CN221110367U - Triaxial high-precision motion platform for femtosecond laser processing - Google Patents
Triaxial high-precision motion platform for femtosecond laser processing Download PDFInfo
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- CN221110367U CN221110367U CN202323144835.8U CN202323144835U CN221110367U CN 221110367 U CN221110367 U CN 221110367U CN 202323144835 U CN202323144835 U CN 202323144835U CN 221110367 U CN221110367 U CN 221110367U
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Abstract
The utility model discloses a triaxial high-precision motion platform for femtosecond laser processing, which comprises the following components: a platform base disposed in a horizontal direction; the X-axis assembly is arranged on the platform base along the horizontal direction and comprises an X-axis guide rail arranged along the horizontal direction, an X-axis load plate capable of moving along the X-axis guide rail, a linear motor arranged below the X-axis load plate and driving the X-axis load plate to reciprocate, and a grating ruler parallel to the X-axis guide rail and arranged on one side of the X-axis guide rail; the horizontal rotary table assembly is arranged on an X-axis load plate of the X-axis assembly and comprises a mandrel capable of rotating along the horizontal direction, and a mandrel central cavity for accommodating a workpiece is arranged on the mandrel along the axial direction of the mandrel. The utility model can meet the requirement of high-precision femtosecond laser processing of a heavy-duty columnar structure, and provides motion guarantee in horizontal, vertical and rotating directions for superfine processing of femtosecond laser.
Description
Technical Field
The utility model belongs to the technical field of precision machining and precision test measurement, and relates to a triaxial high-precision motion platform for femtosecond laser machining.
Background
Because the femtosecond laser pulse has the characteristics of short duration, extremely high peak power, strong focusing capability and the like, the femtosecond laser has unique advantages in laser processing, and can realize non-hot-melt cold treatment on almost all materials to obtain ultra-fine, low-damage and space 3D processing and processing structures. These unique advantages of femtosecond lasers are their wide application in material micromachining, micronano-fabrication, photonic devices, high density storage, medical and bioengineering, and the like.
In order to fully develop the characteristic of ultra-fine processing of femtosecond laser processing, a high-precision and high-stability motion platform is required to provide movement and rotation in all directions. While some cylindrical and tubular structures require high precision motion stages for their motion in horizontal, vertical and rotational directions for ultra-fine machining.
Disclosure of utility model
It is an object of the present utility model to address at least the above problems and/or disadvantages and to provide at least the advantages described below.
It is still another object of the present utility model to provide a three-axis high precision motion platform for femtosecond laser processing, which can meet the requirement of high precision femtosecond laser processing of heavy duty columnar structure, and provide motion guarantee in horizontal, vertical and rotation directions for ultra-fine processing of femtosecond laser.
For this purpose, the technical scheme provided by the utility model is as follows:
a three-axis high precision motion platform for femtosecond laser machining, comprising:
A platform base disposed in a horizontal direction;
The X-axis assembly is arranged on the platform base along the horizontal direction and comprises an X-axis guide rail arranged along the horizontal direction, an X-axis load plate capable of moving along the X-axis guide rail, a linear motor arranged below the X-axis load plate and driving the X-axis load plate to reciprocate, and a grating ruler parallel to the X-axis guide rail and arranged on one side of the X-axis guide rail;
The horizontal rotary table assembly is arranged on an X-axis load plate of the X-axis assembly and comprises a mandrel capable of rotating in the horizontal direction, and a mandrel central cavity for accommodating a workpiece is arranged on the mandrel along the axial direction of the mandrel.
Preferably, the three-axis high-precision motion platform for femtosecond laser processing further comprises a Z-axis assembly, wherein the Z-axis assembly is disposed on the platform base along a vertical direction and is located at one side of the X-axis assembly, and the Z-axis assembly comprises:
the Z-axis base is arranged above the platform base along the vertical direction;
The Z-axis guide rail is arranged on one end surface of the Z-axis base along the vertical direction;
The Z-axis load plate is provided with a Z-axis sliding block on one side surface, and the Z-axis sliding block is matched with the Z-axis guide rail and moves reciprocally along the Z-axis guide rail;
the servo motor is arranged below the Z-axis base, and the upper end of the servo motor is connected with one end face of the Z-axis base;
And the ball screw is arranged between the Z-axis load plate and the Z-axis base along the vertical direction, one end of the ball screw is rotatably connected with the servo motor through a coupler, the other end of the ball screw is rotatably connected to the upper part of the Z-axis base, and the ball screw is connected to the Z-axis load plate through a screw nut connecting piece.
Preferably, in the triaxial high-precision motion platform for femtosecond laser processing, the method further includes:
The two stand columns are arranged in the vertical direction and positioned on one side of the X-axis assembly, and one ends of the two stand columns are fixed on the platform base;
The cross beam is arranged along the horizontal direction, two ends of the cross beam are connected with the other ends of the two upright posts, and the other end face of the Z-axis base is fixed on the cross beam.
Preferably, in the three-axis high-precision motion platform for femtosecond laser processing, the horizontal turntable assembly further comprises:
The first main shell and the second main shell are respectively sleeved at the front end and the rear end of the mandrel;
The horizontal direct-drive motor is arranged in the second main shell and is positioned between the second main shell and the mandrel, the horizontal direct-drive motor is provided with a motor shaft, one end of the motor shaft is connected with the rear end of the mandrel, and the other end of the motor shaft is sleeved with a circular grating;
The reading head is arranged in the second main shell and is positioned between the second main shell and the mandrel, and the reading head reads the scales of the circular grating in real time;
And the three-jaw chuck is arranged at the front end of the mandrel through a chuck mounting plate.
Preferably, the triaxial high-precision motion platform for femtosecond laser processing further comprises:
The two collars are respectively sleeved at the front end and the rear end of the mandrel, the two collars are respectively positioned at the inner sides of the first main shell and the second main shell, and the outer ring end faces of the two collars are respectively closely connected with the shoulder end faces of the first main shell and the second main shell.
Preferably, in the triaxial high-precision motion platform for femtosecond laser processing, two first collar check rings and two second collar check rings are respectively and correspondingly connected to outer ring end faces of the two collars, and are respectively and fixedly connected with the first main casing and the second main casing; the two second collar check rings are respectively sleeved at two ends of the mandrel and are respectively connected with the inner ring end faces of the two collars.
Preferably, in the three-axis high-precision motion platform for femtosecond laser processing, two bearing seats are respectively arranged at two ends of a near-Z-axis base along a horizontal direction, wherein the bearing seat positioned below is positioned above the Z-axis motor mounting seat, two ends of the ball screw are respectively and rotatably connected to the two bearing seats, and the lower end of the ball screw is connected with the servo motor through a double-diaphragm coupling.
The utility model at least comprises the following beneficial effects:
The utility model adopts a linear motor to drive the motion in the horizontal direction, the cylindrical roller guide rail provides support and guide, and a full-closed loop feedback system of the position information of the motion platform is formed by a linear grating.
The motor rotating shaft of the horizontal turntable assembly adopts the circular grating as position feedback, thereby realizing closed-loop control of the structure and meeting higher precision requirements.
The support of the rotating shaft of the horizontal turntable assembly is carried out by adopting crossed roller collars, and simultaneously, the support of a longer heavy-load workpiece is satisfied by arranging two groups of spaced collars.
The utility model ensures the high precision of the turntable structure (the axial runout and the radial runout are less than 1 mu m, and the repeated positioning precision is less than 1 acrsec) through the split structural design and the assembly process.
The structural design of the large-diameter cylindrical workpiece clamping device enables a long-size cylindrical workpiece to be clamped and mounted through the inside of the rotary table, improves the stress condition of the workpiece, and ensures high-precision operation of the workpiece in the machining process.
The utility model is driven by a servo motor through a ball screw in the vertical direction, and the cylindrical roller guide rail provides support and guide. The horizontal shaft, the vertical shaft base and the integral frame are made of granite materials, so that the stability of the structure is ensured.
The utility model provides a matched reliable high-precision rotary motion platform for femtosecond laser processing of a columnar structure, and particularly provides powerful support for ultra-fine processing of a large load of 20kg level.
Additional advantages, objects, and features of the utility model will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the utility model.
Drawings
Fig. 1 is a schematic perspective view of a three-axis high-precision motion platform for femtosecond laser processing according to one embodiment of the present utility model.
Fig. 2 is a schematic structural view of a horizontal turntable assembly according to one embodiment of the present utility model.
Fig. 3 is a schematic structural diagram of a Z-axis assembly according to one embodiment of the present utility model, where a is a top view of the Z-axis assembly, B is a front view of the Z-axis assembly, and C is a section H-H of the B-view.
Fig. 4 is a schematic structural diagram of an X-axis assembly according to one embodiment of the present utility model, wherein a is a front view of the X-axis assembly, B is a side view of the X-axis assembly (with the X-axis baffle removed), C is a top view of the X-axis assembly (with the X-axis organ shield removed), and D is a cross-sectional F-F view of fig. a.
Detailed Description
The present utility model is described in further detail below with reference to the drawings to enable those skilled in the art to practice the utility model by referring to the description.
It will be understood that terms, such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
As shown in fig. 1 and 2, the present utility model provides a triaxial high-precision motion platform for femtosecond laser processing, including:
a platform base 100 disposed in a horizontal direction;
As shown in fig. 4, an X-axis assembly 600 is disposed on the platform base 100 along a horizontal direction, the X-axis assembly 600 includes an X-axis guide rail 602 disposed along the horizontal direction, an X-axis load plate 603 movable along the X-axis guide rail 602, a linear motor disposed below the X-axis load plate 603 and driving the X-axis load plate 603 to reciprocate, and a grating ruler 607 parallel to the X-axis guide rail 602 and disposed at one side of the X-axis guide rail 602; preferably, the X-axis rail 602 is a cylindrical roller rail.
A horizontal turntable assembly 500 disposed on an X-axis load plate 603 of the X-axis assembly 600, the horizontal turntable assembly 500 including a mandrel 15 rotatable in a horizontal direction, the mandrel 15 being provided with a mandrel 15 central cavity along an axial direction thereof for receiving a workpiece. The horizontal turntable assembly 500 is provided with a through hole at the base 1, a threaded hole is arranged at the position corresponding to the X-axis load plate 603 of the X-axis assembly 600, and the two assemblies are fixedly connected through the through hole and the threaded hole by adopting screws.
The utility model adopts a linear motor to drive the motion in the horizontal direction, the cylindrical roller guide rail provides support and guide, and a full-closed loop feedback system of the position information of the motion platform is formed by a linear grating.
The horizontal turntable assembly 500 of the utility model ensures high precision (axial runout and radial runout are less than 1 mu m, repeated positioning precision is less than 1 acrsec) of the turntable structure through a split structural design and assembly process
The utility model provides a matched reliable high-precision rotary motion platform for femtosecond laser processing of a columnar structure, and particularly provides powerful support for ultra-fine processing of a large load of 20kg level.
In the foregoing aspect, preferably, the apparatus further includes a Z-axis assembly disposed on the platform base 100 along a vertical direction and located at one side of the X-axis assembly 600, as shown in fig. 3, the Z-axis assembly includes:
A Z-axis base 401 disposed above the platform base 100 in a vertical direction;
A Z-axis guide rail 413 disposed on one end surface of the Z-axis base 401 in a vertical direction; preferably, the Z-axis guide 413 is also a cylindrical roller guide.
A Z-axis load board 410, one side of which is provided with a Z-axis slider, wherein the Z-axis slider is disposed in cooperation with the Z-axis guide rail 413, and reciprocates along the Z-axis guide rail 413;
a servo motor 404 disposed below the Z-axis base 401, the upper end of the servo motor 404 being connected to one end surface of the Z-axis base 401;
And a ball screw 408 disposed between the Z-axis load plate 410 and the Z-axis base 401 in a vertical direction, one end of the ball screw 408 being rotatably connected to the servo motor 404 through a coupling, and the other end being rotatably connected to an upper portion of the Z-axis base 401, the ball screw 408 being connected to the Z-axis load plate 410 through a screw nut connection. The X-axis assembly 600 is fixed to the base, the horizontal turntable assembly 500 is fixed to the load plate of the X-axis assembly 600, and the Z-axis assembly is fixed to the beam.
In the above aspect, preferably, the method further includes:
Two upright posts 200, wherein the two upright posts 200 are arranged along the vertical direction and positioned at one side of the X-axis assembly 600, and one ends of the two upright posts 200 are fixed on the platform base 100;
And the cross beam 300 is arranged along the horizontal direction, two ends of the cross beam 300 are connected with the other ends of the two upright posts 200, and the other end surface of the Z-axis base 401 is fixed on the cross beam 300. The base, the upright posts 200 and the cross beam 300 are connected by screws to form a unitary granite frame.
In one aspect of the present utility model, preferably, the horizontal turntable assembly 500 further includes:
The first main casing 16 and the second main casing 5 are respectively sleeved at the front end and the rear end of the mandrel 15;
The direct-drive motor is arranged in the second main shell 5 and is positioned between the second main shell 5 and the mandrel 15, the direct-drive motor is provided with a motor shaft 11, one end of the motor shaft 11 is connected with the rear end of the mandrel 15, and the other end of the motor shaft 11 is sleeved with a circular grating 10;
A reading head 9, which is disposed in the second main housing 5 and is located between the second main housing 5 and the mandrel 15, wherein the reading head 9 reads the scales of the circular grating 10 in real time;
A three-jaw chuck 19 mounted on the front end of the spindle 15 by a chuck mounting plate 18.
In one embodiment of the present utility model, preferably, the method further comprises:
the two collars 3 are respectively sleeved at the front end and the rear end of the mandrel 15, the two collars 3 are respectively positioned at the inner sides of the first main casing 16 and the second main casing 5, and the outer ring end faces of the two collars 3 are respectively closely contacted with the shoulder end faces of the first main casing 16 and the second main casing 5. Preferably, both collars 3 are crossed roller collars.
In one aspect of the present utility model, preferably, two first collar collars 2 and two second collar collars 4 are respectively and correspondingly connected to outer ring end surfaces of the two collars 3, and are respectively and fixedly connected to the first main housing 16 and the second main housing 5; the two second collar check rings 4 are respectively sleeved at two ends of the mandrel 15 and are respectively connected with the inner ring end surfaces of the two collars 3.
In one embodiment of the present utility model, preferably, two bearing seats are respectively disposed at two ends of the near Z-axis base 401 along a horizontal direction, wherein the bearing seat 407 located below is located above the Z-axis motor mounting seat, two ends of the ball screw 408 are respectively rotatably connected to the two bearing seats, and a lower end of the ball screw 408 is connected to the servo motor 404 through a double-diaphragm coupling.
For a better understanding of the technical solution of the present utility model, the following examples are now provided for illustration:
A triaxial high-precision motion platform for femtosecond laser machining comprises a platform base 100, two upright posts 200, an X-axis assembly 600, a horizontal turntable assembly 500 and a Z-axis assembly, wherein the platform base 100 is arranged along the horizontal direction, the X-axis assembly 600 is arranged on the platform base 100, and the horizontal turntable assembly 500 and the Z-axis assembly are arranged on an X-axis load plate 603 of the X-axis assembly 600, as shown in fig. 1 and 3. The two upright posts 200 are arranged along the vertical direction and positioned at one side of the X-axis assembly 600, and one ends of the two upright posts 200 are fixed on the platform base 100; and the cross beam 300 is arranged along the horizontal direction, two ends of the cross beam 300 are connected with the other ends of the two upright posts 200, and the other end face of the Z-axis base 401 is fixed on the cross beam 300.
As shown in fig. 2, the horizontal turret assembly 500 includes:
A mandrel 15 rotatable in a horizontal direction, the mandrel 15 being provided with a central cavity of the mandrel 15 accommodating a workpiece in an axial direction thereof.
The first main casing 16 and the second main casing 5 are respectively sleeved at the front end and the rear end of the mandrel 15;
The direct-drive motor is arranged in the second main shell 5 and is positioned between the second main shell 5 and the mandrel 15, the direct-drive motor is provided with a motor shaft 11, one end of the motor shaft 11 is connected with the rear end of the mandrel 15, and the other end of the motor shaft 11 is sleeved with a circular grating 10;
A reading head 9, which is disposed in the second main housing 5 and is located between the second main housing 5 and the mandrel 15, wherein the reading head 9 reads the scales of the circular grating 10 in real time; the reading head 9 is fixed to the second main casing 5 by a reading head mounting plate 8.
A chuck mounting plate 18 having one end mounted on the front end of the spindle 15 and the other end connected to a three-jaw chuck 19.
The two collars 3 are respectively sleeved at the front end and the rear end of the mandrel 15, the two collars 3 are respectively positioned at the inner sides of the first main casing 16 and the second main casing 5, and the outer ring end faces of the two collars 3 are respectively in close contact with the shoulder end faces of the first main casing 16 and the second main casing 5. Preferably, the first collar 33 and the second collar 3 are crossed roller collars 3.
Two first collar retainers 2 and two second collar retainers 4, the two first collar retainers 2 are respectively and correspondingly connected to outer ring end surfaces of the two collars 3, and are respectively and fixedly connected with the first main housing 16 and the second main housing 5; the two second collar check rings 4 are respectively sleeved at two ends of the mandrel 15 and are respectively connected with the inner ring end surfaces of the two collars 3.
A base 1, the first main casing 16 and the second main casing 5 are fixed on the base 1; playing a role in fixation.
And a housing 14 which is sleeved outside the first main casing 16 and the second main casing 5, wherein the lower end of the housing 14 is fixed on the base 1, the front end of the housing 14 is fixed with a front end cover 17, and the rear end is fixed with a cover plate 12.
The two collar 3 inner rings are respectively sleeved at two ends of the mandrel 15, the two collar retainer rings 4 are respectively sleeved at two ends of the mandrel 15 and compress the inner ring end faces of the collar 3, and are fixedly connected with the mandrel 15 through screws, one collar 3 is arranged in the first main shell 16 to enable the outer ring end faces to lean against the shoulder end faces of the first main shell 16, the other collar 3 is arranged in the second main shell 52 to enable the outer ring end faces to lean against the shoulder end faces of the second main shell 5, and the two first collar retainer rings respectively compress the outer ring end faces of the two collar 3 and are respectively fixedly connected with the first main shell 16 and the second main shell 5 through screws.
The direct-drive motor stator 7 is arranged in the second main shell 5, the direct-drive motor stator 7 and the second main shell 5 are adhered and fixed through cementing, the direct-drive motor rotor 6 is sleeved on the motor shaft 11, the direct-drive motor rotor 6 and the motor shaft 11 are adhered and fixed through cementing, one end of the motor shaft 11 is adhered to one end of the mandrel 15 and is connected and fixed through a screw, the circular grating 10 is sleeved on the other conical surface end of the motor shaft 11, the reading head 9 is fixed with the reading head mounting plate 8 through a screw, and the reading head mounting plate 8 is fixed with the second main shell 5 through a screw.
The first main casing 16 and the second main casing 5 are respectively fixed with the base 1 by screws, the outer casing 14 is fixed with the base 1 by screws, the joint fixing frame and the front end cover 17 are respectively fixed at two ends of the outer casing 14 by screw connection, and the cover plate 12 is fixed with the joint fixing frame 13 by screws.
The chuck mounting plate 18 is fixed to the mandrel 15 by screws, the three-jaw chuck 19 is fixedly connected to the chuck mounting plate 18 by screws, and the electric connector 20 is fixed to the connector fixing frame by screws.
The control system is respectively connected with the direct-drive motor and the circular grating 10 in a communication way, the control system sends a motion instruction to the direct-drive motor, the direct-drive motor rotates and drives the mandrel 15 and the circular grating 10 to rotate, the reading head 9 reads the scribing lines on the circular grating 10 in real time and sends the scribing lines to the control system, and the control system receives information of the reading head and compares the information with the motion instruction to confirm whether the mandrel 15 moves to a specified angle position.
When the turntable works, the three-jaw chuck 19 is used for clamping a workpiece, and if the workpiece is too long, the workpiece can partially extend into the through hole of the mandrel 15 so as to improve the machining precision of the workpiece; if not deep into the mandrel 15, a long cantilever structure is formed, and the deviation of the workpiece end during processing is large due to the long cantilever structure. The outer circumference of the circular grating 10 is carved with a plurality of precise score lines, the reading head 9 can confirm the angular position of the turntable by reading the score lines on the circular grating 10 ruler all the time, the control system gives a motion instruction to the motor part, the motor rotates, the circular grating 10 rotates along with the rotation, at the moment, the reading head 9 confirms the rotating angle by reading the score lines on the circular grating 10 and feeds back the information to the control system, and the control system confirms whether the turntable moves to the designated angular position or not by comparing the fed back position information with the given motion instruction, so that a closed loop system of the angular position is formed. The direct-drive motor comprises a direct-drive motor stator 7 fixed on the second main shell 5, a motor shaft 11 connected to the direct-drive motor stator 7 and a direct-drive motor rotor 6 sleeved on the motor shaft 11. The utility model adopts the direct drive torque motor to drive, has zero tooth slot effect and no transmission structure when the servo motor 404 is adopted to drive, improves the driving precision, greatly reduces the size of the structure, and can fully meet the installation application in a limited space. Meanwhile, the rotary shaft of the motor adopts the circular grating 10 as position feedback, so that closed-loop control of the structure is realized, and the higher precision requirement is met. The utility model ensures the high precision of the turntable structure (the axial runout and the radial runout are less than 1 mu m, and the repeated positioning precision is less than 1 acrsec) through the split structural design and the assembly process. And moreover, due to the structural design of the large drift diameter, the long-size columnar workpiece can be clamped and installed through the inside of the turntable, so that the stress condition of the workpiece is improved, and the high-precision operation of the workpiece in the machining process is ensured.
As shown in fig. 2, the Z-axis assembly is disposed on the platform base 100 in a vertical direction and located at one side of the X-axis assembly 600, and includes:
A Z-axis base 401 disposed above the platform base 100 in a vertical direction;
A Z-axis guide rail 413 disposed on one end surface of the Z-axis base 401 in a vertical direction;
A Z-axis load board 410, one side of which is provided with a Z-axis slider, wherein the Z-axis slider is disposed in cooperation with the Z-axis guide rail 413, and reciprocates along the Z-axis guide rail 413;
a servo motor 404 disposed below the Z-axis base 401, the upper end of the servo motor 404 being connected to one end surface of the Z-axis base 401;
And a ball screw 408 disposed between the Z-axis load plate 410 and the Z-axis base 401 in a vertical direction, one end of the ball screw 408 being rotatably connected to the servo motor 404 through a coupling, and the other end being rotatably connected to an upper portion of the Z-axis base 401, the ball screw 408 being connected to the Z-axis load plate 410 through a screw nut connection.
Two bearing seats are respectively arranged at two ends of the near Z-axis base 401 along the horizontal direction, wherein the bearing seats positioned below are positioned above the Z-axis motor mounting seat, two ends of the ball screw 408 are respectively and rotatably connected to the two bearing seats, and the lower end of the ball screw 408 is connected with the servo motor 404 through a double-diaphragm coupler.
A pair of Z-axis end plates are disposed in parallel on the platform base 100, a Z-axis motor mount is mounted on one side of the Z-axis base 401, the Z-axis base 401 is connected to the platform base 100 through 2Z-axis dust-proof plates, one end of the servo motor 404 is located on the Z-axis end plates, and the other end is fixed on the Z-axis motor mount.
An additional pair of Z-axis plates are arranged above the Z-axis base 401 along the horizontal direction, two bearing seats are respectively arranged at two ends of the near Z-axis base 401 along the horizontal direction, wherein the bearing seats positioned below are positioned above the Z-axis motor mounting seat, two ends of the ball screw 408 are respectively and rotatably connected to the two bearing seats, and the lower end of the ball screw 408 is connected with the servo motor 404 through a double-diaphragm coupler. The ball screw 408 is connected to a Z-axis load plate 410 disposed in the vertical direction by a screw nut connection.
Two parallel Z-axis guide rails 413 are arranged on the Z-axis base 401 at intervals along the length direction of the Z-axis base, a group of Z-axis sliding blocks are respectively arranged on two sides below the Z-axis load plate 410, the two groups of Z-axis sliding blocks are respectively arranged in the two Z-axis guide rails 413 in a sliding mode, and the Z-axis load plate 410 is driven by the servo motor 404 and the ball screw 408 to linearly reciprocate along the Z-axis guide rails 413. The ball screw 408 of the Z axis is used to convert the rotation motion of the servo motor 404 into a linear motion, and is connected with the Z axis load plate 410 through a screw nut connector so as to realize the up-down motion of the Z axis load plate 410; the servo motor 404 is the power component of the Z-axis assembly and provides power to the movement of the Z-axis load plate 410.
The Z-axis load board 410 is further provided with 2Z-axis photoelectric switches 415, a Z-axis limiting pulling board 416, 2Z-axis limiting mounting seats 417, 2 polyurethane damping bolts 418, a Z-axis organ shield 419, a Z-axis shield 420 and a Z-axis electrical connector 421.
The X-axis assembly 600 is disposed on the platform base 100 along a horizontal direction, and the X-axis assembly 600 includes an X-axis guide rail 602 disposed along the horizontal direction, an X-axis load plate 603 movable along the X-axis guide rail 602, a linear motor disposed below the X-axis load plate 603 and driving the X-axis load plate 603 to reciprocate, and a grating ruler 607 parallel to the X-axis guide rail 602 and disposed on one side of the X-axis guide rail 602.
Two parallel X-axis guide rails 602 are arranged on the X-axis base 601 at intervals along the length direction of the X-axis base, an X-axis motor is arranged between the two X-axis guide rails 602 and comprises an X-axis motor stator 606 and an X-axis motor rotor 611, an X-axis load plate 603 is arranged at the same time, a group of X-axis sliding blocks 613 are respectively arranged on two sides below the X-axis load plate 603, the two groups of X-axis sliding blocks are respectively arranged in the two X-axis guide rails 602 in a sliding mode, and the X-axis motor is connected with the X-axis load plate 603. Two pairs of X-axis shielding plates are provided around the X-axis load plate 603, one pair of X-axis shielding plates 614 being located on the long side and the other pair of X-axis shielding plates 604 being located on the short side. A grating 607 is arranged between the two X-axis rails 602 below the X-axis load plate 603, said grating 607 being parallel to the X-axis rails 602. An X-axis mechanical limit 608 is arranged between the two X-axis guide rails 602 and near two ends of the X-axis base 601, an X-axis stop block 610 is arranged at two ends of a short side of the X-axis base 601, and the X-axis stop block 610 is fixed on the X-axis base 601 through an X-axis stop plate mounting block 612 fixed on the X-axis base 601. An X-axis drag chain mounting plate 405 is provided on one side of the X-axis base 601, and a drag chain 418 is mounted on the X-axis drag chain mounting plate 405. The X-axis base 601 is also provided with an X-axis electrical connector 615 which is fixed by an X-axis connector fixing plate 616, and is also provided with an X-axis organ shield 617, and an X-axis reading head 620 is fixed near the grating ruler 607 by an X-axis reading head mounting seat 619.
The drag chain 618 of the X-axis assembly 600 is used for threading (motor cable and readhead cable) and for supporting the following movement of the cable during the reciprocating movement of the X-axis load plate 603.
The number of modules and the scale of processing described herein are intended to simplify the description of the present utility model. The application, modification and variation of the three-axis high precision motion platform for femtosecond laser machining of the present utility model will be apparent to those skilled in the art.
Although embodiments of the present utility model have been disclosed above, it is not limited to the details and embodiments shown and described, it is well suited to various fields of use for which the utility model would be readily apparent to those skilled in the art, and accordingly, the utility model is not limited to the specific details and illustrations shown and described herein, without departing from the general concepts defined in the claims and their equivalents.
Claims (7)
1. A triaxial high accuracy motion platform for femtosecond laser processing, characterized by comprising:
A platform base disposed in a horizontal direction;
The X-axis assembly is arranged on the platform base along the horizontal direction and comprises an X-axis guide rail arranged along the horizontal direction, an X-axis load plate capable of moving along the X-axis guide rail, a linear motor arranged below the X-axis load plate and driving the X-axis load plate to reciprocate, and a grating ruler parallel to the X-axis guide rail and arranged on one side of the X-axis guide rail;
The horizontal rotary table assembly is arranged on an X-axis load plate of the X-axis assembly and comprises a mandrel capable of rotating in the horizontal direction, and a mandrel central cavity for accommodating a workpiece is arranged on the mandrel along the axial direction of the mandrel.
2. The three-axis high precision motion platform for femtosecond laser machining as recited in claim 1, further comprising a Z-axis assembly disposed on the platform base in a vertical direction and located at one side of the X-axis assembly, the Z-axis assembly comprising:
the Z-axis base is arranged above the platform base along the vertical direction;
The Z-axis guide rail is arranged on one end surface of the Z-axis base along the vertical direction;
The Z-axis load plate is provided with a Z-axis sliding block on one side surface, and the Z-axis sliding block is matched with the Z-axis guide rail and moves reciprocally along the Z-axis guide rail;
the servo motor is arranged below the Z-axis base, and the upper end of the servo motor is connected with one end face of the Z-axis base;
And the ball screw is arranged between the Z-axis load plate and the Z-axis base along the vertical direction, one end of the ball screw is rotatably connected with the servo motor through a coupler, the other end of the ball screw is rotatably connected to the upper part of the Z-axis base, and the ball screw is connected to the Z-axis load plate through a screw nut connecting piece.
3. The three-axis high precision motion stage for femtosecond laser machining as recited in claim 2, further comprising:
The two stand columns are arranged in the vertical direction and positioned on one side of the X-axis assembly, and one ends of the two stand columns are fixed on the platform base;
The cross beam is arranged along the horizontal direction, two ends of the cross beam are connected with the other ends of the two upright posts, and the other end face of the Z-axis base is fixed on the cross beam.
4. The three axis high precision motion stage for femtosecond laser machining as recited in claim 1, wherein the horizontal turret assembly further comprises:
The first main shell and the second main shell are respectively sleeved at the front end and the rear end of the mandrel;
The horizontal direct-drive motor is arranged in the second main shell and is positioned between the second main shell and the mandrel, the horizontal direct-drive motor is provided with a motor shaft, one end of the motor shaft is connected with the rear end of the mandrel, and the other end of the motor shaft is sleeved with a circular grating;
The reading head is arranged in the second main shell and is positioned between the second main shell and the mandrel, and the reading head reads the scales of the circular grating in real time;
And the three-jaw chuck is arranged at the front end of the mandrel through a chuck mounting plate.
5. The three-axis high precision motion stage for femtosecond laser machining as recited in claim 4, further comprising:
The two collars are respectively sleeved at the front end and the rear end of the mandrel, the two collars are respectively positioned at the inner sides of the first main shell and the second main shell, and the outer ring end faces of the two collars are respectively closely connected with the shoulder end faces of the first main shell and the second main shell.
6. The triaxial high-precision motion platform for femtosecond laser machining according to claim 5, wherein two first collar collars and two second collar collars are respectively and correspondingly connected to outer ring end faces of the two collars, and are respectively fixedly connected with the first main casing and the second main casing; the two second collar check rings are respectively sleeved at two ends of the mandrel and are respectively connected with the inner ring end faces of the two collars.
7. The three-axis high-precision motion platform for femtosecond laser processing according to claim 2, wherein two bearing seats are respectively arranged at two ends of the near-Z-axis base along the horizontal direction, wherein the bearing seat positioned below is positioned above the Z-axis motor mounting seat, two ends of the ball screw are respectively rotatably connected to the two bearing seats, and the lower end of the ball screw is connected with the servo motor through a double-diaphragm coupling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323144835.8U CN221110367U (en) | 2023-11-21 | 2023-11-21 | Triaxial high-precision motion platform for femtosecond laser processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202323144835.8U CN221110367U (en) | 2023-11-21 | 2023-11-21 | Triaxial high-precision motion platform for femtosecond laser processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN221110367U true CN221110367U (en) | 2024-06-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202323144835.8U Active CN221110367U (en) | 2023-11-21 | 2023-11-21 | Triaxial high-precision motion platform for femtosecond laser processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN221110367U (en) |
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2023
- 2023-11-21 CN CN202323144835.8U patent/CN221110367U/en active Active
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