CN221098290U

CN221098290U - Vaporizer and vaporization system

Info

Publication number: CN221098290U
Application number: CN202322736907.1U
Authority: CN
Inventors: 李正宾; 顾建华; 袁闯; 岳粹虎
Original assignee: Zhejiang Saile New Energy Materials Co ltd
Current assignee: Zhejiang Saile New Energy Materials Co ltd
Priority date: 2023-10-11
Filing date: 2023-10-11
Publication date: 2024-06-07
Anticipated expiration: 2033-10-11

Abstract

The utility model provides a vaporizer and a vaporization system, and relates to the field of chemical equipment. The vaporizer comprises a shell, wherein a liquid inlet is formed in the lower end of the shell, a gas outlet is formed in the upper end of the shell, a tube plate, heat exchange tubes and an electric heater are arranged in the shell, a plurality of heat exchange tubes are vertically arranged between the upper tube plate and the lower tube plate, the electric heater is distributed in gaps of the plurality of heat exchange tubes, and liquid in the heat exchange tubes is heated through heat radiation of the electric heater. The liquid level sensor and the first control valve form an automatic control loop, so that the liquid level in the vaporizer can be stably controlled, automatic control is realized between the vaporizer and the storage tank, and the temperature sensor and the electric heater form an automatic control loop, so that the vaporization temperature can be stably controlled. The two automatic control loops can stably output quantitative gas and realize automatic stable continuous control of liquid vaporization.

Description

Vaporizer and vaporization system

Technical Field

The utility model relates to the technical field of chemical equipment, in particular to a vaporizer and a vaporization system.

Background

Silane (SiH 4) gas is a special gas widely used in industries such as photovoltaic panels, semiconductors, integrated circuits and the like, is colorless, high-activity and compressible at normal temperature and pressure, but silane is also known to be extremely strong in combustion energy due to the characteristic spontaneous combustion and explosiveness, and is a high-risk gas. In the production, the silane is stored in a liquid state, and the liquid silane is gasified into silicon carbon gas through a silane vaporizer, and then the gas is compressed and filled for customers.

The vaporization of silane from liquid to gaseous state requires a vaporizer apparatus, and the publication CN109723968a discloses a liquid phase pressurization and vaporization system for filling a silane steel cylinder, wherein the vaporizer is provided with a spiral coil in a shell, and the coil is heated by a heating medium in a shell side, so that the silane liquid in the coil is changed into silane gas. The vaporizer has the following disadvantages in use: the vaporizer adopts a simple coil structure, so that the liquid level of the liquid silane cannot be monitored; the gas-liquid entrainment in the evaporator coil is easy to cause erosion of the coil bend and leakage.

Disclosure of utility model

(One) solving the technical problems

Aiming at the defects of the prior art, the utility model provides the vaporizer and the vaporization system, the vaporizer is safer in structure, and automatic stable continuous control of vaporization of silane liquid is realized.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme:

According to one aspect of the present utility model, there is provided a carburetor including a housing; the lower end of the shell is provided with a liquid inlet, and the upper end of the shell is provided with a gas outlet; the shell is internally provided with a tube plate, a heat exchange tube and an electric heater; the tube plate comprises an upper tube plate and a lower tube plate; the upper tube plate and the lower tube plate are respectively fixedly connected to the inner wall of the shell; the lower tube plate and the bottom of the shell form a first chamber; the upper tube plate and the top of the shell form a second chamber; a plurality of heat exchange tubes are vertically arranged between the upper tube plate and the lower tube plate; two ends of the heat exchange tube are respectively fixed on the upper tube plate and the lower tube plate and are communicated with the first cavity and the second cavity; the electric heaters are distributed in gaps of the heat exchange tubes, and heat radiation is used for heating liquid in the heat exchange tubes; a nitrogen purging device is arranged on the shell between the upper tube plate and the lower tube plate; a temperature sensor is arranged on the side wall of the shell near the gas outlet, the temperature sensor is connected with the electric heater, and the electric heater is regulated by measuring the temperature of the gas so as to control the vaporization temperature; and a liquid level sensor is arranged on the side wall of the shell and used for controlling the liquid level in the vaporizer to be higher than that of the upper tube plate.

Further, the heat exchange tube comprises a central tube and a plurality of heat exchange tubes, and the heat exchange tubes are arranged on the annular side of the central tube.

Furthermore, the heat exchange tubes are arranged in a square mode.

Further, a nitrogen pressure monitoring device is arranged on the shell between the upper tube plate and the lower tube plate.

Further, a gas detection device is arranged on the shell between the upper tube plate and the lower tube plate.

Further, the position of the upper tube plate is arranged at one half of the height of the shell.

Further, a liquid-proof cap is arranged at the top of the second chamber.

According to another aspect of the present utility model there is provided a vaporisation system comprising a vaporiser as described in any preceding claim, the vaporisation system comprising a tank, the top of the tank being provided with a condenser to condense gas entering the tank into liquid for storage; the bottom of the storage tank is connected with a liquid inlet of the vaporizer through a liquid inlet pipeline, and a first control valve is arranged in the liquid inlet pipeline; the liquid level sensor on the vaporizer is connected with the first control valve, and the liquid level in the vaporizer is measured to adjust the first control valve, so that the liquid level of the liquid entering the vaporizer is controlled to be higher than the upper tube plate; the gas outlet of the vaporizer is connected with the gas filling device through a second control valve.

Further, the vaporization system further comprises a return air pipeline, and a gas outlet of the vaporizer is connected with the storage tank through the return air pipeline; and a third control valve is arranged in the air return pipeline.

According to another aspect of the present utility model there is provided a vaporisation system for silane production comprising or being a vaporiser as described in any of the preceding claims.

(III) beneficial effects

Compared with the prior art, the utility model has the following beneficial effects:

1. According to the vaporizer provided by the utility model, the replacement heat pipe is vertically arranged in the shell, the liquid in the tube side is heated by adopting heat radiation, so that gas-liquid entrainment is avoided, and meanwhile, the nitrogen purging device arranged on the shell side part can avoid silane leakage and accumulation, so that safety accidents are avoided.

2. In the vaporization system provided by the utility model, the liquid level sensor and the first control valve form an automatic control loop, so that the liquid level in the vaporizer can be stably controlled, automatic control is realized between the vaporizer and the storage tank, and the temperature sensor and the electric heater form an automatic control loop, so that the vaporization temperature can be stably controlled. The two automatic control loops can stably output quantitative gas and realize automatic stable continuous control of the vaporization of the silane liquid.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a vaporization system according to the present utility model;

FIG. 2 is a cross-sectional view of A-A of a carburetor according to the present utility model;

FIG. 3 is a control schematic diagram of a vaporization system according to the present utility model;

in the drawings, the list of components represented by the various numbers is as follows:

1-shell, 2-electric heater, 3-central tube, 4-heat exchange tube, 5-storage tank, 6-condenser, 7-first control valve, 8-second control valve, 9-third control valve, 10-liquid inlet pipeline, 11-return air pipeline, 12-electric heating controller, 13-liquid inlet, 14-gas outlet, 15-liquid prevention cap, 16-heat exchange tube, 17-temperature sensor, 18-liquid level sensor, 101-upper tube plate, 102-lower tube plate, 103-first cavity, 104-second cavity.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions in the embodiments of the present utility model are clearly and completely described, and it is obvious that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in figures 1 and 2 of the drawings,

The embodiment of the utility model provides a carburetor, which comprises a shell 1, wherein the lower end of the shell 1 is provided with a liquid inlet 13, and the upper end of the shell is provided with a gas outlet 14. Inside the housing 1 are arranged a tube sheet, heat exchange tubes 16 and an electric heater 2.

The tube plate comprises an upper tube plate 101 and a lower tube plate 102, the upper tube plate 101 and the lower tube plate 102 are respectively and fixedly connected to the inner wall of the shell 1, the upper tube plate 101 is positioned right above the lower tube plate 102 and is arranged at one half of the height of the shell 1. The bottom of the lower tube sheet 102 and the shell 1 constitute a first chamber 103 and the top of the upper tube sheet 101 and the shell 1 constitute a second chamber 104.

A liquid level sensor 18 is provided on the side wall of the housing 1 for controlling the liquid level in the evaporator to be higher than the upper tube sheet 101.

A plurality of heat exchange tubes 16 are vertically arranged between the upper tube plate 101 and the lower tube plate 102, and two ends of the heat exchange tubes 16 are respectively fixed on the upper tube plate 101 and the lower tube plate 102, so that the first cavity 103 and the second cavity 104 are communicated through the heat exchange tubes 16. Gaps exist among the heat exchange tubes 16, the electric heaters 2 are distributed in the gaps of the heat exchange tubes 16, and after the electric heaters 2 are started, the heat exchange tubes 16 are heated by heat radiation generated by the electric heaters 2, so that silane liquid in the heating tubes is vaporized. The heat exchange tube 16 comprises a central tube 3 and a plurality of heat exchange tubes 4, the diameter of the central tube 3 is larger than that of the heat exchange tubes 4, and the heat exchange tubes 4 are arranged on the annular side of the central tube 3 and are in square arrangement. The heat exchange tube 16 is arranged into the central tube 3 with a large diameter and the heat exchange tube array 4, so that gas-liquid flow circulation can be well formed, meanwhile, the vertical pipeline can avoid erosion of the pipeline caused by gas-liquid entrainment, and the service life of the pipeline is prolonged.

In some preferred embodiments, the electric heater 2 can be controlled by a modular silicon controlled rectifier, and the output of silane gas can be flexibly, freely and stably controlled according to the requirement of productivity.

A nitrogen purge device is provided on the shell 1 between the upper tube plate 101 and the lower tube plate 102, comprising an N2 charge line and an N2 discharge line. N2 introduced into the shell side part is used as a protective gas, so that a trace amount of silane gas leaked into the shell side can be diluted and discharged, and safety accidents are avoided. In some preferred embodiments, a nitrogen pressure monitoring device is further arranged on the shell 1 between the upper tube plate 101 and the lower tube plate 102, and the gas detection device can detect silane leakage conditions, so that safety is further ensured.

The top of the second chamber 104 is provided with a liquid-proof cap 15, which can further reduce the liquid content in the boil-off gas.

A temperature sensor 17 is arranged on the side wall of the shell 1 near the gas outlet 14, and the temperature sensor 17 is connected with the electric heater 2. Specifically, the electric heater 2 is connected to the electric heating controller 12, and the temperature sensor 17 is connected to the electric heating controller 12. In the vaporization process, the temperature sensor 17 converts the measured gas temperature into a signal and transmits the signal to the electric heating controller 12, and when the temperature does not accord with a preset value, the electric heating controller 12 controls the electric heater 2 to be turned on or off, or adjusts the current of the electric heater 2, so that the size of heat radiation is changed, and the purpose of stably controlling the vaporization temperature is achieved.

As shown in figures 1, 2 and 3,

The embodiment of the utility model also provides a vaporization system which comprises the vaporizer, and further comprises a storage tank 5, a condenser 6, a first control valve 7, a second control valve 8, a third control valve 9, a liquid inlet pipeline 10 and an air return pipeline 11.

The top of the storage tank 5 is provided with a condenser 6, the condenser 6 condenses the silane gas entering the storage tank 5 into liquid for storage, and the refrigerant is preferably freon.

The bottom of the storage tank 5 is connected with a liquid inlet 13 of the vaporizer through a liquid inlet pipeline 10, a first control valve 7 is arranged in the liquid inlet pipeline 10, a liquid level sensor 18 on the vaporizer is connected with the first control valve 7, the liquid level in the vaporizer is measured to adjust the first control valve 7, and then the liquid level entering the vaporizer is controlled to be higher than the upper tube plate 101.

The gas outlet 14 of the carburettor is connected to the gas filling device via a second control valve 8.

The gas outlet 14 of the vaporizer is connected with the storage tank 5 through a return gas pipeline 11, and a third control valve 9 is arranged in the return gas pipeline 11, so that silane gas in the vaporizer and the pipeline can be returned to the storage tank 5 according to requirements.

The working principle of the vaporization system for silane production provided by the embodiment of the utility model is as follows: the silane gas from the production device enters a storage tank 5, and a condenser 6 at the top of the storage tank 5 condenses the gas into liquid for storage. The first control valve 7 is opened, silane liquid enters the vaporizer from the liquid inlet 13 through the liquid inlet pipeline 10, and when the liquid level sensor 18 measures that the liquid level is higher than the upper tube plate 101 of the vaporizer and reaches a liquid level preset value, the first control valve 7 is closed. During the vaporization process, the liquid level sensor 18 monitors the liquid level in the vaporizer and adjusts the first control valve 7 based on the liquid level to control the flow of liquid into the vaporizer so that the liquid level in the vaporizer is maintained within a preset value. The electric heating controller 12 controls the electric heater 2 to start, the heat radiation generated by the electric heater 2 heats the heat exchange tube 16, and then the liquid in the heat exchange tube changes the liquid state into the gas state, the silane gas rises to the top of the second chamber 104, and is output from the gas outlet 14 and is conveyed to the gas filling device through the second control valve 8. In the vaporization process, the temperature sensor 17 monitors the gas temperature, and when the temperature does not accord with a preset value, the electric heating controller 12 adjusts the heat radiation size by controlling the electric heater 2, so that the gas temperature is within the preset value, and the purpose of stably controlling the vaporization temperature is achieved.

In summary, compared with the prior art, the embodiment of the utility model has the following beneficial effects:

According to the vaporizer provided by the utility model, the replacement heat pipe 16 is vertically arranged in the shell, the liquid in the tube side is heated by adopting heat radiation, so that gas-liquid entrainment is avoided, and meanwhile, the nitrogen purging device arranged on the shell side part can avoid silane leakage and accumulation, so that safety accidents are avoided.

The liquid level sensor 18 and the first control valve 7 form an automatic control loop, so that the liquid level in the vaporizer can be stably controlled, automatic control is realized between the vaporizer and the storage tank 5, and the temperature sensor 17 and the electric heater 2 form an automatic control loop, so that the vaporization temperature can be stably controlled. The two automatic control loops can stably output quantitative gas and realize automatic stable continuous control of the vaporization of the silane liquid.

Therefore, the utility model has obvious advantages in the aspects of safety, automatic control, stable operation, service life and the like.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

The above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims

1. A carburettor, characterized in that it comprises a housing (1); the lower end of the shell (1) is provided with a liquid inlet (13), and the upper end of the shell is provided with a gas outlet (14); a tube plate, a heat exchange tube (16) and an electric heater (2) are arranged in the shell (1); the tube plate comprises an upper tube plate (101) and a lower tube plate (102); the upper tube plate (101) and the lower tube plate (102) are respectively and fixedly connected to the inner wall of the shell (1); the lower tube plate (102) and the bottom of the shell (1) form a first chamber (103); the upper tube plate (101) and the top of the shell (1) form a second chamber (104); a plurality of heat exchange tubes (16) are vertically arranged between the upper tube plate (101) and the lower tube plate (102); two ends of the heat exchange tube (16) are respectively fixed on the upper tube plate (101) and the lower tube plate (102) and are communicated with the first cavity (103) and the second cavity (104); the electric heaters (2) are distributed in gaps of the heat exchange tubes (16), and heat radiation is used for heating liquid in the heat exchange tubes (16);

A nitrogen purging device is arranged on the shell (1) between the upper tube plate (101) and the lower tube plate (102);

A temperature sensor (17) is arranged on the side wall of the shell (1) near the gas outlet (14), the temperature sensor (17) is connected with the electric heater (2), and the electric heater (2) is regulated by measuring the temperature of the gas so as to control the vaporization temperature;

a liquid level sensor (18) is arranged on the side wall of the shell (1) and used for controlling the liquid level in the vaporizer to be higher than that of the upper tube plate (101).

2. A carburettor according to claim 1 wherein the heat exchange tube (16) comprises a central tube (3) and several heat exchange tubes (4), the heat exchange tubes (4) being arranged on the annular side of the central tube (3).

3. A carburettor according to claim 2 wherein the heat exchange tubes (4) are arranged in a square.

4. A carburettor according to claim 1 wherein nitrogen pressure monitoring means are provided on the shell (1) between the upper tube plate (101) and the lower tube plate (102).

5. A carburettor according to claim 1 or 4 wherein a gas detection device is provided on the housing (1) between the upper tube plate (101) and the lower tube plate (102).

6. A carburettor according to claim 1 wherein the upper tube plate (101) is located at half the height of the housing (1).

7. A carburettor according to claim 1 wherein the top of the second chamber (104) is provided with a liquid-proof cap (15).

8. A vaporisation system comprising a vaporiser according to any of claims 1-7, characterised in that the vaporisation system further comprises a tank (5), a condenser (6) being provided at the top of the tank (5), the condenser (6) condensing gas entering the tank (5) into liquid for storage; the bottom of the storage tank (5) is connected with a liquid inlet (13) of the carburetor through a liquid inlet pipeline (10), and a first control valve (7) is arranged in the liquid inlet pipeline (10); a liquid level sensor (18) on the vaporizer is connected with the first control valve (7), and the liquid level in the vaporizer is measured to adjust the first control valve (7), so that the liquid level entering the vaporizer is controlled to be higher than the upper tube plate (101); the gas outlet (14) of the carburetor is connected with a gas filling device through a second control valve (8).

9. The vaporization system of claim 8, further comprising a return air line (11), the gas outlet (14) of the vaporizer being connected to the tank (5) via the return air line (11); a third control valve (9) is arranged in the air return pipeline (11).