CN221325412U - Surface type contour detection device - Google Patents
Surface type contour detection device Download PDFInfo
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- CN221325412U CN221325412U CN202323138743.9U CN202323138743U CN221325412U CN 221325412 U CN221325412 U CN 221325412U CN 202323138743 U CN202323138743 U CN 202323138743U CN 221325412 U CN221325412 U CN 221325412U
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- 238000001514 detection method Methods 0.000 title claims abstract description 95
- 230000003287 optical effect Effects 0.000 claims abstract description 73
- 238000006073 displacement reaction Methods 0.000 claims abstract description 18
- 230000007246 mechanism Effects 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000001314 profilometry Methods 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The application relates to a surface profile detection device, which comprises a frame, an optical detection piece, a position detection assembly and a displacement mechanism, wherein a workbench is arranged on the frame and used for placing products; the optical detection piece is movably arranged on the frame, spaced from the product and aligned with the product; the position detection assembly is arranged on the frame and is used for detecting the position of the optical detection piece; the displacement mechanism is used for driving the optical detection piece and/or the product to move so as to scan the surface profile of the product through the optical detection piece.
Description
Technical Field
The application relates to the technical field of lens detection, in particular to a surface profile detection device.
Background
Surface topography measurement plays an extremely important role in ultra-precise detection, particularly in the semiconductor industry and in the field of optical device processing. Surface topography is currently commonly measured using stylus profilometry, but stylus profilometry is a contact measurement method that is likely to scratch the surface of a workpiece while measuring the optical surface.
Disclosure of utility model
The application provides a surface profile detection device, which is used for solving the problem that the surface of a workpiece is easily scratched in surface profile detection.
The application provides a surface profile detection device, comprising:
The machine frame is provided with a workbench, and the workbench is used for placing products;
The optical detection piece is movably arranged on the rack, is spaced from the product and is arranged in alignment;
the position detection assembly is arranged on the rack and is used for detecting the position of the optical detection piece;
And the displacement mechanism is used for driving the optical detection piece and/or the product to move so as to scan the surface profile of the product through the optical detection piece.
In one possible implementation, the workbench is provided with a positioning groove, and the product is placed in the positioning groove.
In one possible implementation manner, the workbench is detachably provided with a matching part, and the positioning groove is formed on the matching part.
In one possible implementation, the position detection assembly comprises a first reference mirror and a second reference mirror disposed at an angle, the product comprises a lens, and the optical detection element comprises a white light interferometer.
In one possible implementation, the first reference mirror is disposed toward the optical detection member and extends in the thickness direction of the product; the second reference mirror is disposed toward the product and extends along a plane perpendicular to a thickness direction of the product.
In one possible implementation, the optical detection element is disposed at an angle to the central axis of the lens.
In one possible implementation, the displacement mechanism includes a rotational drive coupled to the table to drive rotation of the product.
In one possible implementation, the output end of the rotation driving member is connected to the rotation end of the table, and the rotation end of the table corresponds to the center of the product.
In one possible implementation, the displacement mechanism includes a horizontal driving member, and a driving end of the horizontal driving member is connected to the optical detection member.
In one possible implementation, the displacement mechanism includes a lift drive, the drive end of which is connected to the horizontal drive.
Compared with the prior art, the technical scheme provided by the embodiment of the application has the following advantages:
The surface profile detection device provided by the embodiment provides the position of placing for the product through the workstation, detects the position of optical detection piece through the position detection subassembly for optical detection piece keeps the interval between with the product, and optical detection piece and product interval set up, in order to scan the product, and optical detection piece need not contact with the product when scanning can ensure the holistic integrality of product, in addition through displacement mechanism drive optical piece or product motion, make optical detection piece can remove relative product, optical detection piece can scan all positions of product, and then ensure the integrality of optical detection piece scanning product.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application.
In order to more clearly illustrate the embodiments of the application or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, and it will be obvious to a person skilled in the art that other drawings can be obtained from these drawings without inventive effort.
One or more embodiments are illustrated by way of example and not limitation in the figures of the accompanying drawings, in which like references indicate similar elements, and in which the figures of the drawings are not to be taken in a limiting sense, unless otherwise indicated.
Fig. 1 is a schematic diagram of an overall structure of a surface profile detection device according to an embodiment of the present application.
Fig. 2 is a moving path of an optical detecting element in a surface profile detecting device according to an embodiment of the present application.
Fig. 3 is a detection track in a surface profile detection device according to an embodiment of the present application.
Reference numerals illustrate:
1. a work table; 2. an optical detection member; 21. a movement track; 3. a position detection assembly; 31. a first reference mirror; 32. a second reference mirror; 4. a displacement mechanism; 41. a horizontal driving member; 42. a lifting driving member; 5. detecting a track; 6. product profile.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
The following disclosure provides many different embodiments, or examples, for implementing different structures of the application. In order to simplify the present disclosure, components and arrangements of specific examples are described below. They are, of course, merely examples and are not intended to limit the application. Furthermore, the present application may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
For ease of description, spatially relative terms, such as "inner," "outer," "lower," "upper," "above," "front," "rear," and the like, may be used herein to describe one element's or feature's relative positional relationship or movement to another element's or feature as illustrated in the figures. Such spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figure experiences a position flip or a change in attitude or a change in state of motion, then the indications of these directivities correspondingly change, for example: an element described as "under" or "beneath" another element or feature would then be oriented "over" or "above" the other element or feature. Accordingly, the example term "below … …" may include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or in other directions) and the spatial relative relationship descriptors used herein interpreted accordingly.
Referring to fig. 1 to 3, an embodiment of the present application provides a surface profile detection apparatus, including:
the machine comprises a rack, wherein a workbench 1 is arranged on the rack, and the workbench 1 is used for placing products;
The optical detection piece 2 is movably arranged on the rack, is spaced from the product and is arranged in alignment;
a position detecting component 3, which is arranged on the frame, wherein the position detecting component 3 is used for detecting the position of the optical detecting piece 2;
And the displacement mechanism 4 is used for driving the optical detection piece 2 and/or the product to move so as to scan the surface profile of the product through the optical detection piece 2.
The position that places is provided for the product through workstation 1, detect the position of optical detection spare 2 through position detection subassembly 3 for optical detection spare 2 keeps the interval between with the product, and optical detection spare 2 and product interval set up, in order to scan the product, and optical detection spare 2 need not contact with the product when scanning can ensure the holistic integrality of product, in addition drive optical spare or product motion through displacement mechanism 4, make optical detection spare 2 can remove relative product, optical detection spare 2 can scan all positions of product, and then ensure the integrality of optical detection spare 2 scanning product.
The workbench 1 is provided with a positioning groove, products are placed in the positioning groove, the products are limited through the positioning groove, after the products are replaced, the uniformity of the positions of the products can be guaranteed, the optical detection pieces 2 only need to be adjusted, and due to the uniformity of the positions of the products, the optical detection pieces 2 can be adjusted every time according to the same adjustment mode, and therefore the working efficiency is improved.
A matching part is detachably arranged on the workbench 1, and the positioning groove is formed in the matching part. The detachable setting of the positioning groove is indirectly realized by detachably setting the matching piece on the workbench 1 and forming the positioning groove on the matching piece. Through connect different matching parts on workstation 1, the shape of constant head tank on the different matching parts is different, and different constant head tanks can fix a position multiple different products, improves the extensive of device application.
The detachable connection of the matching part and the workbench 1 comprises that the matching part and the workbench 1 can be matched through screw threads, so that multiple dismounting connection is realized. Of course, in order to secure the stability of the connection, the screw may be provided with a plurality of screws. Likewise, the matching piece and the workbench 1 can be positioned and connected through a pin shaft; or snap fit by a buckle, etc.
Optionally, the workbench 1 is located on the rack, the matching part is arranged on the upper surface of the workbench 1, the positioning groove is formed in the upper surface of the matching part, the product is placed in the positioning groove from the upper side of the workbench 1 to be limited, and the optical detection part 2 is located above the product.
The position detection assembly 3 comprises a first reference mirror 31 and a second reference mirror 32 which are arranged at an included angle, the product comprises a lens, the optical detection piece 2 comprises a white light interferometer, the first reference mirror 31 and the second reference mirror 32 have smaller error precision, and the detection precision of ten nanometers can be realized, so that the surface type detection of the precision of ten nanometers can be realized, and the detection of the surface type such as a plane, a spherical surface, an aspheric surface, a free curved surface and the like can be realized by the white light interferometer.
Through the first reference mirror 31 and the second reference mirror 32 that are the contained angle setting for the position detection subassembly 3 can detect the position in two directions of optical detection spare 2 at least, and the judgement of optical detection spare 2 position is more accurate.
The first reference mirror 31 is disposed toward the optical detection member 2 and extends in the thickness direction of the product; the second reference mirror 32 is disposed toward the product and extends along a plane perpendicular to the thickness direction of the product; specifically, the first reference mirror 31 may be located at one side of the lens in the radial direction, and the second reference mirror 32 may be located above the product, where the first reference mirror 31 is used to feed back the real-time position of the optical detection element 2 in the X-axis or the Y-axis, and the second reference mirror 32 is used to feed back the real-time position of the optical detection element 2 in the Z-axis. Alternatively, in the present application, the optical detecting element 2 is moved along the X-axis direction, so the first reference mirror 31 is applied to feeding back the real-time position of the X-axis of the optical detecting element 2.
The optical detection piece 2 and the central axis of the lens form an included angle, that is, the white light interferometer is obliquely arranged, so that the detection end of the white light interferometer protrudes out of the main body part of the white light interferometer, and the first reference mirror 31 and the second reference mirror 32 can more accurately detect the position of the detection end of the white light interferometer.
The displacement mechanism 4 comprises a rotation driving piece which is connected with the workbench 1 to drive the product to rotate; the drive end of the rotation driving piece is connected with the workbench 1, the rotation of the drive end of the rotation driving piece can drive the workbench 1 to rotate, and then the product is driven to synchronously rotate, and under the condition that the product rotates, the product can be driven to move along a certain direction at the moment, so that the whole product is subjected to contour scanning by the white light interferometer. In addition, the optical detecting element 2 can be driven to move along a certain direction, so that the optical detecting element 2 can scan the surface profile of the complete product in the moving process. The rotation driving piece can rotate in a high-precision air-float mode, and therefore high-precision rotation of products is guaranteed.
The output end of the rotation driving piece is connected with the rotation end of the workbench 1, and the rotation end of the workbench 1 corresponds to the center of the product; the output end of the rotation driving piece is connected to the workbench 1 corresponding to the central axis of the lens, so that the rotation of the output end of the rotation driving piece can drive the lens to synchronously rotate along the central axis of the lens, thereby guaranteeing the overall stability of the rotation of the lens, facilitating the scanning of the optical detection piece 2, reducing the scanning time of an invalid area of the optical scanning piece and improving the working efficiency.
The displacement mechanism 4 comprises a horizontal driving piece 41, the driving end of the horizontal driving piece 41 is connected with the optical detection piece 2, the horizontal driving piece 41 can be a high-precision moving module, and the horizontal driving piece 41 is connected with the optical detection piece 2, so that the moving accuracy of the optical detection piece 2 is guaranteed. Wherein, the drive end of the horizontal driving member 41 can be detachably connected with the optical detecting member 2 through the mounting assembly, so that the edge mounts, repairs and dismounts the optical detecting member 2. Mounting assemblies include, but are not limited to, screws, clamping jaws, snaps, and the like.
Optionally, the moving path of the driving end of the horizontal driving member 41 is in any radial direction of the lens, so as to ensure that the path of the optical detection member 2 passes through any diameter of the lens, and further ensure the integrity of scanning the lens by the optical detection member 2.
Of course, the horizontal driving member 41 includes, but is not limited to, a structure in which a motor and a rack gear are engaged, a structure in which a motor and a screw are engaged, or the like.
The displacement mechanism 4 comprises a lifting driving piece 42, the driving end of the lifting driving piece 42 is connected with the horizontal driving piece 41, the movement of the driving end of the lifting driving piece 42 can drive the lifting of the horizontal driving piece 41, and then the lifting of the optical detection piece 2 is driven, so that the distance between the optical detection piece 2 and a product in the moving process is ensured, and meanwhile, the distance value between the optical detection piece 2 and the product can be adjusted, so that the optical detection piece 2 can be scanned at an optimal detection position.
In summary, in the surface profile detection device provided by the application, after a product is placed on the workbench 1, the workbench 1 is driven to rotate by the rotation driving member to drive the product to rotate, and meanwhile, the displacement mechanism 4 drives the optical detection member 2 to move from one side of the product to the other side with small step pitch XZ motion, so that the surface scanning detection of the product is completed, and the surface profile detection figure is output.
It is to be understood that the terminology used herein is for the purpose of describing particular example embodiments only, and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. The terms "comprises," "comprising," "includes," "including," and "having" are inclusive and therefore specify the presence of stated features, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and/or groups thereof. The method steps, processes, and operations described herein are not to be construed as necessarily requiring their performance in the particular order described or illustrated, unless an order of performance is explicitly stated. It should also be appreciated that additional or alternative steps may be used.
Although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the example embodiments.
The foregoing is only a specific embodiment of the application to enable those skilled in the art to understand or practice the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A surface profile detection device, comprising:
The machine frame is provided with a workbench, and the workbench is used for placing products;
The optical detection piece is movably arranged on the rack, is spaced from the product and is arranged in alignment;
the position detection assembly is arranged on the rack and is used for detecting the position of the optical detection piece;
And the displacement mechanism is used for driving the optical detection piece and/or the product to move so as to scan the surface profile of the product through the optical detection piece.
2. The surface profile detection device of claim 1, wherein the table is provided with a positioning groove, and the product is placed in the positioning groove.
3. The surface profile detection apparatus according to claim 2, wherein the table is detachably provided with a fitting member, and the positioning groove is formed in the fitting member.
4. The area profile sensing device of claim 1, wherein the position sensing assembly comprises a first reference mirror and a second reference mirror disposed at an angle, the product comprises a lens, and the optical sensing element comprises a white light interferometer.
5. The planar profile detection apparatus as claimed in claim 4, wherein the first reference mirror is disposed toward the optical detection member and extends in a thickness direction of the product; the second reference mirror is disposed toward the product and extends along a plane perpendicular to a thickness direction of the product.
6. The device of claim 4, wherein the optical detection element is disposed at an angle to a central axis of the lens.
7. The apparatus of claim 6, wherein the displacement mechanism includes a rotational drive member coupled to the table for driving the rotation of the product.
8. The apparatus according to claim 7, wherein the output end of the rotation driving member is connected to a rotating end of the table, the rotating end of the table corresponding to a center of the product.
9. The area profile sensing device of claim 6, wherein the displacement mechanism comprises a horizontal drive member, the drive end of the horizontal drive member being coupled to the optical sensing member.
10. The area profile sensing device of claim 9, wherein the displacement mechanism comprises a lift drive, the drive end of the lift drive being coupled to the horizontal drive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323138743.9U CN221325412U (en) | 2023-11-17 | 2023-11-17 | Surface type contour detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323138743.9U CN221325412U (en) | 2023-11-17 | 2023-11-17 | Surface type contour detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221325412U true CN221325412U (en) | 2024-07-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323138743.9U Active CN221325412U (en) | 2023-11-17 | 2023-11-17 | Surface type contour detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221325412U (en) |
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2023
- 2023-11-17 CN CN202323138743.9U patent/CN221325412U/en active Active
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