CN221262955U - External cavity frequency multiplication structure, fundamental frequency optical coupling device and laser - Google Patents
External cavity frequency multiplication structure, fundamental frequency optical coupling device and laser Download PDFInfo
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Abstract
An external cavity frequency multiplication structure, a fundamental frequency optical coupling device and a laser, wherein the external cavity frequency multiplication structure comprises a pair of plano-concave spherical cavity mirrors and a frequency multiplication crystal. The pair of plano-concave spherical cavity mirrors are symmetrically distributed on two sides of the frequency doubling crystal, and the two sides of the frequency doubling crystal are cut with the brewster angles which are symmetrically distributed, and the cutting surfaces of the brewster angles on the frequency doubling crystal are used for turning light paths. The Brewster angles which are symmetrically distributed are cut on two sides of the frequency doubling crystal, so that the frequency doubling crystal can be used as a nonlinear crystal to realize the frequency doubling process, complete nonlinear conversion of fundamental frequency light, and can be used as a light path direction conversion device to fold the fundamental frequency light in the cavity. The external cavity frequency doubling structure is changed from a traditional four-cavity mirror structure into a two-cavity mirror structure, two optical elements are omitted, the external cavity frequency doubling structure is effectively simplified, the frequency doubling efficiency is improved, the optical loss is reduced, and the possibility of detuning the optical elements is reduced. The external cavity frequency doubling structure greatly shortens the length of the external cavity, and is beneficial to improving the stability and compactness of the external cavity frequency doubling structure.
Description
Technical Field
The application relates to the technical field of lasers, in particular to an external cavity frequency multiplication structure, a fundamental frequency optical coupling device and a laser.
Background
The external cavity frequency doubling technology is an effective means for realizing continuous light efficient frequency doubling, and a four-mirror symmetrical folding cavity structure is generally adopted in experiments. The traditional external cavity frequency doubling structure generally adopts a four-mirror symmetrical butterfly-shaped cavity structure of 'flat-concave', and the structure is easy to cause detuning and frequency doubling efficiency reduction and output beam quality deterioration due to more discrete components and easy to be interfered by external vibration, high and low temperature and other environments in engineering application.
Disclosure of utility model
The application provides an external cavity frequency multiplication structure, a fundamental frequency optical coupling device and a laser, and mainly aims to simplify the external cavity frequency multiplication structure, reduce the external cavity frequency multiplication loss and improve the frequency multiplication efficiency of the external cavity frequency multiplication structure.
According to a first aspect of the present application, there is provided an external cavity frequency doubling structure comprising: a pair of plano-concave spherical cavity mirrors and a frequency doubling crystal; the pair of plano-concave spherical cavity mirrors are symmetrically distributed on two sides of the frequency doubling crystal, the two sides of the frequency doubling crystal are cut with brewster angles which are symmetrically distributed, and a cutting surface of the brewster angles on the frequency doubling crystal is used for turning a light path.
In one embodiment, the frequency doubling crystal further comprises a position adjusting piece, wherein the frequency doubling crystal is arranged on the position adjusting piece; the direction formed by the central connecting lines of the pair of plano-concave spherical cavity mirrors is a first direction, the position adjusting piece is used for moving the frequency doubling crystal along a second direction so as to perform point changing operation on the frequency doubling crystal, and the second direction is perpendicular to the first direction.
In one embodiment, the position adjusting element is further configured to move the frequency doubling crystal along a third direction to adjust a cavity length of the external cavity frequency doubling structure, where the first direction, the second direction, and the third direction are perpendicular to each other.
In one embodiment, the position adjustment member is a two-dimensional piezoelectric displacement table.
In one embodiment, the position adjustment member is further configured to move the frequency doubling crystal along the first direction.
In one embodiment, any one of the pair of plano-concave spherical cavity mirrors is an input coupling mirror, and the other of the pair of plano-concave spherical cavity mirrors is an output coupling mirror; the input coupling mirror is used for allowing fundamental frequency light to enter the resonant cavity and for realizing reflection of the fundamental frequency light and reflection of frequency doubling light in the resonant cavity; the output coupling mirror is used for reflecting fundamental frequency light in the resonant cavity and for carrying out output coupling on frequency doubling light in the resonant cavity.
According to a second aspect of the present application, there is provided a fundamental frequency optical coupling device comprising: a lens group and the external cavity frequency doubling structure; the lens group is used for focusing fundamental frequency light outside the resonant cavity, so that the fundamental frequency light outside the resonant cavity is matched with the laser eigenmodes in the external cavity frequency doubling structure.
In one embodiment, the center of the lens group coincides with the optical path created by the fundamental frequency source.
In one embodiment, the center of the lens group and the center of the plano-concave spherical cavity mirror are coincident with the optical path generated by the fundamental frequency source.
According to a second aspect of the present application, there is provided a laser comprising the fundamental frequency optical coupling device described above.
According to the external cavity frequency multiplication structure in the embodiment, the brewster angles which are symmetrically distributed are cut on two sides of the frequency multiplication crystal, so that the designed frequency multiplication crystal is used as a nonlinear crystal, the frequency multiplication process is realized, the nonlinear conversion of fundamental frequency light is completed, and the designed frequency multiplication crystal can be used as an optical path direction conversion device for folding the fundamental frequency light in the cavity. The external cavity frequency doubling structure is changed from a traditional four-cavity mirror structure into a two-cavity mirror structure, two optical elements are omitted, the external cavity frequency doubling structure is effectively simplified, the frequency doubling efficiency is improved, the optical loss is reduced, and the possibility of detuning the optical elements is reduced. The designed external cavity frequency multiplication structure greatly shortens the external cavity length, is beneficial to improving the stability and compactness of the external cavity frequency multiplication structure, and is also convenient for the miniaturized design of the external cavity frequency multiplication structure.
Drawings
FIG. 1 is a schematic diagram of a fundamental frequency optical coupling device according to an embodiment of the present application;
Fig. 2 is a schematic diagram of a fundamental frequency optical coupling device according to an embodiment of the application.
Reference numerals illustrate: 1. the lens comprises a plano-concave spherical cavity mirror, an input coupling mirror, an output coupling mirror, a frequency doubling crystal, a cutting surface, a position adjusting piece and a lens group.
Detailed Description
The application will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present application. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, related operations of the present application have not been shown or described in the specification in order to avoid obscuring the core portions of the present application, and may be unnecessary to persons skilled in the art from a detailed description of the related operations, which may be presented in the description and general knowledge of one skilled in the art.
Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.
The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The term "coupled" as used herein includes both direct and indirect coupling (coupling), unless otherwise indicated.
The external cavity frequency doubling technology is an effective means for realizing continuous light efficient frequency doubling, and a four-mirror symmetrical folding cavity structure is generally adopted in experiments. The structure is more in discrete components, is easily interfered by external vibration, high and low temperature and other environments in engineering application, and is extremely easy to cause detuning, lower in frequency multiplication efficiency and deteriorated in output beam quality. In order to realize high-speed precise tuning of the cavity length of the frequency-doubled outer cavity, an endoscope of the butterfly-shaped cavity is usually fixed on a high-speed piezoelectric actuator (PZT) so as to push the endoscope to move at a high speed. In the Deep Ultraviolet (DUV) band, the external cavity frequency doubling structure often needs to perform a point changing operation on the frequency doubling crystal, so that the frequency doubling crystal needs to be placed on a high-precision displacement table. Therefore, the resonant cavity of the external cavity frequency doubling structure at least needs to contain two mechanical movement elements, and the defects of complex frequency doubling external cavity mechanical structure, more movement control elements and the like exist. Finally, the traditional external cavity frequency doubling structure has large volume due to the matching requirement of the cavity modes, and is not easy for miniaturization integration.
In order to solve the problems of the conventional external cavity frequency multiplication structure, first, the present application provides a novel "three optical element" external cavity frequency multiplication structure, which only includes three optical elements: the two plano-concave spherical cavity mirrors 1 and the frequency doubling crystal 2 with the brewster angles symmetrically distributed are cut at two ends, so that the structure of a traditional frequency doubling outer cavity is effectively simplified, the optical loss and the system complexity are reduced, and meanwhile, the compactness and the miniaturization of the frequency doubling outer cavity are realized. Secondly, placing the frequency doubling crystal 2 on a two-dimensional piezoelectric displacement table, and realizing precise tuning of the cavity length through precise displacement motion in the horizontal direction; in the vertical direction, the point changing action of the frequency doubling crystal 2 can be realized by pushing at a low speed, the small-sized and compact design of the external cavity frequency doubling structure is realized, and the problems that the traditional external cavity frequency doubling structure is huge in size, more in number of discrete components and devices and non-integrated in displacement driving equipment are solved. The specific technical scheme of the external cavity frequency multiplication structure is introduced as follows:
Referring to fig. 1-2, an external cavity frequency multiplication structure according to an embodiment of the present application includes: a pair of plano-concave spherical cavity mirrors 1 and a frequency doubling crystal 2. The pair of plano-concave spherical cavity mirrors 1 are symmetrically distributed on two sides of the frequency doubling crystal 2, and the brewster angles are symmetrically distributed on two sides of the frequency doubling crystal 2, and a cutting surface 21 of the brewster angles on the frequency doubling crystal 2 is used for turning a light path.
For example, as shown in fig. 1, a pair of plano-concave spherical cavity mirrors 1 are symmetrically distributed on both sides of a frequency doubling crystal 2, and the frequency doubling crystal 2 is located above the pair of plano-concave spherical cavity mirrors 1. The setting size of the brewster angle on the frequency doubling crystal 2 depends on the specific materials adopted by the frequency doubling crystal 2, and different materials need to cut the brewster angles with different angles, so the size of the brewster angle cut on the frequency doubling crystal 2 is not particularly limited, and the size is selected according to practical situations. It should be noted that, the terms of left, right, upper, etc. in the present application are only used to describe the technical solution of the present application more clearly, and should not be construed as limiting the present application.
According to the external cavity frequency doubling structure in the above embodiment, by cutting the brewster angles symmetrically distributed on both sides of the frequency doubling crystal 2, the designed frequency doubling crystal 2 not only serves as a nonlinear crystal, but also can serve as an optical path direction conversion device for folding the fundamental frequency light in the cavity, so as to realize the frequency doubling process and complete the nonlinear conversion of the fundamental frequency light. The external cavity frequency doubling structure is changed from a traditional four-cavity mirror structure into a two-cavity mirror structure, two optical elements are omitted, the external cavity frequency doubling structure is effectively simplified, the frequency doubling efficiency is improved, the optical loss is reduced, and the possibility of detuning the optical elements is reduced. In addition, the designed outer cavity frequency doubling structure greatly shortens the outer cavity length, is beneficial to improving the stability and compactness of the outer cavity frequency doubling structure, and is also convenient for the miniaturized design of the outer cavity frequency doubling structure.
Referring to fig. 1-2, preferably, the external cavity frequency doubling structure further includes a position adjusting member 3, and the frequency doubling crystal 2 is disposed on the position adjusting member 3. The direction formed by the central connecting line of the pair of plano-concave spherical cavity mirrors 1 is a first direction, and the position adjusting piece 3 is used for moving the frequency doubling crystal 2 along a second direction so as to perform point changing operation on the frequency doubling crystal 2, wherein the second direction is perpendicular to the first direction. Taking fig. 1 as an example, the first direction is the horizontal direction in fig. 1, and the second direction is the vertical direction in fig. 1. The cavity length of the outer cavity frequency doubling structure needs to be matched with the wavelength of fundamental frequency light, so that the wavelength of the fundamental frequency light can realize constructive interference by making round trip in the cavity of the outer cavity frequency doubling structure, resonance is realized, and frequency doubling efficiency is improved. Each point or region of the frequency doubling crystal 2 has a certain service life, and the service life of the frequency doubling crystal 2 can be prolonged by arranging the position adjusting piece 3 capable of performing point changing operation on the frequency doubling crystal 2. For example, a point on the frequency doubling crystal 2 has a service life of one year, and fifty point changing operations are performed on the frequency doubling crystal 2 by the position adjusting piece 3, and the corresponding frequency doubling crystal 2 can have a service life of at least fifty years. In this case, the position adjusting member 3 may be used by performing the point changing operation on the frequency doubling crystal 2 along the second direction, and the position adjusting member 3 may be used by having a function of linearly moving along the second direction, which is not particularly limited.
More preferably, the position adjusting member 3 is further configured to move the frequency doubling crystal 2 along a third direction so as to adjust the cavity length of the external cavity frequency doubling structure, where the first direction, the second direction and the third direction are perpendicular to each other. Also taking fig. 1 as an example, when the first direction corresponds to the horizontal direction in fig. 1, the second direction corresponds to the vertical direction in fig. 1, and the third direction corresponds to the front-back direction in fig. 1. The position adjusting piece 3 can always ensure the symmetry of the outer cavity frequency doubling structure when the frequency doubling crystal 2 is moved along the third direction, the symmetry structure can provide great convenience for matching the fundamental frequency light mode with the intra-cavity intrinsic mode, the efficient coupling of the extra-cavity fundamental frequency light into the outer cavity frequency doubling structure can be realized, and the frequency doubling efficiency is effectively improved. When the position adjustment member 3 is also used to move the frequency doubling crystal 2 in the third direction, the position adjustment member 3 is at least the position adjustment member 3 capable of two-dimensional displacement adjustment. Specifically, the position adjusting member 3 is a two-dimensional piezoelectric displacement stage. In order to ensure the adjustment efficiency and the adjustment precision of the position adjusting piece 3, the position adjusting piece 3 is a two-dimensional high-precision piezoelectric displacement table.
As described above, when the external cavity frequency doubling structure is a symmetrical structure, great convenience can be provided for matching the fundamental frequency light mode with the intra-cavity eigenmode, so that the external cavity fundamental frequency light can be efficiently coupled into the external cavity frequency doubling structure, and the frequency doubling efficiency is effectively improved. Therefore, how to ensure the symmetrical distribution of the external cavity frequency multiplication structure is also important. On the one hand, the symmetry of the external cavity frequency multiplication structure can be ensured, the processing and manufacturing precision can be controlled in the process of processing and manufacturing the external cavity frequency multiplication structure, on the other hand, the later adjustment can be performed from the angle of the remedy adjustment, for example, the later adjustment can also be performed by using the position adjusting piece 3 to move the frequency multiplication crystal 2 along the first direction for remedy. It is assumed that, due to the machining precision, the pair of plano-concave spherical cavity mirrors 1 are not symmetrically distributed on both sides of the frequency doubling crystal 2, and the frequency doubling crystal 2 is relatively close to one of the pair of plano-concave spherical cavity mirrors 1, and is far from the other of the pair of plano-concave spherical cavity mirrors 1. At this time, the frequency doubling crystal 2 may be moved along the first direction by the position adjusting piece 3 so that the pair of plano-concave spherical cavity mirrors 1 are symmetrically distributed on both sides of the frequency doubling crystal 2. When the position adjustment member 3 is capable of moving the frequency doubling crystal 2 in the first direction, the second direction, and the third direction, the position adjustment member 3 capable of three-dimensional movement may be selected. The present application is herein focused on the function of the position adjusting member 3, and the specific structure is not limited as long as the position adjusting member 3 capable of three-dimensional movement can be applied in the present application, and specifically selected according to the actual situation. In other embodiments, besides the movable position adjusting member 3, a position adjusting member 3 having a rotation or deflection function may be used, and specifically selected according to actual needs.
Specifically, in the embodiment of the present application, any one of the pair of plano-concave spherical cavity mirrors 1 is an input coupling mirror 11, and the other of the pair of plano-concave spherical cavity mirrors 1 is an output coupling mirror 12. The input coupling mirror 11 is used for allowing the fundamental frequency light to enter the resonant cavity, and for realizing the reflection of the fundamental frequency light and the reflection of the frequency doubling light in the resonant cavity. The output coupling mirror 12 is used for reflecting the fundamental frequency light in the resonant cavity and for output coupling the frequency-doubled light in the resonant cavity, wherein the frequency-doubled light is generated by the fundamental frequency light through the frequency-doubled crystal 2.
The external cavity frequency multiplication structure omits two parallel plane mirrors in the traditional external cavity frequency multiplication structure, and simplifies the original structure of a '4-mirror cavity' into a '2-mirror cavity' structure. In order to realize the light path folding function of the original cavity mirror, the two end faces of the frequency doubling crystal 2 are cut into Brewster angles distributed in an axisymmetric structure, and the Brewster angles are fixed on a position adjusting piece 3 (for example, a two-dimensional high-precision piezoelectric displacement table). At this time, the frequency doubling crystal 2 of the present application has 3 roles: 1. as nonlinear crystal, the frequency multiplication process is realized, and the nonlinear conversion of laser is completed; 2. as a light path direction conversion device, folding the laser in the cavity; 3. as a cavity length fine tuning device, the precise translation of the high-precision piezoelectric displacement platform in the horizontal direction is adopted, so that the precise adjustment of the cavity length of the resonant cavity is realized. Compared with the traditional '4-mirror folding' external cavity frequency multiplication structure, the external cavity frequency multiplication structure in the application only comprises 3 optical components: two plano-concave spherical cavity mirrors 1 and one frequency doubling crystal 2 cut with the brewster angle. The external cavity frequency doubling structure formed by the '3 optical element' greatly shortens the external cavity length, so that the structure also effectively promotes the miniaturization and compactification of the external cavity frequency doubling size. And omitted optical components reduce the loss of frequency multiplication of the external cavity and improve the frequency multiplication efficiency of the laser. In addition, the frequency doubling crystal 2 is fixed on the two-dimensional high-precision piezoelectric displacement table, the fine adjustment and locking functions of the cavity length can be realized, and the point replacement of the frequency doubling crystal 2 can be effectively realized through the vertical high-precision translation of the displacement table, so that the service life of the laser is effectively prolonged. The structure effectively integrates the piezoelectric actuating device of the cavity mirror for frequency multiplication of the traditional butterfly-shaped outer cavity with the crystal displacement platform by taking the frequency multiplication crystal 2 as a precise cavity length scanning device, replaces the former piezoelectric actuator and the former displacement platform by adopting a two-dimensional high-precision piezoelectric displacement platform, effectively simplifies the outer cavity frequency multiplication structure, reduces motion control elements, and is beneficial to the miniaturized integrated design of the outer cavity frequency multiplication structure.
In another embodiment of the present application, a fundamental frequency optical coupling device is provided, including: lens group 4 and the above-mentioned external cavity frequency multiplication structure. The lens group 4 is used for focusing the fundamental frequency light outside the resonant cavity, so that the fundamental frequency light outside the resonant cavity is matched with the laser eigenmodes in the external cavity frequency doubling structure.
Specifically, the center of the lens group 4 coincides with the optical path generated by the fundamental frequency source, or the center of the lens group 4 coincides with the fundamental frequency light generated by the fundamental frequency source. Taking fig. 1 as an example, a fundamental frequency source capable of generating fundamental frequency light may be disposed on the right side of the lens group 4. When the center of the lens group 4 is coincident with the light path generated by the fundamental frequency source, the phase difference can be effectively avoided, and the normal use of the fundamental frequency optical coupling device is further ensured. The pair of plano-concave spherical cavity mirrors 1 are symmetrically distributed on two sides of the frequency doubling crystal 2 along the first direction, and in actual use, based on the structural characteristics of the plano-concave spherical cavity mirrors 1, only the central connecting line of the pair of plano-concave spherical cavity mirrors 1 is parallel to the light path generated by the fundamental frequency source. More preferably, in order to facilitate the manufacture of the external cavity frequency doubling structure or the manufacture of the fundamental frequency optical coupling device, in the embodiment of the present application, the center of the lens group 4 and the center of the concave spherical cavity mirror 1 are both coincident with the optical path generated by the fundamental frequency source.
The baseband optical coupling device designed by the application also has the advantages of the external cavity frequency doubling structure in the embodiment because the baseband optical coupling device comprises the external cavity frequency doubling structure in the embodiment, so the description is omitted here.
In yet another embodiment of the present application, a laser is provided that includes the fundamental frequency optical coupling device described above. The laser provided by the application comprises the fundamental frequency optical coupling device, so that the laser also has the advantages of the fundamental frequency optical coupling device, and therefore, the description is omitted. The designed laser is convenient for miniaturization and compact structural design, frequency doubling efficiency is improved, and service life is prolonged.
The foregoing description of the application has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the application pertains, based on the idea of the application.
Claims (10)
1. An external cavity frequency doubling structure, comprising: a pair of plano-concave spherical cavity mirrors (1) and a frequency doubling crystal (2); the pair of plano-concave spherical cavity mirrors (1) are symmetrically distributed on two sides of the frequency doubling crystal (2), the two sides of the frequency doubling crystal (2) are respectively cut with a Brewster angle which is symmetrically distributed, and a cutting surface (21) of the Brewster angle on the frequency doubling crystal (2) is used for turning a light path.
2. The external cavity frequency doubling structure according to claim 1, further comprising a position adjusting member (3), wherein the frequency doubling crystal (2) is arranged on the position adjusting member (3); the direction formed by the central connecting lines of the pair of plano-concave spherical cavity mirrors (1) is a first direction, and the position adjusting piece (3) is used for moving the frequency doubling crystal (2) along a second direction so as to perform point changing operation on the frequency doubling crystal (2), wherein the second direction is perpendicular to the first direction.
3. The external cavity frequency doubling structure according to claim 2, wherein the position adjusting member (3) is further configured to move the frequency doubling crystal (2) along a third direction to adjust a cavity length of the external cavity frequency doubling structure; the first direction, the second direction and the third direction are perpendicular to each other.
4. An external cavity frequency doubling structure according to claim 3, wherein the position adjusting member (3) is a two-dimensional piezoelectric displacement stage.
5. An external cavity frequency doubling structure according to claim 3, wherein the position adjusting member (3) is further adapted to move the frequency doubling crystal (2) along the first direction.
6. The external cavity frequency doubling structure according to claim 1, wherein any one of a pair of the plano-concave spherical cavity mirrors (1) is an input coupling mirror (11), and the other of the pair of plano-concave spherical cavity mirrors (1) is an output coupling mirror (12); the input coupling mirror (11) is used for allowing fundamental frequency light to enter the resonant cavity and for realizing reflection of the fundamental frequency light and reflection of frequency doubling light in the resonant cavity; the output coupling mirror (12) is used for reflecting the fundamental frequency light in the resonant cavity and for carrying out output coupling on the frequency doubling light in the resonant cavity.
7. A fundamental frequency optical coupling device, comprising: lens group (4) and external cavity frequency doubling structure according to any of claims 1 to 6; the lens group (4) is used for focusing fundamental frequency light outside the resonant cavity, so that the fundamental frequency light outside the resonant cavity is matched with the laser eigenmodes in the external cavity frequency doubling structure.
8. A fundamental frequency optical coupling device according to claim 7, wherein the centre of the lens group (4) coincides with the optical path created by the fundamental frequency source.
9. A fundamental frequency optical coupling device according to claim 8, wherein the centre of the lens group (4) and the centre of the plano-concave spherical cavity mirror (1) both coincide with the optical path generated by the fundamental frequency source.
10. A laser comprising a fundamental frequency optical coupling device as claimed in any one of claims 7 to 9.
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| CN202323190775.3U CN221262955U (en) | 2023-11-23 | 2023-11-23 | External cavity frequency multiplication structure, fundamental frequency optical coupling device and laser |
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