CN221440861U - Air supplementing device and chemical vapor deposition furnace thereof - Google Patents
Air supplementing device and chemical vapor deposition furnace thereof Download PDFInfo
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- CN221440861U CN221440861U CN202323490205.6U CN202323490205U CN221440861U CN 221440861 U CN221440861 U CN 221440861U CN 202323490205 U CN202323490205 U CN 202323490205U CN 221440861 U CN221440861 U CN 221440861U
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- 230000001502 supplementing effect Effects 0.000 title claims abstract description 71
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 12
- 238000000151 deposition Methods 0.000 abstract description 25
- 230000008021 deposition Effects 0.000 abstract description 25
- 239000011248 coating agent Substances 0.000 abstract description 18
- 238000000576 coating method Methods 0.000 abstract description 18
- 239000007789 gas Substances 0.000 description 42
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000013049 sediment Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model belongs to the field of chemical vapor deposition, and particularly relates to an air supplementing device and a chemical vapor deposition furnace thereof, wherein the air supplementing device comprises a furnace body, an air inlet structure and an air outlet structure; the air inlet structure comprises an air supplementing pipe at the outer side of the workpiece and an air supplementing pipe at the inner side of the workpiece; the inner side air supplementing pipes of the workpieces are arranged along the stacking direction of the workpieces to be deposited, penetrate through the workpieces to be deposited in a group, and are arranged along the axis direction, and a plurality of lateral air outlet holes are formed in the inner side air supplementing pipes of the workpieces. The air supplementing device provided by the utility model can ensure that the uniformity of air in the deposition cavity is high, the quality of coating deposition on the surface of a workpiece to be deposited can be effectively improved, the quality of coating deposition on the inner wall surface of the workpiece to be deposited can be ensured, the air supplementing device is also suitable for gas phase deposition of a plurality of workpieces to be deposited in a furnace body in a stacked manner, the furnace loading capacity is further improved, and the coating quality is not influenced on the premise of improving the deposition efficiency.
Description
Technical Field
The utility model belongs to the field of chemical vapor deposition, and particularly relates to an air supplementing device and a chemical vapor deposition furnace thereof.
Background
Chemical vapor deposition is a technique in which gases introduced into a deposition chamber are chemically reacted under certain conditions to form a solid substance, which is deposited on the surface of a workpiece, thereby obtaining a coating on the surface of the workpiece.
At present, a chemical vapor deposition furnace mostly adopts one end for air inlet and the other end for air outlet. As shown in FIG. 1, the furnace body adopts a mode of air inlet and air outlet from top to bottom, air enters the furnace body 1 through an air inlet pipe 6 at the top of the furnace body 1, and is connected with a vacuum pump through an air outlet pipe 7 at the bottom of the furnace body 1. The gas flows through the deposition chamber from the gas inlet pipe 6 to the gas outlet pipe 7, and along the gas flow direction, as the gas continuously forms sediment, the concentration of the gas is reduced, the sediment generation rate is reduced, and the difference of the surface coating effect of the final product is caused.
As shown in fig. 2, the above problems can be solved by providing a lateral gas inlet pipe 8 in the middle section of the furnace body 1, but for a workpiece such as a crucible (cylindrical shape with large difference in diameter of openings at both ends), the supplementary gas mainly flows along the outer surface of the crucible and the inner wall of the deposition furnace, and it is difficult to reach the inner surface of the crucible, and the coating quality of the inner surface of the crucible is difficult to be ensured. In addition, when coating preparation is carried out simultaneously to a plurality of products, the prior art is more difficult to carry out the air supplement to the crucible inner region, and the charging quantity is greatly limited, and the production efficiency is low.
Disclosure of utility model
The utility model aims to solve the technical problem of providing the air supplementing device and the chemical vapor deposition furnace thereof, which are suitable for cylindrical workpieces to be deposited with openings at two ends, and have the advantages of uniform air, good deposition quality and high efficiency.
The utility model provides an air supplementing device which comprises a furnace body, an air inlet structure arranged at one end of the furnace body and an air outlet structure arranged at the other end of the furnace body, wherein the air inlet structure is arranged at the other end of the furnace body;
the air inlet structure comprises a workpiece outer side air supplementing pipe and a workpiece inner side air supplementing pipe;
the workpiece outer side air supplementing pipe is used for outputting gas to the outer wall of the workpiece to be deposited;
The inner side gas supplementing pipes of the workpieces are arranged along the stacking direction of the workpieces to be deposited, the inner side gas supplementing pipes of the workpieces penetrate through the workpieces to be deposited, which are stacked into a group, a plurality of lateral gas outlet holes are arranged along the axis direction of the inner side gas supplementing pipes of the workpieces, and the lateral gas outlet holes are used for outputting gas to the inner wall of the workpieces to be deposited.
Further, a plurality of lateral air outlet holes are circumferentially arranged at intervals around the axis of the air supplementing pipe on the inner side of the workpiece.
Further, the end of the air supplementing pipe on the inner side of the workpiece is sealed.
Furthermore, a plurality of air supplementing pipes on the inner side of the workpiece are arranged in parallel, and one ends of the air supplementing pipes on the inner side of the workpiece are connected through connecting pipes;
The furnace body is characterized by further comprising a main air inlet pipe connected with the connecting pipe, and the main air inlet pipe penetrates through the outer side of the furnace body to be connected with an air supply device.
Furthermore, the air supplementing pipe on the inner side of the workpiece is connected with the connecting pipe through threads, and the connecting pipe is connected with the main air inlet pipe through threads.
Furthermore, the workpiece outer side air supplementing pipes are in annular arrays or symmetrically arranged on the central axis of the furnace body, and one ends of the workpiece outer side air supplementing pipes penetrate through the outer side of the furnace body and are connected with the air supply device.
Still further, the inlet structure is arranged at the upper end of the furnace body, and the outlet structure is arranged at the lower end of the furnace body.
Further, the air outlet structure comprises a horn mouth arranged at the bottom of the furnace body and an air outlet pipe arranged at the tip part of the horn mouth;
the other end of the air outlet pipe is connected with a vacuum pump.
Still further still include the cushion that sets up between two adjacent work pieces of waiting to deposit in a plurality of stacks work pieces that wait to deposit, be provided with the space on the cushion, the gas that inputs to waiting to deposit the work piece inner wall from the side venthole flows to waiting to deposit the work piece outer wall from the space.
The utility model also provides a chemical vapor deposition furnace, which comprises the air supplementing device.
The air supplementing device provided by the utility model is particularly suitable for vapor deposition of cylindrical workpieces to be deposited with openings at two ends, and through the arrangement of the air supplementing pipe at the outer side of the workpiece and the air supplementing pipe at the inner side of the workpiece, on one hand, the uniformity of air in a deposition cavity is high, the quality of coating deposition on the surface of the workpieces to be deposited can be effectively improved, on the other hand, the quality of coating deposition on the inner wall surface of the workpieces to be deposited can be ensured, and the air supplementing device is also suitable for vapor deposition of a plurality of workpieces to be deposited which are stacked in a furnace body, so that the loading amount is improved, and the coating quality is not influenced on the premise of improving the deposition efficiency.
Drawings
FIG. 1 is a schematic diagram of one of the prior art arrangements;
FIG. 2 is a schematic diagram of a second prior art structure;
FIG. 3 is a schematic diagram of the structure of the present utility model;
FIG. 4 is a schematic diagram showing the connection of the air supply pipe, the connecting pipe and the main air inlet pipe on the inner side of the workpiece in the utility model;
FIG. 5 is a schematic structural view of the air supply pipe on the inner side of the workpiece in the utility model;
FIG. 6 is a schematic view of the structure of the workpiece to be deposited according to the present utility model, wherein the arrows indicate the inflow direction of the gas.
In the figure, 1-furnace body; 2-an air inlet structure; 21-an air supplementing pipe at the outer side of the workpiece; 22-an air supplementing pipe on the inner side of the workpiece; 221-lateral air outlet holes; 222-sealing; 23-connecting pipes; 24-a main air inlet pipe; 3-an air outlet structure; 31-flare; 32-an air outlet pipe; 4-cushion blocks; 5-a workpiece to be deposited; 6, an air inlet pipe; 7-an air outlet pipe; 8-lateral air inlet pipe.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present utility model are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
Furthermore, descriptions such as those referred to as "first," "second," and the like, are provided for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implying an order of magnitude of the indicated technical features in the present disclosure. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present utility model, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; the device can be mechanically connected, electrically connected, physically connected or wirelessly connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical solutions of the embodiments of the present utility model may be combined with each other, but it is necessary to be based on the fact that those skilled in the art can implement the technical solutions, and when the technical solutions are contradictory or cannot be implemented, the combination of the technical solutions should be considered as not existing, and not falling within the scope of protection claimed by the present utility model.
As shown in fig. 3-6, the utility model provides an air supplementing device, which comprises a furnace body 1, an air inlet structure 2 arranged at one end of the furnace body 1 and an air outlet structure 3 arranged at the other end of the furnace body 1, wherein a deposition chamber is arranged in the furnace body 1; the gas inlet structure 2 is used for introducing needed gas into the furnace body 1, so that the gas in the deposition chamber in the furnace body 1 is subjected to chemical reaction, solid matters are generated and deposited on the surface of the workpiece 5 to be deposited, and a coating is formed on the surface of the workpiece 5 to be deposited; the air outlet structure 3 is used for removing redundant air, and enables the deposition chamber to be in a pressure state required by a process, and the air inlet structure 2 and the air outlet structure 3 are arranged oppositely, so that the air can circulate through the whole deposition chamber space, the contact degree with a workpiece 5 to be deposited is further improved, and the redundant air is convenient to recover;
The air inlet structure 2 comprises a workpiece outer side air supplementing pipe 21 and a workpiece inner side air supplementing pipe 22, wherein the workpiece outer side air supplementing pipe 21 is used for outputting gas to the outer wall of the workpiece 5 to be deposited, so that a coating is deposited on the outer wall of the workpiece 5 to be deposited, and the workpiece inner side air supplementing pipe 22 is used for outputting gas to the inner wall of the workpiece 5 to be deposited, so that a coating is deposited on the inner wall of the workpiece 5 to be deposited, and the arrangement is such that the inner side and the outer side of the workpiece 5 to be deposited have a larger coating deposition effect;
The air supplementing device provided by the utility model is particularly suitable for the cylindrical workpiece 5 to be deposited with openings at two ends, so that the inner wall and the outer wall of the workpiece 5 to be deposited can be well coated and deposited;
Specifically, the workpiece inner air compensating pipe 22 is disposed along a stacking direction of the plurality of workpieces 5 to be deposited, in order to improve the deposition efficiency, a plurality of cylindrical workpieces 5 to be deposited are generally stacked, and the openings of the plurality of workpieces 5 to be deposited are connected into a straight line, at this time, the workpiece inner air compensating pipe 22 is penetratingly disposed on the openings of the plurality of workpieces 5 to be deposited, that is, the workpiece inner air compensating pipe 22 is penetratingly disposed inside the plurality of workpieces 5 to be deposited stacked into a group, at this time, the diameter of the workpiece inner air compensating pipe 22 is smaller than the minimum opening diameter of the workpieces 5 to be deposited, the workpiece inner air compensating pipe 22 is disposed with a plurality of lateral air outlet holes 221 along the axis direction, and the lateral air outlet holes 221 are used for outputting air to the inner wall of the workpieces 5 to be deposited, so as to blow air out the inner wall of the workpieces 5 to be deposited directly, thereby ensuring the deposition effect.
The air supplementing device provided by the utility model is particularly suitable for vapor deposition of cylindrical workpieces 5 to be deposited with openings at two ends, and through the arrangement of the air supplementing pipe 21 at the outer side of the workpiece and the air supplementing pipe 22 at the inner side of the workpiece, on one hand, the uniformity of air in a deposition cavity is high, the quality of coating deposition on the surface of the workpieces 5 to be deposited can be effectively improved, on the other hand, the quality of coating deposition on the inner wall surface of the workpieces 5 to be deposited can be ensured, and the air supplementing device is also suitable for vapor deposition of a plurality of the workpieces 5 to be deposited in a furnace body 1 in a stacked manner, so that the furnace loading quantity is improved, and the coating quality is not influenced on the premise of improving the deposition efficiency.
In one embodiment, the lateral air outlet holes 221 are circumferentially spaced around the axis of the air compensating tube 22 at the inner side of the workpiece, that is, the lateral air outlet holes 221 can blow air toward each direction of the inner wall of the workpiece 5 to be deposited, so as to ensure the uniformity of the air on the inner wall of the workpiece 5 to be deposited. Wherein lateral gas outlet 221 may be a circular or square through hole.
In one embodiment, the end of the gas supply pipe 22 on the inner side of the workpiece is sealed 222, so that gas is prevented from flowing out from the end of the gas supply pipe 22 on the inner side of the workpiece, and the gas outlet quantity of the lateral gas outlet hole 221 is ensured.
In one embodiment, the workpiece inner side air compensating pipes 22 are arranged in parallel, one ends of the workpiece inner side air compensating pipes 22 are connected through the connecting pipes 23, in this embodiment, a plurality of groups of stacked workpieces 5 to be deposited can be arranged in the furnace body 1, so that the deposition efficiency is further improved, one ends of the workpiece inner side air compensating pipes 22 are connected through the connecting pipes 23, the air supply to the workpiece inner side air compensating pipes 22 is facilitated, and the connection complexity of the air supply device is simplified;
the device also comprises a main air inlet pipe 24 connected with the connecting pipe 23, wherein the main air inlet pipe 24 penetrates through the outer side of the furnace body 1 and is connected with the air supply device, so that even air supply to the air supply pipes 22 on the inner sides of a plurality of workpieces can be completed through the main air inlet pipe 24, and the connection difficulty between the air supply pipes 22 on the inner sides of the plurality of workpieces and the air supply device is simplified.
In one embodiment, the workpiece inner side air supplementing pipe 22 and the connecting pipe 23 are connected through threads, the connecting pipe 23 and the main air inlet pipe 24 are connected through threads, so that the main air inlet pipe 24, the connecting pipe 23 and the workpiece inner side air supplementing pipes 22 are convenient to assemble and disassemble, the workpiece inner side air supplementing pipes 22 with different lengths and/or different lateral air outlet holes 221 can be replaced according to actual conditions to be installed, different application requirements are met, and the practicability is high.
In a preferred embodiment, the workpiece inner side air compensating tube 22 may also be a multi-joint structure for saving manufacturing cost.
In one embodiment, the workpiece outer side air supplementing pipes 21 are in an annular array or symmetrically arranged on the central axis of the furnace body 1, one ends of the workpiece outer side air supplementing pipes 21 penetrate through the outer side of the furnace body 1 and are connected with the air supply device, and thus the air supply uniformity of the workpiece outer side air supplementing pipes 21 on the outer wall of the workpiece 5 to be deposited can be guaranteed. In a preferred embodiment, the main intake pipe 24 is arranged on the central axis of the furnace body 1.
The gas supply flows of the workpiece outer side gas supply pipe 21 and the workpiece inner side gas supply pipe 22 may be uniform or non-uniform, and are specifically selected according to needs, when the gas supply flows of the workpiece outer side gas supply pipe 21 and the workpiece inner side gas supply pipe 22 are non-uniform, the two gas supply flows may be respectively connected with different gas supply devices, or may be connected with the same gas supply device, and flow valves are respectively provided for flow control.
In one embodiment, the air inlet structure 2 is disposed at the upper end of the furnace body 1, and the air outlet structure 3 is disposed at the lower end of the furnace body 1, so as to recover redundant air and avoid excessive air from being deposited on the inner wall of the furnace body 1.
In one embodiment, the air outlet structure 3 includes a bell mouth 31 disposed at the bottom of the furnace body 1 and an air outlet pipe 32 disposed at the tip of the bell mouth 31, so as to improve the air recovery effect;
the other end of the air outlet pipe 32 is connected with a vacuum pump, and the vacuum pump is used for pumping air out of the furnace body 1 so as to realize active air outlet.
In one embodiment, the air inlet device further comprises a cushion block 4 arranged between two adjacent workpieces 5 to be deposited in the plurality of stacked workpieces 5 to be deposited, a gap is arranged on the cushion block 4, in one specific embodiment, the cushion block 4 is of a circular ring structure, a notch is circumferentially arranged on the circular ring structure and used as the gap, in other embodiments, a plurality of cushion blocks 4 can be placed between the two workpieces 5 to be deposited, a gap is formed between the two adjacent cushion blocks 4, and the gas input to the inner wall of the workpiece 5 to be deposited from the lateral air outlet hole 221 flows to the outer wall of the workpiece 5 to be deposited from the gap.
In this embodiment, the workpieces 5 to be deposited are preferably cylindrical workpieces with larger difference in diameters of upper and lower openings, such as crucible structures, at this time, the large end openings of the multiple workpieces 5 to be deposited are downward arranged and separated by the cushion blocks 4, and at this time, the redundant gas entering into one workpiece 5 to be deposited flows into the outer wall of the next workpiece 5 to be deposited from the gap of the cushion block 4 below for supplementing gas, so that the utilization rate of the gas is improved, and the sedimentation effect of the coating is ensured.
The utility model also provides a chemical vapor deposition furnace, which comprises the air supplementing device.
The above description is merely the present embodiment, and is not intended to limit the present utility model. Many possible variations, modifications, or adaptations of the present utility model to its embodiments may be made by one skilled in the art without departing from the scope of the utility model. Therefore, any simple modification, equivalent variation and modification of the above embodiments according to the technical substance of the present utility model shall fall within the scope of the technical solution of the present utility model.
Claims (10)
1. The air supplementing device is characterized by comprising a furnace body (1), an air inlet structure (2) arranged at one end of the furnace body (1) and an air outlet structure (3) arranged at the other end of the furnace body (1);
The air inlet structure (2) comprises a workpiece outer side air supplementing pipe (21) and a workpiece inner side air supplementing pipe (22);
The workpiece outer side air supplementing pipe (21) is used for outputting gas to the outer wall of the workpiece (5) to be deposited;
The inside air supplementing pipe (22) of the workpiece is arranged along the stacking direction of the workpieces (5) to be deposited, the inside air supplementing pipe (22) of the workpiece penetrates through the plurality of the workpieces (5) to be deposited which are stacked into a group, the inside air supplementing pipe (22) of the workpiece is provided with a plurality of lateral air outlet holes (221) along the axial direction, and the lateral air outlet holes (221) are used for outputting air to the inner wall of the workpieces (5) to be deposited.
2. The air supplementing device according to claim 1, wherein the lateral air outlet holes (221) are arranged in a plurality at intervals in the circumferential direction around the axis of the air supplementing tube (22) on the inner side of the workpiece.
3. The air make-up device of claim 1, wherein an end seal (222) of the workpiece inner air make-up tube (22).
4. The air supplementing device according to claim 1, wherein a plurality of air supplementing pipes (22) on the inner side of the workpiece are arranged in parallel, and one ends of the plurality of air supplementing pipes (22) on the inner side of the workpiece are connected through connecting pipes (23);
The furnace body is characterized by further comprising a main air inlet pipe (24) connected with the connecting pipe (23), wherein the main air inlet pipe (24) penetrates through the outer side of the furnace body (1) and is connected with an air supply device.
5. The air supplementing device according to claim 4, wherein the workpiece inner side air supplementing tube (22) and the connecting tube (23) are connected through threads, and the connecting tube (23) and the main air inlet tube (24) are connected through threads.
6. The air supplementing device according to claim 1, wherein the workpiece outer side air supplementing pipes (21) are arranged in an annular array or symmetrically with the central axis of the furnace body (1), and one ends of the workpiece outer side air supplementing pipes (21) penetrate through the outer side of the furnace body (1) and are connected with the air supply device.
7. The air supplementing device according to any one of claims 1 to 6, wherein the air inlet structure (2) is arranged at the upper end of the furnace body (1), and the air outlet structure (3) is arranged at the lower end of the furnace body (1).
8. The air supplementing device according to claim 7, wherein the air outlet structure (3) comprises a horn mouth (31) arranged at the bottom of the furnace body (1) and an air outlet pipe (32) arranged at the tip part of the horn mouth (31);
the other end of the air outlet pipe (32) is connected with a vacuum pump.
9. The air supplementing device according to any one of claims 1 to 5, further comprising a cushion block (4) arranged between two adjacent workpieces (5) to be deposited in a plurality of stacked workpieces (5), wherein a gap is arranged on the cushion block (4), and air input to the inner wall of the workpieces (5) to be deposited from the lateral air outlet holes (221) flows from the gap to the outer wall of the workpieces (5) to be deposited.
10. A chemical vapor deposition furnace comprising the air supply device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323490205.6U CN221440861U (en) | 2023-12-20 | 2023-12-20 | Air supplementing device and chemical vapor deposition furnace thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323490205.6U CN221440861U (en) | 2023-12-20 | 2023-12-20 | Air supplementing device and chemical vapor deposition furnace thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221440861U true CN221440861U (en) | 2024-07-30 |
Family
ID=92063807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323490205.6U Active CN221440861U (en) | 2023-12-20 | 2023-12-20 | Air supplementing device and chemical vapor deposition furnace thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221440861U (en) |
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2023
- 2023-12-20 CN CN202323490205.6U patent/CN221440861U/en active Active
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