CN221238163U - Sintering furnace for high-quality aluminum nitride ceramic plate - Google Patents
Sintering furnace for high-quality aluminum nitride ceramic plate Download PDFInfo
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- CN221238163U CN221238163U CN202323209802.7U CN202323209802U CN221238163U CN 221238163 U CN221238163 U CN 221238163U CN 202323209802 U CN202323209802 U CN 202323209802U CN 221238163 U CN221238163 U CN 221238163U
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- 239000000919 ceramic Substances 0.000 title claims abstract description 31
- 238000005245 sintering Methods 0.000 title claims description 44
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 79
- 238000009413 insulation Methods 0.000 claims abstract description 72
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 23
- 229910017083 AlN Inorganic materials 0.000 claims abstract description 6
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims abstract description 6
- 230000008676 import Effects 0.000 claims abstract description 6
- 229910052757 nitrogen Inorganic materials 0.000 claims description 28
- 238000009423 ventilation Methods 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910002804 graphite Inorganic materials 0.000 claims description 13
- 239000010439 graphite Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000004321 preservation Methods 0.000 claims 10
- 239000007789 gas Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
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Abstract
The utility model provides a high quality aluminium nitride ceramic plate fritting furnace includes stove outer covering, furnace gate, first thermal insulation layer, second thermal insulation layer, high temperature resistant supporting layer, one side of stove outer covering and furnace gate articulates, first thermal insulation layer, second thermal insulation layer, high temperature resistant supporting layer is from outside to inside set gradually in the stove outer covering, be equipped with the preheating chamber between stove outer covering and the first thermal insulation layer, the lateral wall of stove outer covering is equipped with the nitrogen gas import, nitrogen gas import and preheating chamber intercommunication, in order to heat nitrogen gas, the lateral wall of first thermal insulation layer is equipped with a plurality of ventilative grooves, ventilative groove extends to the outer wall of second thermal insulation layer from the outer wall of first thermal insulation layer, the second thermal insulation layer includes a plurality of heat insulating strips, the heat insulating strip is closely arranged, when the furnace gate is closed, furnace gate and high temperature resistant supporting layer form the furnace of sintered aluminium nitride, preheat chamber and second thermal insulation layer between through ventilative groove intercommunication, a plurality of through-holes of high temperature resistant supporting layer evenly distributed to make nitrogen gas get into furnace.
Description
Technical Field
The utility model relates to the technical field of sintering furnaces, in particular to a high-quality aluminum nitride ceramic plate sintering furnace.
Background
In the production process of aluminum nitride ceramic products, sintering is used as an aluminum nitride core process, so that the quality of aluminum nitride substrates is directly determined, and if the quality is not well controlled, the problems of substrate sintering, warping, cracking, color change, unqualified heat conductivity and the like are easily caused. And high quality sintering furnaces and good temperature uniformity are more critical factors in determining sintering quality. The aluminum nitride ceramic requires the addition of nitrogen as a shielding gas and a reaction gas during sintering. The temperature of the introduced nitrogen is lower, and the temperature in the sintering furnace can reach 1600 ℃ or even higher. After the nitrogen gas is introduced into the sintering furnace, a problem of uneven local temperature occurs at the position of the gas inlet of the sintering furnace. The temperature non-uniformity can affect the properties of the aluminum nitride ceramic plate such as sintering density, thermal conductivity, product color and the like. Therefore, the quality of the ceramic plate in the area near the sintering furnace air inlet is not controlled, so that the overall performance of the ceramic plate is greatly affected.
Disclosure of utility model
In view of the above, it is necessary to provide a high-quality aluminum nitride ceramic plate sintering furnace to reduce the influence of nitrogen gas intake on the temperature inside the sintering furnace.
The utility model provides a high quality aluminium nitride ceramic plate fritting furnace includes stove outer covering, furnace gate, first thermal insulation layer, second thermal insulation layer, high temperature resistant supporting layer, one side of stove outer covering and furnace gate articulates, first thermal insulation layer, second thermal insulation layer, high temperature resistant supporting layer is from outside to inside set gradually in the stove outer covering, be equipped with the preheating chamber between stove outer covering and the first thermal insulation layer, the lateral wall of stove outer covering is equipped with the nitrogen gas import, nitrogen gas import and preheating chamber intercommunication, in order to heat nitrogen gas, the lateral wall of first thermal insulation layer is equipped with a plurality of ventilative grooves, ventilative groove extends to the outer wall of second thermal insulation layer from the outer wall of first thermal insulation layer, the second thermal insulation layer includes a plurality of heat insulating strips, the heat insulating strip is closely arranged, when the furnace gate is closed, furnace gate and high temperature resistant supporting layer form the furnace of sintered aluminium nitride, preheat chamber and second thermal insulation layer between through ventilative groove intercommunication, a plurality of through-holes of high temperature resistant supporting layer evenly distributed to make nitrogen gas get into furnace.
In the high-quality aluminum nitride ceramic plate sintering furnace, the first heat insulation layer is a graphite felt layer, and the thickness of the first heat insulation layer is 30-40 cm.
In the high-quality aluminum nitride ceramic plate sintering furnace, the sections of the ventilation grooves are rectangular, the section length of the ventilation grooves is 0.5-2 cm, the section width of the ventilation grooves is 0.1-0.4 cm, and the interval between the ventilation grooves is 1-5 cm.
In the high-quality aluminum nitride ceramic plate sintering furnace, the second heat insulation layer is a graphite felt layer, the thickness of the second heat insulation layer is 3-5 cm, and the width of the heat insulation strip is 1-5 cm.
In the high-quality aluminum nitride ceramic plate sintering furnace, the high-temperature resistant supporting layer is a graphite lining plate, and the thickness of the graphite lining plate is 1-2 cm.
In the high-quality aluminum nitride ceramic plate sintering furnace, the cross section of the furnace shell is circular, the cross section of the first heat insulation layer is rectangular, support lining plates are arranged on two sides of the lower end of the furnace shell, two support columns are arranged at the bottom of the furnace shell so as to support the first heat insulation layer, and the nitrogen inlet is positioned between the two support columns.
The beneficial effects are that: the nitrogen inlet of the sintering furnace for the high-quality aluminum nitride ceramic plate is directly communicated into the hearth, the nitrogen inlet of the sintering furnace for the high-quality aluminum nitride ceramic plate firstly enters the preheating cavity for preheating, so that the temperature of nitrogen is increased, then the nitrogen in the preheating cavity reaches the second heat insulation layer from the ventilation groove, the nitrogen permeates into the high-temperature resistant supporting layer along a gap between the first heat insulation layer and the second heat insulation layer and a gap between the heat insulation strips, and then the nitrogen enters the sintering furnace from the through hole of the high-temperature resistant supporting layer. At this time, the air flow is already very dispersed and sufficiently heated in the process of entering the sintering furnace, so that the temperature difference with the inside of the sintering furnace is very small, the temperature in the sintering furnace and the atmosphere uniformity are good, and the high-quality aluminum nitride ceramic plate can be sintered.
Drawings
Fig. 1 is a schematic structural view of a sintering furnace for a high quality aluminum nitride ceramic plate according to the present utility model.
Fig. 2 is a sectional view of the sintering furnace for the high quality aluminum nitride ceramic plate of the present utility model.
In the figure: the high-quality aluminum nitride ceramic plate sintering furnace 10, a furnace shell 20, a nitrogen inlet 201, a furnace door 30, a first heat insulation layer 40, a ventilation groove 401, a second heat insulation layer 50, heat insulation strips 501, a high-temperature resistant supporting layer 60 and a preheating cavity 70.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Referring to fig. 1 and 2, the sintering furnace 10 of the high-quality aluminum nitride ceramic plate comprises a furnace shell 20, a furnace door 30, a first heat insulation layer 40, a second heat insulation layer 50 and a high-temperature resistant supporting layer 60, wherein the furnace shell 20 is hinged to one side of the furnace door 30, the first heat insulation layer 40, the second heat insulation layer 50 and the high-temperature resistant supporting layer 60 are sequentially arranged in the furnace shell 20 from outside to inside, a preheating cavity 70 is arranged between the furnace shell 20 and the first heat insulation layer 40, a nitrogen inlet 201 is arranged on the side wall of the furnace shell 20, the nitrogen inlet 201 is communicated with the preheating cavity 70 to heat nitrogen, a plurality of ventilation grooves 401 are formed on the side wall of the first heat insulation layer 40 to extend from the outer wall of the first heat insulation layer 40 to the outer wall of the second heat insulation layer 50, the second heat insulation layer 50 comprises a plurality of heat insulation strips 501, the heat insulation strips 501 are closely distributed, when the furnace door 30 and the high-temperature resistant supporting layer 60 form a hearth of sintered aluminum nitride, the preheating cavity 70 is communicated with the second heat insulation layer 50 through the ventilation grooves 401, and the high-temperature resistant supporting layer 60 is evenly distributed to enable the nitrogen to enter the hearth.
The nitrogen preheating is performed in different ways, if a nitrogen preheating device is added separately, the energy consumption is increased, and the space is occupied. If the nitrogen is to be preheated in the sintering furnace, the gas path after the nitrogen enters the sintering furnace needs to be considered. In general, the first heat insulating layer 40 has a structure that is provided in all sintering furnaces. The first insulating layer 40 is thicker, and it is difficult to modify the air path on the first insulating layer 40. Because the gap between the furnace shell 20 and the first insulating layer 40 is large, some heat is still conducted into the gap. The present utility model uses the heat energy of the gap to take the gap between the furnace shell 20 and the first insulating layer 40 as the preheating chamber 70. The nitrogen inlet 201 is communicated with the preheating cavity 70, and nitrogen is preheated in the preheating cavity 70. Then, the ventilation groove 401 is formed in the side surface of the first heat insulation layer 40, and after the furnace door 30 is closed, nitrogen passes through the first heat insulation layer 40 from the ventilation groove 401. Since the second heat insulating layer 50 is not provided with the ventilation groove 401, nitrogen gas is blocked when reaching the second heat insulating layer 50. The second heat insulation layer 50 of the present utility model includes a plurality of heat insulation strips 501, and gaps between the heat insulation strips 501 serve as a path for nitrogen gas, so that the nitrogen gas passes through the second heat insulation layer 50 along the gaps between the heat insulation strips 501. Because the temperature in the sintering furnace is very high, the first heat insulating layer 40 and the second heat insulating layer 50 cannot be bonded, and the high temperature resistant supporting layer 60 and the first heat insulating layer 40 cooperate to sandwich the second heat insulating layer 50. Meanwhile, in order that nitrogen gas can enter the furnace, a through hole is further formed in the high-temperature-resistant supporting layer 60, so that nitrogen gas can enter the furnace through the through hole.
Thus, the nitrogen gas is split when passing through the first heat insulation layer 40, and likewise, the nitrogen gas is split when passing through the second heat insulation layer 50, so that the nitrogen gas flow entering the hearth is more dispersed, which means that the heating speed of the nitrogen gas is faster, and the influence on the temperature in the hearth is very small after entering the hearth, so that the produced aluminum nitride ceramic plate has higher quality.
It is contemplated that the temperature in the furnace may be above 1600 degrees celsius. The first insulating layer 40 is made of a high temperature resistant material. In a preferred embodiment, the first heat insulation layer 40 is a graphite felt layer, and the thickness of the first heat insulation layer 40 is 30-40 cm. The graphite felt can be used at 3000 deg.c in non-oxidizing atmosphere, so that it may be used in sintering aluminium nitride ceramic.
Considering the speed of introducing nitrogen and the heated temperature of nitrogen, if the size of the ventilation groove 401 is too large, the nitrogen inlet amount is larger, the heated temperature is lower, meanwhile, the heat in the hearth is easy to be lost, and if the size of the ventilation groove 401 is too small, the nitrogen inlet amount is slower, and the reaction rate is affected. In a preferred embodiment, the cross section of the ventilation slots 401 is rectangular, the cross section length of the ventilation slots 401 is 0.5-2 cm, the cross section width of the ventilation slots 401 is 0.1-0.4 cm, and the interval between the ventilation slots 401 is 1-5 cm.
Similarly, considering that the temperature in the furnace may reach 1600 ℃ or higher, in a preferred embodiment, the second heat insulation layer 50 is a graphite felt layer, the thickness of the second heat insulation layer 50 is 3-5 cm, and the width of the heat insulation strip 501 is 1-5 cm.
In a preferred embodiment, the gap of the insulating strip is in communication with the ventilation slot. Of course, the two layers can be staggered, and nitrogen can enter the gap between the heat insulation strips from the gap between the first heat insulation layer and the second heat insulation layer.
In a preferred embodiment, the high temperature resistant supporting layer 60 is a graphite lining plate, and the thickness of the graphite lining plate is 1-2 cm.
In a preferred embodiment, the cross section of the furnace shell 20 is circular, the cross section of the first heat insulation layer 40 is rectangular, two sides of the lower end of the furnace shell 20 are provided with support liners, two support columns are arranged at the bottom of the furnace shell 20 to support the first heat insulation layer 40, and the nitrogen inlet 201 is located between the two support columns.
Since the rest of the sintering furnace is not involved in the solution of the utility model, a description thereof will not be repeated.
The foregoing disclosure is illustrative of the preferred embodiments of the present utility model, and is not to be construed as limiting the scope of the utility model, as it is understood by those skilled in the art that all or part of the above-described embodiments may be practiced with equivalents thereof, which fall within the scope of the utility model as defined by the appended claims.
Claims (6)
1. A high-quality aluminum nitride ceramic plate sintering furnace is characterized in that: including stove outer covering, furnace gate, first thermal-insulated heat preservation, second thermal-insulated heat preservation, high temperature resistant supporting layer, the stove outer covering is articulated with one side of furnace gate, and first thermal-insulated heat preservation, second thermal-insulated heat preservation, high temperature resistant supporting layer set gradually in the stove outer covering from outside to inside, are equipped with the preheating chamber between stove outer covering and the first thermal-insulated heat preservation, and the lateral wall of stove outer covering is equipped with nitrogen gas import, and nitrogen gas import and preheating chamber intercommunication to heating nitrogen gas, and the lateral wall of first thermal-insulated heat preservation is equipped with a plurality of ventilation slots, and the ventilation slot extends to the outer wall of second thermal-insulated heat preservation from the outer wall of first thermal-insulated heat preservation, the thermal-insulated heat preservation of second includes a plurality of heat bars, and the heat bars are closely arranged, and when the furnace gate forms the furnace of sintering aluminium nitride with high temperature resistant supporting layer, preheats through ventilation slot intercommunication between chamber and the second thermal-insulated heat preservation, a plurality of through-holes of high temperature resistant supporting layer evenly distributed to make nitrogen gas get into furnace.
2. The high quality aluminum nitride ceramic plate sintering furnace according to claim 1, wherein: the first heat insulation layer is a graphite felt layer, and the thickness of the first heat insulation layer is 30-40 cm.
3. The high quality aluminum nitride ceramic plate sintering furnace according to claim 1, wherein: the section of the ventilation groove is rectangular, the section length of the ventilation groove is 0.5-2 cm, the section width of the ventilation groove is 0.1-0.4 cm, and the interval between the ventilation grooves is 1-5 cm.
4. The high quality aluminum nitride ceramic plate sintering furnace according to claim 1, wherein: the second heat insulation layer is a graphite felt layer, the thickness of the second heat insulation layer is 3-5 cm, and the width of the heat insulation strip is 1-5 cm.
5. The high quality aluminum nitride ceramic plate sintering furnace according to claim 1, wherein: the high-temperature-resistant supporting layer is a graphite lining plate, and the thickness of the graphite lining plate is 1-2 cm.
6. The high quality aluminum nitride ceramic plate sintering furnace according to claim 1, wherein: the cross section of the furnace shell is circular, the cross section of the first heat insulation layer is rectangular, support lining plates are arranged on two sides of the lower end of the furnace shell, two support columns are arranged at the bottom of the furnace shell so as to support the first heat insulation layer, and a nitrogen inlet is arranged between the two support columns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323209802.7U CN221238163U (en) | 2023-11-27 | 2023-11-27 | Sintering furnace for high-quality aluminum nitride ceramic plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323209802.7U CN221238163U (en) | 2023-11-27 | 2023-11-27 | Sintering furnace for high-quality aluminum nitride ceramic plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221238163U true CN221238163U (en) | 2024-06-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323209802.7U Active CN221238163U (en) | 2023-11-27 | 2023-11-27 | Sintering furnace for high-quality aluminum nitride ceramic plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221238163U (en) |
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2023
- 2023-11-27 CN CN202323209802.7U patent/CN221238163U/en active Active
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