The present utility model relates to an air conditioning system, and more particularly, to a composite energy-saving environmental control system suitable for semiconductor manufacturing.
Background
In order to ensure the stability of the equipment environment and improve the product yield, the general semiconductor equipment is generally provided with an environment control system for controlling the temperature and humidity of the equipment environment. An existing environmental control system comprises an air conditioning unit using a refrigerant as a working medium, wherein the air conditioning unit is provided with a compressor, a condenser, an expansion valve and a refrigerant evaporator, and can greatly reduce the temperature and dehumidify the passing air flow. However, the environment control system has no choice but to treat the air flow through the air conditioning unit no matter whether the semiconductor device needs low-temperature and low-humidity air flow, but the compressor and the refrigerant type evaporator consume very much power, and the temperature and the humidity of the air flow treated by the refrigerant type evaporator and the compressor are relatively low, so that in order to meet the use condition, the temperature and the humidity are required to be regulated by a heater and a humidifier with higher power, and the overall energy consumption is relatively increased, so that the environment control system is relatively uneconomical. Thus, the existing environmental control system design remains to be improved.
Disclosure of Invention
It is an object of the present utility model to provide a composite energy saving environmental control system that overcomes at least one of the drawbacks of the background art.
The utility model relates to a composite energy-saving environment control system, which comprises a shell unit, an air control unit, an air conditioning unit, an energy-saving unit and a ring control unit. The casing unit comprises an air inlet and an air outlet. The air control unit is arranged on the casing unit, comprises an air channel positioned between the air inlet and the air outlet, and a fan connected with the air channel and corresponding to the air outlet, and the fan generates air flow flowing into the air channel from the air inlet and then being exhausted from the air outlet. The air conditioning unit is arranged in the shell unit and comprises a refrigerant evaporator which is positioned between the air inlet and the air duct and takes a refrigerant as a working medium. The energy-saving unit is arranged in the shell unit and comprises a water-cooled evaporator which is connected in series with the refrigerant evaporator and the working medium is water. The environmental control unit is electrically connected with the air conditioning unit and the energy saving unit, and comprises a control interface for setting target temperature and humidity and a control module electrically connected with the control interface.
The utility model relates to a composite energy-saving environment control system, the environmental control unit also comprises an inlet sensor which can be used for detecting the inlet temperature and humidity of the air flow entering the air inlet, the control module compares the inlet temperature and humidity with the target temperature and humidity, and starting the air conditioning unit when the inlet temperature and humidity is larger than or equal to the target temperature and humidity, and starting the energy saving unit when the inlet temperature and humidity is smaller than the target temperature and humidity.
The composite energy-saving environment control system also comprises a compensation unit arranged on the shell unit, wherein the compensation unit comprises a heater connected with the air duct and a humidifier communicated with the air duct, the environmental control unit also comprises an outlet sensor which can be used for detecting the outlet temperature and humidity of the air flow discharged from the air outlet, and the control module compares the outlet temperature and humidity with the target temperature and humidity and controls the heater to be turned on or turned off or/and controls the humidifier to be turned on or turned off so that the outlet temperature and humidity meet the target temperature and humidity.
The air conditioning unit further comprises a compressor, a condenser and an expansion valve.
The shell unit also comprises a main carrier seat and an externally hung seat which is detachably arranged on the main carrier seat, wherein the main carrier seat is used for arranging the air control unit and the air conditioning unit, and the externally hung seat is used for arranging the energy saving unit.
The shell unit comprises a main carrier seat, and the main carrier seat is used for arranging the air control unit, the air conditioning unit and the energy saving unit.
The utility model has the beneficial effects that: the composite energy-saving environment control system is compositely provided with the air conditioning unit and the energy-saving unit, and the environmental control unit can start the air conditioning unit or the energy-saving unit according to the requirement, so that the energy-saving and manufacturing process requirements can be met.
Drawings
Other features and advantages of the utility model will be apparent from the following description of the embodiments with reference to the accompanying drawings, in which:
FIG. 1 is a schematic side view of a first embodiment of a composite energy efficient environmental control system of the present utility model;
fig. 2 is a flow block diagram of the air conditioning unit of the first embodiment;
FIG. 3 is a flow chart of the first embodiment; and
FIG. 4 is a schematic side view of a second embodiment of the composite energy efficient environmental control system of the present utility model.
Detailed Description
Before the present utility model is described in detail, it should be noted that in the following description, like elements are denoted by the same reference numerals.
Referring to fig. 1, 2 and 3, a first embodiment of the composite energy-saving environment control system of the present utility model includes a housing unit 1, a wind control unit 2, an air conditioning unit 3, an energy saving unit 4, a compensation unit 5, and a ring control unit 6.
The casing unit 1 of the first embodiment includes a main carrier 11, an external carrier 12 detachably disposed on a front side of the main carrier 11, an air inlet 13 formed on a front side of the external carrier 12, and an air outlet 14 formed on a top side of the main carrier 11. The plug-in holder 12 of the first embodiment is designed to be detachable, so that the plug-in holder can be conveniently installed in the existing environmental control system, but the implementation is not limited thereto.
The air control unit 2 is disposed on the main carrier 11 of the casing unit 1, and includes an air duct 21 located between the air inlet 13 and the air outlet 14, and a fan 22 connected to the air duct 21 and corresponding to the air outlet 14. The fan 22 can be controlled to be started to generate air flow which flows into the air duct 21 from the air inlet 13 and is discharged from the air outlet 14.
The air conditioning unit 3 is disposed on the main carrier 11 of the housing unit 1, and the working medium of the air conditioning unit 3 is a refrigerant, and includes a refrigerant evaporator 31, a compressor 32, a condenser 33, and an expansion valve 34 connected to the front side of the air duct 21. The refrigerant circulates in the refrigerant evaporator 31, the compressor 32, the condenser 33 and the expansion valve 34 in this order. The refrigerant evaporator 31 converts a low-temperature low-pressure refrigerant liquid into a low-temperature low-pressure refrigerant gas. The compressor 32 converts the low-temperature low-pressure refrigerant gas into a high-temperature high-pressure refrigerant gas. The condenser 33 converts the high-temperature and high-pressure refrigerant gas into a normal-temperature and high-pressure refrigerant liquid. The expansion valve 34 converts the refrigerant liquid at normal temperature and high pressure into a refrigerant liquid at low temperature and low pressure. When the air conditioning unit 3 is started, the air flow passing through the refrigerant evaporator 31 will be greatly reduced in temperature and dehumidified.
The energy-saving unit 4 is disposed on the external mount 12 of the housing unit 1, and the working medium of the energy-saving unit 4 is water, and includes a water-cooled evaporator 41 with the air inlet 13 disposed on the front side and the refrigerant evaporator 31 connected in series on the rear side. Of course, the energy saving unit 4 further includes a plurality of water pipes, a water storage tank, and the like, but the present utility model is not limited thereto, and thus will not be described in detail herein. When the energy-saving unit 4 is started, the air flow passing through the water-cooled evaporator 41 is cooled and dehumidified, and the temperature and humidity of the air flow are relatively higher than those of the refrigerant-type evaporator 31.
The compensation unit 5 is disposed on the main carrier 11 of the housing unit 1, and includes a heater 51 connected to the air duct 21, and a humidifier 52 connected to the air duct 21.
The environmental control unit 6 is disposed in the casing unit 1, and includes an inlet sensor 61 for detecting an inlet temperature and humidity of the air flow entering the air inlet 13, an outlet sensor 62 for detecting an outlet temperature and humidity of the air flow exiting the air outlet 14, a control interface 63 for a controller to set a target temperature and humidity and display the target temperature and humidity, and a control module 64 electrically connected to the inlet sensor 61, the outlet sensor 62 and the control interface 63. The inlet sensor 61 has an inlet temperature sensor 611 and an inlet humidity sensor 612. The outlet sensor 62 has an outlet temperature sensor 621 and an outlet humidity sensor 622. The environmental control unit 6 is further electrically connected with the air conditioning unit 3 and the energy saving unit 4, and can control the switching start of the air conditioning unit 3 or the energy saving unit 4, the air conditioning unit 3 is started when the low-temperature and low-humidity airflow is required in the environmental condition, and the energy saving unit 4 is started when the low-temperature and low-humidity airflow is not required in the environmental condition.
In actual operation, the operator sets the target temperature and humidity required by the working condition on the operation interface 63, then starts the air control unit 2 to generate the air flow, at this time, the control module 64 receives the inlet temperature and humidity information transmitted by the inlet sensor 61, compares the inlet temperature and humidity with the target temperature and humidity, if it is determined that the inlet temperature and humidity is greater than or equal to the target temperature and humidity, automatically starts the air conditioning unit 3 to greatly cool and dehumidify the air flow, and if it is determined that the inlet temperature and humidity is less than the target temperature and humidity, automatically starts the energy saving unit 4 to cool and dehumidify the air flow so as to meet the target temperature and humidity. Meanwhile, the control module 64 also receives the outlet temperature and humidity information from the outlet sensor 62, compares the outlet temperature and humidity with the target temperature and humidity, and controls the heater 51 to be turned on or off, or/and controls the humidifier 52 to be turned on or off, so that the outlet temperature and humidity meet the target temperature and humidity. It should be noted that, in terms of design, the heater 51, the inlet temperature sensing element 611 and the outlet temperature sensing element 621 may not be provided in the case where the equipment environment does not require temperature control, and the humidifier 52, the inlet humidity sensing element 612 and the outlet humidity sensing element 622 may not be provided in the case where the equipment environment does not require humidity control.
Referring to fig. 4, the construction of the second embodiment of the composite energy-saving environmental control system of the present utility model is substantially the same as that of the first embodiment, except that: the casing unit 1 of the second embodiment omits to provide the external mount (see element number 12 in fig. 1), and the main mount 11 can provide the air control unit 2, the air conditioning unit 3, the energy saving unit 4 and the compensation unit 5, so that the present utility model is applicable to installation design of a brand new machine.
In summary, the composite energy-saving environment control system of the present utility model is provided with the air conditioning unit 3 and the energy-saving unit 4, and the environmental control unit 6 selectively activates the air conditioning unit 3 or the energy-saving unit 4 according to the requirement, when the environmental condition does not need low temperature or low humidity, the energy-saving unit 4 is activated to perform the environment control, and when the environmental condition needs low temperature or low humidity, the air conditioning unit 3 is activated to perform the environment control, so the environment control system has a larger temperature control and humidity control range, and the system can automatically perform intelligent judgment and switching according to the environmental control condition during the operation, thereby saving electricity and energy in use and really achieving the purpose of the present utility model.
The foregoing is merely illustrative of the present utility model and is not intended to limit the scope of the utility model, which is defined by the appended claims and their equivalents.
Claims (6)
1. A composite energy-saving environmental control system, comprising: the air control unit is arranged on the casing unit and comprises an air channel positioned between the air inlet and the air outlet, and a fan connected with the air channel and corresponding to the air outlet, and the fan generates air flow flowing into the air channel from the air inlet and then being exhausted from the air outlet;
the method is characterized in that: the composite energy-saving environmental control system further comprises: the air conditioner comprises an air conditioner unit, an energy-saving unit and an environmental control unit, wherein the air conditioner unit is arranged in the machine shell unit and comprises a refrigerant type evaporator which is positioned between the air inlet and the air duct and takes a refrigerant as a working medium, the energy-saving unit is arranged in the machine shell unit and comprises a water-cooled evaporator which is connected in series with the refrigerant type evaporator and takes water as the working medium, and the environmental control unit is electrically connected with the air conditioner unit and the energy-saving unit and comprises an operation interface for setting a target temperature and humidity and a control module electrically connected with the operation interface.
2. The composite energy-saving environmental control system of claim 1, wherein: the environmental control unit further comprises an inlet sensor which can be used for detecting the inlet temperature and humidity of the air flow entering the air inlet, the control module compares the inlet temperature and humidity with the target temperature and humidity, the air conditioning unit is started when the inlet temperature and humidity is larger than or equal to the target temperature and humidity, and the energy saving unit is started when the inlet temperature and humidity is smaller than the target temperature and humidity.
3. The composite energy-saving environmental control system of claim 2, wherein: the composite energy-saving environment control system further comprises a compensation unit arranged on the shell unit, the compensation unit comprises a heater connected with the air duct and a humidifier communicated with the air duct, the environmental control unit further comprises an outlet sensor capable of detecting the outlet temperature and humidity of the air flow discharged out of the air outlet, and the control module compares the outlet temperature and humidity with the target temperature and humidity and controls the heater to be turned on or turned off or/and controls the humidifier to be turned on or turned off according to the outlet temperature and humidity, so that the outlet temperature and humidity meet the target temperature and humidity.
4. The composite energy-saving environmental control system of claim 1, wherein: the air conditioning unit further includes a compressor, a condenser, and an expansion valve.
5. The composite energy-saving environmental control system of claim 1, wherein: the shell unit also comprises a main carrier seat and an externally hung seat which is detachably arranged on the main carrier seat, wherein the main carrier seat is used for arranging the air control unit and the air conditioning unit, and the externally hung seat is used for arranging the energy-saving unit.
6. The composite energy-saving environmental control system of claim 1, wherein: the shell unit comprises a main carrier seat, and the main carrier seat is used for setting the air control unit, the air conditioning unit and the energy saving unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323137485.2U CN221444387U (en) | 2023-11-21 | 2023-11-21 | Composite energy-saving environment control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323137485.2U CN221444387U (en) | 2023-11-21 | 2023-11-21 | Composite energy-saving environment control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221444387U true CN221444387U (en) | 2024-07-30 |
Family
ID=92070006
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323137485.2U Active CN221444387U (en) | 2023-11-21 | 2023-11-21 | Composite energy-saving environment control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221444387U (en) |
-
2023
- 2023-11-21 CN CN202323137485.2U patent/CN221444387U/en active Active
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