CN221252613U - Target cabinet and target calibration system - Google Patents

Abstract

The utility model discloses a target cabinet and a target calibration system, wherein the target cabinet comprises: a cabinet body; at least one supporting frame arranged in the cabinet body, wherein the supporting frame is used for placing the target; the cleaning device is arranged in the cabinet body and comprises a cleaning mechanism, a telescopic mechanism and a moving mechanism; the cleaning mechanism is arranged on the telescopic mechanism and provided with a first extending position and a first retracting position along a first direction, and the telescopic mechanism drives the cleaning mechanism to move between the first extending position and the first retracting position; the telescopic mechanism is connected with the moving mechanism, and the moving mechanism drives the telescopic mechanism to move in the second direction in the cabinet body, so that the cleaning mechanism moves in the second direction on the surface of the target to clean the target; the first direction is perpendicular to the second direction. Through setting up at the internal cleaning device of cabinet, can clear up the surface of target, can also clear up the support frame simultaneously, avoid the manual work to move out cleanly, guarantee the quality of target, improve target management efficiency.

Description

Target cabinet and target calibration system

Technical Field

The utility model relates to the technical field of solar photovoltaics, in particular to a target cabinet and a target calibration system.

Background

At present, in the testing process of the crystalline silicon solar module, the solar module standard plate is required to be used for testing and calibrating regularly, so that the integrity of the solar module standard plate is required to be ensured for ensuring the accuracy of test data, and meanwhile, the calibration standard plate is required to be stable and reliable and is not damaged and polluted. The existing standard board is mainly manually moved to a production line for periodic test, and the hidden crack dirt risk is high.

The existing target plate needs to be manually wiped, time and labor are wasted, the online storage assembly line butt joint only solves the problem of target plate cabinet storage, but the design is lacking in the aspect of cleaning maintenance, and a manual taking-out cleaning mode is adopted.

Disclosure of utility model

In view of the foregoing drawbacks or shortcomings in the prior art, it is desirable to provide a reticle cabinet and reticle calibration system that can enable maintenance of the reticle, facilitate storage, cleaning, and transportation of the reticle, and the like.

In a first aspect, the present application provides a target cabinet comprising:

a cabinet body;

The support frame is arranged in the cabinet body and is used for placing the target;

The cleaning device is arranged in the cabinet body and comprises a cleaning mechanism, a telescopic mechanism and a moving mechanism; the cleaning mechanism is arranged on the telescopic mechanism and provided with a first extending position and a first retracting position along a first direction, and the telescopic mechanism drives the cleaning mechanism to move between the first extending position and the first retracting position;

The telescopic mechanism is connected with the moving mechanism, and the moving mechanism drives the telescopic mechanism to move in the cabinet body along a second direction, so that the cleaning mechanism moves on the surface of the target along the second direction to clean the target;

The first direction is perpendicular to the second direction.

Optionally, the moving mechanism comprises at least one section of sliding rail arranged along the second direction and a sliding block in sliding connection with the sliding rail, and the telescopic mechanism is fixedly arranged on the sliding block.

Optionally, the telescopic mechanism includes first telescopic link and second telescopic link, first telescopic link is followed telescopic cover is established in the second telescopic link of first direction, cleaning mechanism sets up on the first telescopic link.

Optionally, the telescopic mechanism further comprises a connecting rod fixedly connected with the sliding block, and the second telescopic rod is telescopically arranged in the connecting rod along the first direction.

Optionally, the second telescopic link has a second extended position and a second retracted position along the first direction, the second telescopic link being movable between the second extended position and the second retracted position;

The second telescopic rod is used for contacting with the end part of the target along the second direction when the second telescopic rod extends out of the second extending position, and the moving mechanism drives the second telescopic rod to move along the second direction, so that the second telescopic rod pushes the target to move along the second direction.

Optionally, the method further comprises: the lifting device is arranged on the cabinet body and comprises a transmission mechanism and a sliding mechanism which are respectively arranged on two opposite side walls of the cabinet body, one end of the supporting frame is fixedly connected with the transmission mechanism, and the other end of the supporting frame is slidably arranged on the sliding mechanism;

When the transmission mechanism drives the supporting frame to lift, the supporting frame synchronously lifts on the sliding mechanism.

Optionally, the transmission mechanism comprises a first sprocket and a second sprocket which are oppositely arranged along the lifting direction, and a belt which is meshed with the first sprocket and the second sprocket for transmission, and the support frame is fixedly arranged on the belt.

Optionally, the transmission mechanism further comprises a first tensioning chain wheel set and a second tensioning chain wheel set which are arranged at two sides of a connecting line of the first chain wheel and the second chain wheel; the first tensioning sprocket set and the second tensioning sprocket set each comprise a plurality of tensioning sprockets arranged along the lifting direction, and each tensioning sprocket is meshed with the belt on the inner side of the belt.

Optionally, the transmission mechanism further comprises a motor, a transmission gear is arranged on an output shaft of the motor, and the transmission gear is meshed with the first sprocket and/or the second sprocket for transmission.

Optionally, the transmission mechanism further comprises a motor, wherein a transmission gear is arranged on an output shaft of the motor, and the transmission gear is positioned between the first tensioning chain wheel group and the second tensioning chain wheel group;

The tensioning chain wheels in the first tensioning chain wheel group correspond to the tensioning chain wheels in the second tensioning chain wheel group one by one, and are symmetrically arranged relative to the connecting line of the first chain wheel and the second chain wheel;

the transmission gear is respectively meshed with the two tensioning chain wheels which are symmetrically arranged.

Optionally, the cleaning mechanism is provided with a cleaning liquid ejection port.

Optionally, at least one group of air blowing devices are fixedly arranged on the cabinet body, and the air blowing devices are used for blowing air into the cabinet body.

In a second aspect, the present application provides a target calibration system comprising:

any of the target cabinets of the first aspect, provided with a target outlet thereon;

A transfer device aligned with the target exit, the transfer device for receiving and transferring the target pushed from the target exit by a second telescoping rod of the target bin in a second direction;

And the testing device is used for receiving the target conveyed by the conveying device and testing the target.

The technical scheme provided by the embodiment of the utility model can comprise the following beneficial effects:

According to the target cabinet provided by the embodiment of the application, the surface of the target can be cleaned through the cleaning device arranged in the cabinet body, and meanwhile, the supporting frame can be cleaned, so that manual removal and cleaning are avoided, the quality of the target is ensured, and the target management efficiency is improved; the telescopic mechanism arranged on the cabinet body can enable the cleaning mechanism to extend or retract, the relative position of the cleaning mechanism and the surface of the target in the first direction is adjusted, and meanwhile, the moving mechanism drives the cleaning mechanism to move along the surface of the target in the second direction, so that the whole surface of the target is cleaned; the cleaning mechanism adopts a contact type cleaning mode to clean the surface of the target plate, so that the cleaning capability of the target plate is improved.

Drawings

Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the accompanying drawings in which:

fig. 1 is a schematic structural diagram of a target cabinet according to an embodiment of the present utility model;

Fig. 2 is a schematic structural view of a cleaning device according to an embodiment of the present utility model;

fig. 3 is a schematic structural diagram of a moving mechanism according to an embodiment of the present utility model;

fig. 4 is a schematic structural view of a telescopic mechanism according to an embodiment of the present utility model;

FIG. 5 is a schematic diagram of a calibration system according to an embodiment of the present utility model;

fig. 6 is a schematic structural diagram of a conveying device according to an embodiment of the present utility model;

Fig. 7 is a schematic structural diagram of a support frame according to an embodiment of the present utility model;

fig. 8 is a schematic structural diagram of a lifting device according to an embodiment of the present utility model;

fig. 9 is a front view of another lifting device according to an embodiment of the present utility model.

In the drawing the view of the figure,

100. A cabinet body; 200. a lifting device; 300. a support frame; 400. a cleaning device; 500. a transfer device; 600. a photoelectric sensor; 700. an air blowing device;

110. a target outlet; 120. a target;

210. a transmission mechanism; 220. a sliding mechanism; 230. a motor; 261. a first set of tensioning sprockets; 262. a second tensioning sprocket set; 201. a belt; 203. an output shaft; 204. a transmission gear; 205. a first sprocket; 206. a second sprocket; 207. tensioning the chain wheel;

310. a roller; 320. a baffle; 330. a clamp;

410. A telescoping mechanism; 420. a cleaning mechanism; 430. a moving mechanism; 431. a slide rail; 432. a slide block; 433. a stop block; 401. a first telescopic rod; 402. a second telescopic rod; 403. a connecting rod; 404. cleaning liquid ejection port.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the utility model are shown in the drawings.

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.

Referring to fig. 1-2 in detail, the present application provides a target cabinet, comprising:

A cabinet 100;

At least one supporting frame 300 provided in the cabinet 100, the supporting frame 300 being used for placing the target 120;

A cleaning device 400 disposed within the cabinet 100, the cleaning device 400 including a cleaning mechanism 420, a telescoping mechanism 410, and a moving mechanism 430; the cleaning mechanism 420 is disposed on the telescopic mechanism 410, and has a first extended position and a first retracted position along the first direction X, and the telescopic mechanism 410 drives the cleaning mechanism 420 to move between the first extended position and the first retracted position;

The telescopic mechanism 410 is connected to the moving mechanism 430, and the moving mechanism 430 drives the telescopic mechanism 410 to move along the second direction Y in the cabinet 100, so that the cleaning mechanism 420 moves along the second direction Y on the surface of the target 120 to clean the target 120;

The first direction X is perpendicular to the second direction Y.

In the embodiment of the application, the cabinet body 100 is vertically placed, the shape is a cuboid, the plurality of support frames 300 are arranged in the cabinet body 100 along the vertical direction, one target 120 can be placed on each support frame 300, and the targets 120 can be of different types and can be set according to the needs. The target outlets 110 are formed on either side of the cabinet 100, and one or more target outlets 110 are provided in the present application, and one target outlet 110 is illustratively described in the present application.

In the embodiment of the application, the surface of the target 120 can be cleaned by the cleaning device 400 arranged in the cabinet body 100, and the supporting frame 300 can be cleaned at the same time, so that manual carrying out of cleaning is avoided, the quality of the target 120 is ensured, and the management efficiency of the target 120 is improved; the telescopic mechanism 410 arranged on the cabinet body 100 can enable the cleaning mechanism 420 to extend or retract, the relative position of the cleaning mechanism 420 and the surface of the target 120 in the first direction X is adjusted, and meanwhile, the moving mechanism 430 drives the cleaning mechanism 420 to move along the surface of the target 120 in the second direction Y, so that the whole surface of the target 120 is cleaned; the cleaning mechanism 420 adopts a contact type cleaning mode to clean the surface of the target 120, so as to improve the cleaning capability of the target 120.

In an embodiment of the present application, when the cleaning mechanism 420 is in the first extended position, there is a partial overlap between the cleaning mechanism 420 and the up-and-down movement stroke of the support frame 300, and when the cleaning mechanism 420 is in the first retracted position, the cleaning mechanism 420 is retracted from the up-and-down movement stroke of the support frame 300. The cleaning mechanism 420 is configured to contact the target 120 to be tested in the first extended position, and the cleaning mechanism 420 is configured to retract the target 120 in the first retracted position.

Alternatively, as shown in fig. 2 and 3, the moving mechanism 430 includes at least one section of slide rail 431 disposed along the second direction Y and a slider 432 slidably connected to the slide rail 431, and the telescopic mechanism 410 is fixedly disposed on the slider 432.

In the embodiment of the present application, the setting position of the cleaning device 400 is not limited, the cleaning device 400 may be disposed on the front and rear sides of the cabinet 100, and the moving mechanism 430 drives the cleaning mechanism 420 to move along the second direction Y, where the first direction X is a front and rear direction, for example; the second direction Y is a left-right direction, and is set according to need in different embodiments, which is not limited in the present application.

In the embodiment of the application, the moving mechanism 430 can adopt a sectional sliding rail 431, and slide on a plurality of sections of sliding rails 431 through sliding blocks 432, so that the position of the sliding blocks 432 can be clamped, the control is more accurate, the sliding rails 431 can be provided with stop blocks 433 at two ends along the second direction Y, the sliding blocks 432 move to be limited through the stop blocks 433 at the two ends, the cleaning mechanism 420 is driven to clean the target 120, and the second telescopic rod 402 can be driven to push the target 120.

Alternatively, as shown in fig. 4, the telescopic mechanism 410 includes a first telescopic rod 401 and a second telescopic rod 402, the first telescopic rod 401 is telescopically sleeved in the second telescopic rod 402 along the first direction X, and the cleaning mechanism 420 is disposed on the first telescopic rod 401.

In the embodiment of the application, the cleaning mechanism 420 is driven to move by adopting the telescopic mode, so that the occupied area of the target cabinet can be saved, and when the cleaning is required, the cleaning mechanism 420 moves to the surface of the target 120 in a telescopic mode; after cleaning is completed, the cleaning mechanism 420 is retracted to the initial position, preventing interference with the up-and-down movement of the support frame 300.

In the embodiment of the application, the cleaning mechanism 420 can be provided with a cleaning liquid box, the cleaning liquid box and the wiping cloth can be in movable patterns, the box can be taken out periodically and the wiping cloth can be disassembled and cleaned, the replacement and the cleaning of the cleaning liquid box and the wiping cloth are kept synchronous, the cyclic use period of the cleaning liquid box and the wiping cloth is about 40 times, and the design of the wiping cloth mainly aims at the glass surface of the target 120, and the calibration is not influenced when the target 120 is used for testing.

In the embodiment of the present application, the lengths of the first telescopic rod 401 and the second telescopic rod 402 are not limited, the length of the first telescopic rod 401 can be adapted to the width of the target 120, and the moving mechanism 430 drives the first telescopic rod 401 to move along the length direction of the target 120 so as to clean the surface of the target 120; the length of the second telescoping rod 402 may be less than the length of the first telescoping rod 401, the first telescoping rod 401 may be partially retracted within the second telescoping rod 402, the length of the second telescoping rod 402 may be equal to or greater than the length of the first telescoping rod 401, and the first telescoping rod 401 may be fully retracted within the second telescoping rod 402, as desired in various embodiments.

In the embodiment of the present application, the movement modes of the first telescopic rod 401 and the second telescopic rod 402 are not limited, and the first telescopic rod 401 can be moved by adopting electric, pneumatic, hydraulic or other modes. To further reduce the space occupied by the telescoping mechanism 410 in the first retracted position, the first telescoping rod 401 may also be a multi-section telescoping rod, as desired in various embodiments.

In the embodiment of the present application, the cleaning mechanism 420 may be a brush, a wiper, or the like, and in order to improve the cleaning effect, the first telescopic rod 401 may be further provided with a cleaning liquid ejection port 404, so as to improve the cleaning effect through the cleaning liquid in the contact cleaning process.

Optionally, as shown in fig. 4, the telescopic mechanism 410 further includes a connecting rod 403 fixedly connected to the moving mechanism 430 (e.g., a slider 432), and the second telescopic rod 402 is telescopically disposed within the connecting rod 403 along the first direction X.

In the embodiment of the present application, the telescopic mechanism 410 is fixedly arranged on the moving mechanism 430 through the connecting rod 403, and the second telescopic rod 402 can be partially or completely retracted into the connecting rod 403, and is arranged according to the needs in different embodiments. The second telescopic rod 402 may be moved relative to the connecting rod 403 by electric, pneumatic, hydraulic, etc.

Optionally, the second telescoping rod 402 has a second extended position and a second retracted position along the first direction X, the second telescoping rod 402 moving between the second extended position and the second retracted position.

The second telescopic rod 402 is used for contacting with the end portion of the target 120 along the second direction Y when in the second extending position, and the moving mechanism 430 drives the second telescopic rod 402 to move along the second direction Y, so that the second telescopic rod 402 pushes the target 120 to move along the second direction Y.

In the embodiment of the present application, the cleaning device 400 may assist the target 120 to move on the support 300 toward the target outlet 110 in addition to cleaning the surface of the target 120, and when the first telescopic rod 401 cleans the surface of the target 120, a contact cleaning mode is adopted, where the first telescopic rod 401 is located above the target 120, and even if the moving mechanism 430 drives the cleaning mechanism 420 to move to the end of the target 120, the first telescopic rod 401 still cannot contact with the end of the target 120. In order to push the target 120 by the same mechanism, the outer diameter of the second telescopic rod 402 is larger than that of the first telescopic rod 401, so that the second telescopic rod 402 can be in contact with the end surface of the target 120, and when the second telescopic rod 402 is driven to move along the second direction Y by the moving mechanism 430, the second telescopic rod 402 can push the target 120 to move along the second direction Y so as to be close to the target outlet 110.

In the embodiment of the present application, when the second telescopic rod 402 is in the second extended position, a partial area overlapping exists between the up-down motion travel of the support frame 300 and the second telescopic rod 402, when the second telescopic rod 402 is in the second retracted position, the second telescopic rod 402 exits the up-down motion travel of the support frame 300, and when the second telescopic rod 402 is in the second retracted position, the second telescopic rod 402 avoids the motion of the support frame 300.

In the embodiment of the present application, the cleaning mechanism 420 is disposed on the second telescopic rod 402, for example, the cleaning mechanism 420 may be a brush, a wipe, or the like, and the surface of the support frame 300 is cleaned by the second telescopic rod 402.

In the embodiment of the present application, according to the different setting positions of the cleaning device 400 in the cabinet 100, the contact positions of the second telescopic rod 402 and the target 120 are different, for example, in the present application, the cleaning device 400 is located on the front and rear sides of the cabinet 100, the target outlet 110 is located on the left and right sides of the cabinet 100, the outer surface of the second telescopic rod 402 contacts with the target 120, and the moving mechanism 430 drives the second telescopic rod 402 to move to push the target 120. When the cleaning device 400 is located on the opposite side of the cabinet 100 from the target exit 110, the second telescopic rod 402 may be used to contact the target 120, and when the second telescopic rod 402 stretches, the target 120 may be pushed to move in a direction approaching the target exit 110.

Alternatively, as shown in fig. 5-6, a conveyor 500 is provided on the exterior of the reticle cabinet at a location corresponding to the reticle outlet 110, the conveyor 500 being aligned with the support frame 300 on which the reticle 120 is positioned, the conveyor 500 being configured to receive and convey the reticle 120 moving in the second direction Y on the reticle outlet 110.

In the embodiment of the present application, the target outlet 110 may be configured as required in different embodiments, for example, by interfacing with a target detection line. In the present application, the label outlet 110 may be configured to transfer the label 120 into the label cabinet to the support 300 by the transfer device 500, and the transfer device 500 may also be configured to transfer the label 120 from the interior of the cabinet 100 to the detection device, to generate a production line, etc.

The conveying device 500 may be a conveyor belt, and the conveying manner of the conveying device 500 may be along the first direction X or the second direction Y. The target outlet 110 may be provided with a photoelectric sensor 600 for detecting whether the target 120 passes through the target outlet 110, and controlling the transfer device 500 to receive the target 120 through the photoelectric sensor 600, and controlling the cleaning device 400 to clean the target 120 through the photoelectric sensor 600.

In the embodiment of the application, in order to simplify the internal structure of the cabinet 100, the space of the cabinet 100 is saved. As shown in fig. 7, the support 300 is provided with a plurality of rollers 310 rotatably engaged with the target 120. For example, the support frame 300 includes two support bars arranged in parallel, and the roller 310 is fixed between the two support bars by a cross bar. The support 300 can adopt a passive roller 310 mode, so that the target 120 can conveniently slide on the support 300. In different embodiments, the roller 310 may be a driving roller 310, and the driving roller 310 is driven to rotate by a power component to convey the target 120 on the supporting frame 300 to the conveying device 500 through the target outlet 110, and also may recycle the target 120 on the conveying device 500 to the supporting frame 300 through the target outlet 110.

In the embodiment of the application, the end, far away from the target outlet 110, of the support frame 300 is further provided with a baffle 320, the target 120 on the support frame 300 can be limited by the baffle 320, and the baffle 320 can be made of polyurethane material so as to reduce collision.

Optionally, as shown in fig. 5, 8, and 9, the target cabinet further includes: the lifting device 200 is arranged on the cabinet body 100, the lifting device 200 comprises a transmission mechanism 210 and a sliding mechanism 220 which are respectively arranged on two opposite side walls of the cabinet body 100, one end of the supporting frame 300 is fixedly connected with the transmission mechanism 210, and the other end is slidably arranged on the sliding mechanism 220; when the transmission mechanism 210 drives the support frame 300 to lift, the support frame 300 synchronously lifts on the sliding mechanism 220.

In the embodiment of the application, the multi-layer supporting frame 300 can be arranged on the lifting device 200 arranged in the cabinet body 100, so that the targets 120 can be automatically conveyed to the targets outlet 110, the trouble of manual carrying is avoided, a certain layer of designated targets 120 can be selected, the accidental damage of the targets 120 is reduced, and the maintenance of the targets 120 is facilitated. The lifting device 200 can drive the support frame 300 to lift along the up-down direction Z, and the lifting direction in the example of the application can be the up-down direction Z, and the lifting direction can be set according to the needs in different embodiments.

In the embodiment of the present application, the lifting device 200 includes a transmission mechanism 210 and a sliding mechanism 220 that are disposed opposite to each other, one end of the supporting frame 300 is fixedly disposed on the transmission mechanism 210, the other end of the supporting frame 300 can slide on the sliding mechanism 220, and the supporting frame 300 synchronously moves on the transmission mechanism 210 and the sliding mechanism 220. For example, the transmission mechanism 210 and the sliding mechanism 220 are respectively disposed at the left and right sides of the cabinet body 100, the supporting frame 300 is horizontally disposed along the left and right direction, one end of the supporting frame 300 is fixedly disposed on the transmission mechanism 210, the other end can slide on the sliding mechanism 220, and the supporting frame 300 can move synchronously on the transmission mechanism 210 and the sliding mechanism 220 through the supporting frame 300, so that the stability of the movement of the supporting frame 300 along the up and down direction Z can be ensured. The cabinet 100 is provided with a screw button for controlling the start and stop of the elevating device 200, etc.

In the embodiment of the present application, the transmission mechanism 210 may adopt various transmission modes, such as hydraulic, pneumatic, and electric motor modes, the transmission mechanism 210 may be an active mechanism, the sliding mechanism 220 may be a passive mechanism, and the transmission mechanism 210 is used to drive the support frame 300 to slide on the sliding mechanism 220. The sliding mechanism 220 may be a guide rail, and the end of the support 300 is provided with a sliding block that can be matched with the guide rail, and the sliding block can slide on the guide rail. Of course, the sliding mechanism 220 may be an active mechanism, and may be driven in the same manner as the transmission mechanism 210, for example.

Alternatively, as shown in fig. 8, the transmission mechanism 210 includes a first sprocket 205 and a second sprocket 206 disposed opposite to each other in the lifting direction, and a belt 201 engaged with the first sprocket 205 and the second sprocket 206 for transmission, and the support frame 300 is fixedly disposed on the belt 201.

The transmission mechanism 210 further comprises a motor 230, and a transmission gear 204 is arranged on an output shaft 203 of the motor 230, and the transmission gear 204 is meshed with the first sprocket 205 and/or the second sprocket 206 for transmission.

In the embodiment of the present application, the belt 201 is engaged with the first sprocket 205 and the second sprocket 206 in the lifting direction, and the support frame 300 may be fixed to the belt 201 by means of gluing, a bolt fastener, a clamp 330, or the like. The motor 230 drives the transmission gear 204 to rotate, the transmission gear 204 is meshed with the first sprocket 205 or the second sprocket 206 to enable the first sprocket 205 or the second sprocket 206 to rotate, and the belt 201 is further meshed with the first sprocket 205 and the second sprocket 206 to realize transmission. When the belt 201 is driven on the first sprocket 205 and the second sprocket 206, the belt moves along the lifting direction, and the rotation direction of the first sprocket 205 and the second sprocket 206 is adjusted, so that the movement direction of the belt 201 can be controlled, and the support frame 300 is driven to lift. It will be appreciated that a set of motors 230 and drive gears 204 may be provided corresponding to each of the first sprocket 205 and the second sprocket 206, respectively, to improve drive efficiency and stability.

In the embodiment of the present application, the positions of the transmission mechanism 210 and the sliding mechanism 220 on the cabinet 100 are not limited, and the transmission mechanism 210 and the sliding mechanism 220 may be disposed in the cabinet 100, so as to facilitate the lifting of the support 300. In order to save the internal space of the cabinet 100, the transmission mechanism 210 and the sliding mechanism 220 may be disposed outside the cabinet 100, and the support frame 300 extends out of the cabinet 100 to be connected with the transmission mechanism 210 and the sliding mechanism 220.

Optionally, as shown in fig. 9, in one embodiment of the present application, to improve the stability of the belt 201 transmission, the transmission mechanism 210 further includes a first tension sprocket set 261 and a second tension sprocket set 262 disposed at two sides of the connection line between the first sprocket 205 and the second sprocket 206; the first tension sprocket set 261 and the second tension sprocket set 262 each include a plurality of tension sprockets 207 disposed in the lifting direction, each tension sprocket 207 being engaged with the belt 201 inside the belt 201.

In an embodiment of the present application, the belt 201 is a meshing belt 201 meshing with a first tension sprocket set 261 and a second tension sprocket set 262. The belt 201 can be tensioned and the belt 201 is driven to rotate synchronously by arranging the first tensioning sprocket set 261 and the second tensioning sprocket set 262 on two sides of the connecting line of the first sprocket 205 and the second sprocket 206, and the connecting line can be the connecting line between the axes of the first sprocket 205 and the second sprocket 206. The first tensioning sprocket set 261 and the second tensioning sprocket set 262 each include a plurality of tensioning sprockets 207, and centers of the respective plurality of tensioning chains 207 are disposed on the same line along the up-down direction Z, so that when the belt 201 is tensioned on the first tensioning sprocket set 261 and the second tensioning sprocket set 262, the surface is flat. The plurality of tensions of the first tension sprocket set 261 and the second tension sprocket set 262 are all disposed on the inner side of the belt to prevent the operator from being injured by the exposure. In order to improve the driving capability and the bearing capability of the belt 201 and ensure the stability of the movement of the support frame 300, the first tensioning sprocket set 261 and the second tensioning sprocket set 262 in the present application each include a plurality of tensioning sprockets 207, and the number of the tensioning sprockets 207 may be two, three or more, which is not limited in the present application.

In this embodiment, the transmission mechanism 210 further includes a motor 230, and a transmission gear 204 is disposed on an output shaft 203 of the motor 230, where the transmission gear 204 is located between the first tensioning sprocket set 261 and the second tensioning sprocket set 262. The tensioning sprockets 207 in the first tensioning sprocket set 261 are in one-to-one correspondence with the tensioning sprockets 207 in the second tensioning sprocket set 262 and are symmetrically arranged with respect to the line connecting the first sprocket 205 and the second sprocket 206. The transmission gear 204 is engaged with two tension sprockets 207 symmetrically arranged, respectively.

It should be understood that in the embodiment of the present application, the transmission gear 204 on the motor 230 is meshed with the tensioning sprocket 207, and the transmission gear 204 on the motor 230 may also be meshed with the first sprocket 205 and/or the second sprocket 206, which is not limited in this aspect of the present application, and may be configured according to needs in different embodiments.

It should be noted that, the transmission gear 204 is disposed between the first tensioning sprocket set 261 and the second tensioning sprocket set 262, so that the transmission gear 204 is respectively meshed with the two tensioning sprockets 207 which are in one-to-one correspondence and symmetrically disposed with respect to the connection line of the first sprocket 205 and the second sprocket 206, that is, the first tensioning sprocket set 261 and the second tensioning sprocket set 262 can be simultaneously transmitted through the transmission gear 204, so as to improve the transmission effect.

Optionally, at least one group of air blowing devices 700 is fixedly arranged on the cabinet 100, and the air blowing devices 700 are used for blowing air into the cabinet 100. The air blowing device 700 can adopt a circulating air blowing mode to provide circulating air flow to keep the temperature and humidity control in the target cabinet, and the circulating air blowing device 700 is an external power circulating air pipe.

Based on the same conception, the present application provides a reticle 120 calibration system comprising:

The target cabinet is provided with a target outlet 110;

A transfer device 500, the transfer device 500 being aligned with the reticle outlet 110, the transfer device 500 being adapted to receive and transfer the reticle 120 pushed out of the reticle outlet 110 in the second direction Y by the second telescopic rod 402 of the reticle cabinet;

And the testing device is used for receiving the target 120 transmitted by the transmitting device 500 and testing the target 120.

In the embodiment of the application, the automatic conveying of the targets 120 to calibrate the testing device is realized by arranging the targets cabinet on the testing assembly line, and meanwhile, the automatic recycling and storage of the targets 120 are realized without manual carrying, so that the labor cost is greatly saved. By utilizing the automatic cleaning function of the target cabinet, the labor force is further released, the labor cost is reduced, and the automation degree and the operation efficiency of the assembly line are improved.

It is to be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are merely for convenience in describing and simplifying the description based on the orientation or positional relationship shown in the drawings, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus are not to be construed as limiting the utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

Unless defined otherwise, technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model pertains. The terminology used herein is for the purpose of describing particular implementations only and is not intended to be limiting of the utility model. Terms such as "disposed" or the like as used herein may refer to either one element being directly attached to another element or one element being attached to another element through an intermediate member. Features described herein in one embodiment may be applied to another embodiment alone or in combination with other features unless the features are not applicable or otherwise indicated in the other embodiment.

The present utility model has been described in terms of the above embodiments, but it should be understood that the above embodiments are for purposes of illustration and description only and are not intended to limit the utility model to the embodiments described. Those skilled in the art will appreciate that many variations and modifications are possible in light of the teachings of the utility model, which variations and modifications are within the scope of the utility model as claimed.

Claims (13)

1. A target cabinet, comprising:

a cabinet body;

The support frame is arranged in the cabinet body and is used for placing the target;

The cleaning device is arranged in the cabinet body and comprises a cleaning mechanism, a telescopic mechanism and a moving mechanism; the cleaning mechanism is arranged on the telescopic mechanism and provided with a first extending position and a first retracting position along a first direction, and the telescopic mechanism drives the cleaning mechanism to move between the first extending position and the first retracting position;

The telescopic mechanism is connected with the moving mechanism, and the moving mechanism drives the telescopic mechanism to move in the cabinet body along a second direction, so that the cleaning mechanism moves on the surface of the target along the second direction to clean the target;

The first direction is perpendicular to the second direction.

2. The target cabinet of claim 1, wherein the moving mechanism comprises at least one section of sliding rail arranged along the second direction and a sliding block slidingly connected with the sliding rail, and the telescopic mechanism is fixedly arranged on the sliding block.

3. The target cabinet of claim 2, wherein the telescoping mechanism comprises a first telescoping rod and a second telescoping rod, the first telescoping rod is telescopically nested within the second telescoping rod in the first direction, and the cleaning mechanism is disposed on the first telescoping rod.

4. The target cabinet of claim 3, wherein the telescoping mechanism further comprises a connecting rod fixedly connected to the slider, the second telescoping rod being telescopically disposed within the connecting rod along the first direction.

5. The target cabinet of claim 4, wherein the second telescoping rod has a second extended position and a second retracted position along the first direction, the second telescoping rod moving between the second extended position and the second retracted position;

The second telescopic rod is used for contacting with the end part of the target along the second direction when the second telescopic rod extends out of the second extending position, and the moving mechanism drives the second telescopic rod to move along the second direction, so that the second telescopic rod pushes the target to move along the second direction.

6. The target cabinet of any one of claims 1-5, further comprising: the lifting device is arranged on the cabinet body and comprises a transmission mechanism and a sliding mechanism which are respectively arranged on two opposite side walls of the cabinet body, one end of the supporting frame is fixedly connected with the transmission mechanism, and the other end of the supporting frame is slidably arranged on the sliding mechanism;

When the transmission mechanism drives the supporting frame to lift, the supporting frame synchronously lifts on the sliding mechanism.

7. The sideboard cabinet of claim 6, wherein the transmission mechanism comprises a first sprocket and a second sprocket which are oppositely arranged along the lifting direction, and a belt which is meshed with the first sprocket and the second sprocket for transmission, and the support frame is fixedly arranged on the belt.

8. The target cabinet of claim 7, wherein the transmission mechanism further comprises a first tensioning sprocket set and a second tensioning sprocket set arranged on two sides of a line connecting the first sprocket and the second sprocket; the first tensioning sprocket set and the second tensioning sprocket set each comprise a plurality of tensioning sprockets arranged along the lifting direction, and each tensioning sprocket is meshed with the belt on the inner side of the belt.

9. The target cabinet according to claim 7 or 8, wherein the transmission mechanism further comprises a motor, and a transmission gear is arranged on an output shaft of the motor, and is meshed with the first sprocket and/or the second sprocket for transmission.

10. The target cabinet of claim 8, wherein the transmission mechanism further comprises a motor, a transmission gear is arranged on an output shaft of the motor, and the transmission gear is positioned between the first tensioning sprocket set and the second tensioning sprocket set;

The tensioning chain wheels in the first tensioning chain wheel group correspond to the tensioning chain wheels in the second tensioning chain wheel group one by one, and are symmetrically arranged relative to the connecting line of the first chain wheel and the second chain wheel;

the transmission gear is respectively meshed with the two tensioning chain wheels which are symmetrically arranged.

11. The target cabinet according to claim 1, wherein the cleaning mechanism is provided with a cleaning liquid ejection port.

12. The target cabinet according to claim 1, wherein at least one group of blowing devices is fixedly arranged on the cabinet body, and the blowing devices are used for blowing air into the cabinet body.

13. A reticle alignment system, comprising:

a target cabinet according to any one of claims 1 to 12, provided with a target outlet;

A transfer device aligned with the target exit, the transfer device for receiving and transferring the target pushed from the target exit by a second telescoping rod of the target bin in a second direction;

And the testing device is used for receiving the target conveyed by the conveying device and testing the target.