CN221350033U - Water jet verticality calibration system of water-guided laser processing equipment - Google Patents
Water jet verticality calibration system of water-guided laser processing equipment Download PDFInfo
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- CN221350033U CN221350033U CN202323399961.8U CN202323399961U CN221350033U CN 221350033 U CN221350033 U CN 221350033U CN 202323399961 U CN202323399961 U CN 202323399961U CN 221350033 U CN221350033 U CN 221350033U
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- 238000012545 processing Methods 0.000 title claims abstract description 110
- 238000010168 coupling process Methods 0.000 claims abstract description 62
- 230000008878 coupling Effects 0.000 claims abstract description 60
- 238000005859 coupling reaction Methods 0.000 claims abstract description 60
- 230000007246 mechanism Effects 0.000 claims abstract description 52
- 230000003287 optical effect Effects 0.000 claims abstract description 37
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- 238000000034 method Methods 0.000 claims description 10
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- 238000013461 design Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
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- 238000005253 cladding Methods 0.000 description 1
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Abstract
The utility model provides a water jet verticality calibration system of water-guided laser processing equipment, which comprises: the device comprises a laser generator, a spectroscope, an optical water coupling processing head, a multidirectional adjusting and balancing mechanism, an optical sensor and a control system, wherein the multidirectional adjusting and balancing mechanism is connected with the optical water coupling processing head through a plurality of orthogonal adjusting parts; the optical sensor is used for sensing a focusing point of the reflected light beam coupled by the optical-water coupling processing head; the control system controls the light-water coupling processing head to move to a preset first position and a second position after the light-water coupling processing head is lifted by a preset height from the first position, and based on the deviation between the focusing points of the first position and the second position and the focusing point, the movement of the multidirectional adjusting balance mechanism is controlled and adjusted to balance the light-water coupling processing head, so that the focusing points of the light-water coupling processing head projected to the optical sensor are overlapped, the verticality of the nozzle is adjusted accordingly, the verticality of the water beam of the coupled laser beam with the processing platform can be kept, and the processing precision is improved.
Description
Technical Field
The utility model relates to the technical field of water-guided laser processing, in particular to a water jet verticality calibration system of water-guided laser processing equipment.
Background
The basic principle of water-guided laser processing is that laser propagates in an optical fiber, a stable water column is used as a medium for laser transmission, air is used as a low-refractive-index cladding, the laser totally reflects on the surface of water, a pulse laser beam is coupled into a water jet to form water-guided laser, and the laser is transmitted to the surface of a workpiece through the water beam. The water-guided laser processing technology has the advantages of small heat affected zone, excellent cutting capability, small thermal residual stress of finished processed workpieces, few microcracks and small roughness of cut processing surfaces.
The basic process of water-guided laser processing is that a high-power laser adopts an optical fiber coupling output mode, a lens is focused on a nozzle arranged on a flat water cavity base, columnar water jet guided laser ejected from the nozzle acts on the surface of a workpiece, so that a processing method of coupling the laser and the water jet produces a kerf parallel to a kerf section, the precise processing precision can be ensured, and the processing area can be ensured to be cooled and clean.
Although the water-guided laser processing technology does not need to perform laser focusing and distance control for the system configuration which is adjusted in the processing process, the eccentricity of the nozzle can be caused after the nozzle is replaced, and the perpendicularity of the water beam relative to a processing platform of a machine tool can not be ensured, so that the processing precision is reduced. Fig. 1a shows a schematic view of the nozzle in a normal state, wherein the nozzle is kept at a vertical installation position and an angle with the processing platform, and fig. 1b shows a situation that the nozzle is eccentric due to the reasons of system assembly, system error and the like after the nozzle is replaced, and the perpendicularity of a water beam relative to the processing platform of a machine tool cannot be kept.
Disclosure of utility model
The utility model aims to provide a water jet verticality calibration system of water-guide laser processing equipment, which is used for adjusting the verticality of a nozzle through an optical automatic correction system, ensuring that the water beam coupled with a laser beam can keep the verticality with a processing platform and improving the processing precision.
According to a first aspect of the present utility model, there is provided a water jet verticality calibration system for a water-guided laser processing apparatus, comprising:
A laser generator arranged to emit a pulsed laser beam;
A beam splitter configured to be installed on an optical path of the laser generator at an angle of 45 ° to achieve half reflection and transmission of the pulse laser beam, forming a reflected beam and a transmitted beam;
The light-water coupling processing head is arranged in the light path direction of the reflected light beam and is used for coupling the reflected light beam into the water beam emitted by the nozzle to form a light-water coupling beam;
The multidirectional adjusting and balancing mechanism is arranged on the equipment rack and is connected with the light-water coupling processing head through adjusting parts arranged in multiple directions;
The optical sensor is arranged on the surface of the processing platform of the equipment and is used for sensing the focusing point of the reflected light beam coupled in the optical water coupling processing head;
The control system is used for controlling the light-water coupling processing head to move to a preset first position and a second position after the light-water coupling processing head is lifted to a preset height from the first position, controlling and adjusting the multidirectional adjusting balance mechanism based on the first position obtained by the optical sensor, focusing points corresponding to the second position and deviation among the focusing points, and driving the movement of the adjusting part to balance the light-water coupling processing head so that the focusing points projected to the optical sensor by the light-water coupling processing head coincide.
As an alternative embodiment, the calibration system further comprises:
And the camera is arranged in the light path direction of the transmitted light beam and is used for monitoring the processing process.
As an alternative embodiment, the multidirectional adjusting balance mechanism includes a plurality of adjusting portions that are disposed in pairs in the horizontal direction and are uniformly fixed to the photo-water coupling process along the outer periphery of the photo-water coupling process head;
Each adjusting part is correspondingly provided with a driving mechanism in the vertical direction, an output shaft of the driving mechanism is arranged to be capable of moving up and down along the vertical direction, and each pair of driving mechanisms can drive the corresponding adjusting part to adjust the vertical position through the contact and driving of the end part of the output shaft and the surface of the adjusting part, so that the optical water coupling processing head integrally connected with the adjusting part is subjected to angle adjustment.
As an alternative embodiment, the plurality of adjustment portions are disposed in an orthogonal distribution in the horizontal direction.
As an alternative embodiment, the driving mechanism is a linear driving mechanism arranged along a vertical direction.
As an alternative embodiment, the linear driving mechanism adopts one of a motor, a motor driver, an electric push rod, an electric sliding table, an electric screw rod, an electric cylinder and a hydraulic cylinder which move linearly.
As an alternative embodiment, the surfaces of each pair of the pair of oppositely disposed regulating portions have the same levelness.
As an alternative embodiment, the control system controls the movement of a pair of oppositely disposed drive mechanisms to be synchronously adjusted to effect correction of the opposing offset angle.
As an alternative embodiment, the control system controls the synchronous adjustment of the upward movement of the output shaft of one of a pair of oppositely disposed drive mechanisms and the downward movement of the output shaft of the other.
It should be understood that all combinations of the foregoing concepts, as well as additional concepts described in more detail below, may be considered a part of the inventive subject matter of the present disclosure as long as such concepts are not mutually inconsistent. In addition, all combinations of claimed subject matter are considered part of the disclosed inventive subject matter.
The foregoing and other aspects, embodiments, and features of the present teachings will be more fully understood from the following description, taken together with the accompanying drawings. Other additional aspects of the utility model, such as features and/or advantages of the exemplary embodiments, will be apparent from the description which follows, or may be learned by practice of the embodiments according to the teachings of the utility model.
Drawings
The drawings are not intended to be drawn to scale. In the drawings, each identical or nearly identical component that is illustrated in various figures may be represented by a like numeral. For purposes of clarity, not every component may be labeled in every drawing. Embodiments of various aspects of the utility model will now be described, by way of example, with reference to the accompanying drawings.
Fig. 1a and 1b show schematic diagrams of the nozzle maintaining the vertical installation position and angle with the processing platform and schematic diagrams of the nozzle decentration incapable of maintaining the perpendicularity of the water beam relative to the processing platform of the machine tool in a normal state respectively.
Fig. 2 is a schematic diagram of a calibration system for adjusting the water jet verticality of a water-guided laser processing apparatus according to an embodiment of the present utility model.
Fig. 3 is a schematic view of an optical water coupling processing head according to an embodiment of the present utility model projected onto a surface of a photosensor in a vertical position.
Fig. 4 is a schematic view of a photo-water coupling processing head according to an embodiment of the present utility model projected onto a surface of a photoelectric sensor in a first position and a second position after a lifting height K in case of decentration.
Fig. 5 is a schematic diagram of coordinate positions of a first focusing point and a second focusing point obtained by projecting an optical water coupling processing head to a surface of a photoelectric sensor when the optical water coupling processing head is at a first position and a second position under the eccentric condition according to the embodiment of the utility model.
Fig. 6 is a schematic diagram of a calculation principle of the first focus point and the second focus point deviation angle according to an embodiment of the present utility model.
Fig. 7 is a side view of a multidirectional adjusting balance mechanism provided in accordance with an embodiment of the present utility model.
Fig. 8 is a top view of a multidirectional adjusting balance mechanism provided according to an embodiment of the present utility model.
Fig. 9 is a schematic diagram of an adjusting principle of a multidirectional adjusting balance mechanism according to an embodiment of the present utility model.
Fig. 10 is a schematic diagram of a process for adjusting verticality based on a deviation angle according to an embodiment of the present utility model.
Detailed Description
For a better understanding of the technical content of the present utility model, specific examples are set forth below, along with the accompanying drawings.
Aspects of the utility model are described in this disclosure with reference to the drawings, in which are shown a number of illustrative embodiments. The embodiments of the present disclosure are not necessarily intended to include all aspects of the utility model. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, may be implemented in any of a number of ways, as the disclosed concepts and embodiments are not limited to any implementation. Additionally, some aspects of the disclosure may be used alone or in any suitable combination with other aspects of the disclosure.
The water jet verticality calibration system of the water guide laser processing equipment is combined with the embodiment shown in the diagrams 2-9, and aims to solve the problems that the water guide laser processing equipment (such as a machine tool and the like) is eccentric due to the fact that a nozzle of a coupling processing head is replaced, so that a water guide laser beam is focused on a processing surface and the processing precision cannot be guaranteed, the eccentricity adjustment and correction are carried out through the calibration system provided by the embodiment of the utility model, the verticality of the water guide laser beam to the processing surface is guaranteed, the processing precision defect caused by the eccentricity of the focused beam is avoided, and the quality and precision of the water guide laser processing are improved.
Referring to fig. 2, the automatic calibration system for water jet verticality of a water-guided laser processing device according to an exemplary embodiment of the present utility model includes a high-pressure water pump 1, a laser generator 2, a beam splitter 3, a camera 4, an optical water coupling processing head 5, a multidirectional adjustment balancing mechanism 6, an optical sensor 7, and a control system 8.
As shown in fig. 1, the laser generator 2 may employ a high-power laser generator configured to emit a pulsed laser beam.
The beam splitter 3 is configured to be installed on the optical path of the laser generator 1 at an angle of 45 degrees, to achieve semi-reflection and transmission of the pulse laser beam, and to form a reflected beam and a transmitted beam. As shown in fig. 1, the reflected beam path is directed downward and the transmitted beam path is aligned with the pulsed laser beam path.
And the optical-water coupling processing head 5 is arranged in the optical path direction of the reflected light beam and is used for coupling the reflected light beam into the water beam emitted by the nozzle to form an optical-water coupling beam.
As shown in fig. 1, a high-pressure water pump 1 is connected to a photo-water coupling processing head 5 for supplying a high-pressure water source and spraying out through a nozzle of the photo-water coupling processing head 5. As shown in fig. 7, reference numeral 5a denotes an emitted water beam coupled with a laser beam.
The multidirectional adjusting and balancing mechanism 6 is mounted on the frame of the water-guided laser processing apparatus, and is connected to the photo-water coupling processing head 5 through adjusting portions 6a provided in a plurality of directions, and is used for adjusting and correcting the angle (i.e., posture) of the photo-water coupling processing head 5 so as to maintain the perpendicularity with the processing platform surface at the bottom.
An optical sensor 7 is arranged on the surface of the processing platform of the equipment and is used for sensing the focus point of the reflected light beam coupled by the optical water coupling processing head.
The control system 8 can be realized by a commercial industrial personal computer and is arranged for controlling the movement of the light-water coupling processing head 5 and the multidirectional adjusting balance mechanism 6 to realize the eccentric angle correction of the light-water coupling processing head 5.
For example, in the embodiment of the present utility model, the control system 8 controls and adjusts the movement of the multidirectional adjustment balance mechanism 6 based on the deviation between the focus point and the focus point of the surface of the optical sensor 7, which are obtained by the optical sensor, by controlling the movement of the photo-water coupling processing head 5 to a preset first position and a second position raised by a predetermined height from the first position, and driving the movement of the adjustment part to balance the angle of the photo-water coupling processing head, so that the focus points projected to the optical sensor by the photo-water coupling processing head overlap, thereby realizing the eccentric correction of the coupling processing head.
As shown in fig. 2, the camera 4 may be a CCD camera, which is located in the direction of the optical path of the transmitted beam, for monitoring the quality of the processing.
In connection with the examples shown in fig. 2 and 7 to 9, the multidirectional adjusting balance mechanism 6 includes a plurality of adjusting portions 6a provided in pairs in the horizontal direction, which are described as 4 in this example, and are uniformly fixed to the photo-water coupling processing head along the outer periphery thereof, with the upper and lower surfaces of each pair of the oppositely provided adjusting portions having the same levelness.
In connection with the drawing, each adjusting portion 6a is correspondingly provided with a driving mechanism 6c in a vertical direction, an output shaft 6b of the driving mechanism 6c is provided so as to be capable of moving up and down in the vertical direction, and each pair of driving mechanisms 6c is enabled to drive the corresponding adjusting portion to perform up-and-down position adjustment by contacting and driving (e.g., opposite movement of a motor-output shaft provided oppositely) an end portion of the output shaft 6b with a surface of the adjusting portion 6a, thereby performing angle adjustment of the photo-water coupling processing head 5 integrally connected with the adjusting portion 6 a.
It will be appreciated that in embodiments of the utility model, during adjustment, the adjustment is synchronized by a pair of opposing drive mechanism-output shafts (and corresponding adjustment portions).
In a preferred embodiment, the plurality of adjustment portions are disposed in an orthogonal distribution in the horizontal direction.
In the example shown in fig. 7 to 9, the adjustment section-driving mechanism provided in correspondence with 4 directions is described as an example, and is distributed in a cross shape in the circumferential direction.
In an alternative embodiment, the driving mechanism 6c is a linear driving mechanism arranged along the vertical direction, for example, one of a motor, an electric push rod, an electric slide table, an electric screw, an electric cylinder, and a hydraulic cylinder that adopts linear motion.
In the examples of the present utility model, the motor is taken as an example, and as an alternative example, the up-and-down linear motion output of the output shaft can be realized by adopting the design of a circular linear motor with the existing design, or the rotating motor is adopted, and a direction changing mechanism is integrated in the rotating motor to convert the rotation motion output of the motor into the up-and-down linear motion of the output shaft.
As shown in connection with fig. 2, 5-7 and 10, as a preferred embodiment, the control system 8 is arranged to control the movement of the photo-water coupled processing head according to the following control logic and to drive the movement of the adjustment part to balance the photo-water coupled processing head such that the focus points of the photo-water coupled processing head projected onto the optical sensor coincide:
controlling the light-water coupling processing head to move to a preset first position, and acquiring the coordinate of a first focusing point at the first position detected by the optical sensor;
Controlling the light-water coupling processing head to lift by a preset height K, moving to a second position, and acquiring the coordinate of a second focusing point under the second position detected by the optical sensor;
Acquiring deviation between the two focusing points based on the coordinates of the first focusing point and the coordinates of the second focusing point;
Based on the obtained deviation and the distance between the pair of adjusting parts, the adjusting amounts in the X-axis and Y-axis directions are obtained, and the driving mechanisms corresponding to the pair of adjusting parts are controlled to move correspondingly.
In an embodiment of the present utility model, referring to fig. 4, 5, and 6, acquiring a deviation between two focus points based on coordinates of a first focus point and coordinates of a second focus point includes:
Acquiring an X-axis direction deviation angle theta between two focusing points:
θ=arctan(K/X);
Acquiring an X-axis direction deviation angle alpha between two focusing points;
α=arctan(K/Y);
Where x=x 2-X1,Y=Y2-Y1,(X1,Y1)、(X2,Y2) represents X, Y axis coordinates of the first focus point and X, Y axis coordinates of the second focus point, respectively.
In a further embodiment, as shown in fig. 6 and 7, obtaining the adjustment amounts in the X-axis and Y-axis directions based on the angular deviation and the distance between the pair of adjustment portions, includes:
Hx=T*sinθ;
HY=T*sinθ;
Wherein H x、HY represents the adjustment amount of the drive mechanism in the X-axis direction and the adjustment amount of the drive mechanism in the Y-axis direction, that is, the amount of movement required for the drive mechanism in the corresponding axial direction, respectively. T represents the distance between a pair of oppositely disposed adjustment portions.
Accordingly, the amount of movement of the corresponding driving mechanism, for example, the motor, can be controlled on the basis of the adjustment amounts in the X-axis and Y-axis directions.
For example, before adjustment, the output shafts of a pair of oppositely disposed motors are kept at the same projecting amount, and are brought into contact with the surface of the adjustment portion (either the upper surface or the lower surface, but should be kept uniform).
According to the foregoing calculation, the adjustment amount of the driving mechanism in the X-axis direction is obtained, and the total adjustment amount of the optical-water coupling processing head 5 in the X-axis direction is set by the opposite double motors, so that the motion amount of each single-sided motor on each side is half of the total adjustment amount, that is, t×sin θ/2, so that the driving motors rotate, and the motion amount of the output shaft of each of the pair of two motors which are oppositely arranged is t×sin θ/2, one of the two motors moves downward, and the other motor moves upward, so as to realize the opposite synchronous adjustment of the teeterboard.
Similarly, the motion control of the driving mechanism in the Y-axis direction is the same as the motion control process of the driving mechanism in the X-axis direction.
Of course, in another embodiment, a design of single-side driving adjustment may be adopted, that is, a configuration that a group of motor-output shaft-adjusting parts are disposed in the X-axis direction and the Y-axis direction, and under the scheme of adopting single-motor driving adjustment, the stroke of the driving motion required by the single motor is the total adjustment quantity, that is, H x=T*sinθ;HY =t×sin θ.
In connection with the above embodiments, we will describe an example of 4 sets of adjusting part-driving mechanisms which are distributed in opposite orthogonal directions, more specifically describing a calibration process for the water jet verticality of a water-guided laser processing apparatus, which includes the steps of:
Step 1, controlling a light-water coupling processing head to move to a preset first position, and acquiring a coordinate of a first focusing point at the first position detected by an optical sensor;
Step 2, controlling the photo-water coupling processing head to lift a preset height K, moving to a second position, and acquiring a coordinate of a second focusing point at the second position detected by the optical sensor;
step 3, acquiring deviation between the two focusing points based on the coordinates of the first focusing point and the coordinates of the second focusing point;
And 4, obtaining adjustment amounts of the driving mechanisms in the X-axis and Y-axis directions based on the deviation and the distance between the pair of adjusting parts, controlling the driving mechanisms oppositely arranged to perform corresponding movement according to the adjustment amounts, and driving the adjusting parts to adjust the up-down positions through up-down movement so as to balance the photo-water coupling processing head until focusing points projected to the optical sensor by the photo-water coupling processing head coincide, wherein the deviation in the X-axis and Y-axis directions is smaller than a preset angle deviation threshold value.
As in the foregoing embodiment, as shown in fig. 4, 5, and 6, the method for acquiring the deviation between the two focus points includes:
Acquiring an X-axis direction deviation angle theta between two focusing points:
θ=arctan(K/X);
Acquiring an X-axis direction deviation angle alpha between two focusing points;
α=arctan(K/Y);
Where x=x 2-X1,Y=Y2-Y1,(X1,Y1)、(X2,Y2) represents X, Y axis coordinates of the first focus point and X, Y axis coordinates of the second focus point, respectively.
In a further embodiment, as shown in the foregoing embodiment, referring to fig. 6 and 7, the adjustment amounts in the X-axis and Y-axis directions are obtained based on the angular deviation and the distance (horizontal distance) between the adjustment portions, and include:
Hx=T*sinθ;
HY=T*sinθ;
Wherein H x、HY represents the adjustment amounts in the X-axis and Y-axis directions, respectively.
It will be appreciated that although the output shaft shown in the drawings may take a cylindrical configuration in cross section, the diameter may generally be designed to be between 1 and 2.5 mm.
The distance between the two adjusting parts is in particular the distance between the centers of the cross-sections of the adjusting parts.
In the calibration and adjustment process described above, the preset angular deviation threshold may be preconfigured, for example, in the example of the present utility model, 0.1 ° is illustrated. It will be appreciated that the smaller the angular deviation threshold setting, the higher the accuracy of the correction.
In connection with fig. 10, it will be appreciated that in an alternative embodiment, after having completed a correction and adjustment, the control system controls the photo-water coupled processing head 5 to be reset to the first position and to determine again the updated coordinates of the first focal point (i.e. the corrected coordinates of the first focal point), then controls the photo-water coupled processing head 5 to rise by a preset height K to reach the second position, determines again the updated coordinates of the second focal point (i.e. the corrected coordinates of the second focal point), and determines again the deviation angle therefrom, and if the deviation angle (either X or Y axis) is greater than 0.1 °, calculates the movement of the adjustment control drive mechanism in the manner described above, corrects the deviation of the photo-water coupled processing head 5 by the movement of the drive mechanism-output shaft-adjustment; and resetting and detecting again in this way until the deviation angle is less than or equal to 0.1 °, and the perpendicularity correction adjustment process ends.
While the utility model has been described with reference to preferred embodiments, it is not intended to be limiting. Those skilled in the art will appreciate that various modifications and adaptations can be made without departing from the spirit and scope of the present utility model. Accordingly, the scope of the utility model is defined by the appended claims.
Claims (9)
1. A water jet verticality calibration system for a water-guided laser processing apparatus, comprising:
A laser generator arranged to emit a pulsed laser beam;
A beam splitter configured to be installed on an optical path of the laser generator at an angle of 45 ° to achieve half reflection and transmission of the pulse laser beam, forming a reflected beam and a transmitted beam;
The light-water coupling processing head is arranged in the light path direction of the reflected light beam and is used for coupling the reflected light beam into the water beam emitted by the nozzle to form a light-water coupling beam;
The multidirectional adjusting and balancing mechanism is arranged on the equipment rack and is connected with the light-water coupling processing head through adjusting parts arranged in multiple directions;
The optical sensor is arranged on the surface of the processing platform of the equipment and is used for sensing the focusing point of the reflected light beam coupled in the optical water coupling processing head;
The control system is used for controlling the light-water coupling processing head to move to a preset first position and a second position after the light-water coupling processing head is lifted to a preset height from the first position, controlling and adjusting the multidirectional adjusting balance mechanism based on the first position obtained by the optical sensor, focusing points corresponding to the second position and deviation among the focusing points, and driving the movement of the adjusting part to balance the light-water coupling processing head so that the focusing points projected to the optical sensor by the light-water coupling processing head coincide.
2. The water jet verticality calibration system of a water guide laser processing apparatus of claim 1, further comprising:
And the camera is arranged in the light path direction of the transmitted light beam and is used for monitoring the processing process.
3. The water jet verticality calibration system of a water guide laser processing apparatus according to claim 1, wherein the multidirectional adjustment balance mechanism comprises a plurality of adjustment portions which are arranged in pairs in a horizontal direction and are uniformly fixed to the photo-water coupling processing along an outer periphery of the photo-water coupling processing head;
Each adjusting part is correspondingly provided with a driving mechanism in the vertical direction, an output shaft of the driving mechanism is arranged to be capable of moving up and down along the vertical direction, and each pair of driving mechanisms can drive the corresponding adjusting part to adjust the vertical position through the contact and driving of the end part of the output shaft and the surface of the adjusting part, so that the optical water coupling processing head integrally connected with the adjusting part is subjected to angle adjustment.
4. The water jet verticality calibration system of a water guide laser processing apparatus according to claim 3, wherein said plurality of adjusting parts are disposed in a horizontal direction in an orthogonal distribution.
5. A water jet verticality calibration system of a water guide laser processing apparatus according to claim 3, wherein said driving mechanism is a linear driving mechanism arranged along a vertical direction.
6. The water jet verticality calibration system of a water guide laser processing device according to claim 5, wherein the linear driving mechanism is one of a motor, a motor driver, an electric push rod, an electric sliding table, an electric screw, an electric cylinder and a hydraulic cylinder which move linearly.
7. The water jet verticality calibration system of a water guide laser processing apparatus according to any one of claims 3 to 6, wherein surfaces of each pair of the adjusting parts disposed oppositely have the same levelness.
8. The water jet verticality calibration system of a water guide laser processing apparatus according to any one of claims 3 to 6, wherein said control system controls movement of a pair of oppositely disposed driving mechanisms to be adjusted synchronously to achieve correction of the opposite deviation angle.
9. The water jet verticality calibration system of a water guide laser processing apparatus according to claim 8, wherein said control system controls an output shaft of one of a pair of symmetrically disposed driving mechanisms to be synchronously adjusted to move upward, and an output shaft of the other one to move downward.
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